公开(公告)号：US08681329B2

公开(公告)日：2014-03-25

申请号：US13147190

申请日：2010-01-25

Applicant: Helmut Becker-Roβ ,  Stefan Florek ,  Michael Okruss

Inventor： Helmut Becker-Roβ ,  Stefan Florek ,  Michael Okruss

IPC: G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/2803 ,  G01J2003/1828

Abstract: An Echelle spectrometer arrangement (10) with internal order separation contains an Echelle grating (34) and a dispersing element (38) for order separation so that a two-dimensional spectrum having a plurality of separate orders (56) can be generated, an imagine optical system (18, 22, 28, 46), a flat-panel detector (16), and predispersion means (20) for predispersing the radiation into the direction of traverse dispersion of the dispersion element (38). The arrangement is characterized in that the predispersion means (20) comprise a predispersion element which is arranged along the optical path behind the inlet spacing (12) inside the spectrometer arrangement. The imaging optical system is designed in such a manner that the predispersed radiation can be imaged onto an additional image plane (24) which does not have any boundaries in the predispersion direction and which is arranged along the optical path between the predispersion element (20) and the echelle grating (34). Optical means (20, 68) in the area of the predispersed spectrum are arranged to influence the spatial and/or the spectral beam density distribution on the detector (16).

Abstract translation: 具有内部顺序分离的Echelle光谱仪装置（10）包含Echelle光栅（34）和分散元件（38），用于顺序分离，使得可以产生具有多个分开的阶数（56）的二维光谱， 光学系统（18,22,28,46），平板检测器（16）和用于将辐射预分散到分散元件（38）的横向分散方向的预分散装置（20）。 该装置的特征在于，预分散装置（20）包括预分散元件，该预分散元件沿着光谱仪装置内的入口间隔（12）的光路布置。 成像光学系统被设计成使得预分散的辐射可以被成像到在预分散方向上没有任何边界并且沿着预分散元件（20）之间的光路布置的附加图像平面（24）上， 和梯形光栅（34）。 在预分散频谱的区域中的光学装置（20,68）被布置成影响检测器（16）上的空间和/或光谱光束密度分布。

公开(公告)号：US07924422B2

公开(公告)日：2011-04-12

申请号：US12369947

申请日：2009-02-12

Applicant: Fred Stanke ,  Adam Norton ,  Holger Tuitje

Inventor： Fred Stanke ,  Adam Norton ,  Holger Tuitje

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01B2210/56 ,  G01J3/0205 ,  G01J3/0224 ,  G01J3/0297 ,  G01J3/28 ,  G01J3/2803 ,  G01J2003/1828 ,  G01N21/274

Abstract: A zoned order sorting filter for a spectrometer in a semiconductor metrology system is disclosed with reduced light dispersion at the zone joints. The order sorting filter comprises optically-transparent layers deposited underneath, or on top of thin-film filter stacks of the order sorting filter zones, wherein the thicknesses of the optically-transparent layers are adjusted such that the total optical lengths traversed by light at a zone joint are substantially equal in zones adjacent the zone joint. A method for wavelength to detector array pixel location calibration of spectrometers is also disclosed, capable of accurately representing the highly localized nonlinearities of the calibration curve in the vicinity of zone joints of an order sorting filter.

Abstract translation: 公开了一种用于半导体测量系统中的光谱仪的分区排序分选过滤器，其中在区域关节处的光散射减小。 订单分选过滤器包括沉积在下面的光学透明层，或者在分级过滤器区域的薄膜过滤器堆叠的顶部，其中调整光学透明层的厚度，使得在光 区域接头在邻近区域接头的区域中基本相等。 还公开了一种用于波长到检测器阵列像素位置校准的光谱仪的方法，其能够精确地表示在订单分选滤波器的区域接头附近的校准曲线的高度局部化的非线性。

公开(公告)号：US06675030B2

公开(公告)日：2004-01-06

申请号：US09932185

申请日：2001-08-17

Applicant: Emil W. Ciurczak ,  Kevin P. Bynum ,  Howard Mark

Inventor： Emil W. Ciurczak ,  Kevin P. Bynum ,  Howard Mark

IPC: A61B500

CPC classification number: G01J3/28 ,  A61B5/14532 ,  A61B5/1455 ,  A61B5/1495 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0237 ,  G01J3/0254 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/12 ,  G01J2003/1213 ,  G01J2003/1828 ,  G01J2003/2866 ,  G01N21/359 ,  G01N2201/065

Abstract: An individualized modeling equation for predicting a patient's blood glucose values is generated as a function of non-invasive spectral scans of a body part and an analysis of blood samples from the patient, and is stored on a central computer. The central computer predicts a blood glucose value for the patient as a function of the individualized modeling equation and a non-invasive spectral scan generated by a remote spectral device. If the spectral scan falls within the range of the modeling equation, the predicted blood glucose level is output to the patient. If the spectral scan falls outside the range of the modeling equation, regeneration of the model is required, and the patient takes a number of noninvasive scans and an invasive blood glucose level determination. The computer regenerates the individualized modeling equation as a function of the set of spectral scans and corresponding blood glucose values.

