公开(公告)号：US20050199805A1

公开(公告)日：2005-09-15

申请号：US10798376

申请日：2004-03-12

Applicant: Carl Freidhoff

Inventor： Carl Freidhoff

IPC: H01J49/28

CPC classification number: H01J41/10 ,  H01J49/0013 ,  H01J49/288

Abstract: A solid state compact ion gauge includes an inlet, a gas ionizer, and a detector all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed in the cavity through which the cavity is evacuated by differential pumping. Preferably, the substrate is formed in two halves. The substrate halves are then bonded together after the components are provided therein.

Abstract translation: 固态紧凑型离子计包括入口，气体离子发生器和全部形成在半导体衬底中的空腔内的检测器。 气体离子发生器可以是固态电子发射器，其离子光学器件由形成在空腔中的电极提供，空腔通过差分泵浦而被抽空。 优选地，衬底形成为两半。 然后在其中提供部件之后将基板半部结合在一起。

公开(公告)号：US5661298A

公开(公告)日：1997-08-26

申请号：US649795

申请日：1996-05-17

Applicant: Robert H. Bateman

Inventor： Robert H. Bateman

IPC: H01J49/28 ,  H01J49/30

CPC classification number: H01J49/30 ,  H01J49/282

Abstract: A mass spectrometer is provided having a plurality of analyzers and including at least one magnetic sector analyzer and, typically, an orthogonal-acceleration time-of-flight mass analyzer. Bypass means are provided so that by switching of the direction of the ion beam, the magnetic sector analyzer may be bypassed and the time-of-flight analyzer used either to analyse the beam of ions from the source or daughter ions produced by fragmentation of that beam.

Abstract translation: 提供了具有多个分析器并且包括至少一个磁性扇区分析仪和通常是正交加速度飞行时间质量分析器的质谱仪。 提供了旁路装置，使得通过切换离子束的方向，可以绕过磁性扇区分析仪，并且飞行时间分析仪用于分析来自源或子离子的离子束 光束。

公开(公告)号：US5530244A

公开(公告)日：1996-06-25

申请号：US320466

申请日：1994-10-07

Applicant: Saptharish Sriram ,  Carl B. Freidhoff

Inventor： Saptharish Sriram ,  Carl B. Freidhoff

IPC: H01J49/28 ,  B01D55/44 ,  H01J49/00

CPC classification number: H01J49/288 ,  H01J49/0018

Abstract: A detector is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The detector is adapted to detect the filtering of an ionized sample of the gas. The detector includes a linear array of detector elements, each detector element being connected to a Faraday cage having v-shaped conductors. The Faraday cage is formed on a cavity provided in a semiconductor substrate upon which the solid state mass-spectrograph is constructed. The detector elements include signal generators located outside of the cavity and connected to the Faraday cage, and charge sensing means in the form of either a MOS switch or a charge-coupled device.

Abstract translation: 提供了一种用于分析气体样品的固体质谱仪的检测器。 检测器适于检测气体的电离样品的过滤。 检测器包括检测器元件的线性阵列，每个检测器元件连接到具有v形导体的法拉第笼。 法拉第笼形成在设置在其上构成固态质谱仪的半导体衬底中的空腔上。 检测器元件包括位于腔体外部并连接到法拉第笼的信号发生器，以及MOS开关或电荷耦合器件形式的电荷感测装置。

公开(公告)号：US5444243A

公开(公告)日：1995-08-22

申请号：US291048

申请日：1994-08-15

Applicant: Teruo Kohhashi ,  Hideo Matsuyama

Inventor： Teruo Kohhashi ,  Hideo Matsuyama

IPC: G01Q70/00 ,  H01J37/05 ,  H01J49/28 ,  H01J49/46 ,  H01J37/26 ,  H01J49/48

CPC classification number: H01J37/05 ,  H01J49/288 ,  H01J49/466 ,  H01J2237/1508 ,  H01J2237/24485

Abstract: A Wien filter is used with secondary electrons that are emitted from a primary electron beam scanning a sample surface in a scanning electron microscope (SEM) used as an energy analyzer or a spin rotater with charged particle beams. The beam is focussed into an interior area of the filter that has magnetic and electric fields generated to cross one another. The beam intersects the crossed fields perpendicularly. The faces of either the magnetic pole pieces or the electrodes have a shape approximating the shape of a portion of a hyperbola, while the other of the faces are substantially planar. Auxiliary electrodes extend parallel to the beam's path of travel between the electrodes. The filter provides a wide area that enables stigmatic focussing of a wide diameter beam.

