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    MULTISPECTRAL CAMERA USING ZERO-MODE CHANNEL
    82.
    发明申请
    MULTISPECTRAL CAMERA USING ZERO-MODE CHANNEL 有权
    多通道摄像机使用零通道

    公开(公告)号：US20150156394A1

    公开(公告)日：2015-06-04

    申请号：US14096058

    申请日：2013-12-04

    Applicant: RAYTHEON CANADA LIMITED

    Inventor： Donald J. Denis

    IPC: H04N5/232 ,  G02B5/20 ,  G02B5/30

    CPC classification number: H04N5/23212 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/18 ,  G01J3/24 ,  G01J3/2823 ,  G01J3/447 ,  G01J2003/1213 ,  G01N21/4738 ,  G02B13/14 ,  G02B27/285

    Abstract: A multispectral imaging system and method in which the zero-mode channel is used to provide imaging of any of a variety of optical properties. In one example an imaging method includes spectrally dispersing received electromagnetic radiation into its spectral components with a dispersive element to produce spectrally dispersed electromagnetic radiation, transmitting the electromagnetic radiation through the dispersive element to produce non-dispersed electromagnetic radiation corresponding to a zero order diffraction mode of the dispersive element, imaging the non-dispersed electromagnetic radiation to produce a zero-mode image, and simultaneously imaging the spectrally dispersed electromagnetic radiation to produce a spectral image.

    Abstract translation: 一种多光谱成像系统和方法，其中零模式通道用于提供各种光学性质中的任何一种的成像。 在一个实例中，成像方法包括使用分散元件将接收的电磁辐射光谱分散到其光谱分量中以产生光谱分散的电磁辐射，将电磁辐射透射通过分散元件，以产生对应于零级衍射模式的非分散电磁辐射 色散元件，对非分散电磁辐射进行成像以产生零模式图像，并且同时对光谱分散的电磁辐射成像以产生光谱图像。

    Method for identifying a scene from multiple wavelength polarized images
    84.
    发明授权
    Method for identifying a scene from multiple wavelength polarized images 有权
    用于从多个波长偏振图像中识别场景的方法

    公开(公告)号：US08655017B2

    公开(公告)日：2014-02-18

    申请号：US13319077

    申请日：2010-05-03

    Applicant: Mehdi Alouini ,  Arnaud Beniere ,  Daniel Dolfi ,  Gérard Berginc ,  François Goudail

    Inventor： Mehdi Alouini ,  Arnaud Beniere ,  Daniel Dolfi ,  Gérard Berginc ,  François Goudail

    IPC: G06K9/62

    CPC classification number: G01N21/21 ,  G01J3/447 ,  G01J4/04

    Abstract: Techniques for identifying images of a scene including illuminating the scene with a beam of 3 or more wavelengths, polarized according to a determined direction; simultaneously acquiring for each wavelength an image X//(λi) polarized according to said direction and an image X⊥(λi) polarized according to a direction perpendicular to said direction, X⊥(λi) being spatially distinct from X//(λi); calculating for each wavelength an intensity image which is a linear combination of X//(λi) and X⊥(λi), providing an intensity spectrum for each pixel; calculating for each wavelength a polarization contrast image on the basis of an intensity ratio calculated as a function of X//(λi) and of X⊥(λi), providing a polarization contrast spectrum for each pixel; and calculating a spectro-polarimetric contrast image of the scene, each pixel of this spectro-polarimetric contrast image calculated based on the intensity spectrum and the contrast spectrum of the pixel considered.

    Abstract translation: 用于识别场景的图像的技术，包括用根据确定的方向极化的3个或更多波长的束照射场景; 同时获取根据所述方向偏振的图像X //（lambdai）和根据与所述方向垂直的方向偏振的图像X⊥（lambdai）的每个波长，X⊥（lambdai）在空间上不同于X //（lambdai ）; 为每个波长计算作为X //（lambdai）和X⊥（lambdai）的线性组合的强度图像，为每个像素提供强度谱; 基于作为X //（lambdai）和X⊥（lambdai）的函数计算的强度比，针对每个波长计算偏振对比图像，为每个像素提供偏振对比度光谱; 并计算场景的光谱偏振度对比度图像，基于所考虑的像素的强度光谱和对比度光谱计算该分光偏振对比度图像的每个像素。

    IMAGE MAPPED SPECTROPOLARIMETRY
    85.
    发明申请
    IMAGE MAPPED SPECTROPOLARIMETRY 有权
    图像映射分光光度计