Abstract translation: 产生用于预测患者血糖值的个性化建模方程作为身体部位的非侵入性光谱扫描和来自患者的血液样本的分析的函数，并且存储在中央计算机上。 中央计算机根据个性化建模方程和由远程光谱装置产生的非侵入式光谱扫描来预测患者的血糖值。 如果光谱扫描落在建模方程的范围内，则将预测的血糖水平输出给患者。 如果光谱扫描超出建模方程的范围，则需要再生模型，并且患者进行多次无创扫描和侵入性血糖水平测定。 计算机根据光谱扫描集和对应的血糖值重新生成个性化建模方程。

公开(公告)号：US06534768B1

公开(公告)日：2003-03-18

申请号：US09699702

申请日：2000-10-30

Applicant: Emil W. Ciurczak ,  Kevin C. Bynum

Inventor： Emil W. Ciurczak ,  Kevin C. Bynum

IPC: G01J528

CPC classification number: G01N21/35 ,  G01J1/0455 ,  G01J1/4228 ,  G01J3/0243 ,  G01J3/10 ,  G01J3/12 ,  G01J3/1256 ,  G01J3/2803 ,  G01J2003/123 ,  G01J2003/1243 ,  G01J2003/1828 ,  G01J2003/2866 ,  G01N21/359 ,  G01N21/59

Abstract: A hemispherical detector comprising a plurality of photodetectors arranged in a substantially contiguous array, the array being substantially in the shape of a half-sphere, the half-sphere defining a closed end and an open end, the open end defining a substantially circular face. Also provided is a method for constructing a hemispherical detector comprising the steps of making a press mold of the desired shape of the hemispherical detector, pouring a material into the press mold to form a cast, finishing the cast to remove any defects, coating the cast with a coating material, and attaching a plurality of photodetectors to the cast.

Abstract translation: 一种半球形检测器，包括以基本上邻接的阵列布置的多个光电检测器，所述阵列基本上为半球形，所述半球限定封闭端和开口端，所述开口端限定基本圆形的面。 还提供了一种用于构造半球形检测器的方法，包括以下步骤：制造半球形检测器所需形状的压模，将材料注入压模中以形成铸件，精加工铸件以除去任何缺陷，涂覆铸件 涂覆材料，并将多个光电检测器附接到铸件上。

公开(公告)号：US20020180970A1

公开(公告)日：2002-12-05

申请号：US09958458

申请日：2001-10-05

Inventor： Michael R. Hammer ,  Philip V. Wilson ,  Mark R. Williams ,  Dower C. Bricker ,  Martin K. Masters ,  Stewart R. Campbell ,  Peter G. Layton

IPC: G01J003/28

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0227 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/1809 ,  G01J3/2803 ,  G01J5/62 ,  G01J2003/1828 ,  G01N21/27 ,  G01N21/31

Abstract: A method and apparatus for the spectrochemical analysis of a sample in which a solid state array detector (82) is used to detect radiation (62) of spectrochemical interest. The invention involves the use of a shutter (72) adjacent the entrance aperture (70) of a polychromator (74-80) to expose the detector (82) to the radiation (62) for varying lengths of time whereby for short duration exposure times charge accumulation in elements (i.e. pixels) of the detector (82) due to high intensity components of the radiation is limited and for longer exposure times charge accumulation in elements (pixels) of the detector (82) due to feeble intesity components of radiation (62) is increased. This ensures that each reading of the detector (82) includes at least one exposure in which the amount of charge accumulated at each wavelength of interest is neither too little or too great. The problems of feeble radiation components not being accurately measurable and of high intensity radiation components exceeding the charge carrying capacity of elements (pixels) of the detector (82) are thereby able to be avoided. An attenuator (90) may be placed between the radiation source (60) and the detector (82) to permit longer exposure times to be used for very high intensity radiation.

