REDUCTION OF DEPOSITION BY SEPARATION ION BEAM AND NEUTRAL FLOW
    131.
    发明申请
    REDUCTION OF DEPOSITION BY SEPARATION ION BEAM AND NEUTRAL FLOW 审中-公开
    通过分离离子束和中性流减少沉积

    公开(公告)号:WO2014197391A1

    公开(公告)日:2014-12-11

    申请号:PCT/US2014/040551

    申请日:2014-06-02

    CPC classification number: H01J37/3171 H01J37/05

    Abstract: Ion implantation systems that separate the flow of ions from the flow of neutral particles are disclosed. The separation of neutral particles from ions can be achieved by manipulating the flow of ions in the system through variations in electrical or magnetic fields disposed within the implantation system. The path of neutral particles is less affected by electrical and magnetic fields than ions. The separation of these flows may also be accomplished by diverting the neutral particles from the ion beam, such as via an introduced gas flow or a flow blockage. Both separation techniques can be combined in some embodiments.

    Abstract translation: 公开了将离子流从中性粒子流分离的离子注入系统。 中性粒子与离子的分离可以通过在植入系统内设置的电场或磁场的变化来操纵系统中的离子流来实现。 中性粒子的路径比离子更少受电场和磁场的影响。 这些流动的分离也可以通过将中性粒子从离子束转移,例如通过引入的气流或阻流来实现。 在一些实施方案中,两种分离技术都可以组合。

    走査電子顕微鏡
    132.
    发明申请
    走査電子顕微鏡 审中-公开
    扫描电子显微镜

    公开(公告)号:WO2013129125A1

    公开(公告)日:2013-09-06

    申请号:PCT/JP2013/053608

    申请日:2013-02-15

    Abstract:  本発明は、高分解能化とパターンの識別能力向上の両立を実現する走査電子顕微の提供を目的とする。上記目的を達成するために本発明では、電子ビーム(3)をモノクロ化するモノクロメータ(20)を備えた走査電子顕微鏡において、モノクロメータは、電子ビームを偏向する磁場発生器(21)と、磁場発生器により偏向された電子ビームの一部を通過させるエネルギー選択絞り(23)を備え、試料から放出される電子が前記磁場発生器が発生する磁場によって偏向される軌道上に、前記試料から放出された電子の一部を通過させる絞り(27)と、当該絞りを通過した電子を検出する検出器(28,29)を配置した走査電子顕微鏡を提案する。

    Abstract translation: 本发明的目的是提供能够提高分辨率和改进的图案识别能力的扫描电子显微镜。 为了实现这一点,提供了包括形成单色电子束(3)的单色器(20)的扫描电子显微镜,其中:单色仪包括使电子束偏转的磁场发生器(21),并且能量选择 孔(23),允许由磁场发生器偏转的电子束的一部分通过; 以及允许样品发射的一些电子通过的孔径(27)和检测通过所述孔径的电子的检测器(28,29)被布置在从样品发射的电子的轨道上 由磁场发生器产生的磁场偏离。

    BEAM LINE DESIGN TO REDUCE ENERGY CONTAMINATION
    133.
    发明申请
    BEAM LINE DESIGN TO REDUCE ENERGY CONTAMINATION 审中-公开
    光束线设计,以减少能源污染

    公开(公告)号:WO2013106220A1

    公开(公告)日:2013-07-18

    申请号:PCT/US2013/000017

    申请日:2013-01-14

    Abstract: Methods and apparatus for reducing energy contamination can be provided to a beam line assembly for ion implantation. Protrusions comprising surface areas and grooves therebetween can face neutral trajectories within a line of sight view from the workpiece within the beam line assembly. The protrusions can alter the course of the neutral trajectories away from the workpiece or cause alternate trajectories for further impacting before hitting a workpiece, and thereby, further reduce energy contamination for more sensitive implants.

