MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

    公开(公告)号:JPH10233402A

    公开(公告)日:1998-09-02

    申请号:JP22004397

    申请日:1997-07-31

    Abstract: PROBLEM TO BE SOLVED: To remove the pollutant in a contact hole for enhancing the crystalline characteristics, by a method wherein a contact hole is coated with a metal to be buried in the contact hole so that the gathering step may be performed during the advancement of respective stages forming a metallic wiring by patterning process or after the completion of the stages. SOLUTION: A P well 22 is formed on a semiconductor substrate 21, and after growing a field oxide film 24, a gate insulating film 25 and a gate electrode 23 are formed. Next, in the stage finishing the formation of an interlayer insulating film 26 and a definite contact hole, the substrate underside is implanted with ions so as to perform the true gathering step by the thin film evaporation under the stress such as silicon nitride, etc., extensional gathering doing the physical damage by scratching.rapping, etc., or using either the rapid heat treatment or an electric furnace. Later, the partition wall metal and wiring metal evaporation step is advanced to form the patterns. Through these procedures, the semiconductor substrate on the contact hole underside can be made into a non-defective region, thereby enabling the crystal to be restored to the single crystalline level.

    PSEUDO RANDOM NUMBER GENERATION METHOD

    公开(公告)号:JPH10214177A

    公开(公告)日:1998-08-11

    申请号:JP22883097

    申请日:1997-08-11

    Abstract: PROBLEM TO BE SOLVED: To provide a method for generating random numbers sensitive to the initial value and hard to find the periodicity, by selecting pseudo random numbers through a filter defined as a nonlinear multidimensional chaos function from stored random numbers and outputting them. SOLUTION: Many multidimensional chaos functions are defined by a nonlinear function and the nonlinear multidimensional functions are stored inside a library 10. In the selection of decision algorithm in the chaos functions stored in the library 10, by extending a key space, stability is provided. The result value 3 of the nonlinear multidimensional function selected and repeatedly applied as the decision algorithm from the nonlinear function library 10 is selected and outputted as the random number 4 by being passed through the filter 20. The filter 20 is realized by the nonlinear multidimensional function driven by the system variable of time or the like and a user key, etc., and the random number 4 is safely secured in random number selection.

    MANUFACTURE OF A-AXIS HIGH TEMPERATURE SUPERCONDUCTIVE THIN FILM

    公开(公告)号:JPH10190077A

    公开(公告)日:1998-07-21

    申请号:JP25945297

    申请日:1997-08-12

    Abstract: PROBLEM TO BE SOLVED: To form an a-axis oriented YBCO high temperature superconductive thin film by depositing an a-axis oriented superconductive thin film at a high temperature of a substrate for irradiation of pulse laser with rapid repetition rate in a target surface of a superconductive sintering body. SOLUTION: Vacuum degree of a vacuum deposition chamber 9 is held at a pressure of 10 Torr by using a turbo-molecular pump 10. Then, a substrate 2 is heated by a substrate heater 3 and a temperature of the substrate 2 is raised. Furthermore, oxygen of high purity is injected into the vacuum deposition chamber 9 through a gas supply nozzle 4 and is held between 100mTorr and 300mTorr. Then, a pulse laser beam 6 is applied to a surface of a target 1 at an angle of 45 deg. from outside the vacuum deposition chamber 9 at a repetition rate of 10 to 100Hz, and a plasma is generated. Then, an a-axis oriented YBa2 Cu3 O7-x superconductive thin film 12 is deposited so that it reaches a surface of the oxide single crystal substrate 2.

    ROOM TEMPERATURE HIGH PEAK CURRENT RESONANCE TUNNELING ELECTRONIC DEVICE

    公开(公告)号:JPH10190014A

    公开(公告)日:1998-07-21

    申请号:JP23537897

    申请日:1997-08-15

    Abstract: PROBLEM TO BE SOLVED: To improve resonance tunneling effects, reduce electric consumption due to high peak current increase and low operation voltage at a room temperature and increase operation speed by providing an asymmetrical combination that gradually reduces the width of a quantum well layer by gradually increasing the width of a quantum barrier layer and then gradually reducing it. SOLUTION: A structure is provided by subsequently stacking a conductive collector 7, a third quantum barrier layer 6, a second quantum well layer 5, a second quantum barrier layer 4, a first quantum well layer 3, a first quantum barrier layer 2 and a conductive emitter 1 on the upper part of a substrate 8. The structure is an asymmetrical combination wherein the width of the quantum barrier layer gradually increases and then gradually reduces and the width of the quantum well layer gradually reduces. With electrostatic capacity reduction by a thin outer barrier layer and an arrangement with Stark shift at a quantum bound level having low energy, resonance tunneling effects are increased and a low peak voltage and increased peak current are induced.