Abstract translation: Wien滤波器被用于从用作能量分析仪的扫描电子显微镜（SEM）中的一次电子束发射的二次电子或带有带电粒子束的旋转旋转器。 光束被聚焦到过滤器的内部区域中，其具有产生的彼此交叉的磁场和电场。 光束垂直与交叉的场相交。 磁极片或电极的表面具有近似于双曲线的一部分的形状的形状，而另一个面基本上是平面的。 辅助电极平行于电极之间的行进路径延伸。 该过滤器提供了一个广泛的区域，可以实现对直径较大的梁的盯梢。

公开(公告)号：US5401963A

公开(公告)日：1995-03-28

申请号：US146220

申请日：1993-11-01

Applicant: Fred C. Sittler

Inventor： Fred C. Sittler

IPC: H01J27/26 ,  H01J49/16 ,  H01J49/28 ,  B01D59/44 ,  H01J49/00

CPC classification number: H01J49/168 ,  H01J27/26 ,  H01J49/0018 ,  H01J49/288

Abstract: A micromachined mass spectrometer includes an ionizer, a separation region and a detector. The ionizer is formed from an upper electrode, a center electrode and a lower electrode. Ionization of a sample gas takes place around an edge of the center electrode. Accelerating electrodes extract ionized particles from the ionizer. Ionized particles are accelerated through the separation region. A magnetic field is applied in a direction perpendicular to travel of the ionized particles through the separation region causing the trajectory of the ionized particles to bend. The mass spectrometer is formed using micromachined techniques and is carried on a single substrate.

Abstract translation: 微加工质谱仪包括电离器，分离区和检测器。 电离器由上电极，中心电极和下电极形成。 样品气体的电离发生在中心电极的边缘周围。 加速电极从电离器中提取电离粒子。 电离粒子通过分离区加速。 在垂直于电离粒子通过分离区域的行进方向上施加磁场，导致电离粒子的轨迹弯曲。 使用微加工技术形成质谱仪并将其携带在单个基底上。

公开(公告)号：US5097124A

公开(公告)日：1992-03-17

申请号：US613012

申请日：1990-11-15

Applicant: Fernand M. Devienne

Inventor： Fernand M. Devienne

IPC: H01J49/26 ,  H01J49/28

CPC classification number: H01J49/282 ,  H01J49/0045

Abstract: Process for the detection in an atmosphere to be monitored of a chemical substance of known mass M using an apparatus for the ionization of said atmosphere and for the dissociation, filtration and detection of the ions formed having in a vacuum enclosure and in said order on the path of the ions:an ion source (1),a dissociation case (3) raised to earth potential,an electrostatic analyzer (4),a detector (5) of ions having passed through the aforementioned apparatus and characterized in that:the voltage V.sub.0 for extracting ions from the ion source (1) is fixed at a constant value;the filtration energy level W of the electrostatic analyzer (4) is varied so as to optionally detect in the detector (5) the dissociation ion fragments m.sub.1, . . . m.sub.k of the substance of mass M crossing the electrostatic analyzer at energies (m.sub.1 /M)eV.sub.0 =W.sub.1, (m.sub.2 /M) eV.sub.0 =W.sub.2 . . . (mk/M) eV.sub.0 =Wk and making it posible to confirm the presence of the substance of mass M.

Abstract translation: 使用用于电离所述气氛的装置和在真空封壳中形成的离子的解离，过滤和检测在所述气体中检测已知质量M的化学物质的方法， 离子路径：离子源（1），解离情况（3）升高到地电位，静电分析仪（4），已经通过上述装置的离子检测器（5），其特征在于：电压 用于从离子源（1）中提取离子的V0被固定为恒定值; 改变静电分析仪（4）的过滤能级W，以便可选地在检测器（5）中检测离解离子碎片m1， 。 。 （m1 / M）eV0 = W1，（m2 / M）eV0 = W2时质量M的物质m与静电分析仪的质量mk。 。 。 （mk / M）eV0 = Wk，并使其可以确认质量M的物质的存在。

公开(公告)号：US4983829A

公开(公告)日：1991-01-08

申请号：US400171

申请日：1989-08-28

Applicant: Heinz D. Burger

Inventor： Heinz D. Burger

IPC: G01N27/62 ,  G01N33/00 ,  H01J49/04 ,  H01J49/28

CPC classification number: H01J49/24 ,  G01N33/0016 ,  G01N33/0027

Abstract: The invention resides in a method for analyzing gases according to the counterflow principle, comprising a mass spectrometer tube (3) located at the suction side of a molecular pump (2). The primary vacuum pressure is adjusted in such a way that basically ambiguous spectrometer indications can only result from a gas with low molecular weight reaching the mass spectrometer in counterflow to the molecular pump and not from a gas with higher molecular weight, which in itself would provoke a similar spectrometer indication.

Abstract translation: 本发明涉及一种根据逆流原理分析气体的方法，包括位于分子泵（2）的吸入侧的质谱仪管（3）。 调整初级真空压力，使得基本上不明确的光谱仪适应症只能由具有低分子量的气体到达分子泵的逆流中而不是分子量较高的气体产生，这本身将引发 一个类似的光谱仪指示。

