公开(公告)号：US20130140458A1

公开(公告)日：2013-06-06

申请号：US13816601

申请日：2011-08-16

Applicant: Shohei Terada

Inventor： Shohei Terada

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/0216

Abstract: The present invention realizes a specimen holder for a charged-particle beam apparatus capable for moving at least one specimen support, and for obtaining the image of the transmission electron microscopy, or the like of all specimens arranged in the specimen holder with high spatial resolution. The retainer plates are put on the specimen supports after the specimen supports are set on the specimen stages at the end portion of the specimen holder respectively. Thereafter, the specimen supports and the retainer plates are fixed to the specimen stages. The vibration damping mechanism is arranged on the end portion side of the specimen holder. The vibration of the specimen support can be prevented or restricted by the condition that the vibration damping mechanism contacts to the specimen support. Accordingly, the transmission electron microscopy image can be obtained with high spatial resolution power.

Abstract translation: 本发明实现了用于移动至少一个样本支架的带电粒子束装置的样本保持器，并且用于获得以高空间分辨率布置在样本保持器中的所有样本的透射电子显微镜等的图像。 将样品支架分别放置在样品架端部的样品台上之后，将保持板放在样品支架上。 然后，将试样支架固定在试样台上。 振动阻尼机构设置在试样架的端部侧。 可以通过减振机构与试样支架接触的条件来防止或限制试样支架的振动。 因此，可以以高空间分辨率的功率获得透射电子显微镜图像。

公开(公告)号：US08436524B2

公开(公告)日：2013-05-07

申请号：US12597961

申请日：2008-05-13

Applicant: Yoshinori Terui ,  Ryozo Nonogaki

Inventor： Yoshinori Terui ,  Ryozo Nonogaki

IPC: H01J1/26 ,  H01J1/28

CPC classification number: H01J37/063 ,  H01J1/20 ,  H01J1/26 ,  H01J37/073 ,  H01J37/075 ,  H01J2237/0216 ,  H01J2237/06316

Abstract: Provided is an electron source which provides a stable electron beam even when vibration is applied from external to a device which uses the electron source. The electron source is provided with a needlelike chip (1) having an electron emitting section at one end; a cup-like component (6) bonded to the other end of the needlelike chip (1); and a filament (3) for heating the cup-like component (6). The filament (3) is arranged in a gap inside the cup-like component (6), in a noncontact state to the cup-like component (6).

Abstract translation: 提供了即使当从外部向使用电子源的装置施加振动时也提供稳定电子束的电子源。 电子源设置有在一端具有电子发射部分的针状芯片（1）; 结合到针状芯片（1）的另一端的杯状部件（6）; 以及用于加热杯状部件（6）的灯丝（3）。 灯丝（3）以与杯状部件（6）非接触状态配置在杯状部件（6）内的间隙内。

公开(公告)号：US20130082194A1

公开(公告)日：2013-04-04

申请号：US13703926

申请日：2011-06-03

Applicant: Daisuke Muto ,  Masanori Watanabe ,  Hiroshi Tsuji ,  Masaru Matsushima

Inventor： Daisuke Muto ,  Masanori Watanabe ,  Hiroshi Tsuji ,  Masaru Matsushima

IPC: G10K11/16 ,  G21K5/00

CPC classification number: G10K11/16 ,  G21K5/00 ,  H01J37/28 ,  H01J2237/0216

Abstract: A charged particle radiation device includes a sample chamber in which a sample stage adapted to mount a sample is installed, a charged particle radiation irradiation section adapted to irradiate the sample with a charged particle radiation to observe and fabricate the sample, sidewalls installed on a periphery of the sample chamber and the charged particle radiation irradiation section, a ceiling board installed on a plane located in an upper part of the sidewalls, and a sound absorbing structure section disposed below the ceiling board, and including a plurality of hole sections and a hollow section communicated with the hole sections. The sound absorbing structure section has an absorption band including a frequency band of a standing wave generated in a space surrounded by the sidewalls and the ceiling board. Further, a soundproof cover may include the sidewalls, ceiling board and sound absorbing structure.

