公开(公告)号：US5157458A

公开(公告)日：1992-10-20

申请号：US598697

申请日：1990-11-02

Applicant: Heinz Wagner ,  Martin Labhart ,  Ulrich Glaus

Inventor： Heinz Wagner ,  Martin Labhart ,  Ulrich Glaus

IPC: G01B9/02 ,  G01J3/447 ,  G01J3/45 ,  G01J3/453 ,  G01J9/02

CPC classification number: G01J3/447 ,  G01J3/4537 ,  G01B2290/70 ,  G01J2009/0261

Abstract: The polarization interferometer comprises a source of light (1), a collimator (2), a first polarizing means (3), a double-refractive means (4,5,6) and a second polarizing means (7) which polarizes the light emerging from the double-refractive means (4,5,6) and directs it to a photon detector (8). The double-refractive means (4,5,6) consists of two optical wedges (5,6) displaceable along those lateral surfaces which face each other, said wedges complementing each other to a right parallelepiped, and of a double-refractive, plane-parallel plate (4) serving as a compensator. The optical axis of the compensator (4) is twisted in a plane perpendicular to the light beam by a finite angle relative to that of the two wedges (5,6), the optical axes of the two wedges (5,6) coinciding with each other. The optical axes of the two polarizing means (3,7) are arranged perpendicularly or parallely to each other and are aligned non-parallely to the axes of the two wedges (5,6) of the double-refractive means (4,5,6).

Abstract translation: PCT No.PCT / CH90 / 00008 Sec。 371日期1990年11月2日 102（e）1990年11月2日日期PCT 1990年1月15日提交PCT公布。 WO90 / 10191 PCT出版物 日期：1990年9月7日。偏振干涉仪包括光源（1），准直器（2），第一偏振装置（3），双折射装置（4,5,6）和第二偏振装置 （7），其使从双折射装置（4,5,6）出射的光偏振并将其引导到光子检测器（8）。 双折射装置（4,5,6）由两个光楔（5,6）组成，两个光楔（5,6）可沿着彼此面对的侧表面移位，所述楔彼此互补成直角的平行六面体，双折射平面 - 平行板（4）作为补偿器。 补偿器（4）的光轴在垂直于光束的平面中相对于两个楔形物（5,6）的角度被扭转有限的角度，两个楔形物（5,6）的光轴与 彼此。 两个偏振装置（3,7）的光轴彼此垂直或平行布置，并且与双折射装置（4,5，...）的两个楔形物（5,6）的轴线非平行地排列， 6）。

公开(公告)号：US4744658A

公开(公告)日：1988-05-17

申请号：US4391

申请日：1987-01-16

Applicant: Sandor Holly

Inventor： Sandor Holly

IPC: G01J9/02 ,  G01B9/02

CPC classification number: G01J9/02 ,  G01J2009/0261 ,  G01J2009/0273

Abstract: A method and apparatus 10 for sensing and measuring the quality of the wavefront of a substantially collimated incoming optical beam 12. Incoming beam 12 is directed through a polarizer 14 and toward a polarizing beam splitter 14 where it is separated into an S-polarized beam 18 and a P-polarized beam 20. Beams 18,20 are directed in opposite directions along a common closed path of a modified cyclic interferometer 22. This closed path includes mirrors 24,26 and focusing means 28,30 for focusing the P- and S-polarized beams 18,20 at a common focal region on the path and for recollimating each beam 18,20 after it passes through the focal region. At the focal region is located a specially constructed polarizer component 32 with an optical aperture 34. The aperture 34 is centered on the centroid of the focused beams and is angularly oriented about an optical axis of the closed path so that it transmits substantially all of the beam traveling in one direction and is an effective optical spatial filter for the beam traveling in the opposite direction. After being recollimated and returned to beam splitter 16 the beams 18,20 are recombined in a common path 36 and oriented in a common plane of polarization by polarizer 38 thereby causing them to interfere. The resultant fringe field is read by reader 40 and analyzed by receiver electronics 42, control electronic means 44 and memory device means 46. The apparatus 10 can operate with either a continuous wave or a pulsed wave of incident optical radiation.

