公开(公告)号：US08822948B1

公开(公告)日：2014-09-02

申请号：US14074824

申请日：2013-11-08

Applicant: Thermo Electron Manufacturing Limited

Inventor： Stephen Hartwell

IPC: C23C14/54 ,  C23C8/36 ,  H01L21/203

CPC classification number: H01J37/244 ,  G01J3/443 ,  G01J2003/4435 ,  H01J27/16 ,  H01J37/08 ,  H01J37/32972 ,  H01J37/3299 ,  H01J49/105 ,  H01J49/26 ,  H05H1/0037

Abstract: A method of and apparatus for controlling the temperature of an inductively coupled or microwave induced plasma for optical emission spectrometry or mass spectrometry in which the intensities of two spectral lines of radiation emitted by the plasma are measured, and the power provided to sustain the plasma is adjusted so that the ratio of the intensities remains substantially constant.

Abstract translation: 用于控制用于光发射光谱或质谱的电感耦合或微波感应等离子体的温度的方法和装置，其中测量由等离子体发射的两束辐射谱线的强度，并且提供用于维持等离子体的功率为 调节使得强度比保持基本恒定。

公开(公告)号：US20140227458A1

公开(公告)日：2014-08-14

申请号：US14112172

申请日：2012-04-18

Applicant: Takayuki Karakawa ,  Hirokazu Ueda

Inventor： Takayuki Karakawa ,  Hirokazu Ueda

IPC: G01J3/443 ,  C23C16/50 ,  C23C16/52

CPC classification number: G01J3/443 ,  C23C16/34 ,  C23C16/45536 ,  C23C16/50 ,  C23C16/52 ,  G01J2003/4435 ,  H01J37/32972 ,  H01L21/0217 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/31111

Abstract: Disclosed is a plasma evaluation method that evaluates plasma P that forms a nitride film by an atomic layer deposition method. First, light emission from the plasma P generated from a gas G that contains nitrogen atoms and hydrogen atoms is detected. Then, evaluation of the plasma P is performed by using a result of comparing an intensity ratio between a first peak caused by hydrogen atoms and a second peak different from the first peak and caused by hydrogen atoms in an intensity spectrum of the detected light emission with a reference value calculated in advance from a relationship between the intensity ratio and an indicator that indicates a film quality of the nitride film.

Abstract translation: 公开了通过原子层沉积法评价形成氮化物膜的等离子体P的等离子体评价方法。 首先，检测从含有氮原子和氢原子的气体G产生的等离子体P的发光。 然后，使用比较由氢原子引起的第一峰与第一峰不同的第二峰与由检测出的发光的强度谱中的氢原子引起的强度比的结果来进行等离子体P的评价， 从强度比与表示氮化膜的膜质量的指标之间的关系预先计算出的基准值。

公开(公告)号：US20140264000A1

公开(公告)日：2014-09-18

申请号：US14074824

申请日：2013-11-08

Applicant: Thermo Electron Manufacturing Limited

Inventor： Stephen HARTWELL

IPC: H01J37/244 ,  H01J49/26 ,  G01J3/443 ,  H01J37/08

CPC classification number: H01J37/244 ,  G01J3/443 ,  G01J2003/4435 ,  H01J27/16 ,  H01J37/08 ,  H01J37/32972 ,  H01J37/3299 ,  H01J49/105 ,  H01J49/26 ,  H05H1/0037

Abstract: A method of and apparatus for controlling the temperature of an inductively coupled or microwave induced plasma for optical emission spectrometry or mass spectrometry in which the intensities of two spectral lines of radiation emitted by the plasma are measured, and the power provided to sustain the plasma is adjusted so that the ratio of the intensities remains substantially constant.

Abstract translation: 用于控制用于光发射光谱或质谱的电感耦合或微波感应等离子体的温度的方法和装置，其中测量由等离子体发射的两束辐射谱线的强度，并且提供用于维持等离子体的功率为 调节使得强度比保持基本恒定。

公开(公告)号：US08781793B2

公开(公告)日：2014-07-15

申请号：US14119487

申请日：2012-05-22

Applicant: Masaki Yamashita ,  Hiromi Mizukawa

Inventor： Masaki Yamashita ,  Hiromi Mizukawa

IPC: G01K11/30 ,  G01B5/02 ,  G01B5/14 ,  G01B7/02 ,  G01B7/14 ,  G01B11/02 ,  G01B11/14 ,  G01B13/02 ,  G01C22/00 ,  G01J3/00 ,  G01B9/02

CPC classification number: G01N21/255 ,  G01J3/443 ,  G01J2003/4435 ,  G01N21/274 ,  G01N21/66 ,  G01N2201/127 ,  H05H1/0037

Abstract: The light emission analyzing device includes: a first light intensity calculation unit that performs polynomial approximation on a spectroscopic spectrum indicating a light intensity for each wavelength in a container as measured by a spectrometer so as to calculate the light intensity; a second light intensity calculation unit that subtracts, for each wavelength, the light intensity calculated by the first light intensity calculation unit from the light intensity indicated by the spectroscopic spectrum measured by the spectrometer so as to calculate a light intensity corresponding to a bright-line spectrum of a molecule; and a ratio calculation unit that calculates, by using the light intensity calculated by the second light intensity calculation unit, a ratio between (a) a peak value of a molecular spectrum of a first molecule and (b) a peak value of a molecular spectrum of a second molecule.

