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公开(公告)号：KR1020050052712A
公开(公告)日：2005-06-07
申请号：KR1020030086246
申请日：2003-12-01
Applicant: 전자부품연구원
IPC: G01T1/16
Abstract: 본 발명은 인체영상센서의 격벽 구조물 제조 방법에 관한 것으로, 보다 자세하게는 변환 물질을 코팅한 후 격벽구조물을 형성시키도록 부분적으로 식각하는 인체영상센서의 제조 방법에 관한 것이다.
본 발명의 인체영상센서의 격벽 구조물 제조 방법은 기판 상에 변환물질을 코팅하는 단계; 상기 코팅된 변환물질 상부에 패턴을 형성하는 단계; 상기 패턴을 마스크로 사용하여 변환물질을 식각하는 단계; 상기 식각된 변환물질 상에 격벽재료를 증착하는 단계; 상기 격벽재료를 평탄화하는 단계 및 상기 기판을 제거하는 단계로 이루어짐에 기술적 특징이 있다.
따라서, 본 발명의 인체영상센서의 격벽 구조물 제조 방법은 좁고 긴 터널 형태의 격벽구조물에 변환물질을 채워넣는 것이 아닌 변환물질을 코팅한 후 격벽형태를 만들어 격벽구조물을 채우는 형태로서, 격벽구조를 만들 때 사용하는 LIGA 공정과 같이 광가속기를 이용할 필요없이 건식 식각장치만을 이용하기 때문에 제조 방법이 용이한 장점이 있고, 공정시간도 단축되는 효과가 있다.-
公开(公告)号：KR1020040095062A
公开(公告)日：2004-11-12
申请号：KR1020030028659
申请日：2003-05-06
Applicant: 전자부품연구원
IPC: H01L41/22
Abstract: PURPOSE: A sample, an apparatus, and a method for measuring a piezoelectric transverse coefficient of a PZT piezoelectric layer are provided to measure accurately the piezoelectric transverse coefficient and obtain comparative data about various piezoelectric materials by providing an improved structure of the sample. CONSTITUTION: A sample for measuring a piezoelectric transverse coefficient of a PZT piezoelectric layer includes a lower electrode deposited on a substrate, a piezoelectric layer having a lower electrode opening formed on the lower electrode, and an upper electrode(60) and a fixing part formed on the piezoelectric layer. The upper electrode is formed on the fixing part without using a connection part.
Abstract translation: 目的：提供用于测量PZT压电层的压电横向系数的样品，装置和方法，以通过提供改进的样品结构来精确地测量压电横向系数并获得关于各种压电材料的比较数据。 构成：用于测量PZT压电层的压电横向系数的样本包括沉积在基底上的下电极，形成在下电极上的具有下电极开口的压电层，以及形成的上电极（60）和固定部 在压电层上。 上部电极形成在固定部分上，而不使用连接部分。
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公开(公告)号：KR100408837B1
公开(公告)日：2003-12-06
申请号：KR1020010073828
申请日：2001-11-26
Applicant: 전자부품연구원
IPC: G02B27/01
Abstract: PURPOSE: A micro display using pressure is provided to improve an adhesive characteristic by using a pressure chamber for forming the pressure and a pressure release button for releasing the pressure. CONSTITUTION: An optical system(15) is used for magnifying a real image formed on a panel(13). A micro display unit(3) is used for forming the magnified image on a user's retina. A pressure chamber(5) is used for applying a pressure on a surface of a mounting position of a transparent body(9) when the micro display unit is mounted on the surface of the transparent body located at a front side of the user's eyeballs. In addition, the pressure chamber is used for applying the atmospheric pressure on the surface of the mounting position of the transparent body when the micro display unit is separated from the surface of the transparent body. An absorbing plate(7) is installed at one side of the pressure chamber. A pressure release button(11) is installed at one side of the pressure chamber in order to release the pressure.
Abstract translation: 目的：通过使用用于形成压力的压力室和用于释放压力的压力释放按钮来提供使用压力的微型显示器以改善粘合特性。 构成：光学系统（15）用于放大形成在面板（13）上的真实图像。 微型显示单元（3）用于在用户的视网膜上形成放大的图像。 当微型显示单元安装在位于用户眼球前侧的透明体的表面上时，压力室（5）用于在透明体（9）的安装位置的表面上施加压力。 另外，当微型显示单元与透明体的表面分离时，压力室用于在透明体的安装位置的表面上施加大气压力。 吸收板（7）安装在压力室的一侧。 压力释放按钮（11）安装在压力室的一侧以释放压力。
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公开(公告)号：KR100378065B1
公开(公告)日：2003-03-29
申请号：KR1020010012032
申请日：2001-03-08
Applicant: 전자부품연구원
IPC: H05B33/10
Abstract: PURPOSE: A method is provided to effectively manufacture a full color display system by repeatedly depositing monomolecular organic electroluminescence material for forming an individual pixel corresponding to red, green and blue colors. CONSTITUTION: A method comprises a first step of patterning an indium tin oxide(ITO) electrode(120) in a lengthwise direction onto a glass substrate(110); a second step of producing a metal mask(130) having a plurality of slots(132), by removing the metallic portion of a metal plate, in the direction perpendicular to the ITO electrode on the glass substrate; a third step of aligning the metal mask onto the glass substrate where the ITO electrode is formed, and depositing a monomolecular organic electroluminescence material through a thermal deposition method; a fourth step of forming a monomolecular organic electroluminescence pixel area by forming a metal electrode through the thermal deposition of metallic mixture onto the monomolecular organic electroluminescence material layer; and a fifth step of moving the metal mask or the glass substrate to the position adjacent to the monomolecular organic electroluminescence pixel area within the distance between slots.