Abstract translation: 用于感测和测量基本上准直的进入光束12的波前质量的方法和装置10.进入的光束12被引导通过偏振器14并朝向偏振光束分离器14，在该分光器14被分离成S偏振光束18 和P偏振光束20.光束18,20沿着修改的循环干涉仪22的公共闭合路径沿相反方向被引导。该闭合路径包括用于聚焦P和S的反射镜24,26和聚焦装置28,30 偏振光束18,20位于路径上的公共焦点区域上，并且用于在每个光束18,20通过焦点区域之后重新准直。 在焦点区域处设置有具有光学孔34的特别构造的偏振器部件32.孔34以聚焦光束的质心为中心，并且围绕封闭路径的光轴成角度地取向，使得其基本上透射 光束在一个方向上行进，并且是用于沿相反方向行进的光束的有效光学空间滤光器。 在重新升高并返回到分束器16之后，光束18,20在公共路径36中重新组合，并通过偏振器38在共同的偏振平面中取向，从而使它们干涉。 所得到的边缘场由读取器40读取，并由接收机电子装置42，控制电子装置44和存储装置装置46进行分析。装置10可以用入射光辐射的连续波或脉冲波进行操作。

公开(公告)号：US4583855A

公开(公告)日：1986-04-22

申请号：US581185

申请日：1984-02-17

Applicant: Noah Bareket

Inventor： Noah Bareket

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J2009/0261

Abstract: An apparatus is described for measuring spatial phase difference between a signal beam and a reference beam in substantially real time, where the signal and reference beams are coherent beams of optical radiation superimposed upon each other and having orthogonal polarization states with respect to each other.

Abstract translation: 描述了用于基本上实时地测量信号光束和参考光束之间的空间相位差的装置，其中信号和参考光束是相互叠加并具有彼此具有正交极化状态的光辐射的相干光束。

公开(公告)号：US20240280412A1

公开(公告)日：2024-08-22

申请号：US18615670

申请日：2024-03-25

Applicant: GIST (Gwangju Institue of Science and Technology)

Inventor： Bok Hyeon KIM ,  Chang Won LEE

IPC: G01J9/02

CPC classification number: G01J9/0246 ,  G01J2009/023 ,  G01J2009/0261

Abstract: The present disclosure relates to an optical wavelength measuring device using an absorption-type optical fiber-based multiple optical fiber filter modules, an optical sensor system having the same, and an optical measurement method. The An optical wavelength measuring device includes a first optical splitter splitting the signal light provided from the optical fiber sensor into first and second split lights, a first optical detection unit detecting the first split light output from the first optical splitter, a polarization controller installed on an optical path of the second split light output from the first optical splitter, and controlling a polarization state of the second split light, a second optical detection unit detecting the second split light which is polarization-controlled by the polarization controller, and a calculation module calculating an optical wavelength of the signal light according to a physical quantity applied to the optical fiber sensor.

公开(公告)号：US09658114B1

公开(公告)日：2017-05-23

申请号：US14986593

申请日：2015-12-31

Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences

Inventor： Feng Tang ,  Xiangzhao Wang ,  Peng Feng ,  Fudong Guo ,  Yunjun Lu

IPC: G01M11/02 ,  G01J9/02

CPC classification number: G01J9/02 ,  G01J1/0437 ,  G01J2009/0223 ,  G01J2009/0226 ,  G01J2009/0261

Abstract: A device for measuring point diffraction interferometric wavefront aberration having an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. A method for detecting wavefront aberration of the optical system by using the device is also disclosed.

公开(公告)号：US07423760B2

公开(公告)日：2008-09-09

申请号：US10530934

申请日：2002-10-11

Applicant: Wolf Steffens ,  Ulrich Kallmann ,  Bernd Nebendahl ,  Emmerich Mueller ,  Ralf Haeussler

Inventor： Wolf Steffens ,  Ulrich Kallmann ,  Bernd Nebendahl ,  Emmerich Mueller ,  Ralf Haeussler

IPC: G01B9/02

CPC classification number: G01J9/0246 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/0207 ,  G01B2290/45 ,  G01B2290/60 ,  G01B2290/70 ,  G01J2009/0261

Abstract: An apparatus and to a method of monitoring an interferometer, comprising the steps of: coupling a first optical signal into the interferometer and into a wavelength reference element, detecting a first resulting interference signal being a result of interference of parts of the first optical signal in the interferometer, detecting a resulting reference signal of the wavelength reference element, the resulting reference signal being a result of interaction of the first optical signal with the wavelength reference element, and comparing the first resulting interference signal with the resulting reference signal to detect a drift of the interferometer, if any.

Abstract translation: 一种监测干涉仪的装置和方法，包括以下步骤：将第一光信号耦合到干涉仪中并进入波长参考元件，检测作为第一光信号部分干扰的结果的第一结果干扰信号 所述干涉仪检测所述波长参考元件的参考信号，所得到的参考信号是所述第一光信号与所述波长参考元件相互作用的结果，以及将所述第一结果干扰信号与所得到的参考信号进行比较以检测漂移 的干涉仪，如果有的话。

公开(公告)号：US20080043224A1

公开(公告)日：2008-02-21

申请号：US11770582

申请日：2007-06-28

Applicant: Raymond Castonguay ,  Piotr Szwaykowski

Inventor： Raymond Castonguay ,  Piotr Szwaykowski

IPC: G01N21/00

CPC classification number: G01B9/02081 ,  G01B2290/45 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.

