公开(公告)号：EP3772745A3

公开(公告)日：2021-04-14

申请号：EP20189362.5

申请日：2020-08-04

Applicant: FEI Company

Inventor： Kieft, Erik René ,  Dona, Pleun ,  Van Rens, Jasper Frans Mathijs ,  Verhoeven, Wouter ,  Mutsaers, Peter ,  Luiten, Jom ,  Baco, Ondrej

IPC: H01J37/04 ,  H01P7/06

Abstract: Disclosed herein are radio frequency (RF) cavities and systems including such RF cavities. The RF cavities are characterized as having an insert with at least one sidewall coated with a material to prevent charge build up without affecting RF input power and that is heat and vacuum compatible. One example RF cavity 206 includes a dielectric insert 222, the dielectric insert having an opening extending from one side of the dielectric insert to another to form a via 230, and a coating layer disposed on an inner surface of the dielectric insert, the inner surface facing the via 230, wherein the coating layer has a thickness and a resistivity, the thickness less than a thickness threshold, and the resistivity greater than a resistivity threshold, wherein the thickness and resistivity thresholds are based partly on operating parameters of the RF cavity.

公开(公告)号：EP3200217B1

公开(公告)日：2018-01-24

申请号：EP16152964.9

申请日：2016-01-27

Applicant: FEI Company

Inventor： Dona, Pleun ,  Mele, Luigi

IPC: H01J37/18 ,  H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/022 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: The invention relates to a holder assembly for cooperating with a nanoreactor (100) and an electron microscope, the electron microscope in working irradiating the nanoreactor with a beam of electrons, said holder assembly having a distal end (120) for holding the nanoreactor(100), the nanoreactor (100) having a first chip (102) with a first electron transparent window (104), and a second chip (106) having a second electron transparent window (108), the first chip and the second chip enclosing an enclosed volume (112), the first electron transparent window aligned with the second electron transparent window, the first chip (102) having a fluid inlet (114) for entering a fluid into the enclosed volume (112) and optionally a fluid outlet (214), the distal end (120) of the holder assembly in working placed in an evacuated part of the electron microscope, the nanoreactor (100) in working attached to the distal end (120), the distal end (120) having a fluid supply channel (126) in working connected to the fluid inlet (114) and optionally a fluid outlet tube (226) connected to the fluid outlet (214), the connection between the fluid inlet (114) and the fluid supply channel (126) in working sealed by a fluid supply sealing element (128), characterized in that the holder assembly comprises a recess (138) that, when the nanoreactor is attached to the holder assembly, forms a sealed pre-vacuum volume between the distal end (120) and the first flat layer (102), the pre-vacuum volume evacuated via a pre-vacuum channel (132) ending in the recess (138), and the fluid supply sealing element (128) and optionally a corresponding fluid outlet sealing element (228) are exposed to the evacuated pre-vacuum volume such that any leakage of the fluid via the fluid supply sealing element (128) and the optional fluid outlet sealing element is pumped away via the pre-vacuum channel (132) without entering the evacuated part of the electron microscope.

公开(公告)号：EP2629318A3

公开(公告)日：2013-11-27

申请号：EP13154515.4

申请日：2013-02-08

Applicant: FEI COMPANY ,  Delft University Of Technology

Inventor： Zandbergen, Henny ,  Dona, Pleun ,  Veen, van, Gerard

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/022 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: The invention relates to a holder assembly for cooperating with an environmental cell ( 101 ) and an electron microscope, the environmental cell showing a fluid inlet (103), the electron microscope showing a vacuum wall (110) for separating an evacuable part of the electron microscope from the outside of the electron microscope, the holder assembly comprising an electron microscope interface for forming a sealing interface with the electron microscope, the holder assembly comprising an environmental cell interface for forming a sealing interfacing with the fluid inlet (103) of the environmental cell ( 101 ), and the holder assembly comprising a tube (126) for connecting a fluid supply to the fluid inlet (103) of the environmental cell ( 101 ), The holder assembly comprises a first (122) and a second (121) part, the first part detachable from the second part, the first part comprising the tube (126) and the environmental cell interface and the second part comprising the electron microscope interface, as a result of which the first part (122) can be cleaned at high temperatures without exposing the second part (121) to said high temperature.
By forming the holder assembly from to detachable parts, one part can be cleaned by heating it to a high temperature of, for example, 1000 °C, clogging in the tubes can be removed by reduction of carbon, while keeping the other part (often comprising mechanical fittings, ball bearing, sliders, or such like) cool. The cleaning can be enhanced by blowing, for example, oxygen or hydrogen through the tubes.

