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    Vacuum ultraviolet reflectometer integrated with processing system
    63.
    发明申请
    Vacuum ultraviolet reflectometer integrated with processing system 失效
    真空紫外线反射计与加工系统集成

    公开(公告)号：US20060208198A1

    公开(公告)日：2006-09-21

    申请号：US11412810

    申请日：2006-04-27

    Applicant: Dale Harrison

    Inventor： Dale Harrison

    IPC: G01J5/00

    CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

    Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

    Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

    Stationary fourier transform spectrometer
    64.
    发明申请
    Stationary fourier transform spectrometer 有权
    固定傅立叶变换光谱仪

    公开(公告)号：US20040239939A1

    公开(公告)日：2004-12-02

    申请号：US10854428

    申请日：2004-05-27

    Applicant: ONERA

    Inventor： Nicolas Guerineau ,  Joel Deschamps ,  Sylvain Rommeluere

    IPC: G01B009/02

    CPC classification number: H01L31/02165 ,  G01J3/0259 ,  G01J3/26 ,  G01J3/4531 ,  G01J3/4532 ,  H01L27/1446

    Abstract: The invention aims to integrate a two-wave stationary interferometer on a photodetector during fabrication in order to constitute a miniature stationary Fourier transform spectrometer. The interferometer essentially comprises a plate having a first plane face coinciding with an image plane on semiconductor photosensitive elements and a second face that is not parallel to the first face. The second face reflects a wave that has a phase difference relative to the incident wave interfering with it that is a function of the local thickness of the plate.

    Abstract translation: 本发明的目的是在制造期间将双波段固定干涉仪集成在光电检测器上，以构成微型固定傅里叶变换光谱仪。 干涉仪基本上包括具有与半导体光敏元件上的像平面相重合的第一平面和与第一面不平行的第二面的板。 第二面反射相对于与其干涉的入射波具有相位差的波，该波是板的局部厚度的函数。

    Interferometric device for performing spectroscopic measurements with a stepped Fabry Perot
    65.
    发明授权
    Interferometric device for performing spectroscopic measurements with a stepped Fabry Perot 失效
    干涉仪用于用步进式法布里·佩罗进行光谱测量

    公开(公告)号：US06016199A

    公开(公告)日：2000-01-18

    申请号：US801633

    申请日：1997-02-18

    Applicant: William Newton

    Inventor： William Newton

    IPC: G01B9/02 ,  G01J3/45 ,  G01J3/453 ,  G01J9/02

    CPC classification number: G01J3/26 ,  G01J3/4531 ,  G01J9/0246

    Abstract: The interferometric device for performing spectroscopic measurements includes a rectangular array of interferometers, each consisting of two partially transparent parallel mirrors arranged so that a distance between the two mirrors of each interferometer is unique; an array (9) of photodetectors positioned behind the rectangular array of interferometers to produce output signals and a device for transforming these output signals to produce a spectrum. In one embodiment the interferometers are formed by two parallel plates (1,2) having the two flat surfaces (3, 4) facing away from each other and two facing surfaces (5,6) each provided with steps (11) of identical step height, but with the step height on one plate differing from the step height on the other and with the two plates (1,2) assembled together so that the steps (11) on the one plate are oriented perpendicularly to the steps (11) on the other. In another embodiment the interferometers are formed by a first parallel plate (12) having two opposing flat sides and a second parallel plate (13) having a first flat side and a second side remote from the first flat side provided with steps (17) of identical height arranged in rows between two opposing narrow sides (18,19) so that a last step next to one narrow side in one row follows a first step in a preceding row next to the other narrow side.

    Abstract translation: PCT No.PCT / DE95 / 01130 Sec。 371日期1997年2月18日 102（e）日期1997年2月18日PCT提交1995年8月24日PCT公布。 公开号WO96 / 06335 日期1996年2月29日用于执行光谱测量的干涉测量装置包括矩形阵列的干涉仪，每个干涉仪阵列由两个部分透明的平行反射镜组成，使得每个干涉仪的两个反射镜之间的距离是唯一的; 定位在矩形干涉仪阵列后面以产生输出信号的光电检测器阵列（9）和用于变换这些输出信号以产生光谱的装置。 在一个实施例中，干涉仪由两个平行的平板（1,2）形成，两个平面板（1,2）具有彼此背离的两个平坦表面（3,4）和两个相对的表面（5,6），每个设置有相同步骤的步骤（11） 高度，但是在一个板上的台阶高度与台阶高度不同，并且两个板（1,2）组装在一起，使得一个板上的台阶（11）垂直于台阶（11）定向， 在另一。 在另一个实施例中，干涉仪由具有两个相对的平坦侧面的第一平行板（12）和具有第一平坦侧面的第二平行板（13）形成，而第二平面板（13） 相同的高度在两个相对的窄边（18,19）之间排列成行，使得在一行中的一个窄边旁边的最后一个步骤跟随在另一个窄边旁边的前一行中的第一步。

