Micro-machined nozzles
    21.
    发明申请
    Micro-machined nozzles 失效
    微加工喷嘴

    公开(公告)号:US20060118511A1

    公开(公告)日:2006-06-08

    申请号:US11003067

    申请日:2004-12-02

    Abstract: A micro-machined nozzle includes a substrate having a hole formed on a first side that extends partially through a thickness dimension of the substrate and a nozzle orifice formed on a second opposite side that communicates with the hole. The nozzle orifice has at least a portion of its interior wall serrated. A method of fabricating a micro-machined nozzle includes the steps of etching a first side of a silicon substrate to form a hole that extends partially through a thickness dimension of the substrate and etching a second opposite side of the silicon substrate to form a serrated nozzle orifice that communicates with the hole.

    Abstract translation: 微加工喷嘴包括:基板,其具有形成在第一侧上的部分地延伸穿过基板的厚度尺寸的孔;以及形成在与孔连通的第二相对侧上的喷嘴孔。 喷嘴孔具有其内壁的至少一部分锯齿状。 一种制造微加工喷嘴的方法包括以下步骤:蚀刻硅衬底的第一面以形成部分延伸穿过衬底的厚度尺寸并蚀刻硅衬底的第二相对侧以形成锯齿状喷嘴的孔 孔与孔连通。

    Electrical component
    22.
    发明授权

    公开(公告)号:US11957059B2

    公开(公告)日:2024-04-09

    申请号:US17294152

    申请日:2019-11-15

    Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an insulated electrical component for a microelectromechanical systems device comprising: i) a substrate layer comprising first and second sides spaced apart in a thickness direction; ii) one or more electrical elements arranged over the first side of the substrate layer, wherein each of the one or more electrical elements comprises: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a continuous insulating layer, or laminate of insulating layers, arranged to overlie each of the one or more electrical elements arranged on the first side of the substrate layer; and iv) a passivation layer, or laminate of multiple passivation layers, disposed adjacent to, and at least partially overlying, each of the one or more electrical elements so as to provide electrical passivation between the first and second electrodes of each of the one or more electrical elements; wherein: a) the passivation layer, or at least an innermost layer of the laminate of multiple passivation layers which is disposed adjacent each of the one or more underlying electrical elements, is discontinuous; and/or b) the laminate of multiple passivation layers is recessed at a side which faces away from each of the underlying electrical elements, wherein a recess is provided in a region overlying each of the one or more electrical elements, such that the laminate of passivation layers is thinner in a thickness direction across the recess compared to other non-recessed regions of the laminate of passivation layers.

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