Abstract:
Disclosed is an electron emitter which is smaller in size, lower in operating voltage, and high in efficiency than the conventional ones. Also disclosed is an electron beam source using such an electron emitter. The electron emitter comprises a light-emitting element for irradiating a cathode with light, and at least electron-emitting surface of the cathode is composed of diamond. By having such a structure, the voltage for extracting electrons can be greatly lowered in this electron emitter than the conventional ones. Namely, there is obtained a small-sized electron emitter which can be operated at low voltage. The above-mentioned light-emitting element is preferably formed integrally with the cathode. The light-emitting element and the electrode are preferably composed of diamond. Further, it is desirable that the electron-emitting surface of the cathode is composed of an n-type or p-type diamond semiconductor.
Abstract:
An n-type diamond epitaxial layer 20 is formed by processing a single-crystalline ä100ü diamond substrate 10 so as to form a ä111ü plane, and subsequently by causing diamond to epitaxially grow while n-doping the diamond ä111ü plane. Further, a combination of the n-type semiconductor diamond, p-type semiconductor diamond, and non-doped diamond, obtained in the above-described way, as well as the use of p-type single-crystalline ä100ü diamond substrate allow for a pn junction type, a pnp junction type, an npn junction type and a pin junction type semiconductor diamond to be obtained.
Abstract:
An electron emission element (2) includes an electron emission unit (6) made of diamond. When an electron emission current value is equal to or above 10 µA in the electron emission element (2), a deviation of the electron emission current value for one hour is within ± 20%. Moreover, the number of generations of a stepwise noise in which the electron emission current value changes stepwise is once or below per 10 minutes.
Abstract:
Disclosed is an optical thin film wherein a hydrogenated carbon film mainly containing at least carbon and hydrogen is formed on a substrate and at least one protective layer composed of any one of an oxide film, a nitride film, an oxynitride film, a fluoride film and a film mainly containing hydrogen and carbon is formed on the hydrogenated carbon film.
Abstract:
A diamond electrode having a sufficiently low resistance is disclosed which is realized by increasing the amount of boron added thereto. A method for producing a high-performance, high-durability electrode is also disclosed by which adhesiveness between a diamond coating and a substrate and separation resistance during electrolysis are sufficiently increased. An electrode composed of a substrate and a diamond layer coating the substrate is characterized in that the electrode is composed of a base coated with diamond and the diamond contains boron in such an amount that the boron concentration is not less than 10,000 ppm but not more than 100,000 ppm. The base is preferably made of an insulating material.