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    Extension-mode angular velocity sensor
    42.
    发明授权
    Extension-mode angular velocity sensor 有权

    公开(公告)号：US09683844B2

    公开(公告)日：2017-06-20

    申请号：US14698451

    申请日：2015-04-28

    Applicant: InvenSense, Inc.

    Inventor： Joseph Seeger ,  Bruno Borovic

    IPC: G01C19/00 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/56

    CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574

    Abstract: An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

    In-plane sensing Lorentz force magnetometer
    43.
    发明授权
    In-plane sensing Lorentz force magnetometer 有权

    公开(公告)号：US09664750B2

    公开(公告)日：2017-05-30

    申请号：US13731301

    申请日：2012-12-31

    Applicant: Invensense, Inc.

    Inventor： Matthew Julian Thompson ,  Joseph Seeger

    IPC: G01R33/02 ,  G01R33/028 ,  H01H1/00 ,  G03F1/00 ,  H02K1/00

    CPC classification number: G01R33/0286 ,  G03F1/00 ,  H01H1/00 ,  H02K1/00

    Abstract: A magnetic field sensor includes a driving element through which an electric current circumnavigates the driving element. A Lorentz force acts on the driving element resulting in a torque about a first axis in response to a magnetic field along a second axis substantially parallel to a plane of a substrate. The driving element is coiled-shaped. A sensing element of the magnetic field sensor is configured to rotate about the first axis substantially parallel to the plane of the substrate in response to the magnetic field and a coupling element mechanically couples the driving element to the sensing element. The driving element, the sensing element, and the coupling element are disposed in the plane, substantially parallel to the substrate. At least two anchors are configured to connect the driving element, the sensing element, and the coupling element to the substrate.

    MEMS sensor including an over-travel stop and method of manufacture
    44.
    发明授权
    MEMS sensor including an over-travel stop and method of manufacture 有权
    MEMS传感器包括超行程挡块和制造方法

    公开(公告)号：US09593008B2

    公开(公告)日：2017-03-14

    申请号：US14501792

    申请日：2014-09-30

    Applicant: InvenSense, Inc.

    Inventor： Matthew Julian Thompson ,  Michael Dueweke ,  Ilya Gurin ,  Joseph Seeger

    IPC: H02N1/04 ,  B81B3/00 ,  H02N11/00 ,  B81B7/02

    CPC classification number: B81B3/0051 ,  B81B7/02 ,  B81B2203/0118 ,  H02N11/002

    Abstract: A MEMS sensor is disclosed. The MEMS sensor includes a MEMS structure and a substrate coupled to the MEMS structure. The substrate includes a layer of metal and a layer of dielectric material. The MEMS structure moves in response to an excitation. A first over-travel stop is formed on the substrate at a first distance from the MEMS structure. A second over-travel stop on the substrate at a second distance from the MEMS structure. At least one electrode on the substrate at a third distance from the MEMS structure. The first, second and third distances are all different.

    Abstract translation: 公开了一种MEMS传感器。 MEMS传感器包括耦合到MEMS结构的MEMS结构和衬底。 衬底包括金属层和电介质材料层。 MEMS结构响应于激发而移动。 在距离MEMS结构的第一距离处，在基板上形成第一超行程挡块。 在距离MEMS结构第二距离的基板上的第二超行程停止。 在距离MEMS结构三分之一距离的衬底上的至少一个电极。 第一，第二和第三距离都是不同的。

    IN-PLANE SENSING LORENTZ FORCE MAGNETOMETER
    46.
    发明申请
    IN-PLANE SENSING LORENTZ FORCE MAGNETOMETER 有权
    内平面感应LORENTZ力量磁力计

    公开(公告)号：US20140184213A1

    公开(公告)日：2014-07-03

    申请号：US13731301

    申请日：2012-12-31

    Applicant: INVENSENSE, INC.

    Inventor： Matthew Julian Thompson ,  Joseph Seeger

    IPC: G01R33/028

    CPC classification number: G01R33/0286 ,  G03F1/00 ,  H01H1/00 ,  H02K1/00

    Abstract: A magnetic field sensor includes a driving element through which an electric current circumnavigates the driving element. A Lorentz force acts on the driving element resulting in a torque about a first axis in response to a magnetic field along a second axis substantially parallel to a plane of a substrate. The driving element is coiled-shaped. A sensing element of the magnetic field sensor is configured to rotate about the first axis substantially parallel to the plane of the substrate in response to the magnetic field and a coupling element mechanically couples the driving element to the sensing element. The driving element, the sensing element, and the coupling element are disposed in the plane, substantially parallel to the substrate. At least two anchors are configured to connect the driving element, the sensing element, and the coupling element to the substrate.

