Abstract:
The present invention relates to a photo curable composition comprising (A) a photo curable monomer and (B) a monomer comprising silicone of the following chemical formula 1, a barrier layer comprising the same, and an encapsulated device comprising the same. The present invention can form a high organic barrier layer having a significantly low water vapor permeability and out gas generation amount and a high attachment to an inorganic barrier layer, and can form an organic barrier layer having a high photo curable ratio, so that not generating a shift after cured.
Abstract:
The present invention relates to a photocurable composition, a protective layer composed of the present composition, and an optical member including the present protective layer. More specifically, the invention relates to a silicon compound having halogen and a (meth)acrylate group, a photocurable composition including a photo polymerization initiator, a protective layer composed of the present composition, and an optical member including the protective layer.
Abstract:
반도체 캐패시터(capacitor) 제조용 노드분리 공정에 사용될 수 있는 화합물 및 이를 포함하는 반도체 미세 갭필용 조성물이 개시된다. 상기 반도체 미세 갭필용 조성물은 보관일수에 따라 분자량이 크게 변하지 않을 뿐만 아니라, 알칼리를 띄는 현상액에 원하는 현상속도(DR; dissolution rate)로 녹아 나오는 동시에, 보관일수에 따라 그 현상속도가 크게 변하지 않는 보관안정성이 우수하다.
Abstract:
PURPOSE: A gap-filling composition is provided to prevent change of developing rate and molecular weight and to completely fill a hole having 70 nm or less of diameter. CONSTITUTION: A gap-filling polymer has a substituent which is induced from a compound of chemical formula 1(HOOC-(CH_2)_l-R^1_2Si-O-SiR^1'_2-(CH_2)_l-COOH). In chemical formula 1, R^1 and R^1' are identically or differently alkyl group of 1-12 carbon atoms or substituted or non-substituted aryl group of 6-20 carbon atoms; and I is individually 0 or integer of 1-10.
Abstract:
PURPOSE: A filler for a semiconductor capacitor and method for manufacturing a semiconductor capacitor using the same are provided to convert a silicon based compound with a t-butyloxycarbonyl group into a carboxyl group by a heating process, thereby increasing development performance. CONSTITUTION: A conductive layer is formed on the semiconductor substrate(1). A filling layer is formed by coating the conductive layer with filler. A part of the conductive layer is eliminated to form a first electrode(5a). A dielectric layer(9) is formed on the first electrode. A second electrode(11) is formed on the dielectric layer.
Abstract:
PURPOSE: A resin composition for over-coating, an over-coating film manufactured thereby, and an image sensor including thereof are provided to improve the surface roughness of the over-coating film after etching, and to secure the adhesive strength, the transparency, and the heat resistance. CONSTITUTION: A resin composition for over-coating contains a polysiloxane resin produced from a silane compound including a double bond functional group through the hydrolysis and the condensation polymerization. The silane compound is marked with chemical formula 1. In the chemical formula 1, R1 and R3 are a substituted or non-substituted alkoxy group, respectively. R2 refers to the substituted or non-substituted alkoxy group, or halogen. R and R` are hydrogen or a substituted or non-substituted alkyl group, respectively. N is an integer of 1~10.
Abstract:
An organosilane polymer for micro gap fill of a semiconductor device is provided to remove it from the inside of hole easily by processing it with hydrofluoric acid solution, after curing. An organosilane polymer for micro gap fill of a semiconductor device comprises (1) a compound indicated as the following chemical formula 1: [RO]3Si-[CH2]n-Si[OR]3, (2) a compound indicated as the following chemical formula 2: [RO]3Si-[CH2]nX and (3) a condensation polymer of hydrolysates generated from at lease one selected from a compound indicated as the following chemical formula 3: [RO]3Si-CH3 and a compound indicated as the following chemical formula 4: [RO]3Si-H.
Abstract:
A polymer for node separation in fabricating a semiconductor device is provided to enable complete gap-fill without generating air voids, to realize a desired solubility to an alkali developer and etching resistance, and to allow easy removal from holes by way of ashing treatment. A polymer for node separation comprises repeating units represented by the following formula 1, formula 2 or formula 3. In formula 1, Ra represents a hydrogen atom or methyl group. The polymer for node separation is selected from a homopolymer of the repeating units represented by formula 1, formula 2 or formula 3, a copolymer thereof, a copolymer of thereof with styrene or benzyl methacrylate, and a blend thereof.