OPTICAL DESIGN TECHNIQUES FOR MULTILAYER THIN FILM DEVICES IN COMPACT OPTICAL SYSTEMS
    62.
    发明申请
    OPTICAL DESIGN TECHNIQUES FOR MULTILAYER THIN FILM DEVICES IN COMPACT OPTICAL SYSTEMS 有权
    紧凑光学系统中多层薄膜设备的光学设计技术

    公开(公告)号:US20160265971A1

    公开(公告)日:2016-09-15

    申请号:US14650116

    申请日:2014-07-28

    Abstract: Methods and systems for designing an integrated computational element (ICE) device are provided. The method includes generating a plurality of ICE device models with a design suite, each ICE device model being configured to detect a characteristic of interest of a sample, and including one or more layers. Further determining at least one transmission spectrum for each theoretical ICE device model for at least one distribution of incident light angles and at least one performance criteria for each ICE device model for the at least one of distribution of incident light angles. Also, ranking the ICE device model based on the at least one performance criteria of each ICE device model at the at least one distribution of incident light angles, and selecting for fabrication one or more ICE device models based on favorable angular tolerance. An optical system including an ICE device as described above is also provided.

    Abstract translation: 提供了用于设计集成计算元件(ICE)设备的方法和系统。 该方法包括利用设计套件生成多个ICE设备模型,每个ICE设备模型被配置为检测样本感兴趣的特征,并且包括一个或多个层。 进一步确定用于入射光角度的至少一个分布的每个理论ICE设备模型的至少一个透射光谱,以及用于入射光角度分布中的至少一个的每个ICE设备模型的至少一个性能标准。 此外,基于入射光角度的至少一个分布,基于每个ICE设备模型的至少一个性能标准来对ICE设备模型进行排名,以及基于有利的角度公差来选择制造一个或多个ICE设备模型。 还提供了包括如上所述的ICE装置的光学系统。

    DUV-UV band spectroscopic optical system and spectrometer using same
    64.
    发明授权
    DUV-UV band spectroscopic optical system and spectrometer using same 有权
    DUV-UV光谱分光光学系统和光谱仪

    公开(公告)号:US08730471B2

    公开(公告)日:2014-05-20

    申请号:US13145942

    申请日:2009-12-17

    Abstract: Disclosed are a spectroscopic optical system and a spectrometer both enabling vertical illumination by means of an optical system using only refractive lenses and enabling wide-band color correction in the DUV-UV (190 to 400 nm) range. The spectroscopic optical system and spectrometer each comprise a light source (100), a folding mirror (110), a field stop (120), an object-side focusing lens system (130) for focusing light onto a sample, an image-side focusing lens (140) disposed on the image forming plane of the object-side focusing lens system, and a spectroscope (150) for dispersing regularly reflected light from the sample. The object-side focusing lens system (130) and the image-side focusing lens system (140) are each a spectroscopic optical system corrected with respect to color in a broad band of wavelength from 190 to 400 nm and configured from only refractive lenses enabling vertical illumination. The working distance (WD) of each lens is set shorter than a predetermined distance, and the doublet interval (D) is set longer than a predetermined distance.

    Abstract translation: 公开了一种分光光学系统和光谱仪,其通过仅使用折射透镜的光学系统实现垂直照明,并且能够在DUV-UV(190-400nm)范围内实现宽带色彩校正。 分光光学系统和光谱仪各自包括光源(100),折叠镜(110),场停止器(120),用于将光聚焦到样本上的物体侧聚焦透镜系统(130),图像侧 设置在物体侧聚焦透镜系统的图像形成平面上的聚焦透镜(140)以及用于从样品中均匀地分散反射光的分光镜(150)。 物体侧聚焦透镜系统(130)和图像侧聚焦透镜系统(140)分别是相对于190至400nm的波长宽带中的颜色校正的分光光学系统,并且仅由折射透镜构成,使得能够 垂直照明 每个透镜的工作距离(WD)设定为短于预定距离,并且双重间隔(D)被设定为比预定距离长。

    ACCURACY AND PRECISION IN RAMAN SPECTROSCOPY
    65.
    发明申请
    ACCURACY AND PRECISION IN RAMAN SPECTROSCOPY 有权
    拉曼光谱的准确度和精度

    公开(公告)号:US20140028996A1

    公开(公告)日:2014-01-30

    申请号:US13559211

    申请日:2012-07-26

    CPC classification number: G01J3/0248 G01J3/0237 G01J3/0278 G01J3/44 G01N21/65

    Abstract: The disclosure is related systems and method for improved accuracy and precision in Raman spectroscopy. In one embodiment, a device may comprise a Raman spectroscopic apparatus configured to determine a property of a sample by directing photons at the sample and measuring a resulting Raman scattering, a positioning apparatus capable of manipulating a position of the sample, and the device being configured to selectively adjust a focus of the Raman spectroscopic apparatus to adjust an intensity of the Raman scattering. Another embodiment may be a method comprising performing a depth focus Raman spectra screening on a sample to determine a depth focus with a maximum-intensity Raman spectra, wherein the depth focus spectra screening comprises performing Raman spectra scans on the sample at a plurality of depth foci, and modifying a process based on a result of the Raman spectra scan at the depth focus with the maximum-intensity Raman spectra.

