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    Method and handling apparatus for placing patterning device on support member for charged particle beam imaging
    82.
    发明授权
    Method and handling apparatus for placing patterning device on support member for charged particle beam imaging 有权
    用于将图案形成装置放置在用于带电粒子束成像的支撑构件上的方法和处理装置

    公开(公告)号：US07868303B2

    公开(公告)日：2011-01-11

    申请号：US12249640

    申请日：2008-10-10

    Applicant: You-Jin Wang ,  Hsuan-Bin Huang ,  Chung-Shih Pan

    Inventor： You-Jin Wang ,  Hsuan-Bin Huang ,  Chung-Shih Pan

    IPC: G01J1/00 ,  G01N21/00 ,  G01N23/00

    CPC classification number: H01L21/68707 ,  H01J2237/204

    Abstract: A patterning device handling apparatus for use in charged particle beam imaging is disclosed. The disclosed patterning device handling apparatus comprises a first gripping member and a second gripping member. The first gripping member is equipped with a plurality of first positioning projections, and the second gripping member is equipped with a plurality of second positioning projections. When the patterning device is held at one angle, the first positioning projections abut against one edge of the patterning device and the second positioning projections abut against the opposite edge of the patterning device. When the patterning device is held at another angle, the first positioning projections abut against two neighboring edges of the patterning device, and the second positioning projections abut against the other two neighboring edges of the patterning device. Therefore, the disclosed patterning device handling apparatus can hold the pattering device at different angles.

    Abstract translation: 公开了一种用于带电粒子束成像的图案形成装置处理装置。 所公开的图案形成装置处理装置包括第一夹持构件和第二夹持构件。 第一夹持构件配备有多个第一定位突起，并且第二夹持构件配备有多个第二定位突起。 当图案形成装置保持一角度时，第一定位突起抵靠图案形成装置的一个边缘，并且第二定位突起抵靠图案形成装置的相对边缘。 当图案形成装置保持在另一个角度时，第一定位突起邻接图案形成装置的两个相邻边缘，并且第二定位突起抵靠图案形成装置的另外两个相邻的边缘。 因此，所公开的图案形成装置处理装置可以以不同的角度保持图案装置。

    Compact Scanning Electron Microscope
    85.
    发明申请
    Compact Scanning Electron Microscope 有权
    紧凑型扫描电子显微镜

    公开(公告)号：US20100276592A1

    公开(公告)日：2010-11-04

    申请号：US12303715

    申请日：2007-04-26

    Applicant: Johannes Antonius Hendricus Wilhelmus Gerardus Persoon ,  Andreas Theodorus Engelen ,  Siegfried Lichtenegger ,  Petrus Henricus Joannes Van Dooren

    Inventor： Johannes Antonius Hendricus Wilhelmus Gerardus Persoon ,  Andreas Theodorus Engelen ,  Siegfried Lichtenegger ,  Petrus Henricus Joannes Van Dooren

    IPC: F16C29/02 ,  H01J37/28 ,  H01J37/08 ,  H01J37/18 ,  H01J5/02 ,  H01J27/02

    CPC classification number: H01J37/28 ,  H01J37/185 ,  H01J37/20 ,  H01J2237/166 ,  H01J2237/184 ,  H01J2237/2006 ,  H01J2237/204

    Abstract: A slider bearing for use with an apparatus comprising a vacuum chamber (11). The slider bearing comprises: a base plate (20) in contact with the vacuum chamber (11) at one side, said base plate showing a first through-hole (21) in contact with the vacuum chamber (11), a second plate (30), one side of the second plate in contact with the base plate (20), said second plate showing a second through-hole (31), the faces of the base plate and the second plate facing each other being sufficiently smooth to form a non-elastomeric vacuum seal, said base plate (20) and said second plate (30) slidable between a first relative position in which the first through-hole (21) and the second through-hole (31) do not overlap and a second relative position in which the first through-hole and the second through-hole overlap, characterised in that the second plate (30) is a flexible plate, the face of the flexible plate opposite to the base plate is equipped to seal against a cup (50), the cup equipped to hold a sample (1), the first through-hole (21) in the base plate shows a rim facing the flexible plate (30) with a controlled curvature, the curvature of the rim formed such that the vacuum seal between the base plate and the flexible plate forms on a pre-defined contour and that the Hertzian contact pressure is smaller than a pre-defined maximum contact pressure, the pre-determined maximum contact pressure chosen to minimise particle generation. By forming the second plate as a flexible plate the pressure with which the base plate and the second plate are pressed together is better reproducible than when both plates are rigid. By forming the rim with a controlled radius, the particle generation is minimized.

