Light output calibration in an optoacoustic system
    41.
    发明授权
    Light output calibration in an optoacoustic system 有权
    光声系统中的光输出校准

    公开(公告)号:US08823928B2

    公开(公告)日:2014-09-02

    申请号:US13842399

    申请日:2013-03-15

    Abstract: An optoacoustic system includes first and second light sources capable of generating pulse of light at first and second wavelengths, first and second electrically controlled optical attenuators, first and second light sync detectors, and a combiner. A power meter that is calibrated to determine power at the first and second predominant wavelength measures power at the first wavelength after the first light sync is detected and measures power at the second wavelength after the second light sync is detected. The system includes a calibration mode wherein it electrically attenuates the first optical attenuator when the power measured by the power meter at the first wavelength after the first light sync is detected is above a first level, and electrically attenuated the second optical attenuator when the power measured by the power meter at the second wavelength after the second light sync is detected is above a second level.

    Abstract translation: 光声系统包括能够产生第一和第二波长的光脉冲的第一和第二光源,第一和第二电控光衰减器,第一和第二光同步检测器以及组合器。 被校准以确定第一和第二主要波长的功率的功率计测量在检测到第一光同步之后的第一波长处的功率,并且在检测到第二光同步之后测量第二波长处的功率。 该系统包括校准模式,其中当在检测到第一光同步之后由功率计在第一波长处测量的功率高于第一电平时,其电衰减第一光衰减器,并且当测量的功率被电衰减时,第二光衰减器 在检测到第二光同步之后的第二波长处的功率计高于第二电平。

    Evaluation device and evaluation method for substrate mounting apparatus and evaluation substrate used for the same
    42.
    发明授权
    Evaluation device and evaluation method for substrate mounting apparatus and evaluation substrate used for the same 有权
    用于其的基板安装装置和评价基板的评价装置及评价方法

    公开(公告)号:US08823404B2

    公开(公告)日:2014-09-02

    申请号:US13014290

    申请日:2011-01-26

    Inventor: Yasuharu Sasaki

    CPC classification number: H01L21/67248 H01L21/67109

    Abstract: There are provided an evaluation device and an evaluation method for a substrate mounting apparatus capable of simply evaluating a temperature control function of the substrate mounting apparatus depending on evaluation conditions or circumstances and an evaluation substrate used for the same. The substrate mounting apparatus holds a target substrate mounted on a mounting surface and controls a temperature of the target substrate. The evaluation device includes an evacuable airtight chamber in which the substrate mounting apparatus is provided; an evaluation substrate which is mounted on the mounting surface instead of the target substrate and includes a self-heating resistance heater; and a temperature measurement unit which measures a temperature of the evaluation substrate.

    Abstract translation: 提供了一种用于能够根据评估条件或环境简单地评价基板安装装置的温度控制功能的基板安装装置的评估装置和评估方法以及用于其的评估基板。 基板安装装置保持安装在安装面上的目标基板,并控制目标基板的温度。 评估装置包括可抽出的气密室,其中设置有基板安装装置; 评价基板,其安装在安装面上而不是目标基板,并且包括自加热电阻加热器; 以及测量评价基板的温度的温度测量单元。

    Wireless, motion and position-sensing, integrating radiation occupational and environmental dosimetry
    43.
    发明授权
    Wireless, motion and position-sensing, integrating radiation occupational and environmental dosimetry 有权
    无线,运动和位置感应,用于职业和环境剂量测定的辐射传感器

    公开(公告)号:US08822924B2

    公开(公告)日:2014-09-02

    申请号:US13906553

    申请日:2013-05-31

    Abstract: Described is a radiation dosimeter including multiple sensor devices (including one or more passive integrating electronic radiation sensor, a MEMS accelerometers, a wireless transmitters and, optionally, a GPS, a thermistor, or other chemical, biological or EMF sensors) and a computer program for the simultaneous detection and wireless transmission of ionizing radiation, motion and global position for use in occupational and environmental dosimetry. The described dosimeter utilizes new processes and algorithms to create a self-contained, passive, integrating dosimeter. Furthermore, disclosed embodiments provide the use of MEMS and nanotechnology manufacturing techniques to encapsulate individual ionizing radiation sensor elements within a radiation attenuating material that provides a “filtration bubble” around the sensor element, the use of multiple attenuating materials (filters) around multiple sensor elements, and the use of a software algorithm to discriminate between different types of ionizing radiation and different radiation energy.