Abstract translation: 带电粒子辐射装置包括：样品室，其中安装有用于安装样品的样品台;带电粒子辐射照射部分，适于用带电粒子辐射照射样品以观察和制造样品，安装在外围的侧壁 所述样品室和所述带电粒子辐射照射部分，安装在位于所述侧壁的上部的平面上的顶板和设置在所述顶板下方的吸声结构部分，并且包括多个孔部分和中空部 部分与孔部分连通。 吸声结构部分具有吸收带，该吸收带包括在由侧壁和天花板板围住的空间中产生的驻波的频带。 此外，隔音罩可以包括侧壁，天花板和吸音结构。

公开(公告)号：US08263943B2

公开(公告)日：2012-09-11

申请号：US13144620

申请日：2010-01-08

Applicant: Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

IPC: H01J49/10 ,  H01J37/28

CPC classification number: H01J37/08 ,  H01J27/26 ,  H01J37/15 ,  H01J2237/0216 ,  H01J2237/0807 ,  H01J2237/28

Abstract: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.

Abstract translation: 提供了一种具有气体电离电离离子源的离子束装置，其能够防止发射极尖端以非接触的方式振动。 气体电场离子源由用于产生离子的发射极尖端（21）组成; 发射极底座（64），用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极（24），其构造为围绕发射极尖端（21）; 以及用于将气体供给到发射极尖端附近的气体供给管（25）。 发射极基座和真空容器彼此磁性相互作用。

公开(公告)号：US20120091362A1

公开(公告)日：2012-04-19

申请号：US13378827

申请日：2010-06-03

Applicant: Hiroshi Tsuji ,  Kouji Ishiguro ,  Ichiro Tachibana ,  Naomasa Suzuki ,  Katsunori Onuki

Inventor： Hiroshi Tsuji ,  Kouji Ishiguro ,  Ichiro Tachibana ,  Naomasa Suzuki ,  Katsunori Onuki

IPC: H01J37/20

CPC classification number: F16F9/306 ,  H01J37/16 ,  H01J2237/0216

Abstract: Disclosed is a high resolution and high throughput charged particle radiation device that attenuates the natural vibration of an ion pump in a short time, excited by a reaction force at the time of driving the stage, and prevents occurrence of a loop of force and a loop of current. The charged particle radiation device includes a sample chamber (4) for disposing a sample (3) therein, a charged particle radiation optical lens tube (1) for irradiating the sample (3) with charged particle radiation (10), ion pumps (2a, 2b) for evacuating the charged particle radiation optical lens tube (1), a frame (16) fixedly attached to the sample chamber (4), the frame (16) facing one end of each of the ion pumps (2a, 2b), and vibration absorbers provided between the frame (16) and the one end of each of the ion pumps (2a, 2b), each of the vibration absorbers including a layered structure which includes a viscoelastic sheet (20a, 20b) sandwiched between metal plates (18a, 18b, 21a, 21b).

Abstract translation: 公开了一种高分辨率和高通量的带电粒子辐射装置，其在短时间内衰减离子泵的自然振动，由驱动载物台时的反作用力激发，并且防止发生力和环路的发生 的当前。 带电粒子辐射装置包括用于在其中设置样品（3）的样品室（4），用于用带电粒子辐射（10）照射样品（3）的带电粒子辐射光学透镜管（1），离子泵 ，2b），用于抽空带电粒子辐射光学透镜管（1），固定地附接到样品室（4）的框架（16），面向每个离子泵（2a，2b）的一端的框架（16） 和设置在框架（16）和每个离子泵（2a，2b）的一端之间的减振器，每个振动吸收器包括层压结构，其包括夹在金属板之间的粘弹性片（20a，20b） （18a，18b，21a，21b）。

