Controlling angle of incidence of multiple-beam optical metrology tools
    51.
    发明授权
    Controlling angle of incidence of multiple-beam optical metrology tools 有权
    控制多光束光学测量工具的入射角

    公开(公告)号:US08030632B2

    公开(公告)日:2011-10-04

    申请号:US12414637

    申请日:2009-03-30

    Abstract: Provided is a method of controlling multiple beams directed to a structure in a workpiece, the method comprising generating a first illumination beam with a first light source and a second illumination beam with a second light source, projecting the first and second illumination beams onto a separate illumination secondary mirror, reflecting the first and second illumination beams onto an illumination primary mirror, the reflected first and second illumination beams projected onto the structure at a first and second angle of incidence respectively, the reflected first and second illumination beams generating a first and second detection beams respectively. The separate illumination secondary mirror is positioned relative to the illumination primary mirror so as make the first angle of incidence substantially the same or close to a calculated optimum first angle of incidence and make the second angle of incidence substantially the same or close to a calculated optimum second angle of incidence. The first and second detection beams are diffracted off the structure at the corresponding angle of incidence to a detection primary mirror, reflected onto a separate secondary detection mirror and other optical components on the detection path, and onto spectroscopic detectors.

    Abstract translation: 提供了一种控制指向工件中的结构的多个光束的方法,该方法包括利用第一光源生成具有第一光源的第一照明光束和具有第二光源的第二照明光束,将第一和第二照明光束投射到单独的 分别将第一和第二照明光束反射到照明主反射镜上,反射的第一和第二照明光束分别以第一和第二入射角投射到结构上,反射的第一和第二照明光束产生第一和第二照明光束 检测光束。 分离的照明次级反射镜相对于照明主反射镜定位,使得第一入射角基本上相同或接近于计算出的最佳第一入射角,并使第二入射角基本上相同或接近于计算的最佳 第二个入射角。 第一和第二检测光束以与检测主反射镜相对应的入射角度从结构衍射,反射到检测路径上的单独的次级检测镜和其它光学部件上,并被分布在光谱检测器上。

    SOLAR SIMULATOR AND A MEASURING METHOD OF A MULTI-JUNCTION PHOTOVOLTAIC DEVICES
    53.
    发明申请
    SOLAR SIMULATOR AND A MEASURING METHOD OF A MULTI-JUNCTION PHOTOVOLTAIC DEVICES 失效
    太阳能模拟器和多功能光伏器件的测量方法

    公开(公告)号:US20110127992A1

    公开(公告)日:2011-06-02

    申请号:US13054744

    申请日:2009-07-02

    CPC classification number: G01J1/08 F21S8/006 H02S50/10

    Abstract: The present invention provides a solar simulator that measures characteristics of multi junction photovoltaic devices for a short time, and a measuring method of a multi-junction photovoltaic devices using the simulator.The measurement method of the multi junction photovoltaic devices of the present invention includes the following processes: the process that the halogen lamp 13 emits a flash light and a top of a light pulse wave shape is controlled to be flat; the process that the xenon lamp 14 once or plural times emits a flash light which has the flat top and is shorter pulse than the flat area of the halogen lamp flash light while the top of a light pulse shape of the flash light from the halogen lamp is flat; and the process that the flash lights from the halogen lamp and the xenon lamp is irradiated to the photovoltaic devices 20 as the measurement object, and during the emission of the flash light from the xenon lamp, the load of the photovoltaic devices is controlled and the current and the voltage generating therefrom are measured at a single point or plural points.

    Abstract translation: 本发明提供了一种在短时间内测量多结光伏器件的特性的太阳模拟器,以及使用该模拟器的多结光伏器件的测量方法。 本发明的多结光伏器件的测量方法包括以下处理:将卤素灯13发出闪光并且将光脉冲波形的顶部控制为平坦的处理; 氙灯14一次或多次发出具有平坦顶部的闪光,并且比卤素灯闪光的平坦区域短的脉冲,而来自卤素灯的闪光的光脉冲形状的顶部 平坦 并且将来自卤素灯和氙灯的闪光灯照射到作为测量对象的光电器件20的处理,并且在从氙灯发射闪光的过程中,控制光伏器件的负载,并且 在单个点或多个点处测量电流和从其产生的电压。

    QUANTUM DOT BASED RADIATION SOURCE AND RADIOMETRIC CALIBRATOR USING THE SAME
    54.
    发明申请
    QUANTUM DOT BASED RADIATION SOURCE AND RADIOMETRIC CALIBRATOR USING THE SAME 有权
    基于量子点的辐射源和使用该辐射源的辐射测量校准器

    公开(公告)号:US20110024612A1

    公开(公告)日:2011-02-03

    申请号:US12533679

    申请日:2009-07-31

    Abstract: In one embodiment, a quantum dot based radiation source includes a housing having a wall defining a cavity therein, a plurality of quantum dots disposed on an inner surface of the wall of the housing, and a radiation excitation source in optical communication with the housing and configured to output radiation to excite the plurality of quantum dots to emit radiation in a desired wavelength range. The quantum dot based radiation source can be used in a calibration system or calibrator, for example to calibrate a detector.