    Abstract translation: 描述了包括多个传感器装置(包括一个或多个无源积分电子辐射传感器,MEMS加速度计,无线发射器,以及可选地,GPS,热敏电阻或其它化学,生物或EMF传感器)和计算机程序 用于电离辐射的同时检测和无线传输,用于职业和环境剂量测定的运动和全局位置。 所描述的剂量计利用新的过程和算法来创建一个独立的,被动的,积分的剂量计。 此外,所公开的实施例提供了MEMS和纳米技术制造技术的用途,以将单独的电离辐射传感器元件封装在辐射衰减材料内,辐射衰减材料围绕传感器元件提供“过滤气泡”,在多个传感器元件周围使用多个衰减材料 ,以及使用软件算法来区分不同类型的电离辐射和不同的辐射能量。

    Portable radiographic detector exterior battery latch and methods for using the same
    44.
    发明授权
    Portable radiographic detector exterior battery latch and methods for using the same 有权
    便携式射线检测器外部电池闩锁及其使用方法

    公开(公告)号:US08742349B2

    公开(公告)日:2014-06-03

    申请号:US13620751

    申请日:2012-09-15

    CPC classification number: G01T7/00 A61B6/4283 A61B6/4405 A61B6/56 G03B42/04

    Abstract: A radiographic imaging detector can include a housing, a radiographic imaging array enclosed by the housing, and a recess to releasably contain a battery in an outer surface of the housing. Certain exemplary embodiments of securing methods and/or battery latch apparatus for the closable recess of the DR detector can include a first catch mechanism configured to be released by force applied in a first direction, a second catch mechanism released by force applied in a second direction different from the first direction, where movement in the first direction can operate to disengage the first catch mechanism from the second catch mechanism, where movement in the second direction can operate to disengage the second catch mechanism for access to the recess, where the second catch mechanism is nearby the first catch mechanism, and where the first and second catch mechanism are actuated using one hand of an operator.

    Abstract translation: 射线照相成像检测器可以包括壳体,由壳体包围的射线成像阵列以及可释放地容纳壳体的外表面中的电池的凹部。 用于DR检测器的可关闭凹部的固定方法和/或电池闩锁装置的某些示例性实施例可以包括构造成通过沿第一方向施加的力释放的第一卡扣机构,通过沿第二方向施加的力释放的第二卡扣机构 不同于第一方向,其中第一方向上的运动可以操作以使第一捕获机构与第二捕获机构脱离,其中在第二方向上的运动可以操作以使第二捕获机构脱离接近凹部,其中第二捕获 机构在第一捕获机构附近,并且第一和第二捕获机构使用操作者的一只手致动。

    Luminance sensing system and method and computer program product thereof
    45.
    发明授权
    Luminance sensing system and method and computer program product thereof 有权
    亮度感测系统及其计算机程序产品

    公开(公告)号:US08738316B2

    公开(公告)日:2014-05-27

    申请号:US12970581

    申请日:2010-12-16

    Applicant: Szu-Hsuan Wang

    Inventor: Szu-Hsuan Wang

    Abstract: A luminance sensing system and method and a computer program product thereof are provided. The system includes: a first luminance sensing unit, arranged at a first position, and used for sensing a light ray luminance at the first position to generate a first illumination value; a second luminance sensing unit, arranged at a second position, having a displacement unit, and used for sensing a light ray luminance at the second position to generate a second illumination value; and a computing unit, electrically connected to the first luminance sensing unit, the displacement unit, and the second luminance sensing unit, and used for acquiring the first illumination value and the second illumination value, acquiring luminance range information by using the first illumination value. When the second illumination value does not conform to the luminance range information, the computing unit controls the displacement unit to move the second luminance sensing unit.