    公开(公告)号：US20130321806A1

    公开(公告)日：2013-12-05

    申请号：US13992101

    申请日：2011-11-30

    Applicant: Robert T. Kester ,  Tomasz S. Tkaczyk

    Inventor： Robert T. Kester ,  Tomasz S. Tkaczyk

    IPC: G01J3/447

    CPC classification number: G01J3/447 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/2823 ,  G01J4/04

    Abstract: A method for imaging a sample, the method includes, during a single acquisition event, receiving a first polarization-encoded EM field for a first point and a second polarization-encoded EM field for a second point. The method further includes re-directing the first polarization-encoded EM field along a first pre-determined direction to a first location on a dispersing re-imager and the second polarization-encoded EM field along a second pre-determined direction to a second location on the dispersing re-imager. The method further includes spectrally dispersing the first polarization-encoded EM field to obtain a first spectrum, re-imaging the first spectrum onto a first location on a detector, spectrally dispersing the second polarization-encoded EM field to obtain a second spectrum, re-imaging the second spectrum onto a second location on the detector, and detecting the first re-imaged spectrum and the second re-imaged spectrum.

    Abstract translation: 一种用于对样本进行成像的方法，所述方法包括在单个采集事件期间，为第一点接收第一偏振编码的EM场，并为第二点接收第二极化编码的EM场。 该方法还包括将沿着第一预定方向的第一偏振编码的EM场重新定向到分散再成像器上的第一位置，并且将第二偏振编码的EM场沿第二预定方向重新定向到第二位置 在分散重建器上。 该方法还包括光谱分散第一偏振编码的EM场以获得第一光谱，将第一光谱重新成像到检测器上的第一位置上，频谱地分散第二偏振编码的EM场以获得第二光谱， 将第二光谱成像到检测器上的第二位置，以及检测第一重新成像光谱和第二重新成像光谱。

    Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry
    87.
    发明授权
    Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry 有权
    吹扫气体流量控制用于使用椭偏仪和反射计的高精度胶片测量

    公开(公告)号：US07755764B2

    公开(公告)日：2010-07-13

    申请号：US12019592

    申请日：2008-01-24

    Applicant: Hidong Kwak ,  Shankar Krishnan

    Inventor： Hidong Kwak ,  Shankar Krishnan

    IPC: G01N21/55

    CPC classification number: G01B11/0625 ,  G01B11/0633 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0294 ,  G01J3/447 ,  G01N21/211 ,  G01N21/33 ,  G01N2021/213 ,  G01N2201/0233

    Abstract: An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller. The purge gas source is configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller is configured to control a flow rate of the purged gas flow in response to an output signal from the detector.

    Abstract translation: 公开了一种用于在吹扫气体流动环境中使用宽带测量工具测量样品的特性的光学方法和系统。 在该方法中，用第一流量的吹扫气体吹扫计量工具的光束路径。 通过在紫外 - 可见（UV-Vis）范围内具有真空紫外（VUV）范围和/或至少一个波长分量的至少一个波长分量的源辐射束照射样品的表面。 当源辐射处于VUV光谱区域时进行的度量测量的第一流量和当源辐射处于UV-Vis光谱区域时进行度量测量的第二流量时，净化气体的流量被调节。 该系统包括光源，照明光学器件，收集光学器件，检测器，吹扫气体源和控制器。 吹扫气体源被配置为向光源和/或照明光学器件和/或样品和/或收集光学元件和/或检测器中的光束路径提供净化气体流。 控制器被配置为响应于来自检测器的输出信号来控制净化气体流量的流量。

    TUNABLE FILTER, LIGHT SOURCE APPARATUS, AND SPECTRAL DISTRIBUTION MEASURING APPARATUS
    88.
    发明申请
    TUNABLE FILTER, LIGHT SOURCE APPARATUS, AND SPECTRAL DISTRIBUTION MEASURING APPARATUS 有权
    电源滤光片，光源装置和光谱分布测量装置

    公开(公告)号：US20100141950A1

    公开(公告)日：2010-06-10

    申请号：US12627842

    申请日：2009-11-30

    Applicant: Atsushi Katsunuma

    Inventor： Atsushi Katsunuma

    IPC: G01N21/61 ,  G02F1/01

    CPC classification number: G01J3/02 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/32 ,  G01J3/447 ,  G01J2003/1213 ,  G01J2003/1282 ,  G01J2003/1286 ,  G02B27/0018 ,  G02B27/283 ,  G02F1/13 ,  G02F1/13363 ,  G02F1/29 ,  G02F2001/3528 ,  G02F2203/055 ,  G02F2203/06

