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公开(公告)号：JP2018088545A
公开(公告)日：2018-06-07
申请号：JP2018018505
申请日：2018-02-05
Applicant: ムラタ エレクトロニクス オサケユキチュア
IPC: H01L25/07 , H01L25/18 , H01L23/12 , H01L25/065
CPC classification number: B81B7/0074 , B81B2201/0235 , B81B2201/025 , B81B2201/0257 , B81B2201/0264 , B81B2201/036 , B81B2207/012 , B81B2207/095 , B81C1/00333 , G01C19/5783 , G01L19/0084 , G01L19/148 , G01P1/023 , G01P1/026 , G01P15/0802 , H01L21/568 , H01L23/528 , H01L23/5389 , H01L24/16 , H01L24/17 , H01L24/19 , H01L24/32 , H01L24/73 , H01L24/83 , H01L24/92 , H01L24/96 , H01L24/97 , H01L25/16 , H01L25/18 , H01L25/50 , H01L27/14618 , H01L2223/6677 , H01L2224/12105 , H01L2224/16145 , H01L2224/16227 , H01L2224/1703 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/8312 , H01L2224/8319 , H01L2224/92125 , H01L2224/97 , H01L2924/12042 , H01L2924/14 , H01L2924/1433 , H01L2924/1461 , H01L2924/15311 , H01L2924/181 , H01L2924/18162 , H01L2224/81 , H01L2224/83 , H01L2924/00012 , H01L2924/00
Abstract: 【課題】システムインパッケージデバイスを製造するための改良された方法、および、その方法で製造されたシステムインパッケージデバイスを提供する。 【解決手段】第1種のダイ200および第2種のダイ202のうちの少なくとも1つが、寸法の再設定のために選択され、かつ、選択されたダイの少なくとも一方の面に、加えられる材料と前記選択されたダイとが寸法再設定されたダイ構造を形成するように、材料204が加えられる。接続層が、寸法再設定されたダイ構造上に形成される。選択されなかったダイと前記少なくとも1つの更なる構成部品とが前記接続層を介して前記寸法再設定されたダイ構造に接触してマウントできるよう、寸法再設定されたダイ構造206の寸法が設定される。 【選択図】図2
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公开(公告)号：JP5769721B2
公开(公告)日：2015-08-26
申请号：JP2012538349
申请日：2010-11-12
Applicant: コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ
Inventor： イヴ・フイエ , フランソワ・バルラ , マルティン・コシュット , サンドリーン・モベール
IPC: F04B43/02
CPC classification number: F04B43/046 , A61M5/14586 , B81C1/00182 , F04B43/043 , B81B2201/036 , B81B2203/0127 , B81C2201/0167 , B81C2201/019 , F05C2203/02 , F05C2203/06 , Y10T29/494
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公开(公告)号：JP2009034814A
公开(公告)日：2009-02-19
申请号：JP2008227637
申请日：2008-09-04
Applicant: California Inst Of Technol , カリフォルニア インスティチュート オブ テクノロジー
Inventor： UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
IPC: B81B3/00 , G03F7/20 , B01L3/00 , B81B1/00 , B81B7/00 , B81C1/00 , B81C3/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F15C5/00 , F16K7/00 , F16K7/02 , F16K7/04 , F16K7/07 , F16K17/02 , F16K27/00 , F16K99/00
CPC classification number: B29C51/00 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B33Y80/00 , B81B5/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , B81C2201/034 , C12Q1/6874 , F04B43/043 , F15C1/06 , F15C5/00 , F16K11/20 , F16K13/00 , F16K31/126 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/0497 , Y10T137/2224 , Y10T137/87249 , Y10T156/10 , Y10T428/24479 , Y10T428/24744 , C12Q2535/125
Abstract: PROBLEM TO BE SOLVED: To provide an elastomer valve structure capable of being formed in a lower profile, operable with small force, and relatively easier to manufacture than a silicon substrate process, and to provide a pumping system using the same. SOLUTION: A second flow channel 32 which is laminated perpendicular to a first flow channel 30 is formed in an elastomer block. A film 25 forming the top of the first flow channel 30 separates two flow channels from each other to form the bottom of the second flow channel 32 which is the top of the first flow channel 30. With a pressure fluctuation in the second flow channel 32, the film 25 is repetitively deformed downward and restored. Thereby, the first flow channel 30 constitutes a valve operation system having linear operation. COPYRIGHT: (C)2009,JPO&INPIT
