Abstract:
In an electrostatically controlled apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to controllably neutralize excess charge and establish a controlled potential between the MEMS elements and the electrostatic actuation electrodes.
Abstract:
A method is provided for calibrating a free-space-coupled fiber-optic transmission system 23, 30. The method uses signal content in the measured coupled power at frequencies equal to the sum, difference, and first harmonics of the frequencies of control-related dither signals to infer and correct errors in the kinematical model used to apply the dithers 109. The technique can operate independently or simultaneously with dither-based functions such as alignment control and power attenuation to provide continuous tracking of model terms 100. The calibration method does not require that any calibration-specific signals be injected into the system, or that the operation of primary functions be halted for the purpose of calibration 300.
Abstract:
Methods and apparatus are provided for detection and control of multiple-axis active alignment for a free-space-coupled single-mode fiber-optic transmission system that automatically optimizes the coupling through the system. In a specific embodiment, a measurement of coupled power is made and error signals are used to control actuation via four axes of beam steering element to null four generally orthogonal alignment errors of the beam between the input (12) and output fibers (14). The four alignment errors are detected using a synchronous-detection approach. A feedback control system (100) nulls the four errors.
Abstract:
A method for generating optical paths in a photonic network is provided. A model of a photonic network is used to store