公开(公告)号：WO2005024888A3

公开(公告)日：2005-04-28

申请号：PCT/EP2004009801

申请日：2004-09-02

Applicant: INTEGRATED CIRCUIT TESTING ,  FROSIEN JUERGEN ,  DEGENHARDT RALF ,  LANIO STEFAN

Inventor： FROSIEN JUERGEN ,  DEGENHARDT RALF ,  LANIO STEFAN

IPC: H01J37/05 ,  H01J37/153 ,  H01J37/28 ,  H01J49/28 ,  H01J49/46 ,  H01J49/48

CPC classification number: H01J37/26 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/05 ,  H01J37/153 ,  H01J37/3174 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/1538

Abstract: The present invention relates to e.g. a charged particle beam energy width reduction system for a charged particle beam with a z-axis along the optical axis and a first and a second plane, comprising, a first element (110) acting in a focusing and dispersive manner, a second element (112) acting in a focusing and dispersive manner, a first quadrupole element (410) being positioned such that, in operation, a field of the first quadrupole element overlaps with a field of the first element acting in a focusing and dispersive manner, a second quadrupole element (412) being positioned such that, in operation, a field of the second quadrupole element overlaps with a field of the second element acting in a focusing and dispersive manner, a first charged particle selection element (618) being positioned, in beam direction, before the first element acting in a focusing and dispersive manner, and a second charged particle selection element (616;716) being positioned, in beam direction, after the first element acting in a focusing and dispersive manner. Thereby, a virtually dispersive source-like location without an inherent dispersion limitation can be realized.

Abstract translation: 本发明涉及例如 具有沿着光轴的z轴以及第一和第二平面的带电粒子束的带电粒子束能量宽度减小系统，包括：以聚焦和色散方式作用的第一元件（110），第二元件（ 112）以聚焦和散射方式作用，第一四极元件（410）被定位成使得在操作中第一四极元件的场与第一元件的聚焦和散射方式的场重叠，第二 四极元件（412）被定位成使得在操作中，第二四极元件的场与以聚焦和色散方式作用的第二元件的场重叠，第一带电粒子选择元件（618）以束 在第一元件以聚焦和色散方式作用之前，以及第二带电粒子选择元件（616; 716）在光束方向上定位在第一元件作用于聚焦和分散方式之后 d分散的方式。 由此，可以实现没有固有色散限制的虚拟色散源位置。

公开(公告)号：WO2004054352A3

公开(公告)日：2004-10-28

申请号：PCT/EP0314141

申请日：2003-12-12

Applicant: INTEGRATED CIRCUIT TESTING ,  LANIO STEFAN

Inventor： LANIO STEFAN

IPC: A01J20060101 ,  H01J37/141 ,  H01J37/145

CPC classification number: H01J37/141 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/1405

Abstract: The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil for at least two lens modules is provided. The lens modules comprise a first pole piece, a second pole piece and at least one opening for a charged particle beam. The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.

Abstract translation: 本发明提供一种用于多个带电粒子束的透镜系统。 其中，提供至少一个用于至少两个透镜模块的公共激励线圈。 透镜模块包括第一极靴，第二极靴和用于带电粒子束的至少一个开口。 透镜模块构成一个部件并共享励磁线圈。 从而提高了原材料的可利用性，工件的加工和透镜领域的对称条件。

公开(公告)号：JP2006261111A

公开(公告)日：2006-09-28

申请号：JP2006056845

申请日：2006-03-02

Applicant: Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh ,  アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー

Inventor： FROSIEN JUERGEN ,  LANIO STEFAN

IPC: H01J37/244 ,  H01J37/05 ,  H01J37/28

CPC classification number: H01J37/05 ,  G01R31/305 ,  H01J37/244 ,  H01J49/488 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/26

Abstract: PROBLEM TO BE SOLVED: To provide an analysis system having an improved detection system and a charged particle beam device equipped with the system.
SOLUTION: The analysis system analyzing charged particle beams (2) includes: a divider (16) dividing the charged particle beams (2) into low-energy beams (18) and highenergy beams (19) in correspondence with their particle energy; a front detector (17) to detect the high-energy beams (19); and at least one back detector (15) to detect the low-energy beams (18). The divider is arranged between the front detector and at least one back detector, and the front detector (17) and/or at least one back detector (15) are divided into segments.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种具有改进的检测系统和装备有该系统的带电粒子束装置的分析系统。 解决方案：分析带电粒子束（2）的分析系统包括：将带电粒子束（2）分成低能束（18）和高能束（19）的分配器（16），与其粒子能量相对应 ; 用于检测高能束（19）的前检测器（17）; 和至少一个用于检测低能量束（18）的反向检测器（15）。 分配器布置在前检测器和至少一个后检测器之间，并且前检测器（17）和/或至少一个后检测器（15）被分成段。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2006269431A

公开(公告)日：2006-10-05

申请号：JP2006079454

申请日：2006-03-22

Applicant: Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh ,  アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー

Inventor： ADAMEC PAVEL ,  LANIO STEFAN

IPC: H01J37/06 ,  H01J37/073

CPC classification number: H01J1/135 ,  H01J1/18 ,  H01J37/07 ,  H01J37/242 ,  H01J2237/06316

