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公开(公告)号:FR3037439A1
公开(公告)日:2016-12-16
申请号:FR1555362
申请日:2015-06-12
Applicant: ST MICROELECTRONICS SA , STMICROELECTRONICS (CROLLES 2) SAS
Inventor: HOTELLIER NICOLAS , FOURNEL RICHARD , GIANESELLO FREDERIC , GUYADER FRANCOIS , FIORI VINCENT
Abstract: Dispositif électronique et procédé de traitement, dans lesquels une plaque arrière (3) comprend une couche arrière de substrat (4), une couche avant de substrat (5) et une couche intermédiaire diélectrique (6), située entre la couche arrière et la couche avant, et comprenant une structure électronique (7) aménagée sur ladite couche avant de substrat (5), incluant des composants électroniques et des moyens de connexion électrique, et dans lesquels ladite couche arrière de substrat (4) présente au moins une région locale pleine (17) et au moins une région locale évidée (18), cette région locale évidée étant aménagée sur toute l'épaisseur de ladite couche arrière, de sorte que ladite couche arrière de substrat ne recouvre pas au moins une zone locale (19) de la face arrière de ladite couche intermédiaire diélectrique (6), correspondant à ladite région locale évidée (18).
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公开(公告)号:FR2871282B1
公开(公告)日:2006-09-15
申请号:FR0406077
申请日:2004-06-04
Applicant: ST MICROELECTRONICS SA
Inventor: SCHOELLKOPF JEAN PIERRE , FOURNEL RICHARD
Abstract: A one-time programmable, dual-bit memory device comprises one MOS storage transistor having a semiconductor substrate, first and second active regions formed under the surface of the substrate being separated by a part of the substrate forming a channel region, a gate formed on the surface of the said substrate in line with the channel region and whose respective distal ends are aligned with a part of the first active region and with a part of the second active region, respectively, which gate is permanently held at ground potential, and a gate oxide layer running between the gate and the surface of the substrate. The intact or broken down state between the gate and the first active region determines a stored value of a first bit, and the intact or broken down state between the gate and the second active region determines a stored value of a second bit.
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公开(公告)号:FR2871282A1
公开(公告)日:2005-12-09
申请号:FR0406077
申请日:2004-06-04
Applicant: ST MICROELECTRONICS SA
Inventor: SCHOELLKOPF JEAN PIERRE , FOURNEL RICHARD
Abstract: Un dispositif mémoire à deux bits programmable une seule fois, comprend un transistor MOS de stockage ayant un substrat semiconducteur, une première et une seconde zones actives réalisées sous la surface du substrat en étant séparées par une partie du substrat formant zone de canal, une grille réalisée à la surface dudit substrat au droit de la zone de canal et dont des extrémités distales respectives viennent au droit d'une partie de la première zone active et d'une partie de la seconde zone active respectivement, et portée en permanence à un potentiel de masse, et une couche d'oxyde de grille s'étendant entre la grille et la surface du substrat, dont l'état intact ou claqué entre la grille et la première zone active détermine la valeur stockée d'un premier bit, et dont l'état intact ou claqué entre la grille et la seconde zone active détermine la valeur stockée d'un second bit.
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公开(公告)号:FR2849260B1
公开(公告)日:2005-03-11
申请号:FR0216558
申请日:2002-12-23
Applicant: ST MICROELECTRONICS SA
Inventor: FOURNEL RICHARD , VINCENT EMMANUEL , BRUYERE SYLVIE , CANDELIER PHILIPPE , JACQUET FRANCOIS
IPC: G11C14/00 , G11C17/14 , G11C11/412 , G11C11/417
Abstract: The memory cell (10) comprises two inverter circuits (14,16) interconnected between the data nodes (N1,N2) so to form a memory circuit (12), two programming transistors (28,30) for implementing an irreversible degradation of the gate oxide layers of transistors (18,18'), and two transistors (32,34) for implementing the functioning of the memory cell after programming. Each inverter circuit (14,16) comprises supplementary MOS transistors (18,20;18',20') connected in series between a supply voltage source (VDD) and the ground circuit (22). Each inverter circuit comprises a p-MOS transistor (18,18') and an n-MOS transistor (20,20'), and the data nodes (N1,N2) are formed between the two transistors, n-MOS and p-MOS. The degraded MOS transistor is a transistor with thin gate oxide layer (GO1). The oxide layer is degraded at least locally so to obtain a variation of current through the transistor at the time of reading the cell. The programming transistors (28,30), or the diodes, are connected between the programming control line (PROG) and the transistors of the inverter circuits. The n-MOS programming transistors (28,30) ensure a selective connection of the gates of the transistors (18,18') to a programming voltage (VREF) at a level sufficient to cause the degradation of the gate oxide layers of the transistors. The inverter circuits are interconnected by the intermediary of a n-MOS transistor (32,34) connected to the control line (SRAM) of functioning the cell as the SRAM cell. The drain and the source electrodes of the transistors (32,34) are connected to the gates of the transistors of the inverter circuits.