    Abstract translation: 在一个实施例中,基于量子点的辐射源包括壳体,其具有在其中限定空腔的壁,设置在壳体的壁的内表面上的多个量子点和与壳体光学连通的辐射激励源, 被配置为输出辐射以激励所述多个量子点以发射所需波长范围内的辐射。 基于量子点的辐射源可用于校准系统或校准器中,例如校准检测器。

    LIGHT TRANSMITTER, LIGHT RECEIVER AND MEASURING DEVICE FOR MEASURING OPTICAL PROPERTIES OF TRANSPARENT SUBSTRATES
    55.
    发明申请
    LIGHT TRANSMITTER, LIGHT RECEIVER AND MEASURING DEVICE FOR MEASURING OPTICAL PROPERTIES OF TRANSPARENT SUBSTRATES 有权
    用于测量透明基板的光学特性的光发射器,光接收器和测量装置

    公开(公告)号:US20110007320A1

    公开(公告)日:2011-01-13

    申请号:US12297893

    申请日:2007-10-30

    Abstract: A measuring device for measuring optical properties of transparent substrates includes a light transmitter and/or light receiver comprising a hollow cylinder having a highly reflective and diffusely dispersive inner surface. The light transmitter comprises a light source arranged in its interior and a light exit opening at a distance from the light source. The light receiver has a light sensor instead of the light source, at a distance from a light entrance opening. The light source and light sensor are arranged at such a distance from the light exit opening and light entrance opening respectively, given a corresponding direction of propagation of the light, that light emitted by the light source or received by the light sensor and multiply reflected in the hollow cylinder emerges as diffuse light from the light exit opening or is incident on the light sensor.

    Abstract translation: 用于测量透明基板的光学特性的测量装置包括:光发射器和/或光接收器,其包括具有高度反射和漫射色散的内表面的中空圆筒。 光发射器包括布置在其内部的光源和距离光源一定距离的光出射开口。 光接收器具有光传感器而不是光源,与光入口开口相距一定距离。 给出相应的光传播方向,光源和光传感器分别布置在与光出射开口和光入射口相距的距离处,由光源发射或由光传感器接收并被乘以反射的光 中空圆筒作为来自光出口的漫射光而出现,或者入射到光传感器上。

    Method and device for calibrating a light intensity measurement device
    56.
    发明授权
    Method and device for calibrating a light intensity measurement device 有权
    用于校准光强测量装置的方法和装置

    公开(公告)号:US07864330B2

    公开(公告)日:2011-01-04

    申请号:US12095378

    申请日:2006-11-24

    Abstract: It is an object of the present invention to provide a method and a device for automatically calibrating a light intensity measurement device. The device (1) includes an optical switch (3) for switching a route of output from an optical intensity modulator (2), an optical attenuator (5) arranged on a first waveguide (4), a second waveguide (6), a light intensity measurement device (7), a control device (8) for receiving light intensity information measured by the light intensity measurement device (7) and controlling the signal to be applied to the optical intensity modulator (2), and a signal source (9) for receiving a control signal of the control device (8) and adjusting the signal to be applied to the optical intensity modulator (2).

    Abstract translation: 本发明的目的是提供一种用于自动校准光强测量装置的方法和装置。 装置(1)包括用于切换来自光强度调制器(2)的输出路线的光开关(3),布置在第一波导(4)上的光衰减器(5),第二波导(6), 光强测量装置(7),用于接收由光强测量装置(7)测量的光强度信息并控制施加到光强度调制器(2)的信号的控制装置(8),以及信号源 9),用于接收控制装置(8)的控制信号并调整要施加到光强度调制器(2)的信号。

    LIGHT SOAKING SYSTEM AND TEST METHOD FOR SOLAR CELLS
    57.
    发明申请
    LIGHT SOAKING SYSTEM AND TEST METHOD FOR SOLAR CELLS 审中-公开
    太阳能电池的轻量化系统和测试方法

    公开(公告)号:US20100073011A1

    公开(公告)日:2010-03-25

    申请号:US12564697

    申请日:2009-09-22

    Abstract: A method and apparatus for exposing a solar device to simulated environmental conditions is described. In one embodiment, a chamber is described. The chamber includes a frame defining a partial enclosure having an interior volume, the frame comprising a door selectively sealing an opening in the frame, a plurality of lighting devices coupled to the enclosure interior of an open wall, each of the plurality of lighting devices being positioned to direct light toward an upper surface of a platen disposed in the interior area, and a plurality of fan units positioned in an opening formed in a sidewall of the frame, each of the plurality of fan units positioned to direct ambient air flow from the outside of the enclosure toward the platen and between the plurality of lighting devices to exit through the open wall.