    Abstract translation: 可以将用于减少能量污染的方法和装置提供给用于离子注入的束线组件。 包括其间的表面区域和凹槽的突起物可以在束线组件内的工件的视线范围内面对中性轨迹。 突起可以改变中立轨迹离开工件的过程,或者在撞击工件之前引起交替的轨迹以进一步冲击,从而进一步降低更敏感的植入物的能量污染。

    반사전자 검출 기능을 구비한 주사전자현미경
    134.
    发明申请
    반사전자 검출 기능을 구비한 주사전자현미경 审中-公开
    扫描电子显微镜配备反向散射电子检测功能

    公开(公告)号:WO2013047919A1

    公开(公告)日:2013-04-04

    申请号:PCT/KR2011/007128

    申请日:2011-09-28

    Abstract: 본 발명은 반사전자 검출 기능을 구비한 주사전자현미경에 관한 것으로서, 본 발명에 따른 반사전자 검출 기능을 구비한 주사전자현미경은 광소스로부터 생성되는 1차전자(Primary Electron)를 시료로 입사시키고, 상기 1차전자가 입사된 후 시료로부터 방출되는 방출전자를 검출하기 위한 주사전자현미경에 있어서, 상기 광소스와 상기 시료 사이에 배치되며, 자기장 및 전기장을 발생시킴으로써, 상기 방출전자를 2차전자(Secondary Electron)와 상기 반사전자(Back Scattered Electron)로 분리하는 빈필터부; 상기 빈필터부로부터 분리되는 2차전자와 반사전자를 각각 디텍팅하는 디텍팅부;를 포함하는 것을 특징으로 한다. 이에 의하여, 빈필터를 이용하여 2차전자와 반사전자를 분리하여 디텍팅할 수 있는 반사전자 검출 기능을 구비한 주사전자현미경이 제공된다.

    Abstract translation: 本发明涉及一种装备有背散射电子检测功能的扫描电子显微镜,其使得从光源产生的一次电子进入样本,并且在一次电子进入其中之后,检测从样品发射的发射电子 。 具有背散射电子检测功能的扫描电子显微镜的特征在于包括:维纳滤波器单元,其布置在光源和样本之间,并且通过产生磁性将发射的电子分离成二次电子和背散射电子 场和电场; 以及检测单元,其检测由维恩滤波器单元分离的二次电子和背散射电子。 因此,提供了配备有背散射电子检测功能的扫描电子显微镜,其能够由于使用维恩滤波器而分离和检测二次电子和反向散射电子。

    走査電子顕微鏡及びそれを用いた測長方法
    136.
    发明申请
    走査電子顕微鏡及びそれを用いた測長方法 审中-公开
    扫描电子显微镜和使用该扫描电子显微镜的长度测量方法

    公开(公告)号:WO2012081428A1

    公开(公告)日:2012-06-21

    申请号:PCT/JP2011/078013

    申请日:2011-12-05

    Abstract: 本発明の走査電子顕微鏡は、電子源(102)と、一次電子線(138)を試料(113)に照射するための電子光学系(109、110、111)と、前記試料から放出される信号電子(139)を検出する電子検出器(127)と、減速電界型エネルギーフィルタ(108)とを備え、前記減速電界型エネルギーフィルタは信号電子のエネルギー弁別用の導体薄膜(304)を有する。これにより、リターディング光学系を有する場合であっても高いエネルギー分解能が得られる減速電界型エネルギーフィルタを備えた走査電子顕微鏡を実現できる。

    Abstract translation: 该电子扫描显微镜包括用于将样品(113)暴露于一次电子束(138)的电子源(102),用于检测信号电子(139)的电子检测器(127)的电子光学系统(109,110,111) 从所述样品发射的减速电场型能量过滤器(108)。 减速电场型能量滤波器具有用于区分信号电子能量的半导体薄膜(304)。 利用这种结构,即使在扫描电子显微镜具有延迟光学系统的情况下,也可以实现具有能够获得高能量分辨率的减速电场型能量过滤器的扫描电子显微镜。

