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    イオン注入装置
    231.
    发明申请
    イオン注入装置 审中-公开
    离子植入装置

    公开(公告)号：WO2006054528A1

    公开(公告)日：2006-05-26

    申请号：PCT/JP2005/020872

    申请日：2005-11-14

    Applicant: 株式会社アルバック ,  小方 誠司 ,  桜田 勇蔵 ,  関口 雅行 ,  西橋 勉

    Inventor： 小方 誠司 ,  桜田 勇蔵 ,  関口 雅行 ,  西橋 勉

    IPC: H01J37/317 ,  H01J37/147 ,  H01L21/265

    CPC classification number: H01L21/265 ,  H01J37/05 ,  H01J37/147 ,  H01J37/1474 ,  H01J37/3171 ,  H01J2237/057 ,  H01J2237/30483

    Abstract: There is provided an ion implantation device capable of suppressing spread of an ion beam and accurately controlling a scan waveform, there by obtaining a large scan angle in the order of 10 degrees. In the ion implantation device, a first, a second, and a third chamber (12A, 14A, 16A) are arranged at predetermined positions on the beam line. The second chamber (14A) is arranged with a first and a second gap (20A, 22A) with respect to the first and the third chamber (12A, 16A). The second chamber (14A) is electrically insulated from the first and the third chamber (12A, 16A) via a first and a second electrode pair (26A, 28A) mounted on the first and the second gap (20A, 22A), respectively. At least one of the first and the second electrode pair (26A, 28A) obliquely intersects a reference axis J of the ion beam with a predetermined angle. The second chamber (14A) includes an ion beam scan mechanism (10A) connected to a scan power source (40A) for applying a potential of a desired scan waveform.

    Abstract translation: 提供了一种离子注入装置，其能够通过获得大约10度的大扫描角度来抑制离子束的扩散并且精确地控制扫描波形。 在离子注入装置中，第一，第二和第三室（12A，14A，16A）被布置在束线上的预定位置处。 第二室（14A）相对于第一和第三室（12A，16A）布置有第一和第二间隙（20A，22A）。 第二室（14A）分别经由安装在第一和第二间隙（20A，22A）上的第一和第二电极对（26A，28A）与第一和第三室（12A，16A）电绝缘。 第一和第二电极对（26A，28A）中的至少一个与离子束的参考轴线J以预定角度倾斜相交。 第二室（14A）包括连接到扫描电源（40A）的用于施加所需扫描波形的电位的离子束扫描机构（10A）。

    ELECTRON SPECTROSCOPE WITH EMISSION INDUCED BY A MONOCHROMATIC ELECTRON BEAM
    232.
    发明申请
    ELECTRON SPECTROSCOPE WITH EMISSION INDUCED BY A MONOCHROMATIC ELECTRON BEAM 审中-公开
    由单色电子束引起的电子电子光谱

    公开(公告)号：WO2005033683A1

    公开(公告)日：2005-04-14

    申请号：PCT/IT2004/000555

    申请日：2004-10-06

    Applicant: STMICROELECTRONICS S.R.L. ,  ALBERICI, Stefano, Giovanni

    Inventor： ALBERICI, Stefano, Giovanni

    IPC: G01N23/227

    CPC classification number: H01J37/256 ,  G01N23/227 ,  H01J37/05 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/06316 ,  H01J2237/24571 ,  H01J2237/2511 ,  H01J2237/2561

    Abstract: An electroscope system based on exciting a certain area of the surface of a sample to emit electrons with a characteristic distribution of kinetic energies, has the analyzed area of the sample excited by an electron beam produced by a field emission source and a monochromator energy filter of said electron beam disposed down-stream of the electron source.The field emission electron source is preferably a Schottky source and monochromator energy filter reduces energy dispertion of the electrons of said electron beam to less than 0.2 eV. Microareas of linear dimensions in the order of ten nm may be analyzed while observing them gathering information on the chemical state of detected elements present at the surface of the examined microarea of the sample.

