公开(公告)号：WO2015020309A1

公开(公告)日：2015-02-12

申请号：PCT/KR2014/005142

申请日：2014-06-12

Applicant: 주식회사 오로스테크놀로지

Inventor： 최종립 ,  이상명 ,  허호영 ,  이윤기 ,  오승철

IPC: H01J37/28

CPC classification number: H01J37/28 ,  H01J37/141 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/04922 ,  H01J2237/1405 ,  H01J2237/2809 ,  H01J2237/2817

Abstract: 본 발명은 빔 스폿 조절이 가능한 주사전자현미경 및 이를 이용한 측정방법에 관한 것으로, 주사전자현미경(SEM)에 있어서, 시편에 조사된 전자빔(electro beam) 스폿(spot)의 가로와 세율의 비율이 다른 선형(linear)의 전자빔으로 제어하여 조사하기 위해 상기 주사전자현미경의 전자빔 소스에서 시편으로 이동하는 전자빔로 내에 전자 마그네틱을 구비하고, 전자빔 소스에서 상기 측정 빔이 출력될 때 상기 전자 마그네틱의 인가 전압을 제어부에서 제어하여 전자빔 스폿의 비율과 방향을 제어하는 것을 특징으로 한다.

Abstract translation: 本发明涉及一种能够调节光斑的扫描电子显微镜（SEM）及使用其的测量方法。 为了通过控制照射到样本上的电子束点来照射具有不同纵横比的线性电子束，扫描电子显微镜（SEM）包括设置在从电子束的电子束源移动的电子束的路径内的电磁 SEM到样品。 当从电子束源输出测量光束时，控制单元控制电磁波的施加电压，从而控制电子束光斑的比例和方向。

公开(公告)号：WO2013015311A1

公开(公告)日：2013-01-31

申请号：PCT/JP2012/068818

申请日：2012-07-25

Applicant: 株式会社日立ハイテクノロジーズ ,  大西 崇

Inventor： 大西　崇

IPC: H01J37/141

CPC classification number: H01J37/141

Abstract: 　電磁レンズが発生する磁場の安定性を向上させることを課題とする。　本発明の電磁レンズ（１）は、電子線の経路（５）の周囲に巻線が巻回されているコイル（１２）、コイル（１３ａ）およびコイル（１３ｂ）と、磁路を形成する強磁性体（１１）と、各々のコイル（１２，１３ａ，１３ｂ）に電流を流す電流源装置（２，３）と、コイル（１３ａ）およびコイル（１３ｂ）に、互いに逆向き、かつ、同じ電流量の電流を流し、コイル（１２，１３ａ，１３ｂ）における合計発熱量をＰとし、コイル（１２）に流れる電流量をＩ １ とし、抵抗値をＲ １ とし、コイル（１３ａ，１３ｂ）に流れる電流量をＩ ２ とし、合成抵抗値をＲ ２ としたとき、コイル（１３ａ，１３ｂ）に流れる電流量Ｉ ２ を、Ｉ ２ ＝｛（Ｐ－Ｉ １ ２ Ｒ １ ）／Ｒ ２ ｝ １／２ に従った量となるよう制御する制御装置（４）と、を有することを特徴とする。

Abstract translation: 本发明解决了提高由磁性透镜产生的磁场的稳定性的问题。 该磁性透镜（1）的特征在于具有线（12,13a，13b），线圈缠绕在电子束的路径（5）的周边，形成磁路的铁磁体（11） 用于向线圈（12,13a，13b）输送电流的电流供给装置（2,3）以及控制器（4）。 控制器（4）进行控制使得以相互相反的方向流动的相同量的电流被传送到线圈（13a，13b），并且流到线圈（13a，13b）的电流I2的量 是I2 = {（P-I1 2R1）/ R2} 1/2，其中P是在线圈（12,13a，13b）中产生的总热量，I1是流向线圈的电流量 （12）中，R1是电阻，I2是流向线圈（13a，13b）的电流量，R2是组合电阻。

公开(公告)号：WO2007041059A3

公开(公告)日：2009-04-09

申请号：PCT/US2006037224

申请日：2006-09-25

Applicant: APPLIED MATERIALS INC

Inventor： JASINSKI THOMAS ,  WINKLER DIETER ,  ECKES WILLIAM A

IPC: A61N5/00

CPC classification number: H01J37/141 ,  H01J2237/002

Abstract: We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.

Abstract translation: 我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。 该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果，而且提供了改善的传热均匀性。 这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内，其中电流范围为约100纳安 - 约1000纳帕。 使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合，其提供对电磁透镜线圈的均匀冷却，不仅能够控制带电粒子束的光轴，而且还提供机械稳定性 带电粒子束柱。

公开(公告)号：WO2004054352A3

公开(公告)日：2004-10-28

申请号：PCT/EP0314141

申请日：2003-12-12

Applicant: INTEGRATED CIRCUIT TESTING ,  LANIO STEFAN

Inventor： LANIO STEFAN

IPC: A01J20060101 ,  H01J37/141 ,  H01J37/145

CPC classification number: H01J37/141 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/1405

Abstract: The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil for at least two lens modules is provided. The lens modules comprise a first pole piece, a second pole piece and at least one opening for a charged particle beam. The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.