    Abstract translation: 一种用于与包括真空室（11）的设备一起使用的滑块轴承。 滑动轴承包括：在一侧与真空室（11）接触的基板（20），所述基板显示与真空室（11）接触的第一通孔（21），第二板 30），与所述基板（20）接触的所述第二板的一侧，所述第二板表示第二通孔（31），所述基板和所述第二板的面彼此相对平滑以形成 非弹性真空密封件，所述基板（20）和所述第二板（30）可在其中第一通孔（21）和第二通孔（31）不重叠的第一相对位置和第二通孔 第二相对位置，其中第一通孔和第二通孔重叠，其特征在于，第二板（30）是柔性板，与基板相对的柔性板的表面被装备以密封杯 （50），装备有样品（1）的杯子，底板中的第一通孔（21） 面对具有受控曲率的柔性板（30），边缘的曲率形成为使得基板和柔性板之间的真空密封形成预定义的轮廓，并且赫兹接触压力小于预定值， 定义的最大接触压力，所选择的预定最大接触压力以最小化颗粒产生。 通过将第二板形成为柔性板，将基板和第二板压在一起的压力比两个板刚性时的压力更好。 通过以受控的半径形成轮辋，使颗粒的产生最小化。

    Sample transfer unit and sample transferring method
    87.
    发明授权
    Sample transfer unit and sample transferring method 失效
    样品转印单元和样品转印方法

    公开(公告)号：US07737416B2

    公开(公告)日：2010-06-15

    申请号：US12038179

    申请日：2008-02-27

    Applicant: Takashi Gunji ,  Hidetoshi Sato ,  Katsuya Kawakami ,  Hideki Yatabe

    Inventor： Takashi Gunji ,  Hidetoshi Sato ,  Katsuya Kawakami ,  Hideki Yatabe

    IPC: G01B15/00 ,  H01L21/677

    CPC classification number: H01L21/67769 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L21/67236 ,  H01L21/67259 ,  H01L21/67742

    Abstract: There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.

    Abstract translation: 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。

    ION IMPLANTATION APPARATUS, SUBSTRATE CLAMPING MECHANISM, AND ION IMPLANTATION METHOD
    88.
    发明申请
    ION IMPLANTATION APPARATUS, SUBSTRATE CLAMPING MECHANISM, AND ION IMPLANTATION METHOD 有权
    离子植入装置，基板夹紧机构和离子植入方法

    公开(公告)号：US20100133449A1

    公开(公告)日：2010-06-03

    申请号：US12702779

    申请日：2010-02-09

    Applicant: Hidenori Takahashi

    Inventor： Hidenori Takahashi

    IPC: H01J37/20 ,  H01J37/08

    CPC classification number: H01J37/3171 ,  H01J37/20 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/31701 ,  H01L21/68728 ,  H01L21/68771

    Abstract: Provided is an ion implantation apparatus including a disk which rotates about a first axis, a pad which is rotatable about a second axis on the disk, and on which a substrate is placed with a holder attached to a circumference of the substrate, the holder including a weight, fixing pins which are each fixedly provided on a portion on the disk around the pad, a sliding piece which slides, by its own centrifugal force, on the disk with a rotational movement of the disk and thereby clamps the holder in cooperation with the fixing pins, and an ion beam generator which irradiates the substrate with ion beams.