Abstract translation: 目的：提供一种通过重复沉积单分子有机电致发光材料来有效地制造全色显示系统的方法，该单分子有机电致发光材料用于形成对应于红色，绿色和蓝色的单个像素。 构成：一种方法包括：第一步骤，在纵向方向上将铟锡氧化物（ITO）电极（120）图案化到玻璃衬底（110）上; 通过在与玻璃基板上的ITO电极垂直的方向上去除金属板的金属部分来制造具有多个槽（132）的金属掩模（130）的第二步骤; 第三步骤，将金属掩模对准形成ITO电极的玻璃基板，并通过热沉积方法沉积单分子有机电致发光材料; 第四步骤，通过将金属混合物热沉积到单分子有机电致发光材料层上形成金属电极来形成单分子有机电致发光像素区域; 以及第五步骤，在狭缝之间的距离内，将金属掩模或玻璃基板移动到与单分子有机电致发光像素区域相邻的位置。
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公开(公告)号：KR1020020078037A
公开(公告)日：2002-10-18
申请号：KR1020010017874
申请日：2001-04-04
Applicant: 전자부품연구원
IPC: G02B26/00
Abstract: PURPOSE: A 1 x N optical switch is provided to have a very simple structure by using a refraction of a light beam. CONSTITUTION: A 1 x N optical switch includes an input port for receiving an incident light beam(1), N number of output ports for outputting a transmitted light beam(3) and an optical refraction plate, placed between the input port and the output ports, for allowing an optical path of the transmitted light beam(3) to translate in parallel by refracting the incident light beam(1). The optical refraction plate includes a transparent plate(2), a pair of antireflection layers(8) attached both sides of the transparent plate(2) for preventing the incident light beam(1) from reflecting and a rotating axis(9) formed at the center portion of one of the antireflection layers(8). The optical refraction plate, located at an incident plane of the incident light beam(1), is capable of selecting an output port to output the transmitted light beam(3) among the N number of output ports by rotating with respect to a straight line passing through an incident point of the incident light beam(1).
Abstract translation: 目的：通过使用光束的折射，提供1 x N的光开关以具有非常简单的结构。 构成：1×N光开关包括用于接收入射光束（1）的输入端口，N个用于输出透射光束（3）的输出端口和放置在输入端口和输出端之间的光学折射板 端口，用于允许透射光束（3）的光路通过折射入射光束（1）平行平移。 光学折射板包括透明板（2），安装在透明板（2）的两侧的一对防反射层（8），用于防止入射光束（1）反射，以及旋转轴线（9）形成在 一个防反射层（8）的中心部分。 位于入射光束（1）的入射面的光折射板能够通过相对于直线旋转而选择输出端口以输出N个输出端口中的透射光束（3） 通过入射光束（1）的入射点。
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Patent Agency Ranking
公开(公告)号：KR100350853B1
公开(公告)日：2002-09-09
申请号：KR1019990048845
申请日：1999-11-05
Applicant: 전자부품연구원
Abstract: 본발명의저온소결압전체조성및 이조성에따른저온소결압전체제조방법은치환된저온소결 PZT계압전체또는복합 3성분계저온소결 PZT계압전체중 하나에대한조성물에대한질량을측정하는단계, 상기질량을측정한저온소결 PZT계압전체조성물들을섞어가열하는하소단계, 저온소결조제인 BaO-CuO의질량을측정하여하소단계를마친저온소결 PZT계압전체조성물과섞는단계, 저온압전체조성물을일정온도로가열하여소결하는단계, 소결단계를마친저온압전체에전극을형성하고전계를가하여분극공정을실시한다음, 전극에전원을인가하여저온압전체의물성을평가하는단계를포함한다. 따라서, 저온소결압전체를제조함에있어서저온소결조제로 BaO-CuO를사용할경우물성이개선된압전체를만들수 있을뿐만아니라소결온도를낮출수 있다.
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公开(公告)号：KR1020020047651A
公开(公告)日：2002-06-22
申请号：KR1020000076149
申请日：2000-12-13
Applicant: 전자부품연구원
IPC: H01J9/02
CPC classification number: H01L51/0011 , H01L27/32
Abstract: PURPOSE: A method for fabricating an organic electro-luminescence shadow mask is provided to enhance resolution of the organic electro-luminescence shadow mask by using a photo-resist layer of high density and a metal plating process. CONSTITUTION: A photo-resist layer of high density is formed on a silicon substrate by using a spin coating method. The photo-resist layer of high density is exposed and developed by using a chrome mask. A photo-resist layer pattern of a desired size and a desired shape is formed by the exposing process and the developing process. A nickel layer is formed on the photo-resist layer pattern. The photo-resist layer pattern is exposed and a metal layer(32) is formed by polishing the nickel layer. An empty space(24) is formed by removing the photo-resist layer pattern from the nickel layer. The silicon substrate is removed by performing an etch process.
