WIND AND TEMPERATURE SPECTROMETER WITH CROSSED SMALL-DEFLECTION ENERGY ANALYZER
    1.
    发明申请
    WIND AND TEMPERATURE SPECTROMETER WITH CROSSED SMALL-DEFLECTION ENERGY ANALYZER 有权
    具有交叉小型能量分析仪的风和温度光谱仪

    公开(公告)号:US20110180700A1

    公开(公告)日:2011-07-28

    申请号:US12695478

    申请日:2010-01-28

    CPC classification number: H01J49/486

    Abstract: A wind and temperature spectrometer (WTS) may detect the angular and energy distributions of neutral atoms/molecules and ions in two mutually perpendicular planes. The measured energy distribution at a known angle near the peak may be used to infer the full wind vector W. A WTS having a single ion source may be used in conjunction with a crossed small-deflection energy analyzer (SDEA). The crossed SDEA may combine the angular and energy distributions in the two mutually perpendicular planes into a single spectrometer with a single optical axis. A WTS having a single ion source may use less energy and occupy less space than a WTS with two ion sources.

    Abstract translation: 风和温度光谱仪(WTS)可以检测两个相互垂直的平面中的中性原子/分子和离子的角度和能量分布。 在峰附近以已知角度测量的能量分布可以用于推断全风向量W.具有单个离子源的WTS可以与交叉的小偏转能量分析仪(SDEA)结合使用。 交叉的SDEA可以将两个相互垂直的平面中的角度和能量分布组合成具有单个光轴的单个光谱仪。 具有单个离子源的WTS可以使用较少的能量并占据比具有两个离子源的WTS更少的空间。

    Wind and temperature spectrometer with crossed small-deflection energy analyzer
    3.
    发明授权
    Wind and temperature spectrometer with crossed small-deflection energy analyzer 有权
    具有交叉小偏转能量分析仪的风和温度光谱仪

    公开(公告)号:US08093565B2

    公开(公告)日:2012-01-10

    申请号:US12695478

    申请日:2010-01-28

    CPC classification number: H01J49/486

    Abstract: A wind and temperature spectrometer (WTS) may detect the angular and energy distributions of neutral atoms/molecules and ions in two mutually perpendicular planes. The measured energy distribution at a known angle near the peak may be used to infer the full wind vector W. A WTS having a single ion source may be used in conjunction with a crossed small-deflection energy analyzer (SDEA). The crossed SDEA may combine the angular and energy distributions in the two mutually perpendicular planes into a single spectrometer with a single optical axis. A WTS having a single ion source may use less energy and occupy less space than a WTS with two ion sources.

    Abstract translation: 风和温度光谱仪(WTS)可以检测两个相互垂直的平面中的中性原子/分子和离子的角度和能量分布。 在峰附近以已知角度测量的能量分布可以用于推断全风向量W.具有单个离子源的WTS可以与交叉的小偏转能量分析仪(SDEA)结合使用。 交叉的SDEA可以将两个相互垂直的平面中的角度和能量分布组合成具有单个光轴的单个光谱仪。 具有单个离子源的WTS可以使用较少的能量并占据比具有两个离子源的WTS更少的空间。

    Charged-particle energy analyzer
    4.
    发明授权
    Charged-particle energy analyzer 失效
    带电粒子能量分析仪

    公开(公告)号:US08421030B2

    公开(公告)日:2013-04-16

    申请号:US13119689

    申请日:2010-07-16

    Abstract: One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a first electrode is arranged such that a first cavity is formed between the second side of the first mesh and the first electrode. A second mesh is arranged to receive the charged particles on a second side and pass the charged particles to a first side, and a second electrode is arranged such that a second cavity is formed between the first side of the second mesh and the second electrode. Finally, a third mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a position-sensitive charged-particle detector is arranged to receive the charged particles after the charged particles pass through the third mesh.

    Abstract translation: 一个实施例涉及一种带电粒子能量分析装置。 布置第一网格以接收第一侧上的带电粒子并将带电粒子传递到第二侧,并且第一电极被布置成使得第一空腔形成在第一网格的第二侧和第一电极之间。 布置第二网以接收第二侧上的带电粒子并将带电粒子传递到第一侧,并且第二电极被布置成使得在第二网格的第一侧和第二电极之间形成第二腔。 最后,设置第三网格以接收第一侧上的带电粒子并将带电粒子传递到第二侧,并且位置敏感带电粒子检测器布置成在带电粒子通过第三侧之后接收带电粒子 网格。

    Parallel radial mirror analyser with an angled zero-volt equipotential exit grid for scanning electron microscopes
    6.
    发明授权
    Parallel radial mirror analyser with an angled zero-volt equipotential exit grid for scanning electron microscopes 有权
    具有倾斜零伏等势出口格栅的平行径向镜分析仪,用于扫描电子显微镜

    公开(公告)号:US08981292B2

    公开(公告)日:2015-03-17

    申请号:US14114170

    申请日:2012-04-24

    Abstract: A parallel radial mirror analyzer (PRMA) (700) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA comprises a zero-volt equipotential grid (728), and a plurality of electrodes (702, 704, 706, 708, 710, 712, 714, 716, 718, 720, 722) electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid (728) to form corresponding second-order focal points on a detector (206). The detector (206) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.