    Integrated optics in an electrically scanned imaging Fourier transform spectrometer
    66.
    发明授权
    Integrated optics in an electrically scanned imaging Fourier transform spectrometer 失效
    电扫描成像傅里叶变换光谱仪中的集成光学器件

    公开(公告)号：US4523846A

    公开(公告)日：1985-06-18

    申请号：US416443

    申请日：1982-09-10

    Applicant: James B. Breckinridge ,  Fred G. O'Callaghan

    Inventor： James B. Breckinridge ,  Fred G. O'Callaghan

    IPC: G01J3/28 ,  G01J3/453 ,  G01J9/02 ,  G01B9/02

    CPC classification number: G01J3/4531 ,  G01J3/2823

    Abstract: State of the art Fourier transform spectrometers are useful scientific tools. But, they are very complex precision electro-optical-mechanical instruments. To simplify the instrument, the need for a mechanical slide mechanism to create a path difference has been eliminated by the use of retro-reflecting mirrors (16, 18) in a monolithic interferometer assembly (11) wherein the mirrors (16, 18) are not at 90 degrees to the propagation vector (29, 43) of the radiation (27), but rather at a small angle (49). The resulting interference fringes (51, 53) create a double-sided interferogram (33) of the source irradiance distribution which is detected by a charge-coupled device (CCD) array (23). The position of each CCD pixel (25) in the array is an indication of the path difference between the two retro-reflecting mirrors (16, 18) in the monolithic optical structure. The Fourier transform of the signals generated by the CCD array (23) provide the spectral irradiance distribution of the source. For imaging, the interferometer assembly (11) scans the source of irradiation by moving the entire instrument, such as would occur if it was fixedly mounted to a moving platform, e.g., a spacecraft. During scanning, the entrance slot (21) to the monolithic optical structure send different pixels to corresponding interferograms detected by adjacent columns of pixels at the CCD array (23).

    Abstract translation: 最先进的傅立叶变换光谱仪是有用的科学工具。 但是，它们是非常复杂的精密电光机械仪器。 为了简化仪器，通过在单片干涉仪组件（11）中使用反射反射镜（16,18），消除了用于产生路径差异的机械滑动机构的需要，其中反射镜（16,18）是 不是辐射（27）的传播矢量（29,43）的90度，而是以小的角度（49）。 由此产生的干涉条纹（51,53）产生源辐射分布的双面干涉图（33），该干涉图由电荷耦合器件（CCD）阵列（23）检测。 阵列中的每个CCD像素（25）的位置是单片光学结构中的两个后向反射镜（16,18）之间的路径差的指示。 由CCD阵列（23）产生的信号的傅里叶变换提供源的光谱辐照度分布。 对于成像，干涉仪组件（11）通过移动整个仪器来扫描照射源，例如如果它固定地安装到诸如航天器的移动平台上则会发生。 在扫描期间，到单片光学结构的入口槽（21）将不同的像素发送到CCD阵列（23）处的相邻像素列检测到的相应的干涉图。

    Spectrometer and method of spectroscopy
    70.
    发明授权
    Spectrometer and method of spectroscopy 有权

    公开(公告)号：US09976903B2

    公开(公告)日：2018-05-22

    申请号：US15293219

    申请日：2016-10-13

    Applicant: Fuji Electric Co., Ltd.

    Inventor： Masanori Oto

    IPC: G01J3/45 ,  G01B9/02 ,  G01J3/453 ,  G01J3/447 ,  G01J3/02

    CPC classification number: G01J3/453 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/447 ,  G01J3/4531

    Abstract: A spectrometer includes a beam splitter that receives incident light rays and splits each of the incident light rays into first and second spatially displaced, linearly polarized light rays that respectively have first and second polarization directions orthogonal to each other; an optical member that receives the split incident light rays from the beam splitter and optically converts the split incident light rays into a plurality of light beams that are respectively guided to mutually differing locations so as to generate interference fringes in the respective locations, each of the plurality of light beams including a component of the first linearly polarized light rays and a component of the second linearly polarized light rays; and a detector that detects the interference fringes respectively generated by the plurality of light beams.

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