Abstract translation: 本发明提供一种用于多个带电粒子束的透镜系统。 其中，提供至少一个用于至少两个透镜模块的公共激励线圈。 透镜模块包括第一极靴，第二极靴和用于带电粒子束的至少一个开口。 透镜模块构成一个部件并共享励磁线圈。 从而提高了原材料的可利用性，工件的加工和透镜领域的对称条件。

公开(公告)号：WO2004054352A2

公开(公告)日：2004-07-01

申请号：PCT/EP2003/014141

申请日：2003-12-12

Applicant: ICT, INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH ,  LANIO, Stefan

Inventor： LANIO, Stefan

IPC: A01J

CPC classification number: H01J37/141 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/1405

Abstract: The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil for at least two lens modules is provided. The lens modules comprise a first pole piece, a second pole piece and at least one opening for a charged particle beam. The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.

Abstract translation: 本发明提供了用于多个带电粒子束的透镜系统。 其中，提供了用于至少两个镜头模块的至少一个共同的励磁线圈。 透镜模块包括第一极片，第二极片和用于带电粒子束的至少一个开口。 镜头模块构成一个组件并共享励磁线圈。 因此，原材料可用性，工件加工和镜片领域的对称条件得到改善。

公开(公告)号：WO01097245A3

公开(公告)日：2002-03-28

申请号：PCT/US2001/019381

申请日：2001-06-15

IPC: G01N23/00 ,  H01J37/141 ,  H01J37/21 ,  H01J37/26 ,  H01J37/28 ,  H01J3/22

CPC classification number: H01J37/21 ,  H01J37/141 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1405

Abstract: A magnetic lens configured to apply a magnetic field to a charged particle beam (16) is provided. The magnetic lens includes an outer pole piece and an inner pole piece. The outer pole piece has at least two sectors (32) and at least two slots (36). The magnetic lens also has a primary coil winding interposed between the outer pole piece and the inner pole piece. In addition, the magnetic lens has a number of sector coil windings, and each sector of the outer pole piece may be coupled to one sector coil winding. A magnetic potential of the outer pole piece is generated by applying a current to the primary coil winding. A separate magnetic potential of each sector is generated by applying current to each sector of the outer pole piece.

Abstract translation: 提供了构造成对带电粒子束（16）施加磁场的磁性透镜。 磁性透镜包括外极片和内极片。 外极片具有至少两个扇区（32）和至少两个槽（36）。 磁性透镜还具有插入在外极片和内极片之间的初级线圈绕组。 此外，磁性透镜具有多个扇形线圈绕组，并且外部极片的每个扇区可以耦合到一个扇区线圈绕组。 通过向初级线圈绕组施加电流来产生外极片的磁电位。 通过向外极片的每个扇区施加电流来产生每个扇区的单独磁势。

公开(公告)号：WO0057450A2

公开(公告)日：2000-09-28

申请号：PCT/GB0000996

申请日：2000-03-17

Applicant: SHIMADZU RES LAB EUROPE LTD ,  MARUI TAKAO ,  BADHEKA RANJAN KRISHNACHANDRA ,  READ FRANK HENRY

Inventor： MARUI TAKAO ,  BADHEKA RANJAN KRISHNACHANDRA ,  READ FRANK HENRY

IPC: H01J37/141 ,  H01J37/244 ,  H01J37/28 ,  H01J37/00

CPC classification number: H01J37/244 ,  H01J37/141 ,  H01J2237/1035

Abstract: A magnetic immersion lens has inner and outer pole-pieces (10, 11) arranged symmetrically about a longitudinal axis X-X of the lens, the inner pole piece (10) having a through-bore (12) and the lens producing a magnetic imaging field for directing along the through-bore (12) secondary electrons emitted from a specimen (S) positioned in front of the inner pole-piece. The lens has an axially-symmetric detection arrangement (20) located within the through-bore. The detector (20) comprises a focusser electrode (21), a repeller electrode (22), an extractor electrode (23), a detector electrode (24), and a reflector electrode (25).