    IMPROVEMENTS IN AND RELATING TO ION GUNS
    137.
    发明申请
    IMPROVEMENTS IN AND RELATING TO ION GUNS 审中-公开
    改进和相关于离子钥匙

    公开(公告)号:WO2012049110A2

    公开(公告)日:2012-04-19

    申请号:PCT/EP2011/067626

    申请日:2011-10-10

    Inventor: BARNARD, Bryan

    Abstract: A method of processing one or more surfaces is provided, comprising: providing a switchable ion gun which is switchable between a cluster mode setting for producing an ion beam substantially comprising ionised gas clusters for irradiating a surface and an atomic mode setting for producing an ion beam substantially comprising ionised gas atoms for irradiating a surface; and selectively operating the ion gun in the cluster mode by mass selecting ionised gas clusters using a variable mass selector thereby irradiating a surface substantially with ionised gas clusters or the atomic mode by mass selecting ionised gas atoms using a variable mass selector thereby irradiating a surface substantially with ionised gas atoms. Also provided is a switchable ion gun comprising: a gas expansion nozzle for producing gas clusters; an ionisation chamber for ionising the gas clusters and gas atoms; and a variable (preferably a magnetic sector) mass selector for mass selecting the ionised gas clusters and ionised gas atoms to produce an ion beam variable between substantially comprising ionised gas clusters and substantially comprising ionised gas atoms. Preferably, the gun comprises an electrically floating flight tube for adjusting the energy of the ions whilst within the mass selector.

    Abstract translation: 提供一种处理一个或多个表面的方法,包括:提供可切换离子枪,其可在用于产生基本上包括用于照射表面的电离气体簇的离子束的簇模式设置和用于产生离子束的原子模式设置之间切换 基本上包括用于照射表面的电离气体原子; 并且通过使用可变质量选择器质量选择电离气体簇来选择性地操作离子枪,从而通过使用可变质量选择器大量选择电离气体原子而基本上用电离气体簇或原子模式照射表面,从而基本上照射表面 具有电离气体原子。 还提供了一种可切换离子枪,包括:用于产生气体团的气体膨胀喷嘴; 用于电离气团和气原子的电离室; 以及用于质量选择电离气体团簇和电离气体原子以产生基本上包含电离气体簇并且基本上包含电离气体原子的离子束可变的变量(优选磁性扇区)质量选择器。 优选地,枪包括电浮动飞行管,用于在质量选择器内调节离子的能量。

    METHOD FOR DISCRIMINATION OF BACKSCATTERED FROM INCOMING ELECTRONS IN IMAGING ELECTRON DETECTORS WITH A THIN ELECTRON-SENSITIVE LAYER
    138.
    发明申请
    METHOD FOR DISCRIMINATION OF BACKSCATTERED FROM INCOMING ELECTRONS IN IMAGING ELECTRON DETECTORS WITH A THIN ELECTRON-SENSITIVE LAYER 审中-公开
    用于将具有电子感应层的电子探测器放入电子装置中进行分离的方法

    公开(公告)号:WO2010151810A1

    公开(公告)日:2010-12-29

    申请号:PCT/US2010/040055

    申请日:2010-06-25

    Inventor: MOONEY, Paul

    Abstract: Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and out events and incoming events caused by particles which backscatter out of the device, hit nearby mechanical structures and are scattered back into the device. Exemplary method steps include discriminating incoming traversal events from outgoing backscatter events, higher-order in and out events and incoming events by limiting dose rate to a level at ensures that separate events do not overlap and discriminating events from background and from other events based on total energy in each event; discriminating backscatter events from incoming traversal events based on electron path shape; or determining that a first event and a second event are coincident with each other and separating incoming form backscatter events based on electron path shape and energy level.