Abstract translation: 要解决的问题：提供一种弹性体阀结构，其能够形成为具有比硅基板工艺更小的力并且相对容易制造的下轮廓，并且提供使用该弹性体阀结构的泵送系统。 解决方案：在弹性体块中形成垂直于第一流动通道30层压的第二流动通道32。 形成第一流动通道30的顶部的膜25将两个流动通道彼此分开以形成作为第一流动通道30的顶部的第二流动通道32的底部。在第二流动通道32中的压力波动 ，膜25向下重复变形并恢复。 由此，第一流路30构成具有线性运转的阀操作系统。 版权所有（C）2009，JPO＆INPIT
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公开(公告)号：JP2007009726A
公开(公告)日：2007-01-18
申请号：JP2005188373
申请日：2005-06-28
Applicant: Sharp Corp , シャープ株式会社
Inventor： KOSHIRO YOSHIAKI
CPC classification number: F04B43/043 , B81B2201/036
Abstract: PROBLEM TO BE SOLVED: To provide a micropump having a construction simplified and reduced in size as compared with a conventional micropump and to provide a micropump system.
SOLUTION: In the micropump 1 of the invention, a flow path substrate 2 is provided with a pressure chamber 3 having one end and another end and storing liquid inside, the one end of the pressure chamber 3 is connected with a flow path 4 having flow path resistances different according to a direction in which the liquid flows, the other end of the pressure chamber is opened, and an actuator 6 is provided for generating a pressure wave to the liquid in the pressure chamber 3, which is propagated between the one end and the other end.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供一种与常规微型泵相比具有简化和尺寸减小的结构的微型泵，并提供微型泵系统。 解决方案：在本发明的微型泵1中，流路基板2设置有一端和另一端的压力室3，并在其内部储存液体，压力室3的一端与流路 4，具有根据液体流动方向不同的流路阻力，压力室的另一端打开，并且设置致动器6，用于向压力室3中的液体产生压力波，该压力波在 一端和另一端。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2006247830A
公开(公告)日：2006-09-21
申请号：JP2005380631
申请日：2005-12-29
Applicant: California Inst Of Technol , カリフォルニア インスティチュート オブ テクノロジー
Inventor： UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
IPC: B81B3/00 , G03F7/20 , B01L3/00 , B81B1/00 , B81B7/00 , B81C1/00 , B81C3/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F04B43/14 , F15C5/00 , F16K7/00 , F16K17/02 , F16K99/00
CPC classification number: B29C51/00 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B33Y80/00 , B81B5/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , B81C2201/034 , C12Q1/6874 , F04B43/043 , F15C1/06 , F15C5/00 , F16K11/20 , F16K13/00 , F16K31/126 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/0497 , Y10T137/2224 , Y10T137/87249 , Y10T156/10 , Y10T428/24479 , Y10T428/24744 , C12Q2535/125
Abstract: PROBLEM TO BE SOLVED: To provide an elastomer valve structure capable of being made to thin thickness, being operated by small force and being relatively easily manufactured as compared with a silicon substrate process, and a pumping system using it. SOLUTION: A second flow channel 32 superposed so as to be perpendicular to a first flow channel 30 is formed in an elastomer block. A membrane 25 for forming an apex part of the first flow channel 30 separated the two flow channels and simultaneously forms a bottom part of the second flow channel 32 in addition to formation of the apex part of the first flow channel 30. The membrane 25 repeats downward deflection and returning by varying a pressure of the second flow channel 32. Thereby, the first flow channel 30 constitutes a valve action system of linear action. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种弹性体阀结构，其能够制造成薄的厚度，与硅衬底工艺相比，通过较小的力并且相对容易地制造，以及使用它的泵送系统。 解决方案：叠合成垂直于第一流动通道30的第二流动通道32形成在弹性体块中。 用于形成第一流动通道30的顶点部分的膜25除了形成第一流动通道30的顶点部分之外，分离两个流动通道并且同时形成第二流动通道32的底部部分。膜25重复 向下偏转并通过改变第二流动通道32的压力返回。由此，第一流动通道30构成线性动作的阀动作系统。 版权所有（C）2006，JPO＆NCIPI
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Patent Agency Ranking
公开(公告)号：JP2005096072A
公开(公告)日：2005-04-14
申请号：JP2004278576
申请日：2004-09-24
Applicant: California Inst Of Technol , カリフォルニア インスティチュート オブ テクノロジーCalifornia Institute Of Technology
