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    Ion source element, ion implanter having the same and method of modifying the same
    72.
    发明授权
    Ion source element, ion implanter having the same and method of modifying the same 失效
    离子源元件，具有相同的离子注入机及其改性方法

    公开(公告)号：US07812320B2

    公开(公告)日：2010-10-12

    申请号：US11521534

    申请日：2006-09-15

    Applicant: Su-han Yun ,  Jong-hyun Yang ,  Do-in Bae ,  Seong-gu Kim

    Inventor： Su-han Yun ,  Jong-hyun Yang ,  Do-in Bae ,  Seong-gu Kim

    IPC: H01J27/00

    CPC classification number: H01J27/08 ,  H01J37/08 ,  H01J2237/082 ,  H01J2237/083 ,  H01J2237/31701

    Abstract: An ion source element, an ion implanter having the ion source element and a method of modifying the ion source element are provided. In the ion source element, a chamber may have a cavity divided into a plurality of inner sections configured substantially perpendicularly to an axis defined through centers of ends of the cavity. The larger inner sections may be at, or near, a center of the cavity and become smaller toward the ends of the cavity. A filament may be disposed at one end of the chamber to emit thermal electrons. A repeller may extend into the chamber through the other end of the chamber. An inlet may be formed in a first cavity wall to introduce gas having a dopant species into the chamber. A beam slit may be formed in a second cavity wall, opposite the inlet, of the chamber to extract an ionized species of the gas from the chamber.

    Abstract translation: 提供离子源元件，具有离子源元素的离子注入机和修改离子源元件的方法。 在离子源元件中，腔室可以具有被分成多个内部部分的空腔，该多个内部部分基本上垂直于通过腔的端部中心限定的轴线。 更大的内部部分可以在空腔的中心处或附近，并且朝向空腔的端部变小。 灯丝可以设置在室的一端以发射热电子。 排斥器可以通过腔室的另一端延伸到腔室中。 入口可以形成在第一空腔壁中以将具有掺杂剂物质的气体引入室中。 可以在室的与入口相对的第二空腔壁中形成梁狭缝，以从室提取气体的离子化物质。

    Gas-fed hollow cathode keeper and method of operating same
    73.
    发明授权
    Gas-fed hollow cathode keeper and method of operating same 有权
    供气空心阴极保持器及其运行方法

    公开(公告)号：US07791260B2

    公开(公告)日：2010-09-07

    申请号：US11828917

    申请日：2007-07-26

    Applicant: Alec Gallimore ,  Joshua Rovey

    Inventor： Alec Gallimore ,  Joshua Rovey

    IPC: F03H1/00

    CPC classification number: H01J27/08 ,  H01J27/022

    Abstract: A gas-fed hollow cathode keeper can reduce ion bombardment erosion by expelling gas through the keeper faceplate. The expelled gas effectively creates a high-pressure “shield” around the keeper such that bombarding ions suffer energy-reducing collisions before impacting the keeper. If the bombarding ion energy is reduced enough, the erosion is eliminated since sputtering is a threshold phenomenon.

    Abstract translation: 气体供给的中空阴极保持器可以通过将气体排出保持器面板来减少离子轰击腐蚀。 排出的气体有效地在保持器周围产生高压“屏蔽”，使得轰击离子在撞击保持器之前遭受减少能量的冲击。 如果轰击离子能量足够减少，则由于溅射是阈值现象，所以消除了侵蚀。

    HOT CATHODE AND ION SOURCE INCLUDING THE SAME
    76.
    发明申请
    HOT CATHODE AND ION SOURCE INCLUDING THE SAME 有权
    热阴极和离子源包括它

    公开(公告)号：US20100038556A1

    公开(公告)日：2010-02-18

    申请号：US12511660

    申请日：2009-07-29

    Applicant: Naoki Miyamoto

    Inventor： Naoki Miyamoto

    IPC: H01J27/00 ,  H01J9/02

    CPC classification number: H01J27/08 ,  H01J1/16 ,  H01J3/027 ,  H01J3/04 ,  H01J37/065 ,  H01J37/08 ,  H01J2237/06308

    Abstract: A hot cathode includes: a hollow external conductor; a hollow internal conductor which is placed coaxially inside the external conductor; and a connection conductor which electrically connects tip end portions of the conductors. A heating current is folded back through the connection conductor to flow in opposite directions in the external conductor and the internal conductor.