    EMITTING PARTICLE FOR FIELD EMISSION DISPLAY AND LUMINESCENT LAYER FORMING METHOD FOR FIELD EMISSION DISPLAY

    公开(公告)号:JPH10188840A

    公开(公告)日:1998-07-21

    申请号:JP35151397

    申请日:1997-12-19

    Abstract: PROBLEM TO BE SOLVED: To provide an emitting particle for a field emission display, whereby emitting efficiency of a luminescent layer is maximized and total surface permeability of light can be improved simultaneously with facilitating electron dispersion, and a forming method of the luminescent layer using the emitting particle for the field emission display. SOLUTION: An emitting particle 30 applying a coating is used, by a forming method of a luminescent layer for a field emission display, the luminescent layer for the field emission display is formed, on a transparent substrate 10 like glass, a transparent conductive layer 20 is formed, in its upper part, a luminescent layer 30a constituted by a powdery particle 30 applying a coating is formed. In the emitting particle for the field emission display for improving emitting efficiency, in a surface of a fluorescent material fine particle or transparent conductive particle formed into powder, coating a uniform thin film by an atomic layer epitaxy method is used.

    ROTARY CYLINDER TEM CELL
    197.
    发明专利

    公开(公告)号:JPH10185981A

    公开(公告)日:1998-07-14

    申请号:JP23537797

    申请日:1997-08-15

    Abstract: PROBLEM TO BE SOLVED: To provide a rotary cylinder TEM cell generating standard electromagnetic wave (plane wave) necessary for measuring antenna pattern and the like. SOLUTION: Constituted are of a test region 1 wherein a cylindrical first external conductor 5 and the first internal conductor 4 of which both ends are connected to the second internal conductor 21 and are rotatable are included and a body to be irradiated is put, and a coaxial connector connection region 2 which has functions of connecting a coaxial cable to the main body and rotating for separating the first internal conductor 4 from the first external conductor 5 and a taper region 3 connecting with the coaxial connector connection region. The internal conductor is placed high from the center of the external conductor so as to ensure wider uniform field region and polarity is made arbitrarily controllable in the range of -100 degree to 100 degree. Also the rotation of the internal conductor is made variable by providing a drive shaft outside so that control of polarization and incidence direction of electromagnetic wave are made possible without the motion of the irradiated body itself.

    GAIN CONTROL METHOD USING MULTIPLE POWER CONTROL WINDOW

    公开(公告)号:JPH10178323A

    公开(公告)日:1998-06-30

    申请号:JP29428397

    申请日:1997-10-27

    Abstract: PROBLEM TO BE SOLVED: To improve BER performance and to prevent the loss of carrier wave synchronization in environment where a receiving state rapidly and frequently changes by reducing the frequency of first automatic gain control causing the level fluctuation of an input signal to a demodulator. SOLUTION: At the same time of executing second automatic gain control processing to the output signal of a first AGC circuit, a first AGC circuit receives the input of a next received signal an executes first automatic gain control processing to this received signal (S16). Then the intensity of the output signal of the first AGC circuit is measured by a detection circuit (S17). After then, a microprocessor judges whether the measured value is within the second power control window W3 of an already decided band width larger than a first power control window W2 (S18). Then when the measured value is not within the second power control window W3, the microprocessor corrects the gain of the first AGC circuit (S19).

    METHOD FOR DUPLEXING CHANNEL USING PN CODE

    公开(公告)号:JPH10164016A

    公开(公告)日:1998-06-19

    申请号:JP18474797

    申请日:1997-07-10

    Abstract: PROBLEM TO BE SOLVED: To transmit two pieces of information with one channel by encoding an input source to be transmitted to a PN code (pseudo noise code) and transmitting it. SOLUTION: A stage for encoding two pieces of channel information to be transmitted to the PN code and a stage for adding encoded information to a modulo two adders and transmitting it to a reception side as one channel are provided. When a new symbol obtained by combining the symbols of a channel X (302) and a channel Y (303) is transmitted, information on the two channels can simultaneously be transmitted to one channel. Furthermore, even parities are automatically given to combined information since the number of '1' is always even by the characteristic of the PN code. When a PN code generator to be used is not known, the restoration of information becomes impossible and the secrecy of information can be obtained.

    UP-LINK POWER CONTROL METHOD FOR SATELLITE BROADCAST TRANSMISSION STATION

    公开(公告)号:JPH10163945A

    公开(公告)日:1998-06-19

    申请号:JP18624197

    申请日:1997-07-11

    Abstract: PROBLEM TO BE SOLVED: To provide a up-link power control method for satellite broadcast transmission station for compensating the nonlinear characteristics of a high output amplifier used for transmission and amplifying the high frequency signal of a transmission object to an appropriate level. SOLUTION: An attenuator 42 for adjusting the level of transmission signals, a power controller 41 for controlling the attenuation of the attenuator corresponding to the reception level of beacon signals from a satellite, a converter 50 for converting the transmission signals whose level is adjusted in the attenuator 42 to the high frequency signals and the high output amplifier 60 for amplifying the converted high frequency signals and transmitting them to the satellite are provided. The power controller 41 controls the attenuation amount of the attenuator 42 so as to linearly increase the level of the high frequency signals transmitted to the satellite for the increase of the attenuation of the received beacon signals based on characteristics for compensating the nonlinear characteristics of the high output amplifier 60.

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