Abstract:
An electron-emitting device contains a vertical emitter resistor patterned into multiple laterally separated sections (34, 34V, 46, or 46V) situated between the electron-emissive elements (40), on one hand, and emitter electrodes (32), on the other hand. Sections of the resistor are spaced apart along each emitter electrode. The resistor can be formed in a manner self aligned to control electrodes (38 or 52A/58B) of the device or with a separate resistor mask.
Abstract:
A device (100) for imparting an orbital angular momentum to a charged particle wave propagating along a beam axis (104) in a charged particle beam generating apparatus is described. The device comprises a support element (106) having a target region (108) adapted for transmitting a charged particle wave propagating along a beam axis (104) and an induction means (112) for inducing a magnetic flux along an elongated profile having a free end portion located in said target region (108) and the induction means (112) is adapted for providing a magnetic flux in said elongated profile in order to induce an angular gradient, relative to the beam axis (104), of the phase of the charged particle wave when transmitted through said target region (108). A corresponding method is also disclosed, as well as the use thereof in electron microscopy.
Abstract:
An electron emitting device includes a substrate, a plurality of first wiring units, each of the plurality of first wiring units including a plurality of first electrodes extending in a first direction on the substrate and spaced apart from each other, a plurality of second wiring units, each of the plurality of second wiring units including a plurality of second electrodes each extending in a direction substantially opposite to the first direction and interposed between adjacent first electrodes of the plurality of first electrodes, and a plurality of first electron emitters at sides of the first electrodes and a plurality of second electron emitters at sides of the second electrodes, wherein at least one of the plurality of first wiring units or the plurality of second wiring units is configured to be driven separately.