중합체 제조 방법 및 실리카계 절연막 형성용 조성물
    13.
    发明公开
    중합체 제조 방법 및 실리카계 절연막 형성용 조성물 有权
    生产聚合物的方法和用于形成二氧化硅绝缘膜的组合物

    公开(公告)号:KR1020140087908A

    公开(公告)日:2014-07-09

    申请号:KR1020120158707

    申请日:2012-12-31

    Abstract: Provided are a method for manufacturing a polymer which is a method for manufacturing a polysilazane having a Si-N linkage on a main chain, and comprises the step of polymerizing through a disproportionation reaction and rearrangement reaction by activating an amino silane monomer represented by the following chemical formula 1 with the existence of a nucleophilic compound capable of coordination of the Si atom of the amino silane, and a composition for forming an insulation film comprising the manufactured polymer. [Chemical formula 1] A polysilazne polymer not substantially comprising chlorine can be manufactured, and an insulation film with the significantly less number of defects, in the case of using the polymer as a component of the composition for forming a silica-based insulation film.

    Abstract translation: 提供一种制造聚合物的方法,该聚合物是在主链上具有Si-N键的聚硅氮烷的制造方法,包括通过歧化反应和重排反应进行聚合的步骤,其通过活化下述的氨基硅烷单体 存在能够配位氨基硅烷的Si原子的亲核化合物的化学式1和用于形成包含所制备的聚合物的绝缘膜的组合物。 [化学式1]在使用聚合物作为形成二氧化硅系绝缘膜的组合物的成分的情况下,可以制造实质上不含氯的聚硅氮烷聚合物,以及具有明显较少缺陷数量的绝缘膜。

    중합체 제조 방법 및 실리카계 절연막 형성용 조성물
    14.
    发明公开
    중합체 제조 방법 및 실리카계 절연막 형성용 조성물 有权
    生产聚合物的方法和用于形成二氧化硅绝缘膜的组合物

    公开(公告)号:KR1020140087903A

    公开(公告)日:2014-07-09

    申请号:KR1020120158699

    申请日:2012-12-31

    Abstract: Provided are a method for manufacturing a polymer which is a method for manufacturing a polysilazane having a Si-N linkage on a main chain, and comprises the step of reacting an amino silane monomer represented by the following chemical formula 1 with a nitrogen contained compound represented by chemical formula 1 with the existence of a nucleophilic compound capable of coordination of the Si atom of the amino silane, and a method for manufacturing a polymer comprising comprising the manufactured polymer. [Chemical formula 1] A polysilazne or polysiloxazane polymer not substantially comprising chlorine can be manufactured, and an insulation film with the significantly less number of defects, in the case of using the polymer as a component of the composition for forming a silica-based insulation film.

    Abstract translation: 提供一种制造聚合物的方法,该聚合物是在主链上具有Si-N键的聚硅氮烷的制造方法,包括使由以下化学式1表示的氨基硅烷单体与含氮化合物表示的步骤 通过存在能够配位氨基硅烷的Si原子的亲核化合物的化学式1,以及包含制造的聚合物的聚合物的制造方法。 [化学式1]在使用聚合物作为形成二氧化硅基绝缘的组合物的组分的情况下,可以制造基本上不含氯的聚硅氮烷或聚硅氧烷氮化合物聚合物,并且具有显着更少数量的缺陷的绝缘膜 电影。

    중합체 제조 방법 및 실리카계 절연막 형성용 조성물
    16.
    发明授权
    중합체 제조 방법 및 실리카계 절연막 형성용 조성물 有权
    生产聚合物的方法和用于形成二氧化硅绝缘膜的组合物

    公开(公告)号:KR101599952B1

    公开(公告)日:2016-03-04

    申请号:KR1020120158699

    申请日:2012-12-31

    Abstract: 주쇄에 Si-N 연결(linkage)을가지는폴리실라잔중합체의제조방법으로서, 하기화학식 1로나타내어지는아미노실란단량체를, 상기아미노실란단량체의 Si원자를배위할수 있는친핵성화합물의존재하에, 하기화학식 2로나타내어지는질소함유화합물과반응시키는단계를포함하는중합체제조방법및 이로부터제조된중합체를포함하는중합체제조방법이제공된다:NRRR상기화학식 1에서, R, R, 및 R는동일하거나상이하며, 각각독립적으로, 수소, -Si(R), C1 내지 C30의알킬기, C6 내지 C20의아릴기, C1 내지 C10의알콕시기, C6 내지 C20의아릴옥시기, C1 내지 C20의알킬또는아릴옥시카르보닐기, C1 내지 C20의아실기, 또는 C1 내지 C20의아실옥시기이되, R, R, 및 R중하나이상은 -Si(R)이고, 여기서 R는동일하거나상이하며, 각각독립적으로, 수소, C1 내지 C30의알킬기, C6 내지 C20의아릴기, C1 내지 C10의알콕시기, 또는 C6 내지 C20의아릴옥시기이되, R중하나이상은수소이고;NHR상기화학식 2에서, R는 R는수소, C1 내지 C30의알킬기, C1 내지 C10의알콕시기, C6 내지 C20의아릴옥시기, C1 내지 C20의알킬또는아릴옥시카르보닐기, -NH, C1 내지 C20의아실기, C1 내지 C20의아실옥시기히드록시기, 또는아민기임.

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