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公开(公告)号：SG178432A1
公开(公告)日：2012-04-27
申请号：SG2012010575
申请日：2010-09-01
Applicant: KLA TENCOR CORP
Inventor： KANDEL DANIEL , LEVINSKI VLADIMIR , SVIZHER ALEXANDER , SELIGSON JOEL , HILL ANDREW , BACHAR OHAD , MANASSEN AMNON , CHUANG YUNG-HO ALEX , SELA ILAN , MARKOWITZ MOSHE , NEGRI DARIA , ROTEM EFRAIM
Abstract: Various metrology systems and methods are provided.
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公开(公告)号：WO2013002988A3
公开(公告)日：2013-07-11
申请号：PCT/US2012041273
申请日：2012-06-07
Applicant: KLA TENCOR CORP , MANASSEN AMNON , SELIGSON JOEL , SAPIENS NOAM
Inventor： MANASSEN AMNON , SELIGSON JOEL , SAPIENS NOAM
IPC: H01L21/027
CPC classification number: G01J1/4257 , G02B21/0016 , G02B21/082 , G02B21/365 , G02B26/0833 , G03F7/70633
Abstract: An optical system may include an objective, a source of illumination, an illumination system having illumination optics configured to direct the illumination onto the objective, and at least two dynamic optical array devices located at a pupil conjugate plane and a field conjugate plane, respectively in the illumination optics. The dynamic optical array devices are configured to control one or more properties of illumination coupled from the illumination system to the objective.
Abstract translation: 光学系统可以包括物镜，照明源，具有被配置为将照明引导到物镜上的照明光学器件的照明系统以及分别位于光瞳共轭平面和场共轭平面处的至少两个动态光学阵列装置 照明光学器件。 动态光学阵列装置被配置为控制从照明系统耦合到物镜的照明的一个或多个特性。
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Patent Agency Ranking
公开(公告)号：WO2011028807A3
公开(公告)日：2011-06-16
申请号：PCT/US2010047539
申请日：2010-09-01
Applicant: KLA TENCOR CORP , KANDEL DANIEL , LEVINSKI VLADIMIR , SVIZHER ALEXANDER , SELIGSON JOEL , HILL ANDREW , BACHAR OHAD , MANASSEN AMNON , CHUANG YUNG-HO ALEX , SELA ILAN , MARKOWITZ MOSHE , NEGRI DARIA , ROTEM EFRAIM
Inventor： KANDEL DANIEL , LEVINSKI VLADIMIR , SVIZHER ALEXANDER , SELIGSON JOEL , HILL ANDREW , BACHAR OHAD , MANASSEN AMNON , CHUANG YUNG-HO ALEX , SELA ILAN , MARKOWITZ MOSHE , NEGRI DARIA , ROTEM EFRAIM
IPC: H01L21/66
CPC classification number: G01N21/47 , G01B11/02 , G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/4792 , G01N2201/06113 , G01N2201/105 , G03F7/70625 , G03F7/70633
Abstract: Various metrology systems and methods are provided.
Abstract translation: 提供了各种计量系统和方法。
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公开(公告)号：EP2724361A4
公开(公告)日：2015-03-18
申请号：EP12803940
申请日：2012-06-07
Applicant: KLA TENCOR CORP
Inventor： MANASSEN AMNON , SELIGSON JOEL , SAPIENS NOAM
IPC: H01L21/027 , G01J1/42 , G02B26/06 , G02B26/08 , G02B27/00
CPC classification number: G01J1/4257 , G02B21/0016 , G02B21/082 , G02B21/365 , G02B26/0833 , G03F7/70633
Abstract: An optical system may include an objective, a source of illumination, an illumination system having illumination optics configured to direct the illumination onto the objective, and at least two dynamic optical array devices located at a pupil conjugate plane and a field conjugate plane, respectively in the illumination optics. The dynamic optical array devices are configured to control one or more properties of illumination coupled from the illumination system to the objective.
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公开(公告)号：EP2474027A4
公开(公告)日：2013-03-20
申请号：EP10814430
申请日：2010-09-01
Applicant: KLA TENCOR CORP
Inventor： KANDEL DANIEL , LEVINSKI VLADIMIR , SVIZHER ALEXANDER , SELIGSON JOEL , HILL ANDREW , BACHAR OHAD , MANASSEN AMNON , CHUANG YUNG-HO ALEX , SELA ILAN , MARKOWITZ MOSHE , NEGRI DARIA , ROTEM EFRAIM
IPC: G01N21/956
CPC classification number: G01N21/47 , G01B11/02 , G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/4792 , G01N2201/06113 , G01N2201/105 , G03F7/70625 , G03F7/70633
Abstract: Various metrology systems and methods are provided.
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26.发明公开SYSTEMS FOR PROVIDING ILLUMINATION IN OPTICAL METROLOGY 有权SYSTEME ZUR BEREITSTELLUNG VON BELEUCHTUNG IN DER OPTISCHER MESSTECHNIK
公开(公告)号：EP2959503A4
公开(公告)日：2016-10-26
申请号：EP14753960
申请日：2014-02-21
Applicant: KLA TENCOR CORP
Inventor： BRADY GREGORY , SHCHEGROV ANDREI V , ROTTER LAWRENCE D , SHAUGHNESSY DERRICK , SHCEMELININ ANATOLY , BEZEL ILYA , ARAIN MUZAMMIL , VASILIEV ANATOLY , ALLEN JAMES , SHULEPOV OLEG , HILL ANDREW , BACHAR OHAD , MARKOWITZ MOSHE , ISH-SHALOM YARON , SELA ILAN , MANASSEN AMNON , SVIZHER ALEXANDER , KHOKHLOV MAXIM , ABRAMOV AVI , TSIBULEVSKY OLEG , KANDEL DANIEL , GHINOVKER MARK
CPC classification number: G01J3/10 , F21V13/00 , F21V13/08 , F21V13/12 , G01J3/0218 , G01J3/12 , G02B6/29332 , G02B6/29362 , G02B6/29388 , G02B6/29395 , G02B6/3508 , G02B6/353 , H01J65/04
Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
Abstract translation: 用于向用于光学测量的测量头提供照明的系统被配置为组合来自多个照明源的照明光束以将一个或多个所选波长的照明传送到测量头。 控制传递到测量头的照明的强度和/或空间相干性。 在一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。
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公开(公告)号：EP2745313A4
公开(公告)日：2014-12-24
申请号：EP12823553
申请日：2012-07-30
Applicant: KLA TENCOR CORP
Inventor： MANASSEN AMNON , KANDEL DANIEL , BARUCH MOSHE , LEVINSKI VLADIMIR , SAPIENS NOAM , SELIGSON JOEL L , HILL ANDY , BACHAR OHAD , NEGRI DARIA , ZAHARAN OFER
CPC classification number: G03F7/70633
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