公开(公告)号：US20150002651A1

公开(公告)日：2015-01-01

申请号：US14377127

申请日：2013-02-20

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Kumiko Shimizu ,  Hajime Kawano

IPC: H01J37/22 ,  H01J37/28

CPC classification number: H01J37/222 ,  G01B7/02 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2803

Abstract: The image processing device has: a scanning direction decision unit which divides an captured image into a plurality of scanning regions and deciding a scanning direction of each scanning region based on a pattern edge captured in each scanning region in the captured image, a scanning order decision unit which performs a raster scan per pixel constituting each scanning region such that the scanning direction of each of the decided scanning region is directed to a horizontal direction of the raster scan, and a scanning image acquisition unit which acquires a scanning image by capturing each scanning region by the scanning-electron-microscope based on the decided scanning order.

Abstract translation: 图像处理装置具有：扫描方向判定单元，其将拍摄图像分割成多个扫描区域，并且基于捕获图像中的每个扫描区域中捕获的图案边缘来确定每个扫描区域的扫描方向，扫描顺序决定 单元，其对构成每个扫描区域的每个像素执行光栅扫描，使得所确定的每个扫描区域的扫描方向指向光栅扫描的水平方向;扫描图像获取单元，通过捕获每个扫描获取扫描图像 通过扫描电子显微镜基于所决定的扫描顺序。

公开(公告)号：US08907279B2

公开(公告)日：2014-12-09

申请号：US14123744

申请日：2012-05-24

Applicant: Natsuki Tsuno ,  Hideyuki Kazumi ,  Yuzuru Mochizuki ,  Takafumi Miwa ,  Yoshinobu Kimura ,  Toshiyuki Yokosuka

Inventor： Natsuki Tsuno ,  Hideyuki Kazumi ,  Yuzuru Mochizuki ,  Takafumi Miwa ,  Yoshinobu Kimura ,  Toshiyuki Yokosuka

IPC: H01J37/26 ,  G01B15/04 ,  H01J37/28

CPC classification number: H01J37/265 ,  G01B15/04 ,  H01J37/28 ,  H01J2237/24585 ,  H01J2237/2803

Abstract: The present invention is characterized by an electron microscope which intermittently applies an electron beam to a sample and detects a secondary electron signal, wherein an arbitrarily defined detection time (T2) shorter than the pulse width (Tp) of the applied electron beam is selected, and a secondary electron image is formed using the secondary electron signal acquired during the detection time. Consequently, it is possible to reflect necessary sample information including the internal structure and laminated interface of the sample in the contrast of an image and prevent unnecessary information from being superimposed on the image, thereby making it possible to obtain the secondary electron image with improved sample information selectivity and image quality.

Abstract translation: 本发明的特征在于电子显微镜，其间断地向样品施加电子束并检测二次电子信号，其中选择比所施加的电子束的脉冲宽度（Tp）短的任意定义的检测时间（T2） 并且使用在检测时间期间获取的二次电子信号形成二次电子图像。 因此，可以在图像的对比度中反映包括样本的内部结构和层叠界面的必要样本信息，并且防止不必要的信息被叠加在图像上，从而可以获得具有改进的样本的二次电子图像 信息选择性和图像质量。

公开(公告)号：US08791436B1

公开(公告)日：2014-07-29

申请号：US13869749

申请日：2013-04-24

Applicant: Chris Pawlowicz ,  Alexander Sorkin ,  Michael W. Phaneuf ,  Alexander Krechmer ,  Ken G. Lagarec

Inventor： Chris Pawlowicz ,  Alexander Sorkin ,  Michael W. Phaneuf ,  Alexander Krechmer ,  Ken G. Lagarec

IPC: G21G5/00 ,  H01J37/26

CPC classification number: G01N23/2255 ,  G01R31/303 ,  H01J37/222 ,  H01J2237/24564 ,  H01J2237/24585 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/31749 ,  H01L22/12

Abstract: Methods and systems for tracing circuitry on integrated circuits using focused ion beam based imaging techniques. A first component or node on an integrated circuit is coupled to a second component or node on the same integrated circuit. After an external bias is applied to the first component or node, a focused ion beam is applied to the integrated circuit and an image is taken using an electron detector. The features or components on the integrated circuit which are coupled to the second component or node will show up in high contrast on the resulting image. The method may also involve applying a bias to a node or component and then using focused ion beam imaging techniques (through an electron detector) to arrive at an image of the integrated circuit. Components coupled to the node will appear in high contrast in the resulting image.