    Abstract translation: 基于激发样品表面的特定区域以发射具有动能特征分布的电子的电镜系统，具有由场发射源产生的电子束和由单个器能量滤波器产生的电子束激发的样本的分析面积 所述电子束设置在电子源的下游。场发射电子源优选为肖特基源，并且单色器能量滤波器将所述电子束的电子的能量差异减小到小于0.2eV。 可以分析十纳米级的线性尺寸的微孔，同时观察它们收集关于存在于检测到的微区表面上的检测元素的化学状态的信息。

    APPARATUS AND METHOD FOR CHARGED PARTICLE FILTERING AND APPARATUS AND METHOD FOR ION IMPLANTATION
    234.
    发明申请
    APPARATUS AND METHOD FOR CHARGED PARTICLE FILTERING AND APPARATUS AND METHOD FOR ION IMPLANTATION 审中-公开
    充填颗粒过滤装置及方法及装置及其植入方法

    公开(公告)号：WO0233764A3

    公开(公告)日：2003-12-24

    申请号：PCT/IB0102612

    申请日：2001-10-16

    Applicant: APPLIED MATERIALS INC

    Inventor： GLAVISH HILTON F ,  JEN CAUSON KO-CHUAN

    IPC: H01J37/05 ,  H01J37/317 ,  H01J49/28 ,  H01M20060101

    CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J2237/03 ,  H01J2237/055

    Abstract: A charged particle filter provides a curved through path and has both magnetic poles for applying a magnetic field normal to the plane of curvature of the path and electrodes for applying a radial electric field. The filter is used as an energy filter downstream of an acelerator in an ion implanter. The filter can be set toprovide a range of energy dispersions, to operate as an achromatic bend, or to reject lower charge state ions.

    Abstract translation: 带电粒子滤波器提供弯曲通路，并且具有用于施加垂直于路径曲面的磁场的磁极和用于施加径向电场的电极的两个磁极。 过滤器用作离子注入机中的加速器下游的能量过滤器。 滤波器可以设置提供一系列能量分散，作为消色差弯曲操作，或者抑制较低电荷状态的离子。

    METHOD AND DEVICE FOR SEPARATING ION MASS, AND ION DOPING DEVICE
    236.
    发明申请
    METHOD AND DEVICE FOR SEPARATING ION MASS, AND ION DOPING DEVICE 审中-公开
    用于分离离子质量的方法和装置以及离子装置

    公开(公告)号：WO02054441A1

    公开(公告)日：2002-07-11

    申请号：PCT/JP2001/011556

    申请日：2001-12-27

    IPC: C23C14/48 ,  H01J37/05 ,  H01J37/317 ,  H01J49/26 ,  H01J49/32 ,  H01L21/265 ,  H01J49/30

    CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J49/26 ,  H01J49/32

    Abstract: A method of separating ion mass, comprising the steps of, by using an air-cored exciting current path (21) formed by spirally winding a conductor (20) in lateral direction on the outside of a bent ion deflection casing having an inlet and an outlet along a bent shape after passing through the inlet and outlet, forming a magnetic field of uniform intensity laterally in the ion deflection casing, leading an ion beam into the air-cored exciting current path through a clearance between the conductors (20c) at the inlet, bending the ion beam according to ion mass by the action of a magnetic field caused by the air-cored exciting current path, and taking out the ion beam of a desired mass through a clearance between the conductors (20d) at the outlet, whereby the ion mass can be separated uniformly from the large diameter ion beam.

    Abstract translation: 一种分离离子质量的方法，其特征在于，包括以下步骤：使用在横向上螺旋地卷绕导体（20）而形成的空心激励电流路径（21），所述空心激励电流路径（21）具有入口和 在通过入口和出口之后沿着弯曲形状的出口，在离子偏转壳体中横向形成均匀强度的磁场，通过导体（20c）之间的间隙将离子束引导到空芯励磁电流路径中 入口，通过由空心激励电流路径引起的磁场的作用，根据离子质量弯曲离子束，并且通过出口处的导体（20d）之间的间隙取出所需质量的离子束， 从而离子质量可以从大直径离子束均匀地分离。

    APPARATUS AND METHOD FOR CHARGED PARTICLE FILTERING AND ION IMPLANTATION
    237.
    发明申请
    APPARATUS AND METHOD FOR CHARGED PARTICLE FILTERING AND ION IMPLANTATION 审中-公开
    用于填充颗粒过滤和离子植入的装置和方法

    公开(公告)号：WO02033764A2

    公开(公告)日：2002-04-25

    申请号：PCT/IB2001/002612

    申请日：2001-10-16

    IPC: H01J37/05 ,  H01J37/317 ,  H01J49/28 ,  H01M20060101 ,  H01M

    CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J2237/03 ,  H01J2237/055

    Abstract: A charged particle filter provides a curved through path and has both magnetic poles for applying a magnetic field normal to the plane of curvature of the path and electrodes for applying a radial electric field. The filter is used as an energy filter downstream of an acelerator in an ion implanter. The filter can be set toprovide a range of energy dispersions, to operate as an achromatic bend, or to reject lower charge state ions.