公开(公告)号：US20120015303A1

公开(公告)日：2012-01-19

申请号：US13184066

申请日：2011-07-15

Applicant: Yoshihiro HIRATA ,  Toru YAMAZAKI

Inventor： Yoshihiro HIRATA ,  Toru YAMAZAKI

IPC: G03F7/20 ,  H01J3/26

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/24 ,  H01J2237/0216 ,  H01J2237/0437

Abstract: A drawing apparatus for drawing a pattern on a substrate with a plurality of charged-particle beams, includes a blanking aperture array including a plurality of apertures, a blanking unit including a plurality of blankers and configured to respectively deflect the plurality of charged-particle beams by the plurality of blankers to cause the blanking aperture array to block the respectively deflected plurality of charged-particle beams, a generating circuit configured to generate a blanking instruction in a serial format, and a serial transmission cable configured to transmit the blanking instruction generated by the generating circuit to the blanking unit, wherein the blanking unit is configured to convert the blanking instruction in the serial format, that has been received via the serial transmission cable, into a blanking instruction in a parallel format, and to drive the plurality of blankers based on the blanking instruction in the parallel format.

Abstract translation: 一种用于在多个带电粒子束的衬底上绘制图案的绘图装置包括一个包括多个孔的消隐孔阵列，一个消隐单元，包括多个消隐器，并且被配置为分别使多个带电粒子束 通过多个消隐器使消隐孔径阵列阻挡分别偏转的多个带电粒子束，生成电路，被配置为产生串行格式的消隐指令，串行传输电缆被配置为发送由 产生电路到消隐单元，其中消隐单元被配置为将已经通过串行传输电缆接收的串行格式的消隐指令转换为并行格式的消隐指令，并且驱动多个消隐器 基于并行格式的消隐指令。

公开(公告)号：US08020398B2

公开(公告)日：2011-09-20

申请号：US12243983

申请日：2008-10-02

Applicant: Roger B. Fish ,  Robert J. Mitchell

Inventor： Roger B. Fish ,  Robert J. Mitchell

IPC: C23F1/00

CPC classification number: H01L21/67213 ,  H01J37/20 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/0216 ,  H01J2237/2001 ,  H01L21/67109 ,  Y10T279/23

Abstract: The fluid delivery mechanism of the present disclosure provides a solution for use in a single axis of motion that allows the connection of one or more fluid flow paths over a wide range of temperatures into a vacuum environment. The mechanism does not employ flexible tubing that is prone to fatigue, especially at very low temperatures. In one embodiment, a tube is axially moved within a sealed piston to allow for fluid delivery. In a second embodiment, bellows are used to provide the required functionality. In another embodiment, it is possible to achieve movement in two or more axis of motion by utilizing two or more appropriately configured mechanisms.

Abstract translation: 本公开的流体输送机构提供了用于单个运动轴线的解决方案，其允许在宽范围的温度下将一个或多个流体流动路径连接到真空环境中。 该机构不使用容易疲劳的柔性管，特别是在非常低的温度下。 在一个实施例中，管在密封活塞内轴向移动以允许流体输送。 在第二实施例中，波纹管用于提供所需的功能。 在另一个实施例中，可以通过利用两个或更多个适当配置的机构实现两个或更多个运动轴的运动。

公开(公告)号：US20110101222A1

公开(公告)日：2011-05-05

申请号：US12609262

申请日：2009-10-30

Applicant: YOU-JIN WANG ,  CHUNG-SHIH PAN

Inventor： YOU-JIN WANG ,  CHUNG-SHIH PAN

IPC: G01N23/00 ,  G21K5/08 ,  G01B11/02

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/20235

Abstract: A stage configuration is provided, wherein a ceramic plate is used as the z-stage body to decrease the use of the metal plates in the conventional configuration, so that the compact structure of the z-stage may decrease the vibrational movements of the z-stage. Further, two Laser interferometer are used to detect a movement of different points along a vertical line of the z-stage sidewall to calculate a movement of the specimen surface, so that a horizontal movement of the specimen surface can be detected more accurately