    Abstract translation: 本公开是提高拉曼光谱精度和精度的相关系统和方法。 在一个实施例中,装置可以包括拉曼分光装置,其被配置为通过在样品处引导光子并测量所得到的拉曼散射来确定样品的性质,能够操纵样品的位置的定位装置,以及被配置的装置 选择性地调节拉曼光谱装置的焦点以调节拉曼散射的强度。 另一个实施方案可以是包括对样品进行深度聚焦拉曼光谱筛选以用最大强度拉曼光谱确定深度聚焦的方法,其中深度聚焦谱筛选包括在多个深度焦点上对样品进行拉曼光谱扫描 ,并根据最大强度拉曼光谱在深度焦点处基于拉曼光谱扫描的结果修改工艺。

    Limited F-cone light source
    67.
    发明授权
    Limited F-cone light source 失效
    有限的F锥光源

    公开(公告)号:US08451527B2

    公开(公告)日:2013-05-28

    申请号:US13617195

    申请日:2012-09-14

    Applicant: Andrew Bodkin

    Inventor: Andrew Bodkin

    Abstract: A shutter includes micro-optics having first and second concentrator arrays. A transducer laterally displaces one of the first and second concentrator arrays between transmissive and shuttered modes. In the transmissive mode, the arrays of concentrators are optically aligned to permit electromagnetic energy passing through the first array of concentrators to pass through the second array of concentrators. In the shuttered mode, the electromagnetic radiation is blocked from passing through the second array of concentrators. The concentrators may be compound parabolic concentrators, or lenslets positioned on opposing plates with pinholes printed therethrough. The shutter may increase f-number of radiation passing therethrough, and may be used in a limited f-cone radiation source with shuttering abilities, for example reducing f-cone of radiation output from the radiation source.

    Abstract translation: 快门包括具有第一和第二集中器阵列的微光学器件。 换能器在透射和快门模式之间横向移位第一和第二聚光器阵列中的一个。 在透射模式中,聚光器阵列被光学对准以允许通过第一集中器阵列的电磁能量穿过第二阵列的聚光器。 在快门模式中,电磁辐射被阻止通过第二阵列的聚光器。 集中器可以是复合抛物面聚光器,或者位于相对的板上的小透镜,其中针孔印刷在其中。 快门可以增加通过其中的f数量的辐射,并且可以用于具有快门能力的有限的f-锥体辐射源,例如减小从辐射源输出的辐射的f锥。

    Color measuring device
    68.
    发明授权
    Color measuring device 有权
    彩色测量装置

    公开(公告)号:US08441642B2

    公开(公告)日:2013-05-14

    申请号:US12820235

    申请日:2010-06-22

    CPC classification number: G01J3/10 G01J3/02 G01J3/0278 G01J3/50 G01J3/501

    Abstract: A color measuring device includes a lighting arrangement for a measurement field of a measurement object to be measured, a pick-up arrangement for detecting the measurement light reflected back from the measurement field and for converting it into corresponding electric signals, an electronic circuit for controlling operation of the color measuring device and for processing and evaluating the electric signals, and a display for displaying measurement results. The lighting arrangement has a lamp ring with three identical lamp groups for illuminating the measurement field from a predefined range of angles of incidence. The pick-up arrangement has a digital camera which creates an image of the measured measurement field. The electronic circuit is designed to switch the light sources of the lamp groups on sequentially, and the camera creates a separate image of the measurement field for every switched-on light source.

    Abstract translation: 一种颜色测量装置,包括用于待测量的测量对象的测量场的照明装置,用于检测从测量场反射回来的测量光并将其转换成对应的电信号的拾取装置,用于控制的电子电路 颜色测量装置的操作和用于处理和评估电信号的显示器以及用于显示测量结果的显示器。 照明装置具有灯环,其具有三个相同的灯组,用于从预定入射角度照射测量场。 拾取装置具有创建测量的测量场的图像的数字照相机。 电子电路被设计为顺序地切换灯组的光源,并且相机为每个接通的光源创建测量场的单独图像。

    High intensity Fabry-Perot sensor
    69.
    发明授权
    High intensity Fabry-Perot sensor 有权
    高强度法布里 - 珀罗传感器

    公开(公告)号:US08432552B2

    公开(公告)日:2013-04-30

    申请号:US12862635

    申请日:2010-08-24

    Abstract: A sensor assembly having an optical fiber, a lens in optical communication with the optical fiber, a reflective surface spaced from the lens, for reflecting light from the beam back to the lens, a partially reflective surface positioned between the reflective surface and the lens, the partially reflective surface for reflecting light from the beam back to the lens, and an alignment device for aligning the lens and reflective surface with respect to one another, such that light from the beam of light transmitted from the lens reflects from the reflective surface back to the lens. The alignment device can have a rotational component and a base component, where the rotational component rotates to align a beam of light transmitted from the lens. The rotational component can also cooperate with the base component to move axially with respect to the reflective surfaces to align the beam for optimum power.

    Abstract translation: 一种具有光纤的传感器组件,与光纤光学连通的透镜,与透镜间隔开的反射表面,用于将来自光束的光反射回透镜,位于反射表面和透镜之间的部分反射表面, 用于将来自光束的光反射回到透镜的部分反射表面,以及用于使透镜和反射表面相对于彼此对准的对准装置,使得来自透镜的光束的光从反射表面反射回来 到镜头 对准装置可以具有旋转部件和基部部件,其中旋转部件旋转以对准从透镜传输的光束。 旋转部件还可以与基部部件配合以相对于反射表面轴向移动以对准光束以获得最佳功率。

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