Abstract translation: 使用聚焦离子束成像技术在集成电路上跟踪电路的方法和系统。 集成电路上的第一组件或节点耦合到同一集成电路上的第二组件或节点。 在将外部偏压施加到第一部件或节点之后，将聚焦离子束施加到集成电路，并且使用电子检测器拍摄图像。 耦合到第二组件或节点的集成电路上的特征或组件将在所得到的图像上呈现高对比度。 该方法还可以包括向节点或部件施加偏压，然后使用聚焦离子束成像技术（通过电子检测器）来获得集成电路的图像。 耦合到节点的组件将在所得到的图像中以高对比度出现。

公开(公告)号：US20130301954A1

公开(公告)日：2013-11-14

申请号：US13980481

申请日：2012-01-19

Applicant: Masumi Shirai ,  Osamu Komuro

Inventor： Masumi Shirai ,  Osamu Komuro

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/24528 ,  H01J2237/24578 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/2817 ,  H01J2237/2826

Abstract: In a scanning electron microscope, if a failure is caused to occur in a SEM image by the influence of a disturbance such as magnetic field or vibration inside and from outside the device, the cause is identified simply and accurately using this SEM image. There is provided a measurement technique whose measurement accuracy is not influenced by a roughness of SEM image pattern. A one-dimensional scanning is performed in a scanning-line direction (X direction) by setting the Y-direction scanning gain at zero at the time of acquiring the SEM image, and a two-dimensional image is created by arranging image information, which is obtained by the scanning, in a time-series manner in the Y direction. A shift-amount data on the two-dimensional image is acquired using a correlation function, and the magnetic field or vibration included within the SEM image is measured by a frequency analysis of the data.

Abstract translation: 在扫描电子显微镜中，如果通过诸如磁场或设备内部和外部的振动的干扰的影响在SEM图像中发生故障，则使用该SEM图像简单且准确地识别原因。 提供了测量精度不受SEM图像粗糙度影响的测量技术。 通过在获取SEM图像时将Y方向扫描增益设定为零，在扫描线方向（X方向）上进行一维扫描，并且通过布置图像信息来创建二维图像，其中 通过在Y方向上以时间序列方式进行扫描获得。 使用相关函数获取关于二维图像的偏移量数据，并且通过数据的频率分析来测量包括在SEM图像内的磁场或振动。

公开(公告)号：US20120193530A1

公开(公告)日：2012-08-02

申请号：US13017016

申请日：2011-01-30

Applicant: N. William Parker ,  Mark W. Utlaut

Inventor： N. William Parker ,  Mark W. Utlaut

IPC: G01N23/225 ,  G01N23/00

CPC classification number: G01N21/6428 ,  G01N21/6458 ,  G01N21/6486 ,  G01N23/225 ,  H01J37/228 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/206 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2803 ,  H01J2237/2857

Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.

Abstract translation: 公开了用于生物样品中荧光标记如荧光蛋白或量子点的成像和定位的方法和系统。 使用重组遗传学技术将“记者”基因插入许多物种已经很成熟。 特别地，绿色荧光蛋白（GFP）及其从蓝色到黄色的遗传修饰的变体易于在感兴趣的基因（GoI）的位点处接合到许多基因组中，其中GFP表达对功能没有明显的影响 的由GoI编码的感兴趣的蛋白质（PoI）。 生物学家的一个目标是更精确地定位细胞内的PoI。 本发明是一种方法和系统，用于使得能够使用带电粒子束对GFP的损伤进行更快速和精确的PoI定位。 提出了用于实现该方法的系统的多个实施例，以及相对不受高统计噪声水平影响的图像处理方法。

公开(公告)号：US20110210249A1

公开(公告)日：2011-09-01

申请号：US13036757

申请日：2011-02-28

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: H01J37/26

CPC classification number: H01J37/26 ,  H01J2237/0492 ,  H01J2237/05 ,  H01J2237/24475 ,  H01J2237/24495 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: A transmission electron microscope in which a sample is positioned in a sample plane 9b comprises an objective lens 11b, a first projection lens system 61b having plural lenses, a second projection lens 63b system having plural lenses, and an analyzing system.The sample plane 9b is imaged into an intermediate image plane 71, a diffraction plane 15b of the objective lens 11b is imaged into an intermediate diffraction plane 67b, and either a) the intermediate image plane is imaged into an entrance image plane of the analyzing system and the intermediate diffraction plane is imaged into an entrance pupil plane of the analyzing system, or b) the intermediate image plane 71 is imaged into the entrance pupil plane 65b and the intermediate diffraction plane 67b is imaged into the entrance image plane 21b.

Abstract translation: 样品位于样品平面9b中的透射电子显微镜包括物镜11b，具有多个透镜的第一投影透镜系统61b，具有多个透镜的第二投影透镜63b系统和分析系统。 将样品平面9b成像为中间像面71，将物镜11b的衍射面15b成像为中间衍射面67b，将中间像平面成像为分析系统的入射像面 中间衍射面成像为分析系统的入射光瞳面，或者b）将中间像面71成像为入射光瞳面65b，将中间衍射面67b成像为入射像面21b。

公开(公告)号：US20110147609A1

公开(公告)日：2011-06-23

申请号：US12995700

申请日：2009-03-30

Applicant: Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Masahiro Yamaoka ,  Noriaki Arai

Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Masahiro Yamaoka ,  Noriaki Arai

IPC: H01J3/04

CPC classification number: H01J27/26 ,  H01J27/022 ,  H01J37/023 ,  H01J37/067 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/2803

Abstract: An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.

