Abstract:
The present invention provides an improved CMOS diode structure with dual gate conductors. Specifically, a substrate comprising a first n-doped region and a second p-doped region is formed. A third region of either n-type or p-type conductivity is located between the first and second regions. A first gate conductor of n-type conductivity and a second gate conductor of p-type conductivity are located over the substrate and adjacent to the first and second regions, respectively. Further, the second gate conductor is spaced apart and isolated from the first gate conductor by a dielectric isolation structure. An accumulation region with an underlying depletion region can be formed in such a diode structure between the third region and the second or the first region, and such an accumulation region preferably has a width that is positively correlated with that of the second or the first gate conductor.
Abstract:
A semiconductor chip includes a semiconductor substrate having a rectifying contact diffusion and a non-rectifying contact diffusion. A halo diffusion is adjacent the rectifying contact diffusion and no halo diffusion is adjacent the non-rectifying contact diffusion. The rectifying contact diffusion can be a source/drain diffusion of an FET to improve resistance to punch-through. The non-rectifying contact diffusion may be an FET body contact, a lateral diode contact, or a resistor or capacitor contact. Avoiding a halo for non-rectifying contacts reduces series resistance and improves device characteristics. In another embodiment on a chip having devices with halos adjacent diffusions, no halo diffusion is adjacent a rectifying contact diffusion of a lateral diode, significantly improving ideality of the diode and increasing breakdown voltage.
Abstract:
PROBLEM TO BE SOLVED: To provide a complimentary metal oxide semiconductor (CMOS) circuit and a method for forming the CMOS circuit. SOLUTION: The CMOS circuit comprises a passive element whose remaining contact resistance value is less than 90 ohm micron, such as an embedded resistor part, capacitor, diode, inductor, attenuator, power splitter, antenna, or the like. A low residual resistance value like this is attained by reducing the spacer width of the passive element to be within the range about 10-30nm, or by masking the passive element during pre-amorphizing injection step so that substantially no pre-amorphized implant is present in the passive element. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a CMOS well structure and a method for forming it. SOLUTION: A method for forming a CMOS well structure comprises a process of forming multiple first conductivity type wells over a substrate. The multiple first conductivity type wells are formed in respective openings in a first mask. A cap is formed over each of the first conductivity type wells, and the first mask is removed. Sidewall spacers are formed on the sidewalls of each of the first conductivity type wells. Multiple second conductivity type wells are formed in respective areas between the first conductivity type wells. Multiple shallow trench isolations are formed between the first conductivity type wells and the second conductivity type wells. The multiple first conductivity type wells are formed in a first selective epitaxial growth process, and the multiple second conductivity type wells are formed in a second selective epitaxial growth process. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
The present invention provides an improved CMOS diode structure with dual gate conductors. Specifically, a substrate comprising a first n-doped region and a second p-doped region is formed. A third region of either n-type or p-type conductivity is located between the first and second regions. A first gate conductor of n-type conductivity and a second gate conductor of p-type conductivity are located over the substrate and adjacent to the first and second regions, respectively. Further, the second gate conductor is spaced apart and isolated from the first gate conductor by a dielectric isolation structure. An accumulation region with an underlying depletion region can be formed in such a diode structure between the third region and the second or the first region, and such an accumulation region preferably has a width that is positively correlated with that of the second or the first gate conductor.
Abstract:
PROBLEM TO BE SOLVED: To provide a method for forming a substrate contact in a substrate with a silicon-on-insulator region. SOLUTION: A shallow isolation trench is formed in a silicon-on-insulator. The shallow isolation trench is filled. A photoresist is glued onto a substrate. A contact trench is formed in the substrate through the filled, shallow isolation trench, the silicon-on-insulator, and a silicon substrate 3 at the lower side of the silicon-on-insulator. The contact trench is filled, a material 21 for filling the contact trench forms a contact to the silicon substrate 3, and grounds the substrate 3, thus solving the problem of the accumulation of static charge in the substrate 3.
Abstract:
A method of forming a contact to the substrate 3 of a silicon-on-insulator semiconductor device comprises forming an isolation trench (11, Fig 2) in the silicon layer 7, filling the trench with TEOS and forming a contact trench through the isolation trench such that the contact trench makes contact with the underlying substrate 3. The contact trench is filled with polysilicon 21 or tungsten and may be ring shaped to form a guard ring. The contact trench may be used to ground the substrate.
Abstract:
A semiconductor chip includes a semiconductor substrate having a rectifying contact diffusion and a non-rectifying contact diffusion. A halo diffusion is adjacent the rectifying contact diffusion and no halo diffusion is adjacent the non-rectifying contact diffusion. The rectifying contact diffusion can be a source/drain diffusion of an FET to improve resistance to punch-through. The non-rectifying contact diffusion may be an FET body contact, a lateral diode contact, or a resistor or capacitor contact. Avoiding a halo for non-rectifying contacts reduces series resistance and improves device characteristics. In another embodiment on a chip having devices with halos adjacent diffusions, no halo diffusion is adjacent a rectifying contact diffusion of a lateral diode, significantly improving ideality of the diode and increasing breakdown voltage.
Abstract:
A semiconductor chip includes a semiconductor substrate having a rectifying contact diffusion and a non-rectifying contact diffusion. A halo diffusion is adjacent the rectifying contact diffusion and no halo diffusion is adjacent the non-rectifying contact diffusion. The rectifying contact diffusion can be a source/drain diffusion of an FET to improve resistance to punch-through. The non-rectifying contact diffusion may be an FET body contact, a lateral diode contact, or a resistor or capacitor contact. Avoiding a halo for non-rectifying contacts reduces series resistance and improves device characteristics. In another embodiment on a chip having devices with halos adjacent diffusions, no halo diffusion is adjacent a rectifying contact diffusion of a lateral diode, significantly improving ideality of the diode and increasing breakdown voltage.