公开(公告)号：EP2631929A1

公开(公告)日：2013-08-28

申请号：EP12157055.0

申请日：2012-02-27

Applicant: FEI Company ,  Delft University Of Technology

Inventor： Zandbergen, Henny ,  Dona, Pleun ,  Van Veen, Gerard

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/022 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: The invention relates to a holder assembly for cooperating with an environmental cell ( 101 ) and an electron microscope, the environmental cell showing a fluid inlet (103), the electron microscope showing a vacuum wall (110) for separating an evacuable part of the electron microscope from the outside of the electron microscope, the holder assembly comprising an electron microscope interface for forming a sealing interface with the electron microscope, the holder assembly comprising an environmental cell interface for forming a sealing interfacing with the fluid inlet (103) of the environmental cell (101), and the holder assembly comprising a tube (126) for connecting a fluid supply to the fluid inlet (103) of the environmental cell (101), characterized in that the holder assembly comprises a first and a second part, the first part detachable from the second part, the first part comprising the tube (126) and the environmental cell interface and the second part comprising the electron microscope interface, as a result of which the first part can be cleaned at high temperatures without exposing the second part to said high temperature.
By forming the holder assembly from to detachable parts, one part can be cleaned by heating it to a high temperature of, for example, 1000 °C, clogging in the tubes can be removed by reduction of carbon, while keeping the other part (often comprising mechanical fittings, ball bearing, sliders, or such like) cool. The cleaning can be enhanced by blowing, for example, oxygen or hydrogen through the tubes.

Abstract translation: 本发明涉及一种用于与环境单元（101）和电子显微镜配合的支架组件，所述环境单元示出了流体入口（103），所述电子显微镜示出了真空壁（110），用于将电子的可抽真空部分 所述保持器组件包括用于与所述电子显微镜形成密封界面的电子显微镜界面，所述保持器组件包括用于形成与所述环境的所述流体入口（103）接口连接的环境单元接口 所述保持器组件包括用于将流体供应连接到所述环境单元（101）的所述流体入口（103）的管（126），其特征在于，所述保持器组件包括第一部分和第二部分，所述 第一部分可从第二部分拆卸，第一部分包括管（126）和环境单元接口，第二部分包括电子麦克风 从而可以在高温下清洁第一部分而不会使第二部分暴露于所述高温。 通过将支架组件形成为可拆卸的部件，可以通过将一个部件加热至例如1000℃的高温来清洁一个部件，可以通过减少碳来去除管道中的堵塞，同时保持另一部件（通常 包括机械配件，滚珠轴承，滑块等）冷却。 例如，通过吹入氧气或氢气可以增强清洁。

公开(公告)号：EP2458355A3

公开(公告)日：2012-08-08

申请号：EP11190235.9

申请日：2011-11-23

Applicant: FEI Company

Inventor： Van den Boom, Stephanus ,  Dona, Pleun ,  Kwakman, Laurens ,  Luecken, Uwe ,  Slingerland, Rik ,  Verheijen, Martin ,  Van de Water, Jeroen ,  Remigy, Herve-William

IPC: G01K5/68 ,  G01K11/20

CPC classification number: G01K5/68 ,  G01K11/20 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/24585

Abstract: The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier.
The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier.
The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

公开(公告)号：EP2458354A1

公开(公告)日：2012-05-30

申请号：EP10192354.8

申请日：2010-11-24

Applicant: FEI COMPANY

Inventor： Van den Boom, Stepahnus ,  Dona, Pleun ,  Kwakman, Loek ,  Luecken, Uwe ,  Slingerland, Rik ,  Verheijen, Martin ,  Van de Water, Jeroen

IPC: G01K5/68

CPC classification number: G01K5/68 ,  G01K11/20 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/24585

Abstract: The invention relates to a method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier.
The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier.
The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals (210a, 21 0b), showing metals (208, 210) with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Abstract translation: 本发明涉及确定的采矿的方法中的带电粒子光学设备，在DASS模方法，其特征的样品载体的温度包括使所述样品载体与带电粒子束观测，观测给出关于的温度信息 样品载体。 本发明是基于这样的认识，并带电粒子光学设备中，检查作为TEM，STEM，SEM或FIB，可以用来观察样品载体的温度相关的变化。 所述改变可以是机械变化（双金属的E.G.），结晶学变化（钙钛矿的E.G.），和发光的变化（在强度或衰减时间）。 在一个优选实施方案中的样品载体显示了两个双金属（210A，21 0B），显示金属（208，210）具有不同的热膨胀系数在相反方向上弯曲。 两个双金属之间的距离被用作温度计。