    Abstract translation: 本发明提供了一种离子注入装置，其包括围绕第一轴线旋转的盘，可绕盘的第二轴线旋转的衬垫，并且其上放置基板并具有附接到衬底周围的保持器，所述保持器包括 一个重量，固定销固定地设置在盘周围的盘上的一部分上，滑块通过其自身的离心力在盘的旋转运动下滑动在盘上，从而与支架配合地夹持支架 固定销以及用离子束照射基板的离子束发生器。

    Position measuring apparatus and positional deviation measuring method
    89.
    发明授权
    Position measuring apparatus and positional deviation measuring method 有权
    位置测量装置和位置偏差测量方法

    公开(公告)号：US07643130B2

    公开(公告)日：2010-01-05

    申请号：US11555397

    申请日：2006-11-01

    Applicant: Shusuke Yoshitake ,  Shuichi Tamamushi

    Inventor： Shusuke Yoshitake ,  Shuichi Tamamushi

    IPC: G03B27/62

    CPC classification number: G03F7/70783 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/84 ,  G03F7/707 ,  G03F7/70708 ,  H01J37/3174 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2817 ,  H01J2237/31776 ,  H01L21/6838

    Abstract: A position measuring apparatus includes a holder having storage spaces in which a three-point support member for supporting a backside of a substrate being a mask at three points, and a vacuum chuck member for holding a backside of a substrate being a mask are prepared, a stage on which one of the three-point support member and the vacuum chuck member prepared in the storage spaces of the holder is mounted, a vacuum pump to hold and chuck the substrate through the vacuum chuck member in a state of being mounted on the stage, and a recognition unit to recognize a position of a pattern written on the substrate supported by the three-point support member mounted on the stage and a position of a pattern written on the substrate held by the vacuum chuck member on the stage.

    Abstract translation: 一种位置测量装置包括一个具有存放空间的保持架，其中三点支撑构件用于支撑三点处的掩模的基板的背面，以及用于保持作为掩模的基板的背面的真空卡盘构件， 安装在保持架的储存空间中的三点支撑构件和真空吸盘构件中的一个安装在其上的阶段，通过真空吸盘构件在安装在保持器的状态下保持和夹持基板的真空泵 阶段和识别单元，以识别写在由安装在舞台上的三点支撑构件支撑的基底上的图案的位置和写在由真空吸盘构件保持的基板上的图案的位置。

    Systems and methods of identifying biomarkers for subsequent screening and monitoring of diseases
    90.
    发明授权
    Systems and methods of identifying biomarkers for subsequent screening and monitoring of diseases 失效
    识别生物标志物用于随后筛选和监测疾病的系统和方法

    公开(公告)号：US07507533B2

    公开(公告)日：2009-03-24

    申请号：US11232597

    申请日：2005-09-22

    Applicant: Arijit Bose ,  Nazneen Aziz

    Inventor： Arijit Bose ,  Nazneen Aziz

    IPC: C12Q1/00

    CPC classification number: G01N1/42 ,  B01L3/022 ,  G01N21/6428 ,  G01N21/6456 ,  G01N33/68 ,  G01N2001/2873 ,  H01J2237/2001 ,  H01J2237/204

    Abstract: A system for generating an image of ultrastructural biomarkers from a biological sample is provided. The system includes a grid onto which a sample to be imaged may be placed and a cryogenic reservoir into which the grid and sample may be immersed for vitrification of the sample. The system also includes a stage onto which the grid and sample may be situated for subsequent imaging in a high contrast imager to permit identification of ultrastructural biomarkers therein. A method for generating an image of ultrastructural biomarkers from a biological sample is also provided. The generated image of ultrastructural biomarkers may be used subsequently for screening and monitoring diseases, evaluating drug and therapeutic efficacy, and assessing risks associated with a drug or therapeutic candidate, among other things.

    Abstract translation: 提供了一种用于从生物样品生成超微结构生物标志物的图像的系统。 该系统包括可以放置要成像的样品的栅格和可以将栅格和样品浸入其中的低温储存器，用于玻璃化样品。 该系统还包括一个阶段，栅格和样本可以位于该阶段，用于在高对比度成像仪中随后成像，以允许在其中识别超微结构生物标志物。 还提供了用于从生物样品生成超微结构生物标志物的图像的方法。 生成的超微结构生物标志物的图像可以随后用于筛选和监测疾病，评估药物和治疗功效，以及评估与药物或治疗候选物相关的风险等。

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