    Abstract: Provided is a tunable filter including: a polarization splitter that splits input light into two linearly polarized light rays of mutually orthogonal vibration directions; a wavelength dispersion spectroscopic element that splits the two linearly polarized light rays split by the polarization splitter, into two spectral images having spatial spread in one direction, the two spectral images corresponding to the two linearly polarized light rays; and a reflective spatial modulator device that modulates and reflects linearly polarized light in each wavelength region for the two spectral images independently from each other, where modulated light reflected at the reflective spatial modulator device reenters the wavelength dispersion spectroscopic element and the polarization splitter, thereby splitting and outputting the modulated light, as output light in a wavelength region modulated by the reflective spatial modulator device and output light in a wavelength region not modulated, and input light and reentered light to the polarization splitter and input light and reentered light to the wavelength dispersion spectroscopic element are parallel light fluxes.

    Abstract translation: 提供一种可调滤波器，包括：偏振分离器，其将输入光分为两个相互正交的振动方向的线偏振光; 将由偏振光分离器分离的两个线偏振光分解成在一个方向上具有空间扩展的两个光谱图像的波长色散分光元件，对应于两个线偏振光的两个光谱图像; 以及反射空间调制器装置，其对于两个光谱图像彼此独立地调制和反射每个波长区域中的线偏振光，其中在反射空间调制器装置反射的调制光重新入射波长色散分光元件和偏振分离器，从而分裂 并输出调制光作为由反射空间调制装置调制的波长区域中的输出光，并输出未被调制的波长区域中的光，并将光和再入射光输入到偏振分束器，并输入光并重新入射到波长色散 分光元件是平行光通量。

    Spectrometric analyzing device and spectrometric analyzing method
    89.
    发明申请
    Spectrometric analyzing device and spectrometric analyzing method 有权
    光谱分析装置和光谱分析方法

    公开(公告)号：US20090316152A1

    公开(公告)日：2009-12-24

    申请号：US12310865

    申请日：2007-12-21

    Applicant: Takeshi Hasegawa

    Inventor： Takeshi Hasegawa

    IPC: G01N21/17

    CPC classification number: G01N21/21 ,  G01J3/447 ,  G01N21/31 ,  G01N21/8422

    Abstract: A spectrometric analyzing device is capable of analyzing a thin film with high accuracy by using light having an arbitrary wavelength, such as not only infrared light but also visible light, ultraviolet light and X-ray, and using whatever refractive index of a supporting member of the thin film. A spectrometric analyzing device comprises a light source (1), a polarizing filter (2), a detection unit (3), a regression operation unit (4) and an absorbance spectrum calculation unit (5). The light source (1) emits light at n different angles of incidence (θn) to a measurement portion. The polarizing filter (2) shields an s-polarized component. The detection unit (3) detects transmitted spectra (S). The regression operation unit (4) uses the transmitted spectra (S) and a mixing ratio (R) to obtain an in-plane mode spectrum (sip) and an out-of-plane mode spectrum (sop) through a regression analysis. The absorbance spectrum calculation unit (5) calculates an in-plane mode absorbance spectrum (Aip) and an out-of-plane mode absorbance spectrum (Aop) of the thin film, based on the results from a state in which the thin film is on the supporting member and a state in which no thin film is on the supporting member.

    Abstract translation: 光谱分析装置能够通过使用具有任意波长的光，例如不仅具有红外光，还包括可见光，紫外光和X射线，并且使用任何波长的光的任何折射率，能够高精度地分析薄膜 薄膜。 光谱分析装置包括光源（1），偏振滤光器（2），检测单元（3），回归运算单元（4）和吸收光谱计算单元（5）。 光源（1）将n个不同入射角（thetan）的光发射到测量部分。 偏振滤光器（2）屏蔽s偏振分量。 检测单元（3）检测发送光谱（S）。 回归运算单元（4）使用透射光谱（S）和混合比（R），通过回归分析获得平面内模式谱（sip）和平面外模式谱（sop）。 吸光度光谱计算单元（5）根据薄膜为（1）的状态的结果，计算出薄膜的面内模式吸收光谱（Aip）和平面外模式吸收光谱（Aop） 在支撑构件上并且在支撑构件上没有薄膜的状态。

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