    Abstract translation: 公开了一种用于促进由入射在试样上的带电束引起的带电粒子的旋转对称检测的并行径向镜分析仪(PRMA)(700)。 PRMA包括零伏等势网格(728)和多个电极(702,704,706,708,710,712,714,716,718,720,722),电气地配置为产生相应的静电场用于偏转 所述带电粒子根据所述带电粒子的相应能级移动通过所述格栅(728)以在检测器(206)上形成对应的二阶焦点。 检测器(206)设置在相应静电场的外部。 还公开了相关方法。

    PARALLEL RADIAL MIRROR ANALYSER FOR SCANNING MICROSCOPES
    7.
    发明申请
    PARALLEL RADIAL MIRROR ANALYSER FOR SCANNING MICROSCOPES 有权
    用于扫描显微镜的并行径向分析仪

    公开(公告)号:US20140042317A1

    公开(公告)日:2014-02-13

    申请号:US14114170

    申请日:2012-04-24

    Abstract: A parallel radial mirror analyser (PRMA) (700) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA comprises a zero-volt equipotential grid (728), and a plurality of electrodes (702, 704, 706, 708, 710, 712, 714, 716, 718, 720, 722) electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid (728) to form corresponding second-order focal points on a detector (206). The detector (206) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.

    Abstract translation: 公开了一种用于促进由入射在试样上的带电束引起的带电粒子的旋转对称检测的并行径向镜分析仪(PRMA)(700)。 PRMA包括零伏等势网格(728)和多个电极(702,704,706,708,710,712,714,716,718,720,722),电气地配置为产生相应的静电场用于偏转 所述带电粒子根据所述带电粒子的相应能级移动通过所述格栅(728)以在检测器(206)上形成对应的二阶焦点。 检测器(206)设置在相应静电场的外部。 还公开了相关方法。

    CHARGED-PARTICLE ENERGY ANALYZER
    8.
    发明申请
    CHARGED-PARTICLE ENERGY ANALYZER 失效
    充电颗粒能量分析仪

    公开(公告)号:US20110168886A1

    公开(公告)日:2011-07-14

    申请号:US13119689

    申请日:2010-07-16

    Abstract: One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a first electrode is arranged such that a first cavity is formed between the second side of the first mesh and the first electrode. A second mesh is arranged to receive the charged particles on a second side and pass the charged particles to a first side, and a second electrode is arranged such that a second cavity is formed between the first side of the second mesh and the second electrode. Finally, a third mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a position-sensitive charged-particle detector is arranged to receive the charged particles after the charged particles pass through the third mesh.

    Abstract translation: 一个实施例涉及一种带电粒子能量分析装置。 布置第一网格以接收第一侧上的带电粒子并将带电粒子传递到第二侧,并且第一电极被布置成使得第一空腔形成在第一网格的第二侧和第一电极之间。 布置第二网以接收第二侧上的带电粒子并将带电粒子传递到第一侧,并且第二电极被布置成使得在第二网格的第一侧和第二电极之间形成第二腔。 最后,设置第三网格以接收第一侧上的带电粒子并将带电粒子传递到第二侧,并且位置敏感带电粒子检测器布置成在带电粒子通过第三侧之后接收带电粒子 网格。

    Devices, systems, and methods for dispersive energy imaging
    10.
    发明授权
    Devices, systems, and methods for dispersive energy imaging 有权
    用于分散能量成像的装置,系统和方法

    公开(公告)号:US08809771B2

    公开(公告)日:2014-08-19

    申请号:US13107609

    申请日:2011-05-13

    Applicant: Erik Syrstad

    Inventor: Erik Syrstad

    CPC classification number: H01J49/22 H01J49/486

    Abstract: Devices, systems, and methods for dispersive energy imaging are disclosed. The full three-dimensional velocity distribution function of a flowing particle stream may be measured and properties of the particle stream characterized. In some devices, an aperture system controls the entry of a stream of particles into the sensor where an electrostatic deflector separates the stream of particles into different species, and a detector system senses the separated species.

    Abstract translation: 公开了用于分散能量成像的装置,系统和方法。 可以测量流动颗粒流的完整三维速度分布函数,并表征粒子流的性质。 在一些装置中,孔径系统控制颗粒物流进入传感器,其中静电偏转器将颗粒流分离成不同的物种,并且检测器系统感测分离的物种。

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