Environmental cell for charged particle beam system
    21.
    发明公开
    Environmental cell for charged particle beam system 有权
    Umgebungszellefürein System mit geladenem Teilchenstrahl

    公开(公告)号:EP2450935A2

    公开(公告)日:2012-05-09

    申请号:EP11187989.6

    申请日:2011-11-07

    Applicant: FEI Company

    Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.

    Abstract translation: 用于带电粒子束系统的环境单元允许安装在X-Y平台上的单元和聚焦柱的光轴之间的相对运动,从而消除对单元内的子级的需要。 柔性电池配置,例如可伸缩盖,允许多种工艺,包括光束诱导和热诱导工艺。 在带电粒子束系统中进行的光子产率光谱和使用光电子的气体级联放大,可以分析细胞中的物质并监测细胞中的处理。 也可以使用可伸缩镜进行发光分析。

    Multistage gas cascade amplifier
    25.
    发明公开
    Multistage gas cascade amplifier 审中-公开
    MehrstufigerGaskaskadenverstärker

    公开(公告)号:EP2107591A1

    公开(公告)日:2009-10-07

    申请号:EP09156789.1

    申请日:2009-03-31

    Applicant: FEI Company

    Abstract: A novel detector for a charged particle beam system which includes multiple gas amplification stages. The stages are typically defined by conductors to which voltage are applied relative to the sample or to a previous stage. By creating cascades of secondary electrons in multiple stages, the gain can be increased without causing dielectric breakdown of the gas.

    Abstract translation: 一种用于带电粒子束系统的新型检测器,其包括多个气体放大级。 这些级通常由相对于样品施加电压的导体或前一级定义。 通过在多级中产生二级电子级联,可以增加增益,而不会引起气体的介质击穿。

    High resolution plasma etch
    26.
    发明公开
    High resolution plasma etch 审中-公开
    HochauflösendePlasmaätzung

    公开(公告)号:EP2006249A2

    公开(公告)日:2008-12-24

    申请号:EP08158646.3

    申请日:2008-06-20

    Applicant: FEI COMPANY

    Abstract: A method for fabrication of microscopic structures that uses a beam process, such as beam-induced decomposition of a precursor, to deposit a mask in a precise pattern and then a selective, plasma beam is applied, comprising the steps of first creating a protective mask upon surface portions of a substrate using a beam process such as an electron beam, focused ion beam (FIB), or laser process, and secondly etching unmasked substrate portions using a selective plasma beam etch process. Optionally, a third step comprising the removal of the protective mask may be performed with a second, materially oppositely selective plasma beam process.

    Abstract translation: 应用一种制造微结构的方法,该方法使用光束过程,例如光束诱导的前体分解,以精确图案沉积掩模,然后选择性等离子束,包括以下步骤:首先产生保护掩模 使用诸如电子束,聚焦离子束(FIB)或激光工艺的光束过程在衬底的表面部分上,并且使用选择性等离子体束蚀刻工艺二次蚀刻未掩模的衬底部分。 可选地,包括去除保护掩模的第三步骤可以用第二种,实质上相对选择的等离子体束工艺进行。

    ELECTRON BEAM MICROSCOPE WITH IMPROVED IMAGING GAS AND METHOD OF USE
    29.
    发明公开
    ELECTRON BEAM MICROSCOPE WITH IMPROVED IMAGING GAS AND METHOD OF USE 有权
    方法用于成像的样品与带电粒子束利用气体图

    公开(公告)号:EP3096343A1

    公开(公告)日:2016-11-23

    申请号:EP16169828.7

    申请日:2016-05-17

    Applicant: FEI Company

    Abstract: Charged particle beam imaging and measurement systems are provided using gas amplification with an improved imaging gas. The system includes a charged particle beam source for directing a charged particle beam to work piece, a focusing lens for focusing the charged particles onto the work piece, and an electrode for accelerating secondary electrons generated from the work piece irradiation by the charged practice beam, or another gas cascade detection scheme. The gas imaging is performed in a high pressure scanning electron microscope (HPSEM) chamber for enclosing the improved imaging gas including CH 3 CH 2 OH (ethanol) vapor. The electrode accelerates the secondary electrons though the CH 3 CH 2 OH to ionize the CH 3 CH 2 OH through ionization cascade to amplify the number of secondary electrons for detection. An optimal configuration is provided for use of the improved imaging gas, and techniques are provided to conduct imaging studies of organic liquids and solvents, and other CH 3 CH 2 OH-based processes.

    Abstract translation: 使用气体放大具有改善的气体的成像提供带电粒子束成像和测量系统。 该系统包括用于将带电粒子束到工件,用于聚焦带电粒子到工件上的聚焦透镜,和在电极用于加速由所述带电实践束从工件照射而产生的二次电子的带电粒子束源, 或其它气体级联检测方案。 气体成像在高压扫描电子显微镜(HPSEM)室中进行用于封闭所述改进的成像气体包括CH 3 CH 2 OH(乙醇)的蒸气。 电极加速二次电子虽然CH 3 CH 2 OH通过电离级联电离CH 3 CH 2 OH以放大探测二次电子的数量。 的最优配置提供了一种用于使用改进的成像气体的,并且提供的技术来进行的有机液体和溶剂,以及其他CH 3 CH 2 OH基的流程成像研究。

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