Abstract translation: 磁浸透镜具有围绕透镜的纵轴XX对称地配置的内极和外极（10,11），所述内极片（10）具有通孔（12），所述透镜产生磁成像场 用于沿着位于内极片前方的试样（S）发射的通孔（12）引导二次电子。 透镜具有位于通孔内的轴对称检测装置（20）。 检测器（20）包括聚光器电极（21），反射器电极（22），提取器电极（23），检测器电极（24）和反射器电极（25）。

公开(公告)号：WO9825293A3

公开(公告)日：1998-08-06

申请号：PCT/IB9701401

申请日：1997-11-06

Applicant: PHILIPS ELECTRONICS NV ,  PHILIPS NORDEN AB

Inventor： KRIJN MARCELLINUS PETRUS CAROL ,  HENSTRA ALEXANDER

IPC: H01J37/153 ,  H01J37/141 ,  H01J37/28 ,  H01L21/027

CPC classification number: H01J37/141 ,  H01J2237/0492 ,  H01J2237/1534

Abstract: Electron-optical, rotationally-symmetrical lenses inevitably exhibit spherical and chromatic aberrations which usually determine the limit of the resolution. Such lens aberrations cannot be eliminated by compensation by means of rotationally-symmetrical fields. In order to enhance the resolution nevertheless, it has already been proposed to reduce said lens aberrations by means of a Wien-type corrector. Such a configuration must satisfy very severe requirements as regards manufacturing precision, mechanical and electrical stability and alignment of the various elements relative to one another. Consequently, it is extremely difficult to perform readjustement of the electron-optical apparatus by means of such a corrector in the case of changing circumstances. According to the invention there is provided a combination of a correction unit and a doublet to be corrected. By constructing the objective to be corrected as a doublet (5) and by independently controlling the two lenses (6 and 8) of the doublet (5), the setting of the correction unit (28) can remain unchanged, it being possible to vary the free object distance and the electron voltage nevertheless during operation of the electron-optical apparatus.

公开(公告)号：WO1981002365A1

公开(公告)日：1981-08-20

申请号：PCT/SU1980000026

申请日：1980-02-13

Applicant: BUREVESTNIK ,  BRATOV O ,  KISEL G ,  DERIPASKA M ,  KAZAKOV L ,  GURIN V ,  MOROZOV V ,  PANOV A ,  MAKAROV K

Inventor： BUREVESTNIK

IPC: H01J37/26

CPC classification number: H01J37/141

Abstract: An electon-optical device comprises a magnetic circuit (1) which is shaped as a closed coil and is made of a ferromagnetic material having a good magnetic permeability, the magnetic circuit (1) including an internal core (2), an external lateral part (3) and butt-end jaws (4, 5). The inner hollow of the magnetic circuit (1) houses an exciting winding (13) which encircles the internal core (2) and which is common for all the electromagnetic lenses of the device. The inner core (2) of the magnetic circuit (1), being also common for all the electromagnetic lenses of the device, is shaped as an elongated hollow cylinder provided with annular grooves (16) on its outer surface. The annular grooves (16), together with the adjacent parts of the inner core (2) placed on both sides of each of the annular grooves (16), are forming the poles of the electromagnetic lenses, the number of which is equal to that of the electromagnetic lenses in the device.

Abstract translation: 电子光学装置包括形成为闭合线圈并由具有良好磁导率的铁磁材料制成的磁路（1），所述磁路（1）包括内芯（2），外侧部分 （3）和对接端颚（4,5）。 磁路（1）的内部空心容纳围绕内部芯（2）的激励绕组（13），并且对于装置的所有电磁透镜是共同的。 所述磁路（1）的内芯（2）对于所述装置的所有电磁透镜也是公用的，其形状为在其外表面上设置有环形凹槽（16）的细长中空圆柱体。 环形槽（16）与位于每个环形槽（16）两侧的内芯（2）的相邻部分一起形成电磁透镜的极数，其数量等于 的电磁透镜。

公开(公告)号：WO2018070635A1

公开(公告)日：2018-04-19

申请号：PCT/KR2017/006323

申请日：2017-06-16

Applicant: 한국기계연구원 ,  재단법인대구경북과학기술원

Inventor： 최시영 ,  김성대 ,  류정호 ,  송경 ,  최홍수

IPC: H01J37/141 ,  H01J37/20 ,  H01J37/26

CPC classification number: H01J37/141 ,  H01J37/20 ,  H01J37/26

Abstract: 본 발명의 일 실시예로써, 입체형 코일 구조를 갖는 자기장 발생 소자 및 이러한 소자를 제조하기 위한 방법이 제공될 수 있다. 본 발명의 일 실시예에 따른 입체형 코일 구조를 갖는 자기장 발생 소자는 기판 및 기판 상에 형성된 소정 크기의 선폭을 갖는 나선형의 입체형 헬름홀츠(helmholz) 코일을 포함하고, 기판 상에서 나선형으로 형성된 헬름홀츠 코일에 인가된 전류에 의하여 기판과 평행한 방향으로 자기장이 발생될 수 있다.

Abstract translation: 作为本发明的一个实施例，可以提供具有三维线圈结构的磁场产生元件和用于制造这种装置的方法。 根据本发明实施例的具有三维线圈结构的磁场产生元件包括基板和在基板上形成的具有预定线宽的螺旋形亥姆霍兹线圈，并且设置有亥姆霍兹线圈 由于产生的电流，可以在平行于基板的方向上产生磁场。