반도체 소자의 제조 방법
    3.
    发明公开
    반도체 소자의 제조 방법 无效
    制造半导体器件的方法

    公开(公告)号:KR1020130075158A

    公开(公告)日:2013-07-05

    申请号:KR1020110143409

    申请日:2011-12-27

    Abstract: PURPOSE: A method for manufacturing a semiconductor device is provided to easily remove a carbon film which remains after an etching object film is etched by forming the carbon film with different boron concentration. CONSTITUTION: An etching object film (115) is formed on a substrate (100). A carbon film (120) doped with boron is formed on the etching object film. The boron concentration of the upper side of the carbon film is different from the boron concentration of the lower side of the carbon film. At least one opening part is formed to expose the etching object film by patterning the carbon film. The exposed etching object film is etched by using the carbon film as an etching mask.

    Abstract translation: 目的:提供一种制造半导体器件的方法,以便通过形成具有不同硼浓度的碳膜来容易地除去蚀刻对象膜后留下的碳膜。 构成:在基板(100)上形成蚀刻对象膜(115)。 在蚀刻对象膜上形成掺杂有硼的碳膜(120)。 碳膜的上侧的硼浓度与碳膜的下侧的硼浓度不同。 形成至少一个开口部分,以通过图案化碳膜来暴露蚀刻对象膜。 通过使用碳膜作为蚀刻掩模蚀刻暴露的蚀刻对象膜。

    이동통신 단말기 및 그의 동영상 목록 표시 방법
    4.
    发明公开
    이동통신 단말기 및 그의 동영상 목록 표시 방법 无效
    移动电信终端和显示移动图像的列表的方法

    公开(公告)号:KR1020080093567A

    公开(公告)日:2008-10-22

    申请号:KR1020070037436

    申请日:2007-04-17

    CPC classification number: H04M1/72583 G06F3/0482 H04N21/41407

    Abstract: A mobile communication terminal and a method for displaying a list of moving pictures in the same are provided to enable a user to check contents of a selected moving picture easily since the user can watch the selected moving picture while the list of moving picture is being displayed. A method for displaying a list of moving pictures in a mobile communication terminal. The mobile communication terminal enables a user to set a moving picture preview setup procedure(S11). The user requests a list of moving pictures for selecting a wanted moving picture(S12). A list generating unit searches for all the moving picture files stored at a storage unit and displays a list of moving pictures(S13,S14). A moving picture processor recognizes an item as selected by a user when the user stops pushing direction keys, positions a cursor on the item, and does not push any other direction keys(S15). The moving picture processor extracts regeneration setup information from a database in correspondence with the selected item(S16). The moving picture processor displays the corresponding moving picture with the list on the basis of the extracted regeneration setup information(S17). If the user moves a cursor and stops moving the cursor again, the moving picture processor determines that the item on which the cursor is put is newly selected by the user(S18). If the user inputs a regeneration request for the selected moving picture(S19), the moving picture processor eliminates a screen for displaying the list of moving pictures and regenerates the selected moving picture(S20).

    Abstract translation: 提供移动通信终端和用于显示其中的运动图像列表的方法,以使用户能够容易地检查所选运动图像的内容,因为用户可以在显示运动图像列表的同时观看所选择的运动图像 。 一种用于在移动通信终端中显示运动图像的列表的方法。 移动通信终端使用户能够设置运动图像预览设置程序(S11)。 用户请求用于选择想要的运动图像的运动图像的列表(S12)。 列表生成单元搜索存储在存储单元中的所有运动图像文件,并显示运动图像的列表(S13,S14)。 运动图像处理器识别用户在用户停止推动方向键时选择的项目,将光标定位在项目上,并且不推动任何其他方向键(S15)。 运动图像处理器从与数据库对应的所选择的项目中提取再生设置信息(S16)。 运动图像处理器基于提取的再生设置信息显示具有列表的对应的运动图像(S17)。 如果用户移动光标并且停止再次移动光标,则运动图像处理器确定用户新选择放置光标的项目(S18)。 如果用户输入对所选运动图像的再生请求(S19),则运动图像处理器消除用于显示运动图像列表的屏幕并​​重新生成所选择的运动图像(S20)。

    잉크젯 프린팅 방법을 이용한 유기 전계효과 트랜지스터의 활성 채널층 형성방법 및 이를 이용한 유기 전계효과 트랜지스터
    5.
    发明公开
    잉크젯 프린팅 방법을 이용한 유기 전계효과 트랜지스터의 활성 채널층 형성방법 및 이를 이용한 유기 전계효과 트랜지스터 无效
    使用喷墨印刷和有机场效应晶体管的有机场效应晶体管的有源通道区域的制造方法

    公开(公告)号:KR1020100075100A

    公开(公告)日:2010-07-02

    申请号:KR1020080133716

    申请日:2008-12-24

    Inventor: 이성훈 홍정표

    Abstract: PURPOSE: A method for forming an active channel layer of an organic field effect transistor and the organic field effect transistor using the same are provided to improve an electrical property by including an active channel layer which is arranged from a grain boundary. CONSTITUTION: Disclosed is a method for forming an active channel layer between a source electrode and a drain electrode. A first liquid(105) is dropped on the drain electrode. A second liquid(106) with dissolved organic semiconductor materials is dropped on the first liquid. The evaporation speed of the first liquid is slower than the evaporation speed of the second liquid. The first liquid and the second liquid have different polarities not to be mixed. The density of the first liquid is larger than the density of the second liquid.