Abstract translation: 发光分析装置包括：第一光强度计算单元，对通过光谱仪测定的表示容器内的各波长的光强度的分光光谱进行多项式近似，以计算光强度; 第二光强度计算单元，对于每个波长，从由所述光谱仪测量的所述光谱所指示的光强度中减去由所述第一光强度计算单元计算的光强度，以计算对应于亮线的光强度 分子光谱; 以及比率计算单元，其通过使用由第二光强计算单元计算的光强度，计算（a）第一分子的分子光谱的峰值与（b）分子光谱的峰值之间的比率 的第二分子。

公开(公告)号：US20140107980A1

公开(公告)日：2014-04-17

申请号：US14119487

申请日：2012-05-22

Applicant: CREV INC.

Inventor： Masaki Yamashita ,  Hiromi Mizukawa

IPC: G01N21/25

CPC classification number: G01N21/255 ,  G01J3/443 ,  G01J2003/4435 ,  G01N21/274 ,  G01N21/66 ,  G01N2201/127 ,  H05H1/0037

Abstract: The light emission analyzing device includes: a first light intensity calculation unit that performs polynomial approximation on a spectroscopic spectrum indicating a light intensity for each wavelength in a container as measured by a spectrometer so as to calculate the light intensity; a second light intensity calculation unit that subtracts, for each wavelength, the light intensity calculated by the first light intensity calculation unit from the light intensity indicated by the spectroscopic spectrum measured by the spectrometer so as to calculate a light intensity corresponding to a bright-line spectrum of a molecule; and a ratio calculation unit that calculates, by using the light intensity calculated by the second light intensity calculation unit, a ratio between (a) a peak value of a molecular spectrum of a first molecule and (b) a peak value of a molecular spectrum of a second molecule.

Abstract translation: 发光分析装置包括：第一光强度计算单元，对通过光谱仪测定的表示容器内的各波长的光强度的分光光谱进行多项式近似，以计算光强度; 第二光强度计算单元，对于每个波长，从由所述光谱仪测量的所述光谱所指示的光强度中减去由所述第一光强度计算单元计算的光强度，以计算对应于亮线的光强度 分子光谱; 以及比率计算单元，其通过使用由第二光强计算单元计算的光强度，计算（a）第一分子的分子光谱的峰值与（b）分子光谱的峰值之间的比率 的第二分子。

公开(公告)号：US5636015A

公开(公告)日：1997-06-03

申请号：US648335

申请日：1996-05-15

Applicant: Kenji Imura ,  Kiyoshi Imai ,  Tokihisa Kawabata ,  Masayuki Makino

Inventor： Kenji Imura ,  Kiyoshi Imai ,  Tokihisa Kawabata ,  Masayuki Makino

IPC: G01J3/443 ,  G01J3/427 ,  G01J3/44 ,  G01N21/27 ,  G01N21/64 ,  G01J3/00

CPC classification number: G01J3/4406 ,  G01J2003/4435 ,  G01J3/427 ,  G01N21/64 ,  G01N2201/065

Abstract: The measuring apparatus of the present invention measures the optical properties of a sample containing a fluorescent material by irradiating the sample with light containing a UV component. In the present invention are provided a first light source for irradiating the sample with light containing a UV component, a second light source for irradiating the sample with light which does not contain a UV component, light receiving element for receiving light reflected from the sample irradiated by said light sources, and output means for generating weighting coefficients for weighting the output of the light receiving element during emission by each light source. The optical properties of the sample is calculated based on the output of the light receiving element for a first light source, output of the light receiving element for a second light source, and the respective weighting coefficients. Accordingly, measurement values can be obtained which are equal to values when measurement is accomplished with a standard light source.

Abstract translation: 本发明的测量装置通过用含有UV成分的光照射样品来测量含有荧光材料的样品的光学性质。 在本发明中提供了一种用于对含有UV成分的光照射样品的第一光源，用于用不含UV成分的光照射样品的第二光源，用于接收从所照射的样品反射的光的光接收元件 以及用于产生加权系数的输出装置，用于在由每个光源发射期间加权光接收元件的输出。 基于用于第一光源的光接收元件的输出，用于第二光源的光接收元件的输出和各个加权系数来计算样品的光学性质。 因此，可以获得与使用标准光源进行测量时的值相等的测量值。