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    저마늄을 이용한 반도체 소자의 접합 영역에서의 결함 치유 방법
    57.
    发明公开
    저마늄을 이용한 반도체 소자의 접합 영역에서의 결함 치유 방법 有权
    与GE的半导体器件连接的缺陷治疗方法

    公开(公告)号：KR1020140087549A

    公开(公告)日：2014-07-09

    申请号：KR1020120157977

    申请日：2012-12-31

    Applicant: (재)한국나노기술원 ,  성균관대학교산학협력단

    Inventor： 박원규 ,  허종곤 ,  전동환 ,  박진홍 ,  심재우

    IPC: H01L21/26 ,  H01L21/324

    CPC classification number: H01L21/3221 ,  H01L21/26513 ,  H01L21/28512 ,  H01L21/28518 ,  H01L21/324 ,  H01L29/45

    Abstract: The present invention relates to a method of repairing a defect in a junction region of a semiconductor device. A p-Ge layer grows on a substrate, and an n+ Ge region is formed on the p-Ge layer through ion implantation or in-situ doping is performed on the upper portion of the p-Ge layer to form the n+ Ge region or an oxide layer is deposited on the p-Ge layer, pattered, etched, and in-situ doped to form the n+ Ge region. After an oxide layer for capping is formed, heat treatment is performed thereon at a temperature of 600-700°C for 1 to 3 hours to deposit an electrode. A leakage current is minimized to improve characteristics of a semiconductor device by relatively reducing deep junction through the heat treatment. The method has advantages in that high integration and refinement of the semiconductor device are realized.

    Abstract translation: 本发明涉及修复半导体器件的接合区域中的缺陷的方法。 p-Ge层在衬底上生长，并且通过离子注入在p-Ge层上形成n + Ge区，或者在p-Ge层的上部进行原位掺杂以形成n + Ge区或 氧化物层沉积在p-Ge层上，图案化，蚀刻和原位掺杂以形成n + Ge区域。 在形成用于封盖的氧化物层之后，在600-700℃的温度下对其进行1至3小时的热处理以沉积电极。 通过相对减少通过热处理的深度接合，使漏电流最小化以改善半导体器件的特性。 该方法具有实现半导体器件的高集成度和精细化的优点。

    노광 장치 및 노광 장치 세정 방법
    59.
    发明公开
    노광 장치 및 노광 장치 세정 방법 审中-实审
    用于层析的装置及其清洗方法

    公开(公告)号：KR1020160142938A

    公开(公告)日：2016-12-14

    申请号：KR1020150078660

    申请日：2015-06-03

    Applicant: 삼성전자주식회사

    Inventor： 장윤경 ,  김성주 ,  박진홍 ,  서도현 ,  이현훈

    IPC: G03F7/20 ,  H01L21/027 ,  H01L21/02

    CPC classification number: G03F7/70925

    Abstract: 본발명의일 실시예에따른노광장치는, 광을발생시키는광원계, 상기광을조절하고패터닝하는광학계, 상기패터닝된상기광으로기판에대해노광공정을수행하는기판계, 그리고상기광원계, 상기광학계, 그리고상기기판계를제어하는제어부를포함하되, 상기광학계는챔버, 상기챔버내에배치되어상기광을조절하는반사부재, 그리고상기기판계와대향되는상기챔버의일측에배치된제 1 개폐밸브를포함하되, 상기제어부는, 상기노광공정을진행할때 상기제 1 개폐밸브를열고, 상기챔버내에대해세정공정을진행할때 상기제 1 개폐밸브를닫도록상기광학계를제어한다.

    Abstract translation: 公开了使用曝光装置的曝光装置和制造方法。 曝光装置包括产生光的光源系统，控制和图案化光的光学系统，通过图案化光对衬底进行曝光处理的衬底系统以及控制光源系统的控制单元，光学系统 系统和基板系统。 该光学系统包括一个室，设置在该腔室中以控制该光的反射构件以及安装在该腔室的与衬底系统相对的一侧上的第一开关阀。 所述控制单元控制所述光学系统，使得所述第一开关阀在所述曝光过程期间被打开，并且在对所述室的内部进行的清洁处理期间被关闭。

    휴대단말기의 노이즈 제거 장치 및 방법
    60.
    发明公开
    휴대단말기의 노이즈 제거 장치 및 방법 有权
    便携式终端中消除噪音的装置和方法

    公开(公告)号：KR1020120113439A

    公开(公告)日：2012-10-15

    申请号：KR1020110031146

    申请日：2011-04-05

    Applicant: 삼성전자주식회사

    Inventor： 박진홍 ,  고영재 ,  김민석

    IPC: H04M1/60 ,  H04B15/00 ,  H04B1/40 ,  H04B15/04

    CPC classification number: H04B15/00 ,  H04M1/6058 ,  H04B1/40 ,  H04B15/04 ,  H04M1/6008

    Abstract: PURPOSE: A device for eliminating noise of a portable terminal and a method thereof are provided to prevent mixed insertion of power noise and TDMA(Time Division Multiple Access) noise about audio signals which are inputted from a microphone terminal to an audio processing unit, thereby increasing call quality and recording quality. CONSTITUTION: An interface unit(250) has a microphone terminal and is connected to an external device. An ADC(Analog-Digital Converter)(290) converts analog power inputted from the microphone terminal into digital power. An audio processing unit(240) processes audio signals inputted from the microphone terminal. A switch(280) controls connection between the microphone terminal and the ADC. A control unit(295) recognizes the type of an external device connected to the interface unit by comparing the digital power with a reference table. The control unit turns the switch off and prevents noise from being mixed with the audio signals through a connection line between the microphone terminal and the ADC. [Reference numerals] (210) Input unit; (220) Display unit; (230) Storage unit; (231) Identification reference table; (240) Audio processing unit; (250) Interface unit; (251) L terminal; (252) R terminal; (253) Microphone terminal; (254) Ground terminal; (255) Detection terminal; (260) Wireless communication unit; (270) Detection unit; (290) AD converter; (295) Control unit; (AA) Reference voltage

    Abstract translation: 目的：提供一种用于消除便携式终端的噪声的装置及其方法，以防止从麦克风终端向音频处理单元输入的音频信号的功率噪声和TDMA（时分多址）噪声的混合插入，从而 提高通话质量和录音质量。 构成：接口单元（250）具有麦克风端子并连接到外部设备。 ADC（模拟数字转换器）（290）将从麦克风端子输入的模拟功率转换为数字功率。 音频处理单元（240）处理从麦克风终端输入的音频信号。 开关（280）控制麦克风端子和ADC之间的连接。 控制单元（295）通过将数字功率与参考表进行比较来识别连接到接口单元的外部设备的类型。 控制单元关闭开关，并通过麦克风端子和ADC之间的连接线防止噪声与音频信号混合。 （附图标记）（210）输入单元; （220）显示单元; （230）存储单元; （231）识别参考表; （240）音频处理单元; （250）接口单元; （251）L端; （252）R端; （253）麦克风终端; （254）接地端子; （255）检测终端; （260）无线通信单元; （270）检测单元; （290）AD转换器; （295）控制单元; （AA）参考电压

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