公开(公告)号：DE602005016501D1

公开(公告)日：2009-10-22

申请号：DE602005016501

申请日：2005-07-25

Applicant: ST MICROELECTRONICS SA ,  COMMISSARIAT ENERGIE ATOMIQUE

Inventor： BOUCHE GUILLAUME ,  ANCEY PASCAL ,  VIALA BERNARD ,  COUDERC SANDRINE

IPC: H01F41/30 ,  H01F10/00 ,  H01F10/13 ,  H01F10/14 ,  H01F10/32 ,  H01F17/00 ,  H01F41/18 ,  H01L23/552

Abstract: The method involves nitriding ferromagnetic nanograins rich in iron immersed in an amorphous substrate (SB), and selectively oxidizing the substrate. The nitriding is effectuated by reactive cathodic or ionic sputtering under magnetic field in the presence of nitrogen. The oxidation is effectuated by reactive sputtering in the presence of oxygen. The oxidation and nitriding are carried out simultaneously. Independent claims are also included for the following: (A) a thin soft magnetic film having high magnetization and insulation; and (B) an integrated circuit comprising a component utilizing a membrane incorporating a film.

公开(公告)号：FR2906238B1

公开(公告)日：2008-12-19

申请号：FR0653975

申请日：2006-09-27

Applicant: COMMISSARIAT ENERGIE ATOMIQUE ,  ST MICROELECTRONICS SA

Inventor： CASSET FABRICE ,  DURAND CEDRIC ,  ANCEY PASCAL

IPC: B81C1/00 ,  B81B7/02 ,  H03H3/007 ,  H03H9/02

公开(公告)号：FR2905208A1

公开(公告)日：2008-02-29

申请号：FR0653488

申请日：2006-08-28

Applicant: ST MICROELECTRONICS SA

Inventor： VOLATIER ALEXANDRE ,  ANCEY PASCAL ,  DUBUS BERTRAND

IPC: H03H9/58

Abstract: La présente invention concerne un filtre à résonateurs à ondes de Lamb couplés (100, 200, 300, 400) comportant :- au moins un premier résonateur à ondes de Lamb (106) comprenant au moins une première couche résonante (108) et au moins une première (102) et une seconde (103) électrodes disposées sur deux faces opposées de la première couche résonante,- au moins un second résonateur à ondes de Lamb (107) comprenant au moins une seconde couche résonante (109) et au moins une troisième (104) et une quatrième (105) électrodes disposées sur deux faces opposées de la seconde couche résonante.Au moins une desdites faces de la première couche résonante appartient à un plan parallèle à une desdites faces de la seconde couche résonante et passe entre deux électrodes (104, 105) du second résonateur, les première et seconde couches étant couplées acoustiquement par des moyens de couplage acoustique (110, 111).

公开(公告)号：FR2888994B1

公开(公告)日：2007-10-12

申请号：FR0507768

申请日：2005-07-21

Applicant: COMMISSARIAT ENERGIE ATOMIQUE ,  ST MICROELECTRONICS SA

Inventor： VIALA BERNARD ,  COUDERC SANDRINE ,  ANCEY PASCAL

IPC: H01P1/00 ,  H01F1/14 ,  H01P1/215 ,  H01P11/00

公开(公告)号：FR2857952B1

公开(公告)日：2005-12-16

申请号：FR0309106

申请日：2003-07-25

Applicant: ST MICROELECTRONICS SA

Inventor： MONFRAY STEPHANE ,  ANCEY PASCAL ,  SKOTNICKI THOMAS ,  SEGUENI KARIM

IPC: B81B3/00 ,  H03H9/24 ,  H03H3/007

Abstract: The resonator has a monocrystalline silicon substrate provided with an active zone surrounded by a shallow trench isolation region (STI). A vibrating beam is anchored on the region by one of free ends (14, 16) and comprises a monocrystalline silicon median part (12). A control electrode (E) is placed above the beam and is supported on the active zone. The median part is separated from the active zone and the electrode. An independent claim is also included for a method of manufacturing an electromechanical resonator.

公开(公告)号：FR2863789A1

公开(公告)日：2005-06-17

申请号：FR0314567

申请日：2003-12-12

Applicant: ST MICROELECTRONICS SA

Inventor： BOUCHE GUILLAUME ,  CARUYER GREGORY ,  ANCEY PASCAL

IPC: H03H3/02 ,  H03H9/17 ,  H03H9/56 ,  H03H9/58 ,  H03H9/15 ,  H01L41/083

Abstract: An acoustic resonator device (1) comprises an active element (6) and a support. The support includes a membrane (5) and the active element provided with at least one piezoelectric layer (10) is surmounted by a multi-layer assembly (12) provided with at least three layers (13, 14, 15) of which at least one has a strong acoustic impedance and at least one a low acoustic impedance.

公开(公告)号：FR2852165A1

公开(公告)日：2004-09-10

申请号：FR0302817

申请日：2003-03-06

Applicant: ST MICROELECTRONICS SA ,  COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE ,  CARUYER GREGORY ,  ANCEY PASCAL ,  BOUCHE GUILLAUME

IPC: H03H3/04 ,  H03H9/17 ,  H03H9/15 ,  H01L41/083 ,  H01L41/22

公开(公告)号：FR2848339A1

公开(公告)日：2004-06-11

申请号：FR0215370

申请日：2002-12-05

Applicant: ST MICROELECTRONICS SA

Inventor： BOUCHE GUILLAUME ,  ANCEY PASCAL ,  FROMENT BENOIT

IPC: B81B7/00 ,  H01S5/022 ,  H01L23/31 ,  B81C3/00

Abstract: The adhesion of a first element (1), of which at least a part of the surface is coated with silicon, on a second element (2), of which at least a part of the surface is coated with nickel, incorporates an adhesion stage effected by NiSi welding at greater than 250degreesC, the rugosity between the two parts of the surface of the two elements being less than 1 micron. An Independent claim is also included for an integrated circuit incorporating two elements joined by NiSi welding.

公开(公告)号：FR2848036A1

公开(公告)日：2004-06-04

申请号：FR0214967

申请日：2002-11-28

Applicant: ST MICROELECTRONICS SA

Inventor： BOUCHE GUILLAUME ,  CARUYER GREGORY ,  ANCEY PASCAL

IPC: H01L23/14 ,  H01L27/20 ,  H01L41/04 ,  H03H9/05 ,  H03H9/17 ,  H03H9/58

公开(公告)号：AT445259T

公开(公告)日：2009-10-15

申请号：AT04354025

申请日：2004-06-29

Applicant: COMMISSARIAT ENERGIE ATOMIQUE ,  ST MICROELECTRONICS SA

Inventor： ROBERT PHILIPPE ,  ANCEY PASCAL ,  CARUYER GREGORY

IPC: H03H3/04 ,  H03H9/17

Abstract: The resonator has a piezoelectric layer (3) placed between two electrodes (1, 2). An electrical heating resistor (9) is placed in thermal contact with the electrode (1). The temporary heating of the electrode (1) permits to partially evaporate a material constituting the electrode (1) to make the electrode (1) thinner for adjusting resonance frequency. An independent claim is also included for a method of producing a thin film bulk acoustic resonator or a solidly mounted resonator.