    Abstract translation: 提供了一种亮度感测系统及其计算机程序产品。 该系统包括:第一亮度感测单元,布置在第一位置,用于感测第一位置处的光线亮度以产生第一照明值; 第二亮度感测单元,布置在第二位置,具有位移单元,并用于感测第二位置处的光线亮度以产生第二照明值; 以及计算单元,电连接到第一亮度感测单元,位移单元和第二亮度感测单元,并且用于获取第一照明值和第二照明值,通过使用第一照明值来获取亮度范围信息。 当第二照明值不符合亮度范围信息时,计算单元控制位移单元移动第二亮度感测单元。

    Process for testing a laser device
    47.
    发明授权
    Process for testing a laser device 有权
    检测激光装置的过程

    公开(公告)号:US08687178B2

    公开(公告)日:2014-04-01

    申请号:US12894299

    申请日:2010-09-30

    Abstract: A process is proposed for testing a laser device that has been set up to emit pulsed focused laser radiation, the focal position of which is adjustable both in and across the direction of propagation of the laser radiation. The laser device includes a contact element that is transparent to the laser radiation, with an abutment surface for abutment of an object to be machined. Within the scope of the process, a test object that is transparent to the laser radiation at least in a machining region is applied onto the abutment surface of the contact element. Then laser radiation is beamed into the test object bearing against the abutment surface and in the process the focal position is moved in accordance with a predetermined test pattern, in order to generate enduring machining structures in the test object.

    Abstract translation: 提出了一种用于测试已被设置为发射脉冲聚焦激光辐射的激光器件的过程,该激光器的焦点位置可以在激光辐射的传播方向上和两者之间调节。 激光装置包括对激光辐射透明的接触元件,具有用于邻接被加工物体的邻接表面。 在该过程的范围内,至少在加工区域中对激光辐射透明的测试对象被施加到接触元件的邻接表面上。 然后激光辐射被射入抵靠着邻接表面的测试对象中,并且在该过程中,焦点位置根据预定的测试图案移动,以便在测试对象中产生持久的加工结构。

    EUV light source components and methods for producing, using and refurbishing same
    48.
    发明授权
    EUV light source components and methods for producing, using and refurbishing same 有权
    EUV光源组件及其制造,使用和翻新方法

    公开(公告)号:US08686370B2

    公开(公告)日:2014-04-01

    申请号:US13675972

    申请日:2012-11-13

    Applicant: Cymer, Inc.

    Abstract: A method is disclosed for in-situ monitoring of an EUV mirror to determine a degree of optical degradation. The method may comprise the steps/acts of irradiating at least a portion of the mirror with light having a wavelength outside the EUV spectrum, measuring at least a portion of the light after the light has reflected from the mirror, and using the measurement and a pre-determined relationship between mirror degradation and light reflectivity to estimate a degree of multi-layer mirror degradation. Also disclosed is a method for preparing a near-normal incidence, EUV mirror which may comprise the steps/acts of providing a metallic substrate, diamond turning a surface of the substrate, depositing at least one intermediate material overlying the surface using a physical vapor deposition technique, and depositing a multi-layer mirror coating overlying the intermediate material.

    Abstract translation: 公开了一种用于EUV反射镜的原位监测以确定光学降解程度的方法。 该方法可以包括用具有波长在EUV谱以外的波长的光照射反射镜的至少一部分的步骤/动作,在光已经从反射镜反射之后测量光的至少一部分,并且使用该测量和 镜面退化和光反射率之间的预定关系,以估计多层镜面退化的程度。 还公开了一种用于制备近似法线入射的EUV反射镜的方法,该反射镜可以包括提供金属基底的步骤/动作,转动基底的表面的金刚石,使用物理气相沉积沉积覆盖表面的至少一种中间材料 技术,并沉积覆盖中间材料的多层镜面涂层。

    Packing container, method of packing optical probe, laser system, and checking method
    50.
    发明授权
    Packing container, method of packing optical probe, laser system, and checking method 失效
    包装容器,光学探针包装方法,激光系统和检查方法

    公开(公告)号:US08625087B2

    公开(公告)日:2014-01-07

    申请号:US13285704

    申请日:2011-10-31

    Abstract: Disclosed herein is a packing container including: a packing container body including a leading-out section which contains an optical probe having a first end section for incoming of a laser beam and a second end section for outgoing of the incoming laser beam, which leads out the first end section of the optical probe thus contained to the exterior and which is sealed, and a window section by which the laser beam going out from the second end section of the contained optical probe is led out to the exterior; and a light-transmitting member which closes the window section and permits the laser beam to pass therethrough.

    Abstract translation: 本文公开了一种包装容器,包括:包装容器主体,包括导出部分,其包含具有用于输入激光束的第一端部部分和用于输出激光束的第二端部部分的光学探针, 光学探针的第一端部被包含在外部并被密封,并且将从所容纳的光学探针的第二端部分出射的激光束引出到外部的窗口部分; 以及透光构件,其闭合窗口部分并允许激光束通过。

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