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    ROTATING-COMPENSATOR ELLIPSOMETER
    13.
    发明专利
    ROTATING-COMPENSATOR ELLIPSOMETER 未知

    公开(公告)号：CA1048806A

    公开(公告)日：1979-02-20

    申请号：CA250134

    申请日：1976-04-13

    Applicant: IBM

    Inventor： DILL FREDERICK H ,  HAUGE PETER S

    IPC: G01J4/04 ,  G01B9/02 ,  G01B11/00 ,  G01B11/06 ,  G01B11/27 ,  G01B11/30 ,  G01N21/21 ,  G01J4/02 ,  G02F1/01

    Abstract: ROTATING-COMPENSATOR ELLIPSOMETER Plane polarized light is reflected from a surface of a sample film to produce an elliptically polarized reflected beam. The reflected beam is passed sequentially through a rotating onequarter wave plate and a fixed analyzer which transmits a beam whose intensity varies as a function of the rotational angle of the plate. The transmitted beam impinges upon a photodetector which produces an electric signal proportional to the intensity of the transmitted light. The rotating one-quarter wave plate cyclically varies the polarization of the beam, so that the electrical signal, when numerically Fourier analyzed, provides Fourier coefficients having both sin.DELTA. and cos.DELTA. terms, where the ellipsometric parameter .DELTA. is the instantaneous phase difference between the parallel (RP) and perpendicular (RS) components of the electric vector of the elliptically polarized reflected beam; therefore, the phase difference .DELTA. is uniquely and unambiguously defined in a single measurement. Furthermore, the presence of both sin.DELTA. and cos.DELTA. terms permits .DELTA. to be determined more accurately than is possible with the prior art rotating-analyzer ellipsometer. Since the ellipsometric parameter ? is also uniquely defined ( ), properties of the sample film can be computed. Alternatively, the rotating quarter-wave plate may be placed in the path of the incident plane polarized beam.

    PRESENCE/ABSENCE BAR CODE
    15.
    发明专利
    PRESENCE/ABSENCE BAR CODE 未知

    公开(公告)号：CA2011296A1

    公开(公告)日：1990-11-15

    申请号：CA2011296

    申请日：1990-03-01

    Applicant: IBM

    Inventor： BOSSEN DOUGLAS C ,  CHEN CHIN L ,  DILL FREDERICK H ,  GOODMAN DOUGLAS S ,  HSIAO MU Y ,  MCCANN PAUL V ,  MULLIGAN JAMES M ,  RAND RICKY A

    IPC: G06K1/12 ,  G06K7/016 ,  G06K7/10 ,  G06K19/06 ,  G06K1/00

    Abstract: PRESENCE/ABSENCE BAR CODE A single width bar code exhibiting inherent self clocking characteristics is provided so as to be particularly useful in the identification of semiconductor wafers in very large scale integrated circuit manufacturing processes. The codes described herein are robust, reliable and highly readable even in the face of relatively high variations in scanning speed The codes are also desirably dense in terms of character representations per linear centimeter, an important consideration in semiconductor manufacturing wherein space on the chips and the wafer is at a premium. Additionally, a preferred embodiment of the present invention exhibits a minimum number for the maximum number of spaces between adjacent bars in code symbol sequences. P09-89-002

    ACHROMATIC UNIT MAGNIFICATION OPTICAL SYSTEM
    17.
    发明专利
    ACHROMATIC UNIT MAGNIFICATION OPTICAL SYSTEM 未知

    公开(公告)号：CA1095760A

    公开(公告)日：1981-02-17

    申请号：CA301709

    申请日：1978-04-21

    Applicant: IBM

    Inventor： DILL FREDERICK H ,  TIBBETTS RAYMOND E ,  WILCZYNSKI JANUSZ S

    IPC: H01L21/30 ,  G02B17/00 ,  G02B17/08 ,  G03F7/20 ,  H01L21/027 ,  F04F5/46 ,  E21B21/00

    Abstract: ACHROMATIC UNIT MAGNIFICATION OPTICAL SYSTEM A unit magnification optical system having micron resolution capability over a broad frequency spectrum. A spherical concave mirror is used to provide unit magnification at high numerical aperture with respect to object and image planes which are both located at or in the proximity of the center of curvature of the mirror, or the optical equivalent thereof. A first refractory element optically close to the object and image planes corrects longitudinal chromatic aberration of the principal rays while a second refractory element optically close to the mirror corrects residual longitudinal chromatic aberration of the marginal rays. In the preferred embodiment, a double prism arrangement located between the first refractory element and the center of curvature of the mirror optically reflects the object and image planes to parallel opposed positions having a common axis perpendicular to the axis of the mirror, The system may be used for either step-and-repeat or scanning exposure operations in fabricating microcircuits.

    AUTOMATIC ELLIPSOMETER
    18.
    发明专利
    AUTOMATIC ELLIPSOMETER 未知

    公开(公告)号：CA1010262A

    公开(公告)日：1977-05-17

    申请号：CA201979

    申请日：1974-06-07

    Applicant: IBM

    Inventor： DILL FREDERICK H ,  HAUGE PETER S

    IPC: G01J4/04 ,  G01B11/06 ,  G01B11/27 ,  G01N21/21 ,  G02B5/30

    Abstract: An automatic ellipsometer is disclosed which comprises a mechanical-optical, an electrical, and a digital (computer) component. The mechanical-optical component includes a light source, various polarizing elements (one of which spins continuously), necessary apertures, and a light detector. The electrical component includes a signal from the light detector, trigger pulses from an angular shaft encoder, and an analog-digital converter, and produces a string of digitized data in a form which can be read and analyzed by digital logical circuitry. The digital (computer) component comprises logic circuitry in sufficient quantity to store and execute a relatively simple data analysis program, there being suitably associated with the digital component, one or more print-out and/or display devices. To facilitate automation of ellipsometric operation, there is provided a sample alignment system which includes a spot-defining aperture in the incident light beam, a sample holder with capability for rotation about two perpendicular axes intersecting at the intersection of the axis of the light beam source and the axis of the detector, and a four-quadrant beam deviation detector located a convenient distance from the sample along the detector axis. In the operation of the system, the sample is properly oriented about two axes of rotation, and data in the form of light intensity transmitted through a continuously spinning analyzer in the reflected beam path is sampled at convenient angular intervals to provide data which is digitally coded, and the data then is numerically Fourier analyzed to enable extrapolated properties of the sample to be displayed or typed out. The entire sequence of operations, i.e., from sample insertion to type out or display is on the order of about 5-10 seconds.

    19.
    发明专利
    未知

    公开(公告)号：FR2285648A1

    公开(公告)日：1976-04-16

    申请号：FR7521493

    申请日：1975-07-04

    Applicant: IBM

    Inventor： DILL FREDERICK H ,  HOEKSTRA JAN PIETER

    IPC: G02B7/00 ,  G03F9/00 ,  H01L21/30 ,  H01L21/027 ,  G05D3/02 ,  H01L21/70

    Abstract: A method and apparatus for locating target patterns with reference to a fixed axis. The apparatus includes a collimated light source providing a light beam to a rotating prism and optical flat producing a rotating light beam. A lens whose axis is the fixed axis focuses the beam to a spot on a surface containing a pattern comprising regularly spaced light scattering surfaces. A light sensor detects light from the rotating beam scattered by the target. An incremental shaft encoder provides a real time indication of spot position. The light sensor output provides a measure of target location and orientation with reference to the lens axis. The encoder can be used to control sampling apparatus and an A/D converter to provide regular digital samples of the light sensor output.

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