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    BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES
    11.
    发明申请
    BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 审中-公开
    从具有多种环氧基团的小核分子衍生的底部抗反射涂层

    公开(公告)号：WO2004034435A3

    公开(公告)日：2005-07-28

    申请号：PCT/US0332091

    申请日：2003-10-07

    Applicant: BREWER SCIENCE INC

    Inventor： NEEF CHARLES J ,  BHAVE MANDAR ,  FOWLER MICHELLE ,  WINDSOR MICHELLE

    IPC: C09B69/00 ,  G03F7/09 ,  G03C1/76 ,  G03F7/00

    CPC classification number: G03F7/091 ,  C09B69/00 ,  Y10S430/111 ,  Y10T428/31511 ,  Y10T428/31515

    Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.

    Abstract translation: 提供了包含小分子（例如小于约5,000g / mol）代替高分子量聚合物的新型抗反射涂层以及使用这些涂层的方法。 在一个实施方案中，使用芳族羧酸作为发色团，并将所得化合物与交联剂和酸共混。 与高分子量聚合物抗反射涂膜相比，根据本发明制备的抗反射涂膜显示出改进的性能。 小分子抗反射涂层具有高蚀刻速率和良好的通孔填充性能。 使用本发明材料进行的光刻工艺产生独立的110nm轮廓。

    SPIN BOWL COMPATIBLE POLYAMIC ACIDS/IMIDES AS WET DEVELOPABLE POLYMER BINDERS FOR ANTI-REFLECTIVE COATINGS
    12.
    发明申请
    SPIN BOWL COMPATIBLE POLYAMIC ACIDS/IMIDES AS WET DEVELOPABLE POLYMER BINDERS FOR ANTI-REFLECTIVE COATINGS 审中-公开
    作为抗反射涂层的可开发的聚合物粘合剂，旋转熔融的聚氨酯/

    公开(公告)号：WO2004000928A2

    公开(公告)日：2003-12-31

    申请号：PCT/US0319456

    申请日：2003-06-18

    Applicant: BREWER SCIENCE INC

    Inventor： COX ROBERT CHRISTIAN ,  NEEF CHARLES J

    IPC: G03F7/037 ,  C08G73/10 ,  G02B1/11 ,  G03F7/038 ,  G03F7/09 ,  G03F7/11 ,  H01L21/027 ,  C08L

    CPC classification number: C09D179/08 ,  C08G73/10 ,  C08G73/1025 ,  C08G73/1039 ,  C08G73/1064 ,  G02B1/111 ,  G03F7/038 ,  G03F7/091 ,  Y10S430/106 ,  Y10S430/151

    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers of the composition include recurring monomers having the formulas (1) and (2) where: (1) each R is individually selected from the group consisting of hydrogen, -OH, aliphatics, and phenyls; and (2) L is selected from the group consisting of -SO2- and - CR'2-, where each R' is individually selected from the group consisting of hydrogen, aliphatics, phenyls, and -CX3, where each X is individually selected from the group consisting of the halogens. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

    Abstract translation: 提供了抗反射组合物和使用这些组合物形成电路的方法。 组合物包含溶解或分散在溶剂体系中的聚合物。 在优选的实施方案中，组合物的聚合物包括具有式（1）和（2）的重复单体，其中：（1）每个R各自选自氢，-OH，脂族基和苯基; 和（2）L选自-SO 2 - 和-CR 2 - ，其中每个R'分别选自氢，脂族基，苯基和-CX 3，其中每个X被单独选择 来自由卤素组成的组。 所得到的组合物是旋转碗相容的（即，它们在微光刻工艺的烘烤阶段之前或在室温下储存期间不交联）是湿显影的并且具有优异的光学性能。

    WET-DEVELOPABLE ANTI-REFLECTIVE COMPOSITIONS
    13.
    发明申请
    WET-DEVELOPABLE ANTI-REFLECTIVE COMPOSITIONS 审中-公开
    可湿性抗反射组合物

    公开(公告)号：WO2004001806A3

    公开(公告)日：2004-09-16

    申请号：PCT/US0319906

    申请日：2003-06-24

    Applicant: BREWER SCIENCE INC

    Inventor： NEEF CHARLES J ,  KRISHNAMURTHY VANDANA

    IPC: C08G79/00 ,  C08L85/00 ,  G02B1/11 ,  G03C1/492 ,  G03C5/00

    CPC classification number: C08G79/00 ,  C08L85/00 ,  G02B1/111 ,  Y10S430/106 ,  C08L2666/02

    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers include a light-attenuating moiety having a structure selected from the group consisting of Formula (I) and (II), where each of X and Y is individually selected from the group consisting of electron withdrawing groups; R is selected from the group consisting of alkyls and aryls; and R is selected from the group consisting of hydrogen and alkyls. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

    Abstract translation: 提供了抗反射组合物和使用这些组合物形成电路的方法。 组合物包含溶解或分散在溶剂体系中的聚合物。 在优选的实施方案中，聚合物包括具有选自式（I）和（II）的结构的光衰减部分，其中X 1和Y各自独立地选自吸电子 组; R 2选自烷基和芳基; 和R 3选自氢和烷基。 所得到的组合物是旋转碗相容的（即，它们在微光刻工艺的烘烤阶段之前或在室温下储存期间不交联）是湿显影的并且具有优异的光学性能。

    WET-DEVELOPABLE ANTI-REFLECTIVE COMPOSITIONS
    14.
    发明公开
    WET-DEVELOPABLE ANTI-REFLECTIVE COMPOSITIONS 有权
    NASSENTWICKELBARE ANTIREFLEXZUSAMMENSETZUNGEN

    公开(公告)号：EP1546803A4

    公开(公告)日：2009-03-11

    申请号：EP03761298

    申请日：2003-06-24

    Applicant: BREWER SCIENCE INC

    Inventor： NEEF CHARLES J ,  KRISHNAMURTHY VANDANA

    IPC: G03C1/492 ,  C08G79/00 ,  C08L85/00 ,  G02B1/11 ,  G03C5/00 ,  H01L21/31 ,  H01L51/00

    CPC classification number: C08G79/00 ,  C08L85/00 ,  G02B1/111 ,  Y10S430/106 ,  C08L2666/02

    Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers include a light-attenuating moiety having a structure selected from the group consisting of Formula (I) and (II), where each of X1 and Y is individually selected from the group consisting of electron withdrawing groups; R2 is selected from the group consisting of alkyls and aryls; and R3 is selected from the group consisting of hydrogen and alkyls. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

    Abstract translation: 提供了抗反射组合物和使用这些组合物形成电路的方法。 该组合物包含溶解或分散在溶剂体系中的聚合物。 在优选的实施方案中，聚合物包括具有选自式（I）和（II）的结构的光衰减部分，其中X 1和Y各自独立地选自吸电子基团; R2选自烷基和芳基; 并且R3选自氢和烷基。 所得组合物与旋转筒相容（即，它们在微光刻工艺的烘烤阶段之前或在室温下储存期间不交联），湿润可显影并且具有优异的光学性质。

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