    Abstract translation: 磁场传感器包括驱动元件，电流通过该驱动元件环绕驱动元件。 洛伦兹力作用在驱动元件上，导致响应于基本上平行于基底平面的第二轴的磁场而产生围绕第一轴线的转矩。 驱动元件是螺旋形的。 磁场传感器的感测元件被配置成响应于磁场围绕基板平行于基板的平面旋转，并且耦合元件将驱动元件机械耦合到感测元件。 驱动元件，感测元件和耦合元件设置在基本上平行于基板的平面内。 至少两个锚被构造成将驱动元件，感测元件和耦合元件连接到基板。

    GYROSCOPE SELF TEST BY APPLYING ROTATION ON CORIOLIS SENSE MASS
    47.
    发明申请
    GYROSCOPE SELF TEST BY APPLYING ROTATION ON CORIOLIS SENSE MASS 有权
    通过对CORIOLIS SENSE MASS进行旋转自动测试

    公开(公告)号：US20130233048A1

    公开(公告)日：2013-09-12

    申请号：US13862352

    申请日：2013-04-12

    Applicant: INVENSENSE, INC.

    Inventor： Ozan Anac ,  Joseph Seeger

    IPC: G01C25/00

    CPC classification number: G01C25/00 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/574 ,  G01C25/005

    Abstract: A self-test method by rotating the proof mass at a high frequency enables testing the functionality of both the drive and sense systems at the same time. In this method, the proof mass is rotated at a drive frequency. An input force which is substantially two times the drive frequency is applied to the actuation structures to rotate the proof mass of the gyroscope around the sensitive axis orthogonal to the drive axis. An output response of the gyroscope at the drive frequency is detected by a circuitry and a self-test response is obtained.

    Abstract translation: 通过以高频率旋转检测质量的自检方法，可以同时测试驱动和感测系统的功能。 在该方法中，检测质量以驱动频率旋转。 基本上是驱动频率的两倍的输入力被施加到致动结构，以使陀螺仪的检测质量块围绕与驱动轴正交的敏感轴线旋转。 通过电路检测陀螺仪在驱动频率下的输出响应，并获得自检响应。

    PLURALITY OF MEMS FOR INCREASED BANDWIDTH
    48.
    发明申请
    PLURALITY OF MEMS FOR INCREASED BANDWIDTH 有权

    公开(公告)号：US20250060392A1

    公开(公告)日：2025-02-20

    申请号：US18498198

    申请日：2023-10-31

    Applicant: InvenSense, Inc.

    Inventor： Matthew Julian Thompson ,  Joseph Seeger ,  Gavin Ho

    IPC: G01P15/08

    Abstract: A MEMS device incorporates a first sensor and a second sensor to receive an external excitation and respectively output signals to processing circuitry. The processing circuitry combines the first and second signals to create a third signal, which includes an output from the first sensor when the external excitation is between a first and second frequency relatively close to DC and an output from the second sensor when the external excitation is between a third and fourth frequency at a higher frequency range.

    Sensor with integrated heater
    49.
    发明授权
    Sensor with integrated heater 有权

    公开(公告)号：US12180067B2

    公开(公告)日：2024-12-31

    申请号：US17549207

    申请日：2021-12-13

    Applicant: InvenSense, Inc.

    Inventor： Pei-Wen Yen ,  Ting-Yuan Liu ,  Jye Ren ,  Chung-Hsien Lin ,  Joseph Seeger ,  Calin Miclaus

    IPC: B81B7/00

    Abstract: A device includes a microelectromechanical system (MEMS) sensor die comprising a deformable membrane, a MEMS heating element, and a substrate. The MEMS heating element is integrated within a same layer and a same plane as the deformable membrane. The MEMS heating element surrounds the deformable membrane and is separated from the deformable membrane through a trench. The MEMS heating element is configured to generate heat to heat up the deformable membrane. The substrate is coupled to the deformable membrane.

    SENSING CIRCUIT OF A MICRO-ELECTROMECHANICAL SENSOR
    50.
    发明公开
    SENSING CIRCUIT OF A MICRO-ELECTROMECHANICAL SENSOR 审中-公开

    公开(公告)号：US20240345125A1

    公开(公告)日：2024-10-17

    申请号：US18753886

    申请日：2024-06-25

    Applicant: INVENSENSE, INC.

    Inventor： Joseph Seeger

    IPC: G01P1/00 ,  G01P15/00 ,  G01P15/125 ,  H03F3/45

    CPC classification number: G01P1/006 ,  G01P15/00 ,  G01P15/125 ,  H03F3/45 ,  H03F2200/48 ,  H03F2203/45156 ,  H03F2203/45546

    Abstract: Applying positive and negative feedback voltages to an electromechanical sensor of a microphone utilizing a voltage-to-voltage converter to facilitate an improvement in sensitivity and reduction in distortion of the microphone is presented herein. A microphone comprises an electromechanical sensor comprising a capacitive sense element comprising a first sense node and a second sense node; and a voltage-to-voltage converter comprising an input, a first output, and a second output. The voltage-to-voltage converter forms, via a first capacitive coupling to the second sense node, a negative feedback loop between the first output of the voltage-to-voltage converter and the input of the voltage-to-voltage converter. The first sense node is electrically coupled to the input of the voltage-to-voltage converter, and the voltage-to-voltage converter forms, via a second capacitive coupling to the first sense node, a positive feedback loop between the second output of the voltage-to-voltage converter and the input of the voltage-to-voltage converter.

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