구리 아미노알콕사이드 화합물, 이의 합성 방법 및 이를이용한 구리 박막의 형성 방법
    11.
    发明公开
    구리 아미노알콕사이드 화합물, 이의 합성 방법 및 이를이용한 구리 박막의 형성 방법 有权
    用于形成高质量铜薄膜的铜亚胺氧化物复合物及其制备方法和使用该铜膜形成铜薄膜的方法

    公开(公告)号:KR1020040076758A

    公开(公告)日:2004-09-03

    申请号:KR1020030012108

    申请日:2003-02-26

    CPC classification number: C07F1/08 C23C16/18

    Abstract: PURPOSE: Copper aminoalkoxide complexes, a preparation method thereof and a process for formation of the copper thin film using the same complexes are provided. The complexes have high volatility and thermal stability, and are reduced into copper without any reducing agent. Therefore, the complexes can be useful for formation of the high quality copper thin film. CONSTITUTION: A copper aminoalkoxide complex is represented by the formula(1), wherein m is an integer of 1 to 3; n is an integer of 2 to 4; and R and R' are C1-4 alkyl optionally containing fluor. A copper aminoalkoxide complex is represented by the formula(2), wherein m is an integer of 1 to 3; n is an integer of 2 to 4; and R and R' are C1-4 alkyl optionally containing fluor. The method for preparing the copper aminoalkoxide complex of the formula(1) comprises reacting copper alkoxide or copper halogenide with amino alkoxide compound of alkali metals(MOCR'2(CH2)mNR2), wherein M is Li or Na. The method for preparing the copper aminoalkoxide complex of the formula(2) comprises reacting copper alkoxide or copper halogenide with amino alkoxide compound of alkali metals(MOC(R')2(CH2)mO(CH2)nNR2), wherein M is Li or Na.

    Abstract translation: 目的:提供氨基烷氧基铜络合物及其制备方法和使用相同复合物形成铜薄膜的方法。 络合物具有高挥发性和热稳定性,并且在没有任何还原剂的情况下还原成铜。 因此,该复合物可用于形成高质量铜薄膜。 构成:铜氨基烷氧基络合物由式(1)表示,其中m为1至3的整数; n为2〜4的整数, 并且R和R'是任选地含氟的C 1-4烷基。 铜氨基醇氧化物配合物由式(2)表示,其中m为1至3的整数; n为2〜4的整数, 并且R和R'是任选地含氟的C 1-4烷基。 制备式(1)的氨基亚烷基氧化物络合物的方法包括使烷氧基铝或卤化铜与碱金属的烷氧基化合物(MOCR'2(CH2)mNR2)反应,其中M为Li或Na。 制备式(2)的氨基烷氧基铜络合物的方法包括使烷氧基铝或卤化铜与碱金属(MOC(R')2(CH2)mO(CH2)nNR2)的氨基醇盐化合物反应,其中M为Li或 娜。

    유기 알칼리토금속 착화합물
    12.
    发明公开
    유기 알칼리토금속 착화합물 失效
    有机碱金属复合物

    公开(公告)号:KR1020030002011A

    公开(公告)日:2003-01-08

    申请号:KR1020010038740

    申请日:2001-06-30

    CPC classification number: C07F3/00 C23C16/404

    Abstract: PURPOSE: Provided is an organic alkali earth metal complex with thermal stability and good vaporization for formation of metal oxide composite films. The resultant complex is adapted to the production of semiconductors, photoelectrics and piezoelectrics. CONSTITUTION: The complex of organic alkali earth metals, L-M-L', is prepared by adding alcohol to organic solution containing alkali earth metal, expressed by the formula MX + xs HOR -->£M(OR)2|n, followed by mixing with chelate ligands L and L', expressed by the formula £M(OR)2|n + L + L' -->L-M-L', where M is Ba, Sr or Ca, L is R(CH3)CH(OH) (CH2)nCH(OH)(CH3)R'(R and R' are C1-C10 alkyl group, and n is an integer of 1-5), L' is N(CH2CH2XCH2CH2YZ)3(X and Y are O or NH, and Z is C1-C10 alkyl group).

    Abstract translation: 目的:提供一种有机碱土金属络合物,具有热稳定性和良好的蒸发性,用于形成金属氧化物复合膜。 所得的复合物适用于制造半导体,光电和压电体。 构成:通过向含有碱土金属的有机溶液中加入醇制备有机碱土金属的混合物,由式MX + xs HOR→M(OR)2 | n表示,然后加入 与螯合配体L和L'混合,由式M M(OR)2 | n + L + L'→LM-L'表示,其中M是Ba,Sr或Ca,L是R(CH 3)CH (OH)(CH2)nCH(OH)(CH3)R'(R和R'是C1-C10烷基,n是1-5的整数),L'是N(CH2CH2XCH2CH2YZ)3(X和Y 是O或NH,Z是C 1 -C 10烷基)。

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