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公开(公告)号:FR2838554B1
公开(公告)日:2004-07-09
申请号:FR0209454
申请日:2002-07-25
Applicant: ST MICROELECTRONICS SA
Inventor: FOURNEL RICHARD , DRAY CYRILLE , GENDRIER PHILIPPE
IPC: H01L21/336 , H01L21/8247 , H01L27/115 , H01L29/788 , H01L29/792 , G11C16/02
Abstract: The semiconductor memory device comprises a transistor with floating gate (FG) and a control gate, where the regions of source (S), drain (D) and channel of the floating-gate transistor form the control gate, and the memory cell comprises a dielectric zone (ZTN) laid out between a part (P1) of the layer of gate material and an active semiconductor zone (RG1) electrically insulated from another active zone (RG2) incorporating the control gate. The dielectric zone forms a tunnel zone (ZTN) for transferring the charges stored in the floating gate at the time of erasing the memory cell. The capacitive value of tunnel zone (ZTN) is below or equal to 30% of the total capacitive value between the layer of gate material and the set of active zones of the memory cell. The transistor has a ring gate (FG), and the gate material comprises a linking part (PL) connecting the first part (P1) and the ring gate. The active zones (RG1,RG2) are electrically insulated by the p-n junctions polarized in reverse, and the two zones are electrically insulated on the surface by a region of shallow trench isolation (STI). A memory array comprises several memory cells, each memory cell is associated with an access transistor, and the access transistor partly surrounds the floating-gate transistor of the memory cell resulting in a memory array of reduced size and lower programming currents. The device comprises the polarization means possessing the states of programming, reading and erasing the memory cell, where the erasing is of type Fowler-Nordheim and applies a voltage on the first active zone which is much higher than that applied in the regions of source, drain and substrate of the transistor. The programming of type Fowler-Nordheim applies to the regions of source, drain and substrate of the transistor voltages which are much higher than those applied to the first active zone. In the reading state the difference between the drain/source voltages is limited to 1 V in absolute value. An integrated circuit comprises the device as claimed.
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公开(公告)号:FR2837023B1
公开(公告)日:2004-05-28
申请号:FR0202853
申请日:2002-03-06
Applicant: ST MICROELECTRONICS SA
Inventor: DRAY CYRILLE , GENDRIER PHILIPPE , FOURNEL RICHARD
IPC: H01L21/336 , H01L21/8247 , H01L27/115 , H01L29/788 , H01L29/792
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公开(公告)号:FR2817360B1
公开(公告)日:2004-03-12
申请号:FR0015527
申请日:2000-11-30
Applicant: ST MICROELECTRONICS SA
Inventor: FOURNEL RICHARD
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公开(公告)号:FR2823363B1
公开(公告)日:2003-12-12
申请号:FR0104621
申请日:2001-04-05
Applicant: ST MICROELECTRONICS SA
Inventor: FOURNEL RICHARD , DRAY CYRILLE , CASPAR DANIEL
IPC: G11C16/02 , G11C16/04 , H01L21/8247 , H01L27/115 , H01L29/788 , H01L29/792 , G11C16/14
Abstract: A FAMOS memory cell is electrically erased. The FAMOS memory cell may be electrically erased by applying to the substrate a voltage having a value at least 4 volts higher than the lower of a voltage applied to the source and a voltage applied to the drain. The voltage applied to the substrate is also less than a predetermined limit above which the memory cell is destroyed.
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公开(公告)号:FR2838554A1
公开(公告)日:2003-10-17
申请号:FR0209454
申请日:2002-07-25
Applicant: ST MICROELECTRONICS SA
Inventor: FOURNEL RICHARD , DRAY CYRILLE , GENDRIER PHILIPPE
IPC: H01L21/336 , H01L21/8247 , H01L27/115 , H01L29/788 , H01L29/792 , G11C16/02
Abstract: The semiconductor memory device comprises a transistor with floating gate (FG) and a control gate, where the regions of source (S), drain (D) and channel of the floating-gate transistor form the control gate, and the memory cell comprises a dielectric zone (ZTN) laid out between a part (P1) of the layer of gate material and an active semiconductor zone (RG1) electrically insulated from another active zone (RG2) incorporating the control gate. The dielectric zone forms a tunnel zone (ZTN) for transferring the charges stored in the floating gate at the time of erasing the memory cell. The capacitive value of tunnel zone (ZTN) is below or equal to 30% of the total capacitive value between the layer of gate material and the set of active zones of the memory cell. The transistor has a ring gate (FG), and the gate material comprises a linking part (PL) connecting the first part (P1) and the ring gate. The active zones (RG1,RG2) are electrically insulated by the p-n junctions polarized in reverse, and the two zones are electrically insulated on the surface by a region of shallow trench isolation (STI). A memory array comprises several memory cells, each memory cell is associated with an access transistor, and the access transistor partly surrounds the floating-gate transistor of the memory cell resulting in a memory array of reduced size and lower programming currents. The device comprises the polarization means possessing the states of programming, reading and erasing the memory cell, where the erasing is of type Fowler-Nordheim and applies a voltage on the first active zone which is much higher than that applied in the regions of source, drain and substrate of the transistor. The programming of type Fowler-Nordheim applies to the regions of source, drain and substrate of the transistor voltages which are much higher than those applied to the first active zone. In the reading state the difference between the drain/source voltages is limited to 1 V in absolute value. An integrated circuit comprises the device as claimed.
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公开(公告)号:FR2810452B1
公开(公告)日:2003-09-12
申请号:FR0007874
申请日:2000-06-20
Applicant: ST MICROELECTRONICS SA
Inventor: FOURNEL RICHARD , MALLARDEAU CATHERINE
IPC: H01L21/28 , H01L21/336 , H01L21/8242 , H01L21/8247 , H01L27/105 , H01L29/423 , H01L29/788 , H01L27/115 , G11C16/02
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