公开(公告)号：US4945236A

公开(公告)日：1990-07-31

申请号：US344767

申请日：1989-04-28

Applicant: Akinori Mogami ,  Motohiro Naitoh

Inventor： Akinori Mogami ,  Motohiro Naitoh

IPC: G01Q30/02 ,  H01J49/02 ,  H01J49/28 ,  H01J49/32 ,  H01J49/40

CPC classification number: H01J49/40 ,  H01J49/0004 ,  H01J49/022 ,  H01J49/288

Abstract: There is disclosed a direct imaging type SIMS (secondary ion mass spectrometry) instrument having a mass analyzer comprising superimposed fields. The superimposed fields consist of a toroidal electric field and a uniform magnetic field substantially perpendicular to the electric field. In an imaging mode, and ion image of the region of a sample which is irradiated with a primary beam is focused onto a two-dimensional ion detector by the mass analyzer having the superimposed fields. In TOF (time-of-flight) mass spectrometric mode, the intensity of the magnetic field of the superimposed fields is reduced down to zero to use only the electric field. Pulsed secondary ions from the surface of the sample are passed through the electric field and are separated according to mass with the lapse of time on the principle of TOF mass spectrometry.

Abstract translation: 公开了具有包括叠加场的质量分析仪的直接成像型SIMS（二次离子质谱）仪器。 叠加的场由环形电场和基本垂直于电场的均匀磁场组成。 在成像模式中，通过具有叠加场的质量分析器将照射有主光束的样品的区域的离子图像聚焦到二维离子检测器上。 在TOF（飞行时间）质谱模式中，叠加场的磁场强度降低到零，仅使用电场。 来自样品表面的脉冲二次离子通过电场，按照质量随TOF质谱原理随时间分离。

公开(公告)号：US4860225A

公开(公告)日：1989-08-22

申请号：US183336

申请日：1988-04-07

Applicant: Rolf Von Criegern ,  Peter Fazekas ,  Johannes Fottner

Inventor： Rolf Von Criegern ,  Peter Fazekas ,  Johannes Fottner

IPC: G01N23/225 ,  H01J37/252 ,  H01J37/256 ,  H01J49/00 ,  H01J49/02 ,  H01J49/28

CPC classification number: H01J49/142 ,  G01N23/225 ,  H01J37/256 ,  H01J49/0004 ,  H01J49/0036

Abstract: A method and an apparatus for storing measured data from a sputter crater which is generated and analyzed in a secondary ion mass spectrometer is considerably more simple and cost-effective than techniques requiring complete data storage and is an improvement over the known standard integral method. The region swept by the ion beam of a secondary ion mass spectrometer is subdivided into a plurality of sub-areas, one location in a memory is assigned to each of the sub-areas, the signal components occurring from the individual sub-areas are stored in the assigned memory locations during a sweep of the sputter crater with the ion beam, and the measured data are evaluated after the end of at least one scan of the sputter crater.

Abstract translation: 用于存储来自在二次离子质谱仪中生成和分析的溅射坑的测量数据的方法和装置比需要完整数据存储的技术要简单且成本有效，并且是对已知标准积分方法的改进。 由二次离子质谱仪的离子束扫掠的区域被细分为多个子区域，存储器中的一个位置被分配给每个子区域，存储从各个子区域发生的信号分量 在用离子束扫描溅射坑期间的分配的存储器位置中，并且在溅射坑的至少一次扫描结束之后评估测量的数据。

公开(公告)号：US4855596A

公开(公告)日：1989-08-08

申请号：US46117

申请日：1987-05-05

Applicant: Dieter M. Gruen ,  Charles E. Young ,  Michael J. Pellin

Inventor： Dieter M. Gruen ,  Charles E. Young ,  Michael J. Pellin

IPC: G01Q30/02 ,  G01Q30/04 ,  G01Q90/00 ,  H01J49/06 ,  H01J49/14 ,  H01J49/16 ,  H01J49/28

CPC classification number: H01J49/484 ,  H01J49/061 ,  H01J49/142 ,  H01J49/161 ,  H01J49/282

Abstract: A method and apparatus for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly diminishing field region. The lens system also enables focusing on a sample of a charged particle beam, such as an ion beam, along a path length perpendicular to the sample and extraction of the charged particles along a path length also perpendicular to the sample. Improvement of signal to noise ratio is achieved by laser excitation of ions to selected autoionization states before carrying out quantitative analysis. Accurate energy analysis of energetic charged particles is assured by using a preselected resistive thick film configuration disposed on an insulator substrate for generating predetermined electric field boundary conditions to achieve for analysis the required electric field potential. The spectrometer also is applicable in the fields of SIMS, ISS and electron spectroscopy.

Abstract translation: 一种用于提取样品的选定原子成分的离子进行定量分析的方法和装置。 透镜系统被配置为为包含所选择的原子分量的体积提供缓慢减小的场区域，使得能够对在缓慢减小的场区域中产生的离子进行精确的能量分析。 透镜系统还可以沿垂直于样品的路径长度聚焦在带电粒子束（例如离子束）的样品上，并且沿垂直于样品的路径长度提取带电粒子。 在进行定量分析之前，通过激光激发离子到选择的自动电位状态来实现信噪比的提高。 通过使用设置在绝缘体衬底上的预选电阻厚膜配置来确保能量带电粒子的精确能量分析，以产生预定的电场边界条件以实现所需电场电位的分析。 光谱仪也适用于SIMS，ISS和电子光谱学领域。