Abstract translation: 目的：提供一种制造有机电致发光荫罩的方法，通过使用高密度和金属电镀工艺的光致抗蚀剂层来提高有机电致发光荫罩的分辨率。 构成：通过使用旋涂法在硅衬底上形成高密度的光致抗蚀剂层。 通过使用镀铬掩模使高密度的光致抗蚀剂层曝光和显影。 通过曝光处理和显影处理形成期望尺寸和期望形状的光致抗蚀剂层图案。 在光致抗蚀剂层图案上形成镍层。 曝光光刻胶层图案，通过研磨镍层形成金属层（32）。 通过从镍层去除光致抗蚀剂层图案来形成空的空间（24）。 通过执行蚀刻工艺去除硅衬底。
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公开(公告)号：KR100320040B1
公开(公告)日：2002-01-09
申请号：KR1019990063040
申请日：1999-12-27
Applicant: 전자부품연구원
IPC: B29D11/00
Abstract: 이발명은비구면렌즈의제조방법및 비구면렌즈사출용금형제조방법을개시한다. 기판상에감광막이형성되어있는노광시편위에비구면렌즈제조를위한노광마스크를위치시키고상기노광시편의회전축과노광마스크의중심축을정렬시킨다음에, 노광마스크는고정시키고상기노광시편은회전시키면서상기노광마스크위로 X-선을조사하여감광막을노광시킨다. 그리고감광막을현상하여비구면렌즈를형성한다. 또한, 현상된감광막즉, 감광막구조물위에도금기저층을형성하고, 도금기저층위에전기도금공정을수행하여도금층을형성한다음에, 상기도금층을상기감광막구조물로부터분리하여비구면렌즈를사출성형하기위한금형틀에결합하여사출금형을제조한다. 이와같이 X-선사진식각공정을이용하여저가의비용으로보다정밀한형상을가지는비구면렌즈를용이하게제조할수 있다. 또한비구면렌즈를사출성형하기위한금형이 X-선사진식각공정에따라제조됨으로써, 보다정밀하고미세한크기의비구면렌즈를대량으로제조할수 있다.
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公开(公告)号：KR1020010060635A
公开(公告)日：2001-07-07
申请号：KR1019990063040
申请日：1999-12-27
Applicant: 전자부품연구원
IPC: B29D11/00
Abstract: PURPOSE: Provided is a process for producing non-spherical surface lens, which is very easy and can make precisely by using X-ray lithography process. CONSTITUTION: The process contains the steps of: i) installing an exposure mask for producing the non-spherical surface lens at an exposure sample formed a sensitive film on a plate and arranging a shaft of the exposure sample and the center axis of the exposure mask; ii) fixing the exposure mask and irradiating light on the exposure mask to exposure the sensitive film while the exposure sample rotates; and then iii) developing the sensitive film.
Abstract translation: 目的：提供非球形表面透镜的制造方法，这是非常容易的，并且可以通过使用X射线光刻工艺精确地制造。 构成：该方法包括以下步骤：i）在曝光样品上安装用于制造非球形表面透镜的曝光掩模，在曝光样品上形成敏感膜并且布置曝光样品的轴和曝光掩模的中心轴 ; ii）固定曝光掩模并在曝光掩模上照射光以在曝光样品旋转时曝光敏感膜; 然后iii）开发敏感膜。
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公开(公告)号：KR100291555B1
公开(公告)日：2001-05-15
申请号：KR1019990029367
申请日：1999-07-20
Applicant: 전자부품연구원
IPC: H01L21/306
Abstract: 이발명은기판식각장치및 이를이용한실리콘멤브레인제조방법을개시한다. 실리콘기판의하부면의일부를설정된실리콘멤브레인두께만큼식각하여적어도하나이상의식각영역을형성한다음, 식각영역에각각금속막을증착한다. 다음에실리콘기판의상하부면에보호막을형성하고, 실리콘기판의상부면에형성된보호막의일부를제거하여식각영역에대응하는측정영역의제1 개구부와소자를형성하기위한활성영역의제2 개구부를형성한다. 보호막중 제거되지않은보호막을식각마스크로하여제1 및제2 개구부를통하여측정영역이및 활성영역을식각하며, 식각시에일정량의광을식각영역의금속막으로조사한다. 제1 개구부를통하여금속막이노출됨에따라금속막으로조사되는광의일부가투과되어금속막으로부터반사되는광의세기가최고치에서감소되기시작하여, 금속막이모두식각되어반사되는광이최소치로감소되는구간내에서식각공정을종료한다. 따라서, 식각용액의농도및 온도변화그리고식각시간에상관없이설정된두께를가지는실리콘멤브레인을용이하게제조할수가있다.
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