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    METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID METAL ION SOURCE
    6.
    发明申请
    METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID METAL ION SOURCE 有权

    公开(公告)号：US20250157780A1

    公开(公告)日：2025-05-15

    申请号：US19020049

    申请日：2025-01-14

    Applicant: FEI Company

    Inventor： Sean M. Kellogg ,  Mostafa Maazouz ,  James B. McGinn

    IPC: H01J37/09 ,  H01J37/22 ,  H01J37/244

    Abstract: Variations in charged-particle-beam (CPB) source location are determined by scanning an alignment aperture that is fixed with respect to a beam defining aperture in a CPB, particularly at edges of a defocused CPB illumination disk. The alignment aperture is operable to transmit a CPB portion to a secondary emission surface that produces secondary emission directed to a scintillator element. Scintillation light produced in response is directed out of a vacuum enclosure associated with the CPB via a light guide to an external photodetection system.

    MINIMIZATION OF ENERGY SPREAD IN FOCUSED ION BEAM (FIB) SYSTEMS
    7.
    发明申请
    MINIMIZATION OF ENERGY SPREAD IN FOCUSED ION BEAM (FIB) SYSTEMS 有权

    公开(公告)号：US20250157779A1

    公开(公告)日：2025-05-15

    申请号：US18506957

    申请日：2023-11-10

    Applicant: FEI Company

    Inventor： Radovan Vašina ,  Bohuslav Sed'a ,  Mostafa Maazouz ,  Lukáš Král

    IPC: H01J37/05 ,  H01J37/04 ,  H01J37/10 ,  H01J37/147

    Abstract: Charged-particle beam (CPB) optical systems can include a beam acceptance aperture plate defining a first acceptance aperture and at least one second acceptance aperture, situated with respect to a CPB source so that a first CPB is transmitted by the first acceptance aperture and a second CPB is transmitted by a second acceptance aperture. A CPB lens is situated to receive the first and second CPBs from the beam acceptance aperture plate and direct the first and second CPBs towards a filter aperture plate to transmit selected spectral portion of the second CPB. The selected spectral component of the first CPB can be selectively directed to a workpiece by a beam steering deflector along the same axis. In some examples, the first and second CPBs have different beam currents and only one is directed to a workpiece.

    Optical alignment correction using convolutional neural network evaluation of a beam image
    8.
    发明授权
    Optical alignment correction using convolutional neural network evaluation of a beam image 有权

    公开(公告)号：US10923318B2

    公开(公告)日：2021-02-16

    申请号：US16228201

    申请日：2018-12-20

    Applicant: FEI Company

    Inventor： Galen Gledhill ,  Mostafa Maazouz ,  Gavin Mitchson

    IPC: H01J37/304 ,  H01J37/305 ,  G01T1/29 ,  G06N3/08 ,  G06N3/04

    Abstract: A focused ion beam (FIB) is used to mill beam spots into a substrate at a variety of ion beam column settings to form a set of training images that are used to train a convolutional neural network. After the neural network is trained, an ion beam can be adjusted by obtaining spot image which is processed with the neural network. The neural network can provide a magnitude and direction of defocus, aperture position, lens adjustments, or other ion beam or ion beam column settings. In some cases, adjustments are not made by the neural network, but serve to indicate that the ion beam and associated ion column continue to operate stably, and additional adjustment is not required.

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