Abstract translation: 用于对样品进行光谱化学分析的方法和装置，其中固态阵列检测器（82）用于检测分光光度的辐射（62）。 本发明涉及使用与多色调剂（74-80）的入口孔（70）相邻的快门（72）将检测器（82）暴露于辐射（62）以改变长度的时间，从而短时间曝光时间 由于辐射的高强度分量，检测器（82）的元件（即，像素）中的电荷累积受到限制，并且由于辐射的微弱的肥胖分量，对于更长的曝光时间来检测器（82）的元件（像素）中的电荷累积 62）增加。 这确保了检测器（82）的每次读取包括至少一次曝光，其中在每个感兴趣波长处累积的电荷量既不太小也不太大。 因此能够避免无法精确测量的微弱辐射成分和超过检测器（82）的元件（像素）的电荷承载能力的高强度辐射成分的问题。 衰减器（90）可以放置在辐射源（60）和检测器（82）之间，以允许更长的曝光时间用于非常高强度的辐射。

公开(公告)号：US6122052A

公开(公告)日：2000-09-19

申请号：US300609

申请日：1999-04-27

Applicant: Robert F. Barnes ,  Mario Carozza ,  David J. Eaton ,  Gerard T. Paul ,  J. Fenton Williams ,  Mark W. Stoltze ,  Steven L. Paul ,  Andrew P. Bajorinas

Inventor： Robert F. Barnes ,  Mario Carozza ,  David J. Eaton ,  Gerard T. Paul ,  J. Fenton Williams ,  Mark W. Stoltze ,  Steven L. Paul ,  Andrew P. Bajorinas

IPC: C12Q1/68 ,  G01J3/18 ,  G01J3/28 ,  G01J3/42 ,  G01N21/27 ,  G01J3/02

CPC classification number: G01J3/42 ,  G01J3/28 ,  G01J2003/1828 ,  G01J2003/2866

Abstract: A spectrometric instrument passes flashing light through a sample and has a linear detector operated by the computer to integrate signals for an established number of flashes to obtain an integrated unit of the signal data, from which spectral information is displayed on a monitor. Over a full spectral range, the established number is determined as that which effects a highest peak height proximately below a preselected maximum, and light source voltage is adjusted to bring the peak height closer to the maximum. For a narrower spectral range, an operating number of flashes for a unit is increased above the established number to accommodate a lower highest peak in the range. Wavelength calibration uses peaks in the light source. Corrections are made for stray light and non-linearity of detector response. Calculation of auxiliary information derived from input of auxiliary data through a touch screen is displayed on the monitor.

Abstract translation: 光谱仪将闪烁的光通过样品，并具有由计算机操作的线性检测器，以将已建立数量闪烁的信号集成，以获得信号数据的集成单元，从该信号数据显示光谱信息。 在完整光谱范围内，确定的数量被确定为接近预定最大值的最高峰值高度，并调整光源电压以使峰值高度接近最大值。 对于较窄的光谱范围，单位的闪烁操作数量将增加到高于建立的数量，以适应​​该范围内较低的最高峰值。 波长校准使用光源中的峰值。 对杂散光和检测器响应的非线性进行校正。 通过触摸屏输入辅助数据的辅助信息的计算显示在监视器上。

公开(公告)号：US6078048A

公开(公告)日：2000-06-20

申请号：US66662

申请日：1998-04-27

Applicant: Charles G. Stevens ,  Norman L. Thomas

Inventor： Charles G. Stevens ,  Norman L. Thomas

IPC: G01J3/18 ,  G01J3/28 ,  G02B5/18

CPC classification number: G02B5/1814 ,  G01J3/1809 ,  G01J3/2803 ,  G01J2003/1828

Abstract: A small spectrograph containing no moving components and capable of providing high resolution spectra of the mid-infrared region from 2 microns to 4 microns in wavelength. The resolving power of the spectrograph exceeds 20,000 throughout this region and at an optical throughput of about 10.sup.-5 cm.sup.2 sr. The spectrograph incorporates a silicon immersion echelle grating operating in high spectral order combined with a first order transmission grating in a cross-dispersing configuration to provide a two-dimensional (2-D) spectral format that is focused onto a two-dimensional infrared detector array. The spectrometer incorporates a common collimating and condensing lens assembly in a near aberration-free axially symmetric design. The spectrometer has wide use potential in addition to general research, such as monitoring atmospheric constituents for air quality, climate change, global warming, as well as monitoring exhaust fumes for smog sources or exhaust plumes for evidence of illicit drug manufacture.

