VIBRATION SENSING OPTICAL FIBER SENSOR AND VIBRATION SENSING METHOD

    公开(公告)号:US20180283935A1

    公开(公告)日:2018-10-04

    申请号:US15870842

    申请日:2018-01-12

    Inventor: Yoshihiro KANDA

    Abstract: A vibration sensing optical fiber sensor is structured to include a probe light supplying section, an optical fiber, a polarimeter for reflected light, and a computing unit. The probe light supplying section generates, as probe light, light pulses that are switched alternately and periodically to orthogonal polarization directions. The probe light is inputted to the optical fiber. The polarimeter for reflected light measures a state of polarization of reflected light that is the probe light that has been reflected by the optical fiber. The computing unit carries out specifying of a position of vibrations by using the state of polarization measured by the polarimeter for reflected light.

    Information maintenance, intensity attenuation, and angle/plane of incidence control in electromagentic beams

    公开(公告)号:US10066989B1

    公开(公告)日:2018-09-04

    申请号:US15330353

    申请日:2016-09-09

    Abstract: A system for providing variable wavelength intensity attenuation to said focused beams by application of an aperture-like element that comprises at least two regions of “filter” material, or comprises different materials graded into one another, which different materials that have different responses to different wavelengths, wherein said system is applied to reduce differences in wavelength intensity levels when applied in collimated portions of a beam as a Spectral Angle Adjustor (SAA) or to preserve information in a beam while changing said beam effective diameter as a Spectral Aperture Stop (SAS); or to affect a Spectral Field Stop (SFS) that controls source image size when applied at a convergent/divergent beam focal point as a Spectrally Varying Aperture, (SVA) the end result depending on where in a beam it is applied.

    Simultaneous capturing of overlay signals from multiple targets

    公开(公告)号:US10048132B2

    公开(公告)日:2018-08-14

    申请号:US15222503

    申请日:2016-07-28

    Abstract: Metrology methods and systems are provided, in which the detected image is split at a field plane of the collection path of the metrology system's optical system into at least two pupil plane images. Optical elements such as prisms may be used to split the field plane images, and multiple targets or target cells may be measured simultaneously by spatially splitting the field plane and/or the illumination sources and/or by using two polarization types. The simultaneous capturing of multiple targets or target cells increases the throughput of the disclosed metrology systems.

    Apparatus and methods for concentration determination using polarized light

    公开(公告)号:US10031069B2

    公开(公告)日:2018-07-24

    申请号:US15619837

    申请日:2017-06-12

    Abstract: Methods and apparatus for concentration determination using polarized light. The apparatus includes a first polarized light source having a first light source polarization axis and a second polarized light source having a second light source polarization axis generally perpendicular to the first light source polarization axis. Also, a first polarized light receiver having a first polarized light receiver polarization axis and configured to measure an intensity of light transmitted from the first light receiver polarizer and a second polarized light receiver having a second polarized light receiver polarization axis substantially perpendicular to the first light receiver polarization axis and configured to measure an intensity of light transmitted from the second light receiver polarizer, wherein the first and second light receiver polarization axes are generally +/−45 degrees relative to the first and second light source polarization axes.

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