    Abstract translation: 热阴极包括：中空的外部导体; 中空的内部导体，同轴地放置在外部导体内部; 以及将导体的前端部电连接的连接导体。 加热电流通过连接导体折回，在外部导体和内部导体中沿相反方向流动。

    ION SOURCE ARC CHAMBER SEAL
    77.
    发明申请
    ION SOURCE ARC CHAMBER SEAL 有权
    离子源电弧室密封

    公开(公告)号：US20080230713A1

    公开(公告)日：2008-09-25

    申请号：US11689769

    申请日：2007-03-22

    Applicant: Yongzhang Huang ,  Neil K. Colvin ,  Kevin J. Hoyt

    Inventor： Yongzhang Huang ,  Neil K. Colvin ,  Kevin J. Hoyt

    IPC: H01J27/02

    CPC classification number: H01J27/08 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/0262 ,  H01J2237/061 ,  H01J2237/082 ,  H01J2237/166

    Abstract: An exemplary ion source for creating a stream of ions has a chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirectly heats a cathode to sufficient temperature to cause electrons to stream through the ionization region of the arc chamber. A seals has a ceramic body having an outer wall that abuts the arc chamber body along a circumferential outer lip. The seal also has one or more radially inner channels bounded by one or more inner walls spaced inwardly from the outer wall.

    Abstract translation: 用于产生离子流的示例性离子源具有至少部分地界定电弧室的电离区域的室主体。 电弧室主体与热丝电弧室壳体一起使用，其直接或间接地将阴极加热至足够的温度，以使电子流过电弧室的电离区域。 密封件具有陶瓷体，该陶瓷体具有沿着周向外唇缘邻接电弧室主体的外壁。 密封件还具有一个或多个径向内部通道，其由与外壁间隔开的一个或多个内壁限定。

    CHARGED PARTICLE BEAM APPARATUS, METHOD FOR CONTROLLING CHARGED PARTICLE, AND FREQUENCY ADJUSTMENT APPARATUS
    78.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS, METHOD FOR CONTROLLING CHARGED PARTICLE, AND FREQUENCY ADJUSTMENT APPARATUS 有权
    充电颗粒光束装置，控制充电颗粒的方法和频率调节装置

    公开(公告)号：US20080164820A1

    公开(公告)日：2008-07-10

    申请号：US11946170

    申请日：2007-11-28

    Applicant: Yusuke Osada ,  Tadahisa Shiono ,  Yutaka Yabe ,  Makoto Ito

    Inventor： Yusuke Osada ,  Tadahisa Shiono ,  Yutaka Yabe ,  Makoto Ito

    IPC: H05H1/00

    CPC classification number: H01J27/08 ,  H01J27/024

    Abstract: An ion gun 11 supplies an Ar gas into a main body 111 from a gas inlet 114, causes DC hot cathode discharge between a filament 113 and an anode 112 to generate Ar plasma. Next, a voltage gradient is applied to separated accelerator grids 116a, 116b having a bi-separated configuration in an ion ejecting direction. The each potential of the separated accelerator grids 116a, 116b is independently controlled by independently setting accelerator control switches 121a, 121b on or off to change the potential of that of the separated accelerator grids 116a, 116b which corresponds to an ion beam to be disabled.

    Abstract translation: 离子枪11从气体入口114将Ar气体供给到主体111中，使灯丝113和阳极112之间的直流热阴极放电产生Ar等离子体。 接下来，对离子喷射方向上具有双分离构造的分离的加速器栅极a1a，116b施加电压梯度。 通过独立地设置加速器控制开关121a，121b来分开地分离加速器栅极116a，116b的每个电位，以改变分离的加速器栅极116a，116b的电位，对应于 离子束被禁用。

    Cathode assembly for indirectly heated cathode ion source
    79.
    发明授权
    Cathode assembly for indirectly heated cathode ion source 有权
    用于间接加热的阴极离子源的阴极组件

    公开(公告)号：US07276847B2

    公开(公告)日：2007-10-02

    申请号：US09826274

    申请日：2001-04-04

    Applicant: Joseph C. Olson ,  Leo Klos ,  Anthony Renau ,  Nicholas A. Venuto

    Inventor： Joseph C. Olson ,  Leo Klos ,  Anthony Renau ,  Nicholas A. Venuto

    IPC: H01J29/46

    CPC classification number: H01J27/022 ,  H01J27/08

    Abstract: A cathode in an indirectly heated cathode ion source is supported by at least one rod or pin. The cathode is preferably in the form of a disk, and the support rod is smaller in diameter than the disk to limit thermal conduction and radiation. In one embodiment, the cathode is supported by a single rod at or near its center. The support rod may be held by a spring-action clamp for simple and reliable clamping and unclamping. The disk shaped cathode and the support rod may be fabricated as a single piece. A filament that emits electrons thermionically may be disposed around the rod in close proximity to the cathode.

    Abstract translation: 间接加热的阴极离子源中的阴极由至少一个杆或销支撑。 阴极优选为盘的形式，并且支撑杆的直径小于盘以限制热传导和辐射。 在一个实施例中，阴极由其中心处或附近的单个杆支撑。 支撑杆可以通过弹簧夹来保持，以简单可靠的夹紧和松开。 盘形阴极和支撑杆可以制成单件。 热电子发射电子的灯丝可以靠近阴极设置在杆周围。

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