Abstract translation: 一个小型的光谱仪不含移动组件，能够提供波长为2微米至4微米的中红外区域的高分辨率光谱。 光谱仪的分辨率在该区域超过20,000，光通量约为10-5cm2 sr。 光谱仪包括以高光谱顺序工作的硅浸没式光栅栅格，与交叉分散配置中的一阶透射光栅组合，以提供聚焦到二维红外检测器阵列上的二维（2-D）光谱格式 。 光谱仪包含一个普通的准直和聚光透镜组件，具有近无像差的轴对称设计。 除了一般性研究之外，光谱仪还具有广泛的应用潜力，例如监测空气质量，气候变化，全球变暖的大气成分，以及监测烟雾源的废气烟雾或排放羽毛，以证明非法药物生产。

公开(公告)号：US4986658B1

公开(公告)日：1996-06-25

申请号：US34174889

申请日：1989-04-21

Applicant: UNIV LEHIGH

Inventor： KIM YONG W

IPC: G01J3/443 ,  G01J3/02 ,  G01J3/04 ,  G01J3/18 ,  G01J3/28 ,  G01N21/17 ,  G01N21/69 ,  G01N21/71 ,  G01N21/73 ,  G01N21/63

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/28 ,  G01J3/2889 ,  G01J2003/1828 ,  G01N21/718 ,  G01N2021/695

公开(公告)号：US5461477A

公开(公告)日：1995-10-24

申请号：US402314

申请日：1995-03-10

Applicant: William J. Marinelli ,  Karl W. Holtzclaw ,  Steven J. Davis ,  Byron D. Green

Inventor： William J. Marinelli ,  Karl W. Holtzclaw ,  Steven J. Davis ,  Byron D. Green

IPC: G01J3/18 ,  G01J3/26 ,  G01J3/28 ,  G01N21/27 ,  G01B9/02

CPC classification number: G01J3/2823 ,  G01J2003/1828 ,  G01J3/26

Abstract: A spectrometer comprises a tunable interferometer for producing a monochromatic continuous image at an image plane and including two mirrors having substantially parallel surfaces and an adjustable spacing therebetween, a radiation detector located at the image plane for recording the image, a filter arrangement for allowing at least one predetermined range of wavelengths to pass to the detector, and a lens arrangement for collecting radiation and limiting radiation incident on the interferometer to an angle which is substantially perpendicular to the substantially parallel surfaces of the two mirrors.

Abstract translation: 光谱仪包括可调干涉仪，用于在图像平面处产生单色连续图像，并且包括两个反射镜，其具有基本上平行的表面和可调节的间隔，位于图像平面处的用于记录图像的辐射探测器，至少允许 一个预定范围的波长传递到检测器，以及透镜装置，用于收集辐射并将入射在干涉仪上的辐射限制在大致垂直于两个反射镜的基本上平行的表面的角度。

公开(公告)号：US5359409A

公开(公告)日：1994-10-25

申请号：US98559

申请日：1993-07-28

Applicant: Kenneth R. Wildnauer ,  James R. Stimple ,  John D. Knight ,  Joseph N. West ,  Barry G. Broome

Inventor： Kenneth R. Wildnauer ,  James R. Stimple ,  John D. Knight ,  Joseph N. West ,  Barry G. Broome

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/18 ,  G01J2003/062 ,  G01J2003/069 ,  G01J2003/1819 ,  G01J2003/1828 ,  G01J3/0221 ,  G01J3/2889

Abstract: A double-pass scanning monochromator for use in an optical spectrum analyzer includes an input optical fiber for emitting an input light beam, a diffraction grating for diffracting the input light beam to produce a spatially dispersed light beam, a slit for passing a selected portion of the dispersed light beam, a motor for rotating the diffraction grating, a shaft angle encoder for sensing grating position, and an output optical fiber. The light that passes through the slit is directed to the diffraction grating and is recombined by the diffraction grating to produce an output light beam. The light beam to be analyzed is incident on the diffraction grating during first and second passes. A polarization rotation device rotates the polarization components of the light beam by 90.degree. between the first and second passes so that the output of the monochromator is independent of the polarization of the input light beam. The output optical fiber is translated by a micropositioning assembly in a plane perpendicular to the output light beam during rotation of the diffraction grating to automatically track the output light beam and to provide optical chopping.

Abstract translation: 用于光谱分析仪的双通扫描单色仪包括用于发射输入光束的输入光纤，用于衍射输入光束以产生空间分散的光束的衍射光栅，用于使所选择的部分通过的狭缝 分散的光束，用于旋转衍射光栅的电动机，用于感测光栅位置的轴角编码器和输出光纤。 通过狭缝的光被引导到衍射光栅，并且被衍射光栅重新组合以产生输出光束。 要分析的光束在第一次和第二次通过期间入射到衍射光栅上。 偏振旋转装置在第一和第二遍之间使光束的偏振分量旋转90°，使得单色仪的输出与输入光束的偏振无关。 在衍射光栅旋转期间，输出光纤由垂直于输出光束的平面中的微定位组件平移，以自动跟踪输出光束并提供光学切割。