    Abstract translation: 公开了用于操作具有高能量粒子检测器的装置的方法,其中颗粒产生第一进入的穿越事件,出射的后向散射事件,高阶进入和离开事件以及由反向散射出装置的颗粒引起的进入事件,撞击附近的机械结构 并分散回设备。 示例性方法步骤包括通过将剂量率限制到一个水平来区分进入的遍历事件与输出的后向散射事件,高阶进入和离开事件以及进入的事件,以确保单独的事件不会与基于总计的背景和来自其他事件的事件重叠和区分事件 每个事件的能量; 基于电子路径形状鉴别反向散射事件与进入的穿越事件; 或者确定第一事件和第二事件彼此重合,并基于电子路径形状和能级分离入射形式的反向散射事件。

    AN IMAGING DETECTOR FOR A SCANNING CHARGED PARTICLE MICROSCOPE
    139.
    发明申请
    AN IMAGING DETECTOR FOR A SCANNING CHARGED PARTICLE MICROSCOPE 审中-公开
    用于扫描充电颗粒显微镜的成像检测器

    公开(公告)号:WO2010148423A1

    公开(公告)日:2010-12-29

    申请号:PCT/AU2010/000737

    申请日:2010-06-15

    Inventor: GRIFFIN, Brendan

    Abstract: The present disclosure provides a component for an imaging detector of a scanning charged particle microscope. The scanning changed particle microscope has a column for providing a scanning beam of the charged particles. The imaging detector is arranged for detecting off-axis electrons at a position outside the column and comprises an electron receiving element that is arranged to generate a signal in response to an intensity of received electrons. The detector component also comprises a filter that has a solid screening element and is arranged such that at least a portion of the electrons that have an initial kinetic energy within a first energy range are captured by the screening element and prevented from being received by the electron receiving element and at least a portion of the electrons that have an initial kinetic energy within a second energy range are received by the electron receiving element. The first energy range includes higher energies than the second energy range.

    Abstract translation: 本公开提供了用于扫描带电粒子显微镜的成像检测器的部件。 扫描改变的微粒显微镜具有用于提供带电粒子的扫描光束的列。 成像检测器被设置用于在柱外部的位置处检测离轴电子,并且包括电子接收元件,其被布置成响应于接收的电子的强度产生信号。 检测器部件还包括具有固体屏蔽元件的滤波器,并且被布置成使得在第一能量范围内具有初始动能的至少一部分电子被屏蔽元件捕获并防止被电子接收 接收元件和在第二能量范围内具有初始动能的至少一部分电子被电子接收元件接收。 第一能量范围包括比第二能量范围更高的能量。

    ENHANCED LOW ENERGY ION BEAM TRANSPORT IN ION IMPLANTATION
    140.
    发明申请
    ENHANCED LOW ENERGY ION BEAM TRANSPORT IN ION IMPLANTATION 审中-公开
    在离子植入中增强低能量离子束运输

    公开(公告)号:WO2010085349A1

    公开(公告)日:2010-07-29

    申请号:PCT/US2010/000167

    申请日:2010-01-22

    Abstract: An ion implantation method and system that incorporate beam neutralization to mitigate beam blowup, which can be particularly problematic in low-energy, high-current ion beams. The beam neutralization component can be located in the system where blowup is likely to occur. The neutralization component includes a varying energizing field generating component that generates plasma that neutralizes the ion beam and thereby mitigates beam blowup. The energizing field is generated with varying frequency and/or field strength in order to maintain the neutralizing plasma while mitigating the creation of plasma sheaths that reduce the effects of the neutralizing plasma.

    Abstract translation: 一种离子注入方法和系统,其结合光束中和以减轻光束吹胀,这在低能量,高电流离子束中可能是特别有问题的。 光束中和组件可以位于可能发生喷射的系统中。 中和组件包括变化的激发场产生组件,其产生中和离子束的等离子体,从而减轻束吹。 产生具有变化的频率和/或场强的激励场,以便维持中和等离子体,同时减轻等离子体护套的产生,从而降低中和等离子体的影响。

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