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公开(公告)号：KR100833648B1
公开(公告)日：2008-05-30
申请号：KR1020070050833
申请日：2007-05-25
Applicant: 한국표준과학연구원
Abstract: An ultra-high vacuum exhausting system is provided to have a vacuum reservoir allowing a turbo pump to be performed normally from low vacuum to high vacuum. An ultra-high vacuum exhausting system includes a turbo pump(10), a vacuum reservoir(20), and a sub pump(50). The turbo pump maintains predetermined vacuum degree of the vacuum reservoir. The vacuum reservoir is connected to an exhaust side of the turbo pump and maintains vacuum pressure of the turbo pump below critical vacuum pressure without additional pumping for a long time. The sub pump operates when chamber pressure of the vacuum reservoir rises over a predetermined vacuum degree.
Abstract translation: 提供超高真空排气系统以具有允许涡轮泵从低真空到高真空正常执行的真空容器。 超高真空排气系统包括涡轮泵（10），真空容器（20）和副泵（50）。 涡轮泵保持真空容器的预定真空度。 真空容器连接到涡轮泵的排气侧，并将涡轮泵的真空压力保持在临界真空压力以下，而不需要长时间的泵送。 当真空容器的室压力上升超过预定的真空度时，副泵运行。
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公开(公告)号：KR100805928B1
公开(公告)日：2008-02-21
申请号：KR1020060074817
申请日：2006-08-08
Applicant: 한국표준과학연구원
Abstract: 본 발명은 부피 측정 장치 및 방법에 관한 것으로서, 피측정 시료가 넣어지거나 부착되는 용기, 용기에 연결되고, 피스톤 및 실린더를 포함하는 부피 가변 장치, 부피 가변 장치를 구동하기 위한 구동기, 용기 내의 압력을 측정하기 위한 압력계, 및 피스톤의 이동 거리 및 측정된 압력에 기초하여 피측정 시료의 부피를 계산하기 위한 계산 수단을 포함하는 것을 특징으로 하는 부피 측정 장치, 및 이러한 부피 장치를 이용한 부피 측정 방법을 제공한다.
부피측정, 기체압력, 기체온도, 피스톤-
公开(公告)号：KR1020080013375A
公开(公告)日：2008-02-13
申请号：KR1020060074817
申请日：2006-08-08
Applicant: 한국표준과학연구원
Abstract: A volume measuring apparatus and method are provided to quickly and easily measure the volume of a test sample by using a volume variable device rather than water. A volume measuring apparatus comprises a container(10) in which a test sample is placed or attached, a volume variable device connected to the container and including a piston(30) and a cylinder(20), a driver(40) for driving the volume variable device, a manometer(50) for measuring a pressure in the container, and a calculation unit(70) for calculating the volume of the test sample on the basis of the moving distance of the piston and the measured pressure.
Abstract translation: 提供了一种体积测量装置和方法，通过使用体积可变装置而不是水来快速和容易地测量测试样本的体积。 体积测量装置包括：容器（10），其中放置或附接测试样品;连接到容器并且包括活塞（30）和气缸（20）的容积可变装置;驱动器（40），用于驱动 体积可变装置，用于测量容器中的压力的压力计（50），以及用于基于活塞的移动距离和测量的压力计算测试样本的体积的计算单元（70）。
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公开(公告)号：KR100802593B1
公开(公告)日：2008-02-13
申请号：KR1020060093757
申请日：2006-09-26
Applicant: 한국표준과학연구원
IPC: H01L21/205 , H01L21/203
CPC classification number: H01L21/0228 , C23C16/45536 , H01L21/02178 , H01L21/02181 , H01L21/02183 , H01L21/02186 , H01L21/02189
Abstract: A method for controlling element concentration and preventing impurities into a thin film during a deposition process by light exposure in a thin film forming process is provided to prevent a physical damage of a thin film and to reduce generation of particles by improving a reactive characteristic without using plasma. A reactant attaching process is performed to attach a first reactant onto a substrate by implanting a metal element for forming a thin film and the first reactant including an organic ligand into a reaction chamber including the substrate. An activation process is performed to activate the first reactant by performing an exposure process. An oxide layer or a nitride layer is formed by implanting a second reactant including oxygen atoms or nitrogen atoms into the reaction chamber. The oxide layer or the nitride layer is formed by reaction between the first reactant and the second reactant.
