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    Electron Gun, Method of Controlling Same, and Electron Beam Additive Manufacturing Machine
    136.
    发明申请
    Electron Gun, Method of Controlling Same, and Electron Beam Additive Manufacturing Machine 有权
    电子枪，控制方法和电子束添加剂制造机

    公开(公告)号：US20150270088A1

    公开(公告)日：2015-09-24

    申请号：US14621526

    申请日：2015-02-13

    Applicant: JEOL Ltd.

    Inventor： Takashi Satoh

    IPC: H01J3/08 ,  H01J3/02

    CPC classification number: H01J3/08 ,  B22F3/1055 ,  B23K15/002 ,  B23K15/0026 ,  B23K15/0086 ,  B23K15/06 ,  B33Y30/00 ,  H01J3/02 ,  H01J3/024 ,  H01J3/027 ,  H01J37/063 ,  H01J37/305 ,  H01J2237/06308 ,  H01J2237/065 ,  H01J2237/3128 ,  Y02P10/295

    Abstract: There is disclosed a method of controlling an electron gun without causing decreases in brightness of the electron beam if a current-limiting aperture cannot be used. The electron gun (10) has a cathode (11), a Wehnelt electrode (12), a control electrode (13), an anode (14), and a controller (22). The Wehnelt electrode (12) has a first opening (12c) in which the tip of the cathode is inserted, and focuses thermal electrons emitted from the tip of the cathode (11). The thermal electrons emitted from the tip of the cathode (11) are caused to pass into a second opening (13c) by the control electrode (13). The anode (14) accelerates the thermal electrons emitted from the cathode (11) such that the thermal electrons passed through the second opening (13c) pass through a third opening (14b) and impinge as an electron beam (B1) on a powdered sample (8). The controller (22) sets the bias voltage and the control voltage based on combination conditions of the bias voltage and control voltage to maintain the brightness of the beam constant.

    Abstract translation: 如果不能使用限流孔，则公开了一种控制电子枪而不引起电子束亮度降低的方法。 电子枪（10）具有阴极（11），Wehnelt电极（12），控制电极（13），阳极（14）和控制器（22）。 Wehnelt电极（12）具有插入阴极顶端的第一开口（12c），并聚焦从阴极（11）的尖端发射的热电子。 从阴极（11）的顶端发射的热电子被控制电极（13）通入第二开口（13c）。 阳极（14）加速从阴极（11）发射的热电子，使得穿过第二开口（13c）的热电子通过第三开口（14b）并作为电子束（B1）撞击在粉末样品上 （8）。 控制器（22）基于偏置电压和控制电压的组合条件设置偏置电压和控制电压，以保持光束的亮度恒定。

    Gun configured to generate charged particles
    137.
    发明授权
    Gun configured to generate charged particles 有权
    枪被配置成产生带电粒子

    公开(公告)号：US09093243B2

    公开(公告)日：2015-07-28

    申请号：US14284128

    申请日：2014-05-21

    Applicant: NATIONAL UNIVERSITY OF SINGAPORE

    Inventor： Anjam Khursheed

    IPC: H01J37/26 ,  H01J3/18 ,  H01J3/20 ,  H01J3/02

    CPC classification number: H01J3/18 ,  H01J3/021 ,  H01J3/027 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/26 ,  H01J2237/06333 ,  H01J2237/0635 ,  H01J2237/1534

    Abstract: A gun configured to generate charged particles, comprising a ring-cathode (200) electrically configured to generate a charged particle beam; a lens arranged to focus the charged particle beam on a specimen; and at least one correction focusing electrode (1406) arranged to generate at least one electrostatic/magnetic field to further divergently/convergently focus the charged particle beam for correcting in-plane geometric aberrations associated with the lens, the focusing being based on the in-plane geometric aberrations associated with the lens. A related method is also disclosed.

    Abstract translation: 一种配置成产生带电粒子的枪，包括电气配置以产生带电粒子束的环形阴极（200）; 透镜，布置成将带电粒子束聚焦在样本上; 以及至少一个校正聚焦电极（1406），其布置成产生至少一个静电/磁场，以进一步发散/收敛地聚焦带电粒子束，用于校正与透镜相关联的面内几何像差， 与透镜相关的平面几何像差。 还公开了相关方法。

    Cathode Assembly For Use In A Radiation Generator
    138.
    发明申请
    Cathode Assembly For Use In A Radiation Generator 有权
    用于辐射发生器的阴极组件

    公开(公告)号：US20150022080A1

    公开(公告)日：2015-01-22

    申请号：US13945589

    申请日：2013-07-18

    Applicant: Schlumberger Technology Corporation

    Inventor： Brian Umbach

    IPC: H01J1/94 ,  H01J9/18 ,  H01J43/00

    CPC classification number: H01J1/94 ,  H01J1/16 ,  H01J1/18 ,  H01J3/027 ,  H01J3/04 ,  H01J9/18 ,  H01J27/022 ,  H01J35/06 ,  H01J43/00 ,  H05H3/06

    Abstract: A cathode assembly is for use in a radiation generator and includes an ohmically heated cathode, and a support having formed therein a hole and a recess at least partially surrounding the hole. In addition, there is a mount coupled to the support. The mount includes a larger outer frame positioned within the recess, a smaller inner frame carrying the ohmically heated cathode and spaced apart from the larger outer frame, and a plurality of members coupling the smaller inner frame to the larger outer frame.

    Abstract translation: 阴极组件用于辐射发生器中并且包括欧姆加热的阴极，以及在其中形成有孔和至少部分地围绕孔的凹部的支撑件。 另外，还有一个联接在支架上的支架。 安装座包括位于凹槽内的较大外框架，承载欧姆加热阴极并与较大外框架间隔开的较小内框架，以及将较小内框架连接到较大外框架的多个构件。

    ELECTROSTATIC LENS AND METHOD OF MANUFACTURING THE SAME
    140.
    发明申请
    ELECTROSTATIC LENS AND METHOD OF MANUFACTURING THE SAME 审中-公开
    静电镜片及其制造方法

    公开(公告)号：US20130334437A1

    公开(公告)日：2013-12-19

    申请号：US13900947

    申请日：2013-05-23

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Tadayuki Yoshitake ,  Yoichi Ando

    IPC: H01J29/62 ,  H01J9/18

    CPC classification number: H01J29/62 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/46 ,  H01J3/027 ,  H01J9/14 ,  H01J9/18 ,  H01J37/12 ,  H01J37/3177 ,  H01J2237/1205 ,  Y10T29/49082

    Abstract: An electrostatic lens includes a first electrode and a second electrode that are arranged oppositely relative to each other with a gap separating them from each other and the first and second electrodes have respective through-holes for allowing a charged particle beam to pass through the through-hole, wherein at least either the first electrode or the second electrode comprises two or more regions; and the through-hole of the electrode with the two or more regions is arranged at least in one of the regions; while the regions are electrically connected to each other by way of a resistor.

    Abstract translation: 静电透镜包括彼此相对布置的第一电极和第二电极，其间隔开彼此间隔开，并且第一和第二电极具有用于允许带电粒子束穿过通孔的通孔， 其中所述第一电极或所述第二电极中的至少一个包括两个或更多个区域; 并且具有两个或更多个区域的电极的通孔至少布置在其中一个区域中; 而这些区域通过电阻器彼此电连接。

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