公开(公告)号：EP1883096A1

公开(公告)日：2008-01-30

申请号：EP07112812.8

申请日：2007-07-20

Applicant: FEI COMPANY

Inventor： Van Gaasbeek, Erik ,  Dona, Pleun ,  Barends, Paul ,  Van Hees, Ian ,  Van de Water, Jeroen ,  Van den Oetelaar, Johannes

IPC: H01J37/20 ,  H01L21/68 ,  H01L21/687

CPC classification number: H01J37/20

Abstract: The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder ( 40 ) to a second position in a second holder (10) and/or vice versa, each holder ( 10 , 40 ) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders ( 10 , 40 ) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders ( 10 , 40 ) when the specimen is in the second position.
The mechanical guidance mechanism may comprise extra parts ( 50 ).
At least one of the holders ( 40 ) may be equipped to hold a multitude of specimens.

Abstract translation: 本发明涉及一种用于将样品（2）从第一保持器（40）中的第一位置转移到第二保持器（10）中的第二位置和/或反之亦然的转移机构，每个保持器（10,40）装备有 为了可拆卸地保持试样，试样在不同于第二位置的转移位置发生的保持器之间的转移，其特征在于，当试样在保持器（10,40）之间转移时，机械引导机构将保持器 相对精度高于第二位置的相互精度，并且当样本处于第二位置时，所述机械引导机构不定位至少一个保持器（10,40）。 机械引导机构可以包括额外的部件（50）。 保持器（40）中的至少一个可以被装备成容纳多个标本。

公开(公告)号：EP4030461A1

公开(公告)日：2022-07-20

申请号：EP21214240.0

申请日：2021-12-14

Applicant: FEI Company

Inventor： Henstra, Alexander ,  Dona, Pleun

IPC: H01J37/153 ,  H01J37/145 ,  H01J37/147 ,  H01J37/26

Abstract: Systems for reducing the generation of thermal magnetic field noise in optical elements of microscope systems, are disclosed. Example microscopy optical elements having reduced Johnson noise generation according to the present disclosure comprises an inner core composed of an electrically isolating material, and an outer coating composed of an electrically conductive material. The product of the thickness of the outer coating and the electrical conductivity is less than 0.01Ω -1 . The outer coating causes a reduction in Johnson noise generated by the optical element of greater than 2x, 3x, or an order of magnitude or greater. In a specific example embodiment, the optical element is a corrector system having reduced Johnson noise generation. Such a corrector system comprises an outer magnetic multipole, and an inner electrostatic multipole. The inner electrostatic multipole comprises an inner core composed of an electrically isolating material and an outer coating composed of an electrically conductive material.

公开(公告)号：EP3767663A1

公开(公告)日：2021-01-20

申请号：EP19186447.9

申请日：2019-07-16

Applicant: FEI Company

Inventor： Janssen, Bart Jozef ,  Dona, Pleun

IPC: H01J37/244 ,  G01T1/29 ,  H01J37/26 ,  H01L27/146

Abstract: The invention relates to a method of manufacturing a charged particle detector, comprising the steps of providing a sensor device, such as an Active Pixel Sensor (APS). Said sensor device at least comprises a substrate layer and a sensitive layer. The method further comprises the step of providing a mechanical supporting layer and connecting said mechanical supporting layer to said sensor device. After connection, the sensitive layer is situated in between said substrate layer and said mechanical supporting layer. By connecting the mechanical supporting layer, it is possible to thin said substrate layer for forming said charged particle detector. The mechanical supporting layer forms part of the manufactured detector. The detector can be used in a charged particle microscope, such as a Transmission Electron Microscope for direct electron detection.

公开(公告)号：EP3591685A1

公开(公告)日：2020-01-08

申请号：EP18182145.5

申请日：2018-07-06

Applicant: FEI Company

Inventor： Henstra, Alexander ,  Dona, Pleun

IPC: H01J37/09 ,  H01J37/26

Abstract: An Electron Microscope M comprising:
- A specimen holder H, for holding a specimen S;
- A source 4, for producing a beam B of electrons;
- An illumination system 6, for directing said beam so as to irradiate the specimen;
- An elongate beam conduit B", through which the beam is directed;
- A detector 26, 30, 32, 34, for detecting radiation emanating from the specimen in response to said irradiation,
wherein at least a longitudinal portion of said beam conduit has a composite structure comprising:
- An outer tube 50 of electrically insulating material;
- An inner skin 52 of electrically conductive material.
In an alternative but related structure, at least a longitudinal portion of said beam conduit is comprised of an aggregate composite material comprising intermixed electrically insulating material and electrically conductive material.