Abstract translation: 根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15） 构造成围绕发射器尖端（21），以及气体供应管（25）。 引出电极（24）的中心轴线与离​​子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座 （64）相对于所述电离室（15）的中心轴线是可倾斜的。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

公开(公告)号：US20100202672A1

公开(公告)日：2010-08-12

申请号：US12602248

申请日：2008-04-23

Applicant: John Charles Sinclair ,  Martin Edward Mäntylä Noble

Inventor： John Charles Sinclair ,  Martin Edward Mäntylä Noble

IPC: G06K9/62 ,  C07K14/00 ,  C40B40/04 ,  C07H21/00 ,  C12N15/74 ,  C12N5/10 ,  G01N23/00 ,  G01N23/207

CPC classification number: H01J37/222 ,  C07K14/001 ,  C07K14/24 ,  C07K14/36 ,  C07K14/47 ,  C07K14/7151 ,  C07K19/00 ,  C07K2319/00 ,  G01N33/6803 ,  H01J37/20 ,  H01J37/261 ,  H01J37/295 ,  H01J2237/201 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: Protein layers (1) repeating regularly in two dimensions comprise protein protomers (2) which each comprise at least two monomers (5), (6) genetically fused together. The monomers (5), (6) are monomers of respective oligomer assemblies (3), (4) into which the monomers are assembled to assembly of the protein layer. The first oligomer assembly (3) belongs to a dihedral point group of order O, where O equals (3), (4) or (6) and has a set of O rotational symmetry axes of order (2). The second oligomer assembly (4) has a rotational symmetry axis of order (2). Due to the symmetry of the oligomer assemblies (3), (4), the rotational symmetry axes of each second oligomer assembly (4) is aligned with one of said set of O rotational symmetry axes of a first oligomer assembly (3) with (2) protomers being arranged symmetrically therearound. Thus, an 2-fold fusion between the oligomer assemblies (3), (4) is produced and the arrangements of the rotational symmetry axes of the oligomer assemblies (3), (4) cause the protein layer to repeat regularly. The protein layer has many uses, for example to support molecular entities for biosensing, x-ray crystallography or electron microscopy.

Abstract translation: 在二维中规则重复的蛋白质层（1）包含蛋白质反转录剂（2），其每个包含至少两个基因融合在一起的单体（5），（6）。 单体（5），（6）是各自的低聚物组件（3），（4）的单体，其中单体组装成蛋白质层的组装。 第一低聚物组件（3）属于阶数为O的二面点组，其中O等于（3），（4）或（6），并具有一组O旋转对称轴（2）。 第二低聚物组件（4）具有顺序（2）的旋转对称轴。 由于低聚物组件（3），（4）的对称性，每个第二低聚物组件（4）的旋转对称轴线与第一低聚物组件（3）的所述一组O旋转对称轴线之一与（ 2）检测器在其周围对称布置。 因此，产生低聚物组件（3），（4）之间的2倍融合，并且低聚物组件（3），（4）的旋转对称轴的布置导致蛋白质层定期重复。 蛋白质层具有许多用途，例如用于支持用于生物传感，X射线晶体学或电子显微镜的分子实体。

公开(公告)号：US07429733B2

公开(公告)日：2008-09-30

申请号：US11323405

申请日：2005-12-29

Applicant: Michael B. Schmidt ,  Tracy D. Myers

Inventor： Michael B. Schmidt ,  Tracy D. Myers

IPC: H01J37/28

CPC classification number: G01N23/225 ,  G01N1/32 ,  H01J2237/2802 ,  H01J2237/2803 ,  H01J2237/31745 ,  H01L22/24

Abstract: A method and sample for radiation microscopy include a sample source that includes an area of interest, an outer side of a sample formed in the sample source adjacent to the area of interest, an inner side of the sample formed inside the sample source wherein at least a portion of the area of interest is included between the inner side of the sample and the outer side, and a particle beam channel formed inside the sample source for conducting a particle beam to or from the inner side of the sample.

Abstract translation: 用于放射线显微镜的方法和样品包括包含感兴趣区域的样品源，在与源区域相邻的样品源中形成的样品的外侧，在样品源内部形成的样品的内侧，其中至少 感兴趣区域的一部分被包括在样品的内侧和外侧之间，并且形成在样品源内部的用于将粒子束传导到样品的内侧或从样品的内侧的粒子束通道。

公开(公告)号：US20070221845A1

公开(公告)日：2007-09-27

申请号：US11723579

申请日：2007-03-21

Applicant: Osamu Komuro ,  Osamu Nasu

Inventor： Osamu Komuro ,  Osamu Nasu

IPC: G21K7/00

CPC classification number: H01J37/268 ,  H01J2237/047 ,  H01J2237/2008 ,  H01J2237/2803

Abstract: A charged particle beam system wherein the output of the secondary electron detector is detected while the retarding voltage is varied between the values for which the secondary electrons do not reach the sample and the values for which the secondary electrons reach the sample, and the surface potential of the sample is determined on the basis of the relationship between the retarding voltage and the detected output of the secondary electron detector.

Abstract translation: 一种带电粒子束系统，其中在二次电子未到达样品的值和二次电子到达样品的值之间改变延迟电压并检测二次电子检测器的输出，并且表面电位 基于延迟电压与二次电子检测器的检测输出之间的关系来确定样品。