Abstract translation: 一种光学测量装置，其组合包括偏振型干涉仪，该偏振型干涉仪包括偏振光束分离器，其中偏振光束被分成正交偏振的参考和测试光束，检测器阵列布置成一行，用于创建多个 相移干涉图，以及用于沿与检测器的长轴垂直的方向移动物体的扫描装置。

公开(公告)号：US20070171427A1

公开(公告)日：2007-07-26

申请号：US11627153

申请日：2007-01-25

Applicant: Yoshihiro Shiode

Inventor： Yoshihiro Shiode

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G03F7/706 ,  G01J4/00 ,  G01J2009/0261 ,  G03F7/70566

Abstract: A method for irradiating onto a target optical system plural linearly polarized rays having different polarization directions, and for measuring a polarization characteristic of the target optical system including a birefringence amount R and a fast axis Φ includes the steps of irradiating linearly polarized ray having a polarization direction θ onto the target optical system and obtaining a centroid amount P of the ray that has transmitted through the target optical system, and obtaining the birefringence amount R and the fast axis Φ from P=−R·cos(2θ−Φ) or P=R·cos(2θ−Φ).

Abstract translation: 一种用于向目标光学系统照射多个具有不同偏振方向的线性偏振光，并且用于测量包括双折射量R和快轴Phi的目标光学系统的偏振特性的方法包括以下步骤：照射具有极化的线偏振光 方向θ到目标光学系统上，并获得透过目标光学系统的光线的重心量P，并从P = -R.cos（2theta-Phi）或P中获得双折射量R和快轴Phi = R.cos（2ta-Phi）。

公开(公告)号：US07212290B2

公开(公告)日：2007-05-01

申请号：US10900529

申请日：2004-07-28

Applicant: Kevin R. Fine ,  Greg C. Felix ,  John J. Bockman ,  Douglas P. Woolverton

Inventor： Kevin R. Fine ,  Greg C. Felix ,  John J. Bockman ,  Douglas P. Woolverton

IPC: G01B9/02

CPC classification number: G01J9/0215 ,  G01B9/02003 ,  G01B9/02018 ,  G01B9/02051 ,  G01B2290/70 ,  G01J2009/0261

Abstract: An interferometer system includes a rhomboid assembly having a first optical stack and a second optical stack mounted on the first stack. The first stack includes a first prism having an angled face mounted to an angled face of a second prism. The interface between these angled faces includes a first polarizing beam-splitter. The second stack includes a third prism having an angled face mounted to an angled face of the fourth prism. The interface between these angled faces includes a second polarizing beam-splitter. First, second, third, and fourth wave plate elements are located in beam paths between the rhomboid assembly and at least one of a measurement optic and a reference optic. A redirecting optic is located at least adjacent to the vertical faces of the first and the third prisms.

Abstract translation: 干涉仪系统包括具有安装在第一堆叠上的第一光学堆叠和第二光学堆叠的菱形组件。 第一堆叠包括具有安装到第二棱镜的倾斜面的倾斜面的第一棱镜。 这些倾斜面之间的界面包括第一偏振分束器。 第二堆叠包括具有安装到第四棱镜的倾斜面的成角度的第三棱镜。 这些倾斜面之间的界面包括第二偏振分束器。 第一，第二，第三和第四波片元件位于菱形组件与测量光学元件和参考光学元件中的至少一个之间的光束路径中。 重定向光学器件至少邻近第一和第三棱镜的垂直面定位。

公开(公告)号：US07106456B1

公开(公告)日：2006-09-12

申请号：US10146156

申请日：2002-05-15

Applicant: William J. Cottrell

Inventor： William J. Cottrell

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G01J9/02 ,  G01J2009/0223 ,  G01J2009/0261 ,  G01M11/005 ,  G01M11/331 ,  G01M11/333

Abstract: A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast.

Abstract translation: 公共路径，点衍射，相移干涉仪使用具有诸如针孔的衍射元件的半波片。 相干偏振光源同时从衍射元件产生参考光束，并且从通过半波片的光的剩余部分产生物体光束。 参考光束具有近似球面的波前。 两个光束中的每一个具有不同的偏振状态。 物体和参考光束然后通过偏振敏感相位调制器独立相位调制，偏振相位调制器根据施加的电压和取决于入射光的偏振状态移相量。 然后使用偏振器以相同的强度在相同的极化状态下提供物体和参考光束，因此它们可以干扰以产生具有近乎一致的对比度的干涉图。