Inventor： UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
IPC: G03F7/20 , B01L3/00 , B81B1/00 , B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F15C5/00 , F16K7/00 , F16K17/02 , F16K99/00
CPC classification number: B29C51/00 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B33Y80/00 , B81B5/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , B81C2201/034 , C12Q1/6874 , F04B43/043 , F15C1/06 , F15C5/00 , F16K11/20 , F16K13/00 , F16K31/126 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/0497 , Y10T137/2224 , Y10T137/87249 , Y10T156/10 , Y10T428/24479 , Y10T428/24744 , C12Q2535/125
Abstract: PROBLEM TO BE SOLVED: To provide an elastomer valve structure capable of being thinned, being operated with small force and being comparatively easily manufactured as compared with a silicon substrate process, and a pumping system using the structure. SOLUTION: A second flow channel 32 laminated by being made orthogonal to a first flow channel 30 is formed within an elastomer block. A film 25 for forming a top part of the first flow channel 30 separates two flow channels, is a top part of the first flow channel 30, and at the same time, forms a bottom part of the second flow channel 32. By fluctuating pressure of the second flow channel 32, the film 25 repeats bending and recovering to a lower side, and thereby the first flow channel 30 constitutes a valve operation system of a linear operation. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种与硅衬底工艺相比能够减薄，与较小力相比较容易制造的弹性体阀结构，以及使用该结构的泵送系统。 解决方案：在弹性体块内形成通过与第一流动通道30正交地层压的第二流动通道32。 用于形成第一流动通道30的顶部的膜25分离两个流动通道，即第一流动通道30的顶部，并且同时形成第二流动通道32的底部。通过波动的压力 在第二流路32中，膜25重复弯曲并回收到下侧，由此第一流路30构成线性运转的阀操作系统。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2004512190A
公开(公告)日：2004-04-22
申请号：JP2002539252
申请日：2001-10-06
Inventor： ハンス アルトマン , フーベルト ベンツェル , フランク シェーファー , ヘリベルト ヴェーバー
IPC: G01P15/125 , B81B3/00 , B81C1/00 , H01L29/84
CPC classification number: B81C1/00595 , B81B2201/0235 , B81B2201/036 , B81C2201/0114 , B81C2201/0115 , B81C2201/0136 , B81C2203/0136
Abstract: 本発明は、第１のドーピングタイプ（ｐ）を備えた基板材料から成る基板（１０）と、基板（１０）内に設けられたマイクロメカニックな機能組織と、マイクロメカニックな機能組織を少なくとも部分的に覆うカバー層とを有している形式の、マイクロメカニックな構造エレメントを創作する。 マイクロメカニックな機能組織は、第２のドーピングタイプ（ｎ）を備えた基板材料から成る範囲（１５；１５ａ；１５ｃ；７３０；７４０；８３０）を有しており、これらの範囲は少なくとも部分的に中空室（５０；５０ａ〜ｆ）により取り囲まれており、かつ、カバー層が基板材料から成る気孔性の層（３０）を有している。
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公开(公告)号：US20230406694A1
公开(公告)日：2023-12-21
申请号：US18334468
申请日：2023-06-14
Applicant: Infineon Technologies AG
Inventor： Christian Bretthauer , Marco Haubold , Hans-Jörg Timme , Dominik Mayrhofer
CPC classification number: B81B3/0021 , B81B3/007 , H04R19/02 , H04R2201/003 , B81B2203/06 , B81B2201/0257 , B81B2201/036 , B81B2203/0127
Abstract: A MEMS device includes a substrate having a cavity and a membrane structure mechanically connected to the substrate and configured for deflecting out-of-plane with regard to a substrate plane and with a frequency in an ultrasonic frequency range to cause a fluid motion of the fluid in the cavity. The MEMS device includes a valve structure sandwiching the cavity together with the membrane structure, wherein the valve structure includes a planar perforated structure and a shutter structure opposing the perforated structure and arranged movably in-plane and with a frequency in the ultrasonic frequency range and with regard to the substrate plane and between a first position and a second position. The shutter structure is arranged to provide a first fluidic resistance for the fluid in the first position and a second, higher fluidic resistance for the fluid in the second position.