    Abstract translation: 目的:提供一种用于形成有机场效应晶体管的有源沟道层的方法和使用其的有机场效应晶体管,以通过包括从晶界排列的有源沟道层来改善电性能。 构成:公开了一种在源电极和漏电极之间形成有源沟道层的方法。 第一液体(105)滴在漏电极上。 具有溶解的有机半导体材料的第二液体(106)滴在第​​一液体上。 第一液体的蒸发速度比第二液体的蒸发速度慢。 第一液体和第二液体具有不同的极性不混合。 第一液体的密度大于第二液体的密度。

    플라즈마 처리 장치
    6.
    发明公开
    플라즈마 처리 장치 审中-实审
    等离子处理设备

    公开(公告)号:KR1020170143068A

    公开(公告)日:2017-12-29

    申请号:KR1020160075871

    申请日:2016-06-17

    Abstract: 본발명의예시적실시예에따른플라즈마처리장치는, 챔버; 상기챔버의상부에배치되며, 체결홀을갖는윈도우플레이트; 복수의노즐을가지며상기체결홀에체결되는몸체부, 상기몸체부에서방사상으로연장되어상기윈도우플레이트의저면을부분적으로가리는플렌지부를갖는인젝터; 및상기윈도우플레이트의상면에서상기몸체부와체결되어상기인젝터가상기체결홀에서빠지는것을방지하는스토퍼;를포함할수 있다.

    Abstract translation: 根据本发明示例性实施例的等离子体处理设备包括腔室; 设置在腔室顶部的窗板,窗板具有紧固孔; 1。一种喷射器,其特征在于,具有:主体部,其具有多个喷嘴并被紧固于所述紧固孔;以及凸缘部,其从所述主体部沿径向延伸,以部分地覆盖所述窗板的底面; 并且在窗板的上表面处固定到本体上的塞子以防止喷射器从紧固孔脱落。

    포커스 링 조립체 및 이를 이용한 기판 처리 방법
    7.
    发明公开
    포커스 링 조립체 및 이를 이용한 기판 처리 방법 审中-实审
    对焦环组件和使用其的基板处理方法

    公开(公告)号:KR1020170118466A

    公开(公告)日:2017-10-25

    申请号:KR1020160046283

    申请日:2016-04-15

    Abstract: 기판처리방법에따르면, 플라즈마처리장치내로기판을반입할수 있다. 상기기판상의막을상기플라즈마처리장치내에서발생된플라즈마로처리할수 있다. 상기기판을상기플라즈마처리장치로부터반출시킬수 있다. 상기플라즈마에의해마모된상기플라즈마처리장치내의포커스링의표상부면에두께보상막을상기플라즈마처리장치내에서인-시튜공정으로형성할수 있다. 따라서, 마모된포커스링 교체를위해플라즈마처리장치의가동을중단시키지않아도되므로, 플라즈마처리장치의가동율이향상될수 있다.

    Abstract translation: 根据基板处理方法,可以将基板搬入等离子体处理装置。 衬底上的膜可以用等离子体处理装置中产生的等离子体处理。 衬底可以从等离子体处理装置中取出。 厚度补偿膜可以在等离子体处理设备中的等离子体处理设备中的聚焦环表面上的等离子体处理设备中的原位处理中形成。 因此,不需要停止等离子体处理装置的操作来更换磨损的聚焦环,从而可以提高等离子体处理装置的运转率。

    기판 처리 장치
    8.
    发明公开
    기판 처리 장치 审中-实审
    基板加工装置

    公开(公告)号:KR1020170024996A

    公开(公告)日:2017-03-08

    申请号:KR1020150120747

    申请日:2015-08-27

    Abstract: 기판처리장치가제공된다. 기판처리장치는기판처리영역을포함하는챔버, 상기기판처리영역상에배치되고, 삽입홀을포함하는유전판및 상기유전판상에배치되어상기유전판의온도를측정하고, 상기삽입홈에삽입되는나사(screw)부를가지는온도측정부를포함하고, 상기삽입홀과상기나사부각각은서로맞물리는나사선을포함할수 있다.

    Abstract translation: 提供了包括温度测量单元的衬底处理设备。 基板处理装置包括:室,包括基板处理区域,设置在基板处理区域上并且包括插入孔的电介质片和设置在电介质片上以测量电介质片材的温度的温度测量单元, 并且具有插入到所述插入孔中的螺纹部分,其中所述插入孔和所述螺纹部分中的每一个具有彼此啮合的螺纹螺旋。

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