公开(公告)号：US11742176B2

公开(公告)日：2023-08-29

申请号：US17536288

申请日：2021-11-29

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yoshiki Oyama

IPC: H01J37/28 ,  H01J37/10 ,  H01J37/26 ,  H01J37/147

CPC classification number: H01J37/28 ,  H01J37/10 ,  H01J37/147 ,  H01J37/265 ,  H01J2237/2802

Abstract: A transmission electron microscope includes a control unit that: determines an excitation amount of a second illumination system lens based on an excitation amount of first illumination system lens such that the second illumination system lens satisfies a first optical condition; and determines a control amount of a first deflector and a control amount of a second deflector based on the excitation amount of the second illumination system lens such that the first deflector and the second deflector satisfy a second optical condition. The first optical condition is for a convergence angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed, and the second optical condition is for an illuminating position of the electron beam and an illuminating angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed.

公开(公告)号：US20180374671A1

公开(公告)日：2018-12-27

申请号：US16007276

申请日：2018-06-13

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Takeo Sasaki ,  Ichiro Onishi ,  Shuichi Yuasa ,  Masashi Shimizu

IPC: H01J37/20 ,  H01J37/10 ,  H01J37/244 ,  H01J37/09 ,  H01J37/28

Abstract: A sample holder capable of limiting X-rays accepted into an X-ray detector is provided. The sample holder is for use in an electron microscope equipped with a polepiece assembly and a semiconductor detector. The sample holder includes: a sample stage on which a sample is held; and a shield plate. When the sample stage has been introduced in the sample chamber of the electron microscope, the shield plate is located between the polepiece assembly and the semiconductor detector.

公开(公告)号：US11776787B2

公开(公告)日：2023-10-03

申请号：US17570043

申请日：2022-01-06

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yusuke Toriumi

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/20207

Abstract: A charged particle beam apparatus includes a tilt mechanism that tilts a specimen, a detector that detects an electromagnetic wave emitted from the specimen, a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on the detection solid angle of the detector are associated with each other, a tilt control unit that controls the tilt mechanism, and a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table.

公开(公告)号：US20230072991A1

公开(公告)日：2023-03-09

申请号：US17939309

申请日：2022-09-07

Applicant: JEOL Ltd.

Inventor： Hiroki Hashiguchi ,  Kazuki Yagi ,  Ruth Shewmon Bloom ,  Bryan W. Reed

IPC: H01J37/04 ,  H01J37/28 ,  G01N23/04

Abstract: A charged particle beam device scans a specimen with a charged particle beam and generates an image based on a detected signal from a detector that detects a signal generated from the specimen based on the scan performed by the charged particle beam. The charged particle beam device includes: a blanker that performs blanking of the charged particle beam; an image acquisition unit that acquires a plurality of images by controlling the blanking during the scan performed by the charged particle beam, the plurality of images including pixels corresponding to a region of the specimen that is irradiated with the charged particle beam and pixels corresponding to a region of the specimen that is not irradiated with the charged particle beam; and an integrated image generation unit that generates an integrated image by integrating the plurality of acquired images.

公开(公告)号：US20220172924A1

公开(公告)日：2022-06-02

申请号：US17536288

申请日：2021-11-29

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yoshiki Oyama

IPC: H01J37/28 ,  H01J37/10 ,  H01J37/147 ,  H01J37/26

Abstract: A transmission electron microscope includes a control unit that: determines an excitation amount of a second illumination system lens based on an excitation amount of first illumination system lens such that the second illumination system lens satisfies a first optical condition; and determines a control amount of a first deflector and a control amount of a second deflector based on the excitation amount of the second illumination system lens such that the first deflector and the second deflector satisfy a second optical condition. The first optical condition is for a convergence angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed, and the second optical condition is for an illuminating position of the electron beam and an illuminating angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed.

公开(公告)号：US20220216033A1

公开(公告)日：2022-07-07

申请号：US17570043

申请日：2022-01-06

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yusuke Toriumi

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/20 ,  H01J37/26

Abstract: A charged particle beam apparatus includes a tilt mechanism that tilts a specimen, a detector that detects an electromagnetic wave emitted from the specimen, a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on the detection solid angle of the detector are associated with each other, a tilt control unit that controls the tilt mechanism, and a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table.

公开(公告)号：US20220084783A1

公开(公告)日：2022-03-17

申请号：US17472816

申请日：2021-09-13

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yu Jimbo ,  Bryan W. Reed ,  Ruth Shewmon Bloom

IPC: H01J37/28 ,  H01J37/04 ,  H01J37/147 ,  H01J37/244

Abstract: A charged particle beam device including: a charged particle beam source which emits a charged particle beam; a blanking device which has an electrostatic deflector that deflects and blocks the charged particle beam; an irradiation optical system which irradiates a specimen with the charged particle beam; and a control unit which controls the electrostatic deflector, the control unit performing processing of: acquiring a target value of a dose of the charged particle beam for the specimen; setting a ratio A/B of a time A during which the charged particle beam is not blocked to a unit time B (where A≠B, A≠0), based on the target value; and operating the electrostatic deflector based on the ratio.

公开(公告)号：US20230290607A1

公开(公告)日：2023-09-14

申请号：US18120617

申请日：2023-03-13

Applicant: JEOL Ltd.

Inventor： Takeo Sasaki ,  Kanako Noguchi ,  Kazuki Yagi

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J37/265

Abstract: A charged particle beam apparatus for scanning a specimen with a charged particle beam and acquiring a scan image. The charged particle beam apparatus including: an optical system that includes a pulse mechanism for illuminating the specimen with pulses of the charged particle beam, and a deflector that deflects the charged particle beam and scans the specimen with the deflected charged particle beam; and a control unit that controls the optical system. The control unit controls the optical system so as to satisfy T = n × t (n is a natural number). T represents a dwell time of the charged particle beam in each pixel of the scan image, and t represents a cycle of pulses of the charged particle beam.

公开(公告)号：US11676796B2

公开(公告)日：2023-06-13

申请号：US17472816

申请日：2021-09-13

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yu Jimbo ,  Bryan W. Reed ,  Ruth Shewmon Bloom

IPC: H01J37/28 ,  H01J37/04 ,  H01J37/147 ,  H01J37/244

CPC classification number: H01J37/28 ,  H01J37/045 ,  H01J37/1477 ,  H01J37/244 ,  H01J2237/24415

Abstract: A charged particle beam device including: a charged particle beam source which emits a charged particle beam; a blanking device which has an electrostatic deflector that deflects and blocks the charged particle beam; an irradiation optical system which irradiates a specimen with the charged particle beam; and a control unit which controls the electrostatic deflector, the control unit performing processing of: acquiring a target value of a dose of the charged particle beam for the specimen; setting a ratio A/B of a time A during which the charged particle beam is not blocked to a unit time B (where A≠B, A≠0), based on the target value; and operating the electrostatic deflector based on the ratio.