METHOD FOR MANUFACTURING SILICON OPTICAL INTERPOSER, METHOD FOR MANUFACTURING THREE-DIMENSIONAL STRUCTURE, METHOD FOR INTEGRATING SURFACE-ELECTRODE ION TRAP AND SILICON PHOTOELECTRONIC DEVICE, INTEGRATED STRUCTURE, AND THREE-DIMENSIONAL STRUCTURE

    公开(公告)号:SG11202012334SA

    公开(公告)日:2021-06-29

    申请号:SG11202012334S

    申请日:2019-11-21

    Abstract: An integrated method for a silicon optical adapter adapter plate and a three-dimensional architecture, capable of making the chip encapsulation area smaller, and achieving a higher integration level, a smaller electrical signal delay and a higher bandwidth and speed, and an integrated method for a surface electrode ion trap, a silicon optical device and a three-dimensional architecture, an integrated structure and a three-dimensional architecture with a strong stability, miniaturization, versatility and expandability. The integration of the three-dimensional architecture is realized on the basis of the integration of a through-silicon via and a silicon optical device, so that the integrated chip area can be smaller and the integration level can be higher, and the formed three-dimensional architecture has a smaller electrical signal delay and a higher bandwidth and speed. The surface electrode ion trap is integrated with a silicon single-photon avalanche detector or a silicon-based germanium single-photon avalanche detector, a silicon grating and/or a silicon nitride grating and a through-silicon via. After being powered on, the surface electrode ion trap is used to capture ions and trap same in a certain range. A laser source is coupled to the silicon grating and/or the silicon nitride grating by using any coupling mode such as end-face coupling. The laser is emitted to the ions via the silicon grating and/or the silicon nitride grating on three orientations to complete addressing. The ions can undergo energy level transition after being excited by light. After energy level transition, the ions can radiate fluorescent light. The fluorescent light is detected by the silicon single-photon avalanche detector or the silicon-based germanium single-photon avalanche detector, and the detection of quantum bit information is finally completed.

    METHOD FOR MANUFACTURING GATE-ALL-AROUND TFET DEVICE

    公开(公告)号:US20250006822A1

    公开(公告)日:2025-01-02

    申请号:US18708028

    申请日:2023-11-27

    Abstract: A method for manufacturing a gate-all-around TFET device. The method comprises: forming, on a substrate, a channel stack comprising channel layer(s) and sacrificial layer(s) that alternate with each other; forming, on the substrate, a dummy gate astride the channel stack; forming a first spacer at a surface of the dummy gate; etching the sacrificial layer(s) to form recesses on side surfaces of the channel stack; forming second spacers in the recesses, respectively; fabricating a source and a drain separately, where a region for fabricating the source is shielded by a dielectric material when fabricating the drain, and a region for fabricating the drain is shielded by another dielectric material when fabricating the source; etching the dummy gate and the sacrificial layer(s) to form a space for a surrounding gate; and fabricating a surrounding dielectric-metal gate in the space.

    MEMORY CELL, THREE-DIMENSIONAL MEMORY, AND METHOD OF OPERATING THREE-DIMENSIONAL MEMORY

    公开(公告)号:US20240421032A1

    公开(公告)日:2024-12-19

    申请号:US18703924

    申请日:2021-11-02

    Abstract: The memory cell includes: an array of channel layers including N channel layers vertically provided on a substrate, a tunneling layer and a memory layer being sequentially provided on an outer side of the channel layers; N thermal conductive cores provided in the N channel layers respectively and penetrating the substrate; and an array of thermocouples including a thermocouple word line layer grown on the substrate and N thermocouple layers on the thermocouple word line layer, the thermocouple layers being connected one-to-one with the thermal conductive cores. A first potential difference is applied between the thermocouple word line layer and the thermocouple layer, and the thermal conductive core connected with the thermocouple layer is heated, so that the channel layer and the memory layer corresponding to the thermal conductive core are maintained at first and second preset temperatures respectively under a thermal insulation effect of the tunneling layer.

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