Abstract: PROBLEM TO BE SOLVED: To provide an emitter for a charged particle beam apparatus. SOLUTION: The emitter is provided with a filament (3) fixed to and extended between a first and a second support parts (2), an emitter tip part (4)mounted on the filament (3) and a stabilizing element (6) mounted on a third support part (5) and the filament (3). The first, second and third support parts (2, 5) define a triangle, and as a result, the stabilizing element (6) will be extended at least partially in the direction of crossing an extension direction of the filament at right angles. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供用于带电粒子束装置的发射器。 解决方案：发射器设置有固定到第一和第二支撑部分（2）上并在其之间延伸的灯丝（3），安装在灯丝（3）上的发射极尖端部分（4）和稳定元件 6）安装在第三支撑部分（5）和灯丝（3）上。 第一，第二和第三支撑部分（2,5）限定三角形，结果，稳定元件（6）将至少部分地沿垂直于灯丝的延伸方向的方向延伸。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006190653A

公开(公告)日：2006-07-20

申请号：JP2005329684

申请日：2005-11-15

Applicant: Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh ,  アイシーティ,インテグレイテッド サーキット テスティング ゲゼルシャフト フュア ハーブライタープリューフテックニック ミット ベシュレンクテル ハフツング

Inventor： FROSIEN JUERGEN DR ,  LANIO STEFAN ,  SCHOENECKER GERALD ,  BRODIE ALAN D ,  CREWE DAVIS A

IPC: H01J37/244 ,  G01N23/225 ,  G21K1/00 ,  G21K5/04 ,  H01J37/05 ,  H01J37/12 ,  H01J49/48

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

Abstract: PROBLEM TO BE SOLVED: To provide an analysis system and a charged particle beam device by which a high-speed and high-quality imaging of a test piece can be made with a short acting distance and a compact design, and contrast of the image can be increased.
SOLUTION: This is a charged particle unit which deflects and energy selects charged particles of a charged particle beam. Double focus sector units 425, 425 for deflecting the charged particle beam and an energy filter 460 for forming the potential are provided, and thereby, the charged particles of the charged particle beam are changed its direction at the potential saddle point according to the energy of the charged particles.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种分析系统和带电粒子束装置，通过该装置可以以短的动作距离和紧凑的设计制造测试件的高速和高质量的成像，并且对比度 可以增加图像。

解决方案：这是一个带电粒子单元，其偏转和能量选择带电粒子束的带电粒子。 提供了用于偏转带电粒子束的双焦点部件425,425和用于形成电位的能量过滤器460，由此，带电粒子束的带电粒子根据能量 带电粒子。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：KR20200138026A

公开(公告)日：2020-12-09

申请号：KR20200062794

申请日：2020-05-26

Applicant: ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH

Inventor： FIRNKES MATTHIAS ,  BREUER JOHN ,  LAMPERSBERGER FLORIAN ,  KAUPP HANNO ,  LANIO STEFAN

IPC: H01J37/04 ,  G01N23/2251 ,  H01J37/147 ,  H01J37/28

Abstract: 시편을검사하기위한하전입자빔 디바이스가설명된다. 하전입자빔 디바이스는, 하전입자빔을방출하기위한빔 소스, 하전입자빔에영향을주기위한전극, 및전극의진동들을감쇠시키기위한, 전극상에제공되는감쇠유닛을포함한다. 추가로, 전극을갖는대물렌즈모듈이설명되며, 여기서, 감쇠유닛이전극상에제공된다. 추가로, 전극디바이스가설명되며, 여기서, 질량감쇠기가전극디바이스의디스크-형상전극몸체상에장착된다.

公开(公告)号：DE602005006967D1

公开(公告)日：2008-07-03

申请号：DE602005006967

申请日：2005-03-17

Applicant: INTEGRATED CIRCUIT TESTING

Inventor： FROSIEN JUERGEN ,  LANIO STEFAN

IPC: H01J37/244 ,  G01R31/305 ,  H01J37/05 ,  H01J49/48

Abstract: The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles (2) has a divider (16) to divide the beam of charged particles (2) according to their energies into a low energy beam (18; 24, 25) and a high energy beam (19); a front detector (17) for detecting the high energy beam (19); and at least one reverse detector (15; 22) for detecting the low energy beam (18; 24,25). The divider is positioned between the front detector and the at least one reverse detector and the front detector (17) and/or the at least one reverse detector (15, 22) are segmented.

公开(公告)号：AU2003290028A8

公开(公告)日：2004-07-09

申请号：AU2003290028

申请日：2003-12-12

Applicant: INTEGRATED CIRCUIT TESTING

Inventor： LANIO STEFAN

IPC: A01J20060101 ,  H01J37/141 ,  H01J37/145

Abstract: The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil (106a,b) for at least two lens modules is provided. The lens modules comprise a first pole piece, a second pole piece and at least two openings (22) for charged particle beams along optical axes (24). The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.

公开(公告)号：DE60235636D1

公开(公告)日：2010-04-22

申请号：DE60235636

申请日：2002-12-17

Applicant: INTEGRATED CIRCUIT TESTING

Inventor： LANIO STEFAN

IPC: H01J37/141 ,  A01J20060101 ,  H01J37/145

Abstract: The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil (106a,b) for at least two lens modules is provided. The lens modules comprise a first pole piece, a second pole piece and at least two openings (22) for charged particle beams along optical axes (24). The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.

公开(公告)号：AU2003290028A1

公开(公告)日：2004-07-09

申请号：AU2003290028

申请日：2003-12-12

Applicant: INTEGRATED CIRCUIT TESTING

Inventor： LANIO STEFAN

IPC: A01J20060101 ,  H01J37/141 ,  H01J37/145

Abstract: The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil (106a,b) for at least two lens modules is provided. The lens modules comprise a first pole piece, a second pole piece and at least two openings (22) for charged particle beams along optical axes (24). The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.