Abstract translation: 提供了一种台架结构，其中使用陶瓷板作为z阶段本体以减少常规构造中金属板的使用，使得z阶段的紧凑结构可以减小z阶段的振动运动， 阶段。 此外，使用两个激光干涉仪来检测沿z级侧壁的垂直线的不同点的移动，以计算样品表面的移动，从而可以更精确地检测样品表面的水平移动

公开(公告)号：US20100237762A1

公开(公告)日：2010-09-23

申请号：US12680918

申请日：2008-10-03

Applicant: Ryozo Nonogaki ,  Yoshinori Terui

Inventor： Ryozo Nonogaki ,  Yoshinori Terui

IPC: H01J1/16

CPC classification number: H01J1/15 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/18 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0216 ,  H01J2237/06316 ,  H01J2237/26 ,  H01J2237/28

Abstract: Provided is an electron source which outputs a stable electron beam even when vibration is applied from the external to an apparatus which uses the electron source. The electron source is provided with an insulator (5); two conductive terminals (4) arranged at an interval on the insulator (5); a long filament (3) stretched between the conductive terminals (4); and a needle-like cathode (1) having an electron emitting section attached to the filament (3). The vertical cross-section shape of the filament (3) in the axis direction has a long direction and a short direction, and the maximum length in the long direction is 1.5 times or more but not more than 5 times the maximum length in the short direction.

Abstract translation: 提供了即使从外部向使用电子源的装置施加振动时也输出稳定的电子束的电子源。 电子源设有绝缘体（5）; 在绝缘体（5）上间隔布置的两个导电端子（4）; 在导电端子（4）之间延伸的长丝（3）; 和具有连接到灯丝（3）上的电子发射部分的针状阴极（1）。 灯丝（3）在轴向上的垂直截面形状具有长方向和短方向，并且长度方向上的最大长度是短时间内的最大长度的1.5倍以上但不大于5倍 方向。

公开(公告)号：US20090152462A1

公开(公告)日：2009-06-18

申请号：US12314553

申请日：2008-12-12

Applicant: Tohru Ishitani ,  Yoichi Ose ,  Hiroyasu Shichi ,  Shinichi Matsubara ,  Tomihiro Hashizume ,  Muneyuki Fukuda

Inventor： Tohru Ishitani ,  Yoichi Ose ,  Hiroyasu Shichi ,  Shinichi Matsubara ,  Tomihiro Hashizume ,  Muneyuki Fukuda

IPC: G01N23/00 ,  H01T23/00

CPC classification number: H01J37/285 ,  B82Y15/00 ,  H01J27/024 ,  H01J27/26 ,  H01J37/08 ,  H01J37/09 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/0458 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/0835 ,  H01J2237/1501 ,  H01J2237/188 ,  H01J2237/24514

Abstract: It is an object of the present invention to improve the stability of a gas field ionization ion source.A GFIS according to the present invention is characterized in that the aperture diameter of the extraction electrode can be set to any of at least two different values or the distance from the apex of the emitter to the extraction electrode can be set to any of at least two different values. In addition, solid nitrogen is used for cooling. According to the present invention, it is possible to not only let divergently emitted ions go through the aperture of the extraction electrode but also, in behalf of differential pumping, reduce the diameter of the aperture. In addition, it is possible to reduce the physical vibration of the cooling means. Consequently, it is possible to provide a highly stable GFIS and a scanning charged particle microscope equipped with such a GFIS.

Abstract translation: 本发明的目的是提高气田电离离子源的稳定性。 根据本发明的GFIS的特征在于，可以将引出电极的孔径设置为至少两个不同的值中的任一个，或者可以将发射极顶端到提取电极的距离设置为至少 两个不同的值。 此外，固体氮用于冷却。 根据本发明，不仅允许发散的离子通过提取电极的孔径，而且代表差分泵送也可以减小孔径。 此外，可以减少冷却装置的物理振动。 因此，可以提供具有这种GFIS的高度稳定的GFIS和扫描带电粒子显微镜。