公开(公告)号：US07288773B2

公开(公告)日：2007-10-30

申请号：US11233488

申请日：2005-09-22

Applicant: Niels de Jonge ,  Erik Petrus Antonius Maria Bakkers ,  Louis Felix Feiner ,  Antonio Maria Calvosa

Inventor： Niels de Jonge ,  Erik Petrus Antonius Maria Bakkers ,  Louis Felix Feiner ,  Antonio Maria Calvosa

IPC: H01J37/73

CPC classification number: H01J37/073 ,  H01J2209/0223 ,  H01J2237/06341 ,  H01J2237/262 ,  H01J2237/28 ,  H01J2237/3175

Abstract: The invention provides an electron source suitable for use in a charged-particle apparatus, in which source a beam of electrons can be extracted from an electrode that is subjected to at least one of an electric potential, thermal excitation and photonic excitation, whereby at least part of the electrode comprises semiconductor material having a conduction band that is quantized into discrete energy levels. Such a source enjoys a relatively low energy spread, typically much smaller than that of a Cold Field Emission Gun (CFEG). The semiconductor material may, for example, comprise a semiconductor nanowire including InAs and GaInAs.

Abstract translation: 本发明提供一种适用于带电粒子装置的电子源，其中源电极可从经受至少一种电势，热激发和光子激发的电极中提取出来，至少至少 电极的一部分包括具有量子化为离散能级的导带的半导体材料。 这样的源具有相对较低的能量传播，通常比冷场发射枪（CFEG）小得多。 半导体材料可以例如包括包括InAs和GaInAs的半导体纳米线。

公开(公告)号：US20120120226A1

公开(公告)日：2012-05-17

申请号：US13299241

申请日：2011-11-17

Applicant: Niels de Jonge

Inventor： Niels de Jonge

IPC: H04N7/18

CPC classification number: G01N23/2204 ,  B01L3/502715 ,  G01N23/2251 ,  H01J37/20 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2802

Abstract: In one aspect, the present invention relates to a microfluidic chamber. In one embodiment, the microfluidic chamber has a first sub-chamber and at least one second sub-chamber. The first sub-chamber has a first window and a second window. Both the first window and the second window are transparent to electrons of certain energies. The second window is positioned substantially parallel and opposite to the first window defining a first volume therebetween. The first window and the second window are separated by a distance that is sufficiently small such that an electron beam that enters from the first window can propagate through the first sub-chamber and exit from the second window. The at least one second sub-chamber is in fluid communication with the first sub-chamber and has a second volume that is greater than the first volume of the first sub-chamber.

Abstract translation: 一方面，本发明涉及一种微流体室。 在一个实施例中，微流体室具有第一子室和至少一个第二子室。 第一子室具有第一窗口和第二窗口。 第一窗口和第二窗口对于某些能量的电子是透明的。 第二窗口基本平行且相对于第一窗口定位，在第一窗口之间限定第一容积。 第一窗口和第二窗口被分开足够小的距离，使得从第一窗口进入的电子束可以传播通过第一子室并从第二窗口排出。 所述至少一个第二子室与所述第一子室流体连通并且具有大于所述第一子室的第一容积的第二容积。

公开(公告)号：US20060076504A1

公开(公告)日：2006-04-13

申请号：US11233488

申请日：2005-09-22

Applicant: Niels de Jonge ,  Erik Petrus Antonius Maria Bakkers ,  Louis Felix Feiner ,  Antonio Maria Calvosa

Inventor： Niels de Jonge ,  Erik Petrus Antonius Maria Bakkers ,  Louis Felix Feiner ,  Antonio Maria Calvosa

IPC: H01T23/00

CPC classification number: H01J37/073 ,  H01J2209/0223 ,  H01J2237/06341 ,  H01J2237/262 ,  H01J2237/28 ,  H01J2237/3175

Abstract: The invention provides an electron source suitable for use in a charged-particle apparatus, in which source a beam of electrons can be extracted from an electrode that is subjected to at least one of an electric potential, thermal excitation and photonic excitation, whereby at least part of the electrode comprises semiconductor material having a conduction band that is quantized into discrete energy levels. Such a source enjoys a relatively low energy spread, typically much smaller than that of a Cold Field Emission Gun (CFEG). Said semiconductor material may, for example, comprise a semiconductor nanowire. Examples of suitable semiconductor materials for such a nanowire include InAs and GaInAs.

Abstract translation: 本发明提供一种适用于带电粒子装置的电子源，其中源电极可从经受至少一种电势，热激发和光子激发的电极中提取出来，至少至少 电极的一部分包括具有量子化为离散能级的导带的半导体材料。 这样的源具有相对较低的能量传播，通常比冷场发射枪（CFEG）小得多。 所述半导体材料可以例如包括半导体纳米线。 用于这种纳米线的合适的半导体材料的实例包括InAs和GaInAs。

公开(公告)号：US20090078868A1

公开(公告)日：2009-03-26

申请号：US11860760

申请日：2007-09-25

Applicant: Niels de Jonge

Inventor： Niels de Jonge

IPC: G01N23/04

CPC classification number: H01J37/26 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/045 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/21 ,  H01J2237/226 ,  H01J2237/24455 ,  H01J2237/262 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminated by the incident electron beam. A detection system is placed approximately in the image plane.

Abstract translation: 一种共焦扫描透射电子显微镜，其包括提供沿着限定传播轴的方向传播的入射电子束的电子照明装置，以及沿着传播轴定位并且能够沿至少一个横向于传播轴的方向移动的精密样本扫描台。 精密样本扫描台被配置为相对于入射电子束定位样本。 投影透镜接收通过至少部分样本的透射电子束，并将该透射光束聚焦在图像平面上，其中透射光束由样品被入射电子束照射。 检测系统大致放置在图像平面中。

公开(公告)号：US10319559B2

公开(公告)日：2019-06-11

申请号：US15257667

申请日：2016-09-06

Applicant: Tim Dahmen ,  Niels de Jonge

Inventor： Tim Dahmen ,  Niels de Jonge

IPC: H01J37/22 ,  H01J37/26 ,  H01J37/28 ,  H01J37/10 ,  H01J37/20

Abstract: The disclosed subject matter relates to testing a sample by means of a particle beam microscope in which the sample is scanned in a point-wise manner by a focused beam of charged particles thereby generating imaging signals. The particle beam dose applied per scanning point is changed during scanning.

公开(公告)号：US07777185B2

公开(公告)日：2010-08-17

申请号：US11860760

申请日：2007-09-25

Applicant: Niels de Jonge

Inventor： Niels de Jonge

IPC: H01J37/26 ,  H01J37/28 ,  G01N23/04

CPC classification number: H01J37/26 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/045 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/21 ,  H01J2237/226 ,  H01J2237/24455 ,  H01J2237/262 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminated by the incident electron beam. A detection system is placed approximately in the image plane.

Abstract translation: 一种共焦扫描透射电子显微镜，其包括提供沿着限定传播轴的方向传播的入射电子束的电子照明装置，以及沿着传播轴定位并且能够沿至少一个横向于传播轴的方向移动的精密样本扫描台。 精密样本扫描台被配置为相对于入射电子束定位样本。 投影透镜接收通过至少部分样本的透射电子束，并将该透射光束聚焦在图像平面上，其中透射光束由样品被入射电子束照射。 检测系统大致放置在图像平面中。