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公开(公告)号：US20180061613A1
公开(公告)日：2018-03-01
申请号：US15683734
申请日：2017-08-22
Applicant: FEI Company
Inventor： Bohuslav Sed'a , Lubomír Tuma , Petr Hlavenka , Marek Uncovský , Radovan Vasina , Jan Trojek , Mostafa Maazouz
IPC: H01J37/26 , H01J37/20 , H01J37/244
CPC classification number: H01J37/261 , G21K7/00 , H01J37/12 , H01J37/1413 , H01J37/18 , H01J37/20 , H01J37/244 , H01J2237/121 , H01J2237/1415 , H01J2237/188 , H01J2237/2605
Abstract: A charged-particle microscope having a vacuum chamber comprises a specimen holder, a particle-optical column, a detector and an exchangeable column extending element. The specimen holder is for holding a specimen. The particle-optical column is for producing and directing a beam of charged particles along an axis so as to irradiate the specimen. The column has a terminal pole piece at an extremity facing the specimen holder. The detector is for detecting a flux of radiation emanating from the specimen in response to irradiation by the beam. The exchangeable column extending element is magnetically mounted on the pole piece in a space between the pole piece and the specimen holder. Methods of using the microscope are also disclosed.
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公开(公告)号：US09691583B2
公开(公告)日：2017-06-27
申请号：US14792771
申请日：2015-07-07
Applicant: FEI Company
Inventor： Thomas G. Miller , Sean Kellogg , Shouyin Zhang , Mostafa Maazouz , Anthony Graupera
CPC classification number: H01J37/08 , H01J37/026 , H01J37/10 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/3007 , H01J37/3171 , H01J2237/0492 , H01J2237/08 , H01J2237/18 , H01J2237/188 , H01J2237/31713 , H01J2237/31749
Abstract: Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system using a plasma source. The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers below the plasma source to reduce the opportunity for the ions to interact with gas.
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公开(公告)号：US20170125207A1
公开(公告)日：2017-05-04
申请号：US14981164
申请日：2015-12-28
Applicant: FEI Company
Inventor： Richard Swinford , Mostafa Maazouz , David William Tuggle , William M. Steinhardt
CPC classification number: H01J37/21 , H01J37/10 , H01J37/31 , H01J2237/0453 , H01J2237/30472 , H01J2237/317 , H01J2237/31745 , H01J2237/31749
Abstract: The present invention provides a method for optimizing a shaped working beam having a sharp edge for making sufficiently precise cuts and a high beam current for faster processing. An ion beam is directed along an optical column through a reference aperture to form a reference beam that has a preferred shape and an associated reference current. The reference beam is optimized using selected parameters of the optical components within the optical column. The ion beam is then directed through a working aperture to form a working beam for use in a processing application. The working beam has a different shape from the reference beam and an associated working current that is higher than the reference current. The reference aperture and working aperture have at least one corresponding dimension. The working beam is then optimized using the selected optical component parameters used to align and focus the reference beam.
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Patent Agency Ranking
公开(公告)号：US20150380204A1
公开(公告)日：2015-12-31
申请号：US14792771
申请日：2015-07-07
Applicant: FEI Company
Inventor： Thomas G. Miller , Sean Kellogg , Shouyin Zhang , Mostafa Maazouz , Anthony Graupera
IPC: H01J37/08 , H01J37/10 , H01J37/18 , H01J37/317 , H01J37/30
CPC classification number: H01J37/08 , H01J37/026 , H01J37/10 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/3007 , H01J37/3171 , H01J2237/0492 , H01J2237/08 , H01J2237/18 , H01J2237/188 , H01J2237/31713 , H01J2237/31749
Abstract: Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system using a plasma source. The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers below the plasma source to reduce the opportunity for the ions to interact with gas.
Abstract translation: 申请人已经发现，通过高能离子和中性气体分子之间的电荷交换相互作用产生的高能中性粒子使用等离子体源在离子束系统中到达样品。 能量中性产生离子束冲击点的二次电子。 解决问题的方法包括等离子体源下面的差分泵浦腔，以减少离子与气体相互作用的机会。
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公开(公告)号：US20150325403A1
公开(公告)日：2015-11-12
申请号：US14803964
申请日：2015-07-20
Applicant: FEI Company
Inventor： Mostafa Maazouz
IPC: H01J37/07 , H01J37/305 , H01J37/147 , H01J37/21 , H01J37/10
CPC classification number: H01J37/07 , H01J3/026 , H01J37/04 , H01J37/06 , H01J37/10 , H01J37/1477 , H01J37/21 , H01J37/248 , H01J37/3056 , H01J37/3178 , H01J2237/0473 , H01J2237/04735 , H01J2237/04756 , H01J2237/1518 , H01J2237/1534 , H01J2237/28 , H01J2237/31749
Abstract: The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.
Abstract translation: 本发明提供了一种带电粒子束系统，其中聚焦离子束列的中间部分被偏压到高的负电压，允许光束以比该塔的该部分内的最终光束能量更高的电位移动。 在低kV电位下，像差和库仑相互作用减小，这导致光斑尺寸的显着改善。
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公开(公告)号：US09105438B2
公开(公告)日：2015-08-11
申请号：US13891545
申请日：2013-05-10
Applicant: FEI Company
Inventor： Tom Miller , Sean Kellogg , Shouyin Zhang , Mostafa Maazouz , Anthony Graupera
CPC classification number: H01J37/08 , H01J37/026 , H01J37/10 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/3007 , H01J37/3171 , H01J2237/0492 , H01J2237/08 , H01J2237/18 , H01J2237/188 , H01J2237/31713 , H01J2237/31749
Abstract: Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system using a plasma source. The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers below the plasma source to reduce the opportunity for the ions to interact with gas.
Abstract translation: 申请人已经发现，通过高能离子和中性气体分子之间的电荷交换相互作用产生的高能中性粒子使用等离子体源在离子束系统中到达样品。 能量中性产生离子束冲击点的二次电子。 解决问题的方法包括等离子体源下面的差分泵浦腔，以减少离子与气体相互作用的机会。
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公开(公告)号：US09087672B2
公开(公告)日：2015-07-21
申请号：US14565051
申请日：2014-12-09
Applicant: FEI Company
Inventor： Mostafa Maazouz
IPC: H01J3/07 , H01J37/08 , H01J49/10 , H01J49/26 , H01J37/147 , H01J37/06 , H01J37/248
CPC classification number: H01J37/07 , H01J3/026 , H01J37/04 , H01J37/06 , H01J37/10 , H01J37/1477 , H01J37/21 , H01J37/248 , H01J37/3056 , H01J37/3178 , H01J2237/0473 , H01J2237/04735 , H01J2237/04756 , H01J2237/1518 , H01J2237/1534 , H01J2237/28 , H01J2237/31749
Abstract: The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.
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公开(公告)号：US20130320229A1
公开(公告)日：2013-12-05
申请号：US13891545
申请日：2013-05-10
Applicant: FEI Company
Inventor： Tom Miller , Sean Kellogg , Shouyin Zhang , Mostafa Maazouz , Anthony Graupera
IPC: H01J37/08
CPC classification number: H01J37/08 , H01J37/026 , H01J37/10 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/3007 , H01J37/3171 , H01J2237/0492 , H01J2237/08 , H01J2237/18 , H01J2237/188 , H01J2237/31713 , H01J2237/31749
Abstract: Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system using a plasma source. The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers below the plasma source to reduce the opportunity for the ions to interact with gas.
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