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公开(公告)号：US09828239B2
公开(公告)日：2017-11-28
申请号：US14845926
申请日：2015-09-04
Applicant: MURATA ELECTRONICS OY
Inventor： Heikki Kuisma , Sami Nurmi
IPC: H01L23/528 , B81B7/00 , H01L25/16 , H01L25/18 , B81C1/00 , H01L23/00 , G01P1/02 , H01L23/538 , G01L19/14 , G01P15/08 , G01C19/5783 , H01L25/00 , H01L21/56 , H01L27/146 , G01L19/00
CPC classification number: B81B7/0074 , B81B2201/0235 , B81B2201/025 , B81B2201/0257 , B81B2201/0264 , B81B2201/036 , B81B2207/012 , B81B2207/095 , B81C1/00333 , G01C19/5783 , G01L19/0084 , G01L19/148 , G01P1/023 , G01P1/026 , G01P15/0802 , H01L21/568 , H01L23/528 , H01L23/5389 , H01L24/16 , H01L24/17 , H01L24/19 , H01L24/32 , H01L24/73 , H01L24/83 , H01L24/92 , H01L24/96 , H01L24/97 , H01L25/16 , H01L25/18 , H01L25/50 , H01L27/14618 , H01L2223/6677 , H01L2224/12105 , H01L2224/16145 , H01L2224/16227 , H01L2224/1703 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/8312 , H01L2224/8319 , H01L2224/92125 , H01L2224/97 , H01L2924/12042 , H01L2924/14 , H01L2924/1433 , H01L2924/1461 , H01L2924/15311 , H01L2924/181 , H01L2924/18162 , H01L2224/81 , H01L2224/83 , H01L2924/00012 , H01L2924/00
Abstract: A method of making a system-in-package device, and a system-in-package device is disclosed. In the method, at least one first species die with predetermined dimensions, at least one second species die with predetermined dimensions, and at least one further component of the system-in-device is included in the system-in package device. At least one of the first and second species dies is selected for redimensioning, and material is added to at least one side of the selected die such that the added material and the selected die form a redimensioned die structure. A connecting layer is formed on the redimensioned die structure. The redimensioned die structure is dimensioned to allow mounting of the non-selected die and the at least one further component into contact with the redimensioned die structure via the connecting layer.
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公开(公告)号：US20170232189A1
公开(公告)日：2017-08-17
申请号：US15443484
申请日：2017-02-27
Applicant: Cam Med LLC
Inventor： Yanzhe Qin , Zhifei Ge
CPC classification number: A61M5/14248 , A61M5/14586 , A61M5/16881 , A61M39/24 , A61M2005/14252 , A61M2205/3334 , A61M2205/35 , A61M2205/581 , A61M2205/582 , A61M2207/00 , B29C65/08 , B29C65/4825 , B29C66/301 , B29C66/474 , B32B37/12 , B32B2535/00 , B81B2201/036 , B81C1/00158 , B81C2201/034 , F04B43/043 , F04B53/10 , F16K2099/008 , F16K2099/0094
Abstract: A flexible patch pump for controllable accurate subcutaneous delivery of one or more medicaments to a patient includes a laminated layered structure. The pump may have a rigid reservoir layer including a number of rigid reservoirs disposed in a flexible material; a flexible microfluidic layer including a compliant membrane for sealing the rigid reservoirs, a network of microfluidic channels connecting the rigid reservoirs, and a number of inlet and/or outlet valves corresponding to the rigid reservoirs; and a flexible-rigid electronic circuit layer including a number of individually-addressable actuators. In operation, the rigid reservoirs may contain medicament that is dispensed in precise volumes at appropriate times due, for to example, to a pressure change in an addressed reservoir caused by displacement of the compliant membrane or other actuation element.
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