    Abstract translation: 描述了一种用于将太阳能装置暴露于模拟环境条件的方法和装置。 在一个实施例中,描述了一个室。 所述腔室包括限定具有内部容积的部分外壳的框架,所述框架包括选择性地密封所述框架中的开口的门,耦合到开放壁的所述外壳内部的多个照明装置,所述多个照明装置中的每一个是 定位成将光朝向设置在内部区域中的压板的上表面引导,以及多个风扇单元,其定位在形成在框架的侧壁中的开口中,多个风扇单元中的每一个被定位成将环境空气流从 外壳外部朝向压板并在多个照明装置之间通过开放的壁离开。

    Integrating photometer for measuring total flux of light generated from light source to be measured, and method for measuring total flux of light through use of the same
    58.
    发明授权
    Integrating photometer for measuring total flux of light generated from light source to be measured, and method for measuring total flux of light through use of the same 有权
    用于测量从被测量光源产生的光的总光通量的积分光度计,以及通过使用该光度计测量总光通量的方法

    公开(公告)号:US07663744B2

    公开(公告)日:2010-02-16

    申请号:US12252576

    申请日:2008-10-16

    Applicant: Kazuaki Ohkubo

    Inventor: Kazuaki Ohkubo

    CPC classification number: G01J1/04 G01J1/08 G01J2001/0481

    Abstract: A mirror is provided with a light source window and an illumination window each establishing communicative connection between an inner face side and an outer side of a hemispherical unit. The light source window is an opening to which a light source OBJ to be measured is attached mainly. The illumination window is an opening for guiding a flux of light from a correcting light source used for measurement of self-absorption toward the inner face of the hemispherical unit. A self-absorption correcting coefficient of the light source OBJ is calculated based on an illuminance by a correcting flux of light in a case where the light source to be measured OBJ in a non-light emitting state is attached to the light source window and an illuminance by a correcting flux of light in a case where a calibration mirror is attached to the light source window.

    Abstract translation: 镜子设置有光源窗口和照明窗口,每个照明窗口在半球形单元的内表面侧和外侧之间建立通信连接。 光源窗口是主要附着于被测光源OBJ的开口。 照明窗口是用于将来自用于自身吸收测量的校正光源的光束引导到半球形单元的内表面的开口。 在不发光状态的待测光源OBJ附着到光源窗口的情况下,基于通过校正光束的光的照度计算光源OBJ的自吸收校正系数, 在将校准反射镜附接到光源窗口的情况下,通过校正光束的照度。

    METHOD AND SYSTEM FOR A SOLAR SIMULATOR
    59.
    发明申请
    METHOD AND SYSTEM FOR A SOLAR SIMULATOR 有权
    太阳能模拟器的方法和系统

    公开(公告)号:US20100014080A1

    公开(公告)日:2010-01-21

    申请号:US12334971

    申请日:2008-12-15

    Abstract: System and method for testing solar cells is provided. The system includes a first light source configured to generate a first optical beam; a second light source configured to generate a second optical beam; a reflector for each light source, configured to collimate and direct each of the first optical beam and the second optical beam; a spectral filter assembly associated with each of the first light source and the second light source, the spectral filter assembly configured to (a) receive the first optical beam and the second optical beam (b) split each of the first optical beam and the second optical beam into “N” smaller optical beams, and (c) filter the “N” smaller optical beams; a re-imaging assembly for each spectral filter assembly configured to re-image the smaller “N” optical beam at a dichroic mirror that receives one or more N beams.

    Abstract translation: 提供了太阳能电池测试系统和方法。 该系统包括被配置为产生第一光束的第一光源; 第二光源,被配置为产生第二光束; 每个光源的反射器,被配置为对每个第一光束和第二光束进行准直和定向; 与所述第一光源和所述第二光源中的每一个相关联的光谱滤波器组件,所述光谱滤波器组件被配置为(a)接收所述第一光束,并且所述第二光束(b)将所述第一光束和所述第二光束 光束变成“N”个较小的光束,(c)过滤“N”个较小的光束; 用于每个频谱滤波器组件的重新成像组件被配置为在接收一个或多个N个波束的分色镜处重新成像较小的“N”个光束。

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