Process for thermal separation of a solution
    68.
    发明授权
    Process for thermal separation of a solution 有权
    溶液热分离方法

    公开(公告)号:US09480933B2

    公开(公告)日:2016-11-01

    申请号:US14789665

    申请日:2015-07-01

    CPC classification number: B01D3/06 B01J3/008 B01J8/005 C08F6/12

    Abstract: A process for thermal separation of a solution comprised of a thermoplastic polymer and a solvent involves heating a solvent under pressure above a critical point of the solvent; decompressing the heated solvent in a first vessel, such that a polymer-rich and a low-polymer phase form; and supplying the polymer-rich phase to a second vessel. In embodiments, on entry into the second vessel, a pressure jump occurs, the pressure jump leading to a thermal flash in the second vessel such that a polymer part of the polymer-rich phase rises to at least 70%, and a resulting polymer-rich solution is provided.

    Abstract translation: 用于热分解由热塑性聚合物和溶剂组成的溶液的方法包括在高于溶剂的临界点的压力下加热溶剂; 在第一容器中减压加热的溶剂,使得富聚合物和低聚合物相形式; 并将富聚合物相提供给第二容器。 在实施方案中,在进入第二容器时,发生压力跳跃,压力跳跃导致第二容器中的热闪光,使得富聚合物相的聚合物部分上升至至少70%,并且得到的聚合物 - 提供丰富的解决方案。

    METHOD OF OUTGASSING A MASK MATERIAL DEPOSITED OVER A WORKPIECE IN A PROCESS TOOL
    70.
    发明申请
    METHOD OF OUTGASSING A MASK MATERIAL DEPOSITED OVER A WORKPIECE IN A PROCESS TOOL 有权
    在工艺工具中通过工件沉积掩模材料的方法

    公开(公告)号:US20160049313A1

    公开(公告)日:2016-02-18

    申请号:US14458220

    申请日:2014-08-12

    Abstract: Embodiments of the invention include methods and apparatuses for outgassing a workpiece prior to a plasma processing operation. An embodiment of the invention may comprise transferring a workpiece having a mask to an outgassing station that has one or more heating elements. The workpiece may then be heated to an outgassing temperature that causes moisture from the mask layer to be outgassed. After outgassing the workpiece, the workpiece may be transferred to a plasma processing chamber. In an additional embodiment, one or more outgassing stations may be located within a process tool that has a factory interface, a load lock coupled to the factory interface, a transfer chamber coupled to the load lock, and a plasma processing chamber coupled to the transfer chamber. According to an embodiment, an outgassing station may be located within any of the components of the process tool.

    Abstract translation: 本发明的实施例包括在等离子体处理操作之前使工件脱气的方法和装置。 本发明的实施例可以包括将具有掩模的工件传送到具有一个或多个加热元件的除气站。 然后可以将工件加热到使得来自掩模层的水分脱气的除气温度。 在对工件进行放气之后,可以将工件转移到等离子体处理室。 在另外的实施例中,一个或多个除气站可以位于处理工具内,该工具具有出厂界面,耦合到出厂界面的负载锁,耦合到负载锁的传送室以及耦合到传送的等离子体处理室 房间。 根据实施例,除气站可以位于处理工具的任何部件内。

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