Abstract translation: 提供了一种在薄膜形成过程中通过曝光在沉积过程中控制元素浓度并防止杂质进入薄膜的方法，以防止薄膜的物理损伤并通过改善反应特性来减少颗粒的产生而不使用 等离子体。 通过将用于形成薄膜的金属元素和包含有机配体的第一反应物注入到包括该基底的反应室中，进行反应物附着过程以将第一反应物附着到基底上。 执行激活过程以通过执行曝光过程来激活第一反应物。 通过将包含氧原子或氮原子的第二反应物注入到反应室中来形成氧化物层或氮化物层。 通过第一反应物和第二反应物之间的反应形成氧化物层或氮化物层。
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公开(公告)号：KR102102308B1
公开(公告)日：2020-04-20
申请号：KR1020180028568
申请日：2018-03-12
Applicant: 한국표준과학연구원
IPC: H01L21/027 , H01L21/033 , H01L21/3065 , H01L21/3213
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Patent Agency Ranking
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公开(公告)号：KR1020180102745A
公开(公告)日：2018-09-18
申请号：KR1020170029250
申请日：2017-03-08
Applicant: 한국표준과학연구원
Abstract: 본발명은측정대상인열전소재의상측에이동가능하게배치되는상부모듈; 측정대상인열전소재의하측에배치되어열전소재가안치되는하부모듈; 및상기하부모듈을고정시키고, 상기상부모듈을이동시키는고정모듈;을포함하는열전특성측정장치를제공하여, 열전특성을파악하기위한제백계수, 전기전도도및 열전도도(k)를개별적으로측정할수 있으며, 열전소재를다양한방향에서정밀하게측정할수 있다.
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公开(公告)号：KR101880519B1
公开(公告)日：2018-07-20
申请号：KR1020160136439
申请日：2016-10-20
Applicant: 한국표준과학연구원
CPC classification number: Y02E10/52
Abstract: 수상에서태양의위치를추적할수 있는발전장치가개시된다. 본발명은태양광발전의효율을극대화하기위해, 태양을추적하여실시간으로조도센서를적용하여태양광의세기가최대인지점을향하도록제어하여, 태양광의집광율을극대화할수 있는발전장치를제공할수 있도록하며, 기본적인발전장치의전력을소모하여상술한동작을구현하여추가전력없이도고효율의발전을구현하는바경제적인장점도구현된다.
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公开(公告)号：KR101825461B1
公开(公告)日：2018-02-06
申请号：KR1020160136445
申请日：2016-10-20
Applicant: 한국표준과학연구원
CPC classification number: H01L22/14 , H01L21/02 , H01L21/6835 , H01L22/30 , H01L35/02 , H01L35/12 , H01L35/32 , H02N11/002
Abstract: 본발명은웨이퍼(10) 상에열전부(20)가설치되어웨이퍼(10)의가장자리와중심의온도차에의해열전부(20)를통하여전력을얻는온-웨이퍼전력공급장치(1)에관한것으로서, 열전부(20)는다른열전특성을갖는제1물질층(21)과제2물질층(22)이옆으로교번하여배치되면서서로직렬적으로연결되어이루어지고, 제1물질층(21)과제2물질층(22)의연결접점들(23)이웨이퍼(10) 내에서안쪽과바깥쪽에교번해가면서위치하도록배치되어열전부(20)가구불구불한형상을하는것을특징으로한다. 본발명에의하면, 웨이퍼(10) 상에서로다른열전특성을갖는물질을설치하여전력을얻기때문에배터리없이도동력원(예컨대무선통신동력원)을얻을수 있을뿐만아니라높은온도환경에서도이러한동력원의획득이가능하다는장점이있다.
Abstract translation: 本发明开放部（20），设定值被接通，以获得通过所述边缘的断开部分（20）和功率晶片10的在晶片电源晶片（10）上的中心温度（1） 如，开口部（20）具有第一材料层（21）挑战第二材料层22，如交替布置到yiyeop由串联连接到彼此时，第一材料层21，具有不同的热特性的问题 第二材料层22，23的连接触点，晶片10被布置成在柱部将交替的向内和向外的位置（20）的特征在于，所述缠绕形状甚至家具。 根据本发明，可以以这样的电源中，不仅能够获得的优点得到动力源（例如，无线通信的电源）不带电池，而且高温环境通过安装在晶片10上具有不同的热特性，以获得功率材料 有。
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