Abstract:
PURPOSE: Copper aminoalkoxide complexes, a preparation method thereof and a process for formation of the copper thin film using the same complexes are provided. The complexes have high volatility and thermal stability, and are reduced into copper without any reducing agent. Therefore, the complexes can be useful for formation of the high quality copper thin film. CONSTITUTION: A copper aminoalkoxide complex is represented by the formula(1), wherein m is an integer of 1 to 3; n is an integer of 2 to 4; and R and R' are C1-4 alkyl optionally containing fluor. A copper aminoalkoxide complex is represented by the formula(2), wherein m is an integer of 1 to 3; n is an integer of 2 to 4; and R and R' are C1-4 alkyl optionally containing fluor. The method for preparing the copper aminoalkoxide complex of the formula(1) comprises reacting copper alkoxide or copper halogenide with amino alkoxide compound of alkali metals(MOCR'2(CH2)mNR2), wherein M is Li or Na. The method for preparing the copper aminoalkoxide complex of the formula(2) comprises reacting copper alkoxide or copper halogenide with amino alkoxide compound of alkali metals(MOC(R')2(CH2)mO(CH2)nNR2), wherein M is Li or Na.
Abstract:
PURPOSE: Provided is an organic alkali earth metal complex with thermal stability and good vaporization for formation of metal oxide composite films. The resultant complex is adapted to the production of semiconductors, photoelectrics and piezoelectrics. CONSTITUTION: The complex of organic alkali earth metals, L-M-L', is prepared by adding alcohol to organic solution containing alkali earth metal, expressed by the formula MX + xs HOR -->£M(OR)2|n, followed by mixing with chelate ligands L and L', expressed by the formula £M(OR)2|n + L + L' -->L-M-L', where M is Ba, Sr or Ca, L is R(CH3)CH(OH) (CH2)nCH(OH)(CH3)R'(R and R' are C1-C10 alkyl group, and n is an integer of 1-5), L' is N(CH2CH2XCH2CH2YZ)3(X and Y are O or NH, and Z is C1-C10 alkyl group).