Abstract:
The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.
Abstract:
A grid for use in a linear electron beam tube such as an IOT or TWT includes a grid section 3 and a focus electrode 4 between which is included an accommodation portion 5. The grid is mounted in the tube by a mounting flange 6 around its outer periphery. During use, the grid section 3 becomes hot and consequently expands but the mounting flange 6 remains relatively cool being connected to a relatively massive structure. Thin flexible strips 9 of the accommodation section 5 permit movement between the mounting flange 6 and the grid section 3 due to differential thermal expansion, thus minimising distortion to the grid section which might otherwise occur if it were connected directly to the mounting flange 6 and hence fixed in its outer diameter length.
Abstract:
A heater coil (64) for an electron tube includes a spiral wire (60) which is double wound to be cylindrical, and a connection wire (70) which is formed on an upper face of the spiral wire in a horizontal plane. The connection wire is shaped to have at least two bent portions on the same plane.
Abstract:
[Object] In the control of electron beam focusing of a pierce-type electron gun, any influences from the space charge effect and space charge neutralizing action within the electron gun are eliminated to attain complete control of an electron beam. [Solving Means] Feedback control of the pressure within the electron gun is performed by directly measuring temperature at an internal of the pierce-type electron gun. It is desirable that locations where the direct measurement of the temperature at the internal of the electron gun is performed are an anode (39) and a flow register (43). Further, the direct measurement can be performed at any one of a ring, an aperture and an exhaust pipe provided at an outlet or an inlet of any one of a cathode chamber (31), an intermediate chamber, and a scanning chamber (33). Accordingly, all of stabilization of beam producing area (optimized design of electron gun itself), stabilization of beam transporting portion and stabilization of beam using portion have become appropriate.
Abstract:
The invention provides a charged particle beam device, an emitter module for emitting charged particle beams and a method of operation thereof. Thereby, a charged particle beam emitter (15) emitting charged particles along an optical axis (1) is realized. On the same carrier body (32), a cleaning emitter (16) for emitting charged particles approximately along the optical axis (1) is realized. Thus, an improved cleaning can be provided.
Abstract:
A filament assembly includes a core and a filament. At least a central portion of the filament is disposed on the core. At least the central portion may be straight or may have a high-resistance configuration such as one in which the filament follows a path that changes direction. A thermionically emissive layer may be disposed on the core so as to encapsulate at least the central portion. The filament assembly may be utilized in any application requiring the production of electrons.
Abstract:
A filament assembly includes a core and a filament. At least a central portion of the filament is disposed on the core. At least the central portion may be straight or may have a high-resistance configuration such as one in which the filament follows a path that changes direction. A thermionically emissive layer may be disposed on the core so as to encapsulate at least the central portion. The filament assembly may be utilized in any application requiring the production of electrons.
Abstract:
Bei diesem Strahlerzeugersystem soll eine Positionsänderung der Vorratskathode (1) in der strahlformenden Elektrode (4) bei verschiedenen Umgebungstemperaturen unterbunden und damit eine Strahldefokussierung vermieden werden. Zu diesem Zweck wird die Vorratskathode (1) unterhalb der Emissionsscheibe (2) durch eine radiale Kathodenhalterung (3) direkt mit der strahlformenden Elektrode (4) verbunden. Ein erfindungsgemäßes Strahlerzeugersystem findet insbesondere bei Wanderfeldröhren Verwendung.
Abstract:
The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.