    Abstract translation: 带电粒子滤波器提供弯曲通路，并且具有用于施加垂直于路径曲面的磁场的磁极和用于施加径向电场的电极的两个磁极。 过滤器用作离子注入机中的加速器下游的能量过滤器。 滤波器可以设置提供一系列能量分散，作为消色差弯曲操作，或者抑制较低电荷状态的离子。

    GAS CLUSTER ION BEAM LOW MASS ION FILTER
    239.
    发明申请
    GAS CLUSTER ION BEAM LOW MASS ION FILTER 审中-公开
    气体离子束低质量过滤器

    公开(公告)号：WO0140532A3

    公开(公告)日：2001-10-25

    申请号：PCT/US0042556

    申请日：2000-12-05

    Applicant: EPION CORP

    Inventor： TORTI RICHARD P ,  DYKSTRA JERALD P

    IPC: H01J37/05 ,  H01J37/305 ,  H01J49/04 ,  H05H7/04 ,  H05H3/00 ,  H01J37/30

    CPC classification number: H01J49/0422 ,  H01J27/026 ,  H01J37/05 ,  H01J49/10 ,  H01J2237/0812 ,  H05H7/04

    Abstract: Incorporating the use of a permanent magnet (252) within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam (148) to facilitate improved processing of workpieces (152). In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an electrical coil. The above system eliminates problems related to power consumption and heat generation.

    Abstract translation: 在GCIB设备中结合使用永磁体（252）以将不期望的单体离子与气体簇离子束（148）分离，以便改进工件（152）的处理。 在替代实施例中，永磁体的作用可以通过使用电线圈来控制。 上述系统消除了与功耗和发热有关的问题。

    ELECTRONIC ENERGY FILTER
    240.
    发明申请
    ELECTRONIC ENERGY FILTER 审中-公开
    电子能量过滤器

    公开(公告)号：WO1996002935A1

    公开(公告)日：1996-02-01

    申请号：PCT/JP1995001401

    申请日：1995-07-14

    Applicant: HITACHI, LTD. ,  TAYA, Shunroku ,  TANIGUCHI, Yoshifumi

    Inventor： HITACHI, LTD.

    IPC: H01J49/44

    CPC classification number: H01J37/05 ,  H01J49/44 ,  H01J49/46 ,  H01J49/48 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/2802

    Abstract: An electronic energy filter is equipped with a first pair of magnetic poles (21) which generates a first deflecting magnetic field and a second pair of magnetic poles (22) which generates a second deflecting magnetic field in the same direction as that of the first magnetic field. Incident electrons are deflected by about 90 DEG with a path radius of AM1 in the first magnetic field, passed through a free space having a length of DL2 which is about the half of the radius AM1, directed into the second magnetic field, deflected in the second field by about 180 DEG with a radius of AM2 which is nearly the half of the radius AM1, passed through the free space, again directed into the first magnetic field, deflected in the first field by about 90 DEG with the radius AM1, and emitted in the same direction where the electrons enter the first magnetic field. Thus, the electrons travel on a path like a Greek letter gamma . Therefore, the filter is compact and the aberrations of the filter are small.

    Abstract translation: 电子能量过滤器配备有产生第一偏转磁场的第一对磁极（21）和产生与第一磁场相同方向的第二偏转磁场的第二对磁极（22） 领域。 事件电子在第一磁场中偏转大约90°的路径半径为AM1，通过长度为DL2的自由空间，其长度为半径为AM1的半径，指向第二磁场，偏转在第二磁场中 第二场约180度，半径为AM2，半径为半径AM1，半径为AM1的半径，通过自由空间，再次导入第一磁场，第一场中以半径AM1偏转约90度， 在电子进入第一磁场的相同方向上发射。 因此，电子在像希腊字母伽马的路径上行进。 因此，过滤器紧凑，并且过滤器的像差小。

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