MULTI-ELEMENT SUPER RESOLUTION OPTICAL INSPECTION SYSTEM

    公开(公告)号:US20230296517A1

    公开(公告)日:2023-09-21

    申请号:US18119189

    申请日:2023-03-08

    Abstract: A method is disclosed. The method may include generating a first optical image of a sample with a first inspection sub-system. The first optical image may be generated when a first set of photoluminescent markers are emitting photoluminescent illumination at a first time interval. The method may include generating additional optical images with an additional inspection sub-system. The additional optical images may be generated when additional photoluminescent markers are emitting photoluminescent illumination at additional time intervals. The method may include generating an accumulated optical image based on the first optical image and the additional optical images. The method may include determining a location of the photoluminescent markers based on the accumulated optical image. The method may include determining a pattern of the sample based on the determined location of the photoluminescent markers.

    Three-photon light sheet imaging
    64.
    发明授权

    公开(公告)号:US11762180B2

    公开(公告)日:2023-09-19

    申请号:US16622542

    申请日:2018-06-15

    Inventor: Kishan Dholakia

    Abstract: A light sheet imaging system, such as a light sheet microscope, comprises an illumination arrangement for generating a light sheet for three-photon excitation of a fluorescent sample, and a fluorescence collection arrangement for collecting fluorescence generated in the sample as a result of three-photon excitation by the light sheet. The light sheet may be a non-diffractive, propagation-invariant light sheet. The light sheet may be formed from and/or comprise a Bessel beam. A method of light sheet imaging comprises using a light sheet for three-photon excitation of a fluorescent sample, and collecting fluorescence generated in the sample as a result of three-photon excitation of the sample by the light sheet. Such a method may be used for light sheet microscopy.

    ENHANCED EVANESCENT PRISM COUPLING SYSTEMS AND METHODS FOR CHARACTERIZING STRESS IN CHEMICALLY STRENGTHENED CURVED PARTS

    公开(公告)号:US20230168186A1

    公开(公告)日:2023-06-01

    申请号:US18070022

    申请日:2022-11-28

    CPC classification number: G01N21/31 G01N2201/127 G01N2201/0634

    Abstract: Methods and apparatus for obtaining a corrected digital mode spectrum for a chemically strengthened (CS) substrate having a curved surface are disclosed. The methods include digitally capturing transverse magnetic (TM) and transverse electric (TE) mode spectra of the CS substrate to form a digital mode spectrum image using an evanescent prism coupling system having a system calibration for measuring flat CS substrates. The method further includes establishing a calibration correction based on the difference in the digitally captured TM and TE mode spectra as compared to a reference TM and TE mode spectra for a reference CS substrate. The calibration correction is applied to the digital mode spectrum image to form the corrected digital mode spectrum image, which can be processed using the system calibration for measuring flat CS substrates to determine a refractive index profile and stress characteristics for the curved CS substrate.

    Miniaturized imaging apparatus for wafer edge

    公开(公告)号:US09885671B2

    公开(公告)日:2018-02-06

    申请号:US14731861

    申请日:2015-06-05

    Inventor: Paul D. Horn

    Abstract: Disclosed are methods and apparatus for imaging a rounded edge of a sample, such as a wafer with a beveled edge. In one embodiment, the system includes a curved diffuser having an internal surface for positioning towards the rounded edge of the sample and an external surface opposite the internal surface and light sources for generating a plurality of illumination beams adjacent to a plurality of positions on the external surface of the diffuser so that the diffuser outputs uniform light onto the rounded edge of the sample at a wide range of incident angles. The system further includes a sensor for receiving light scattered from the rounded edge of the sample in response to the incident light and generating a detected signal for generating an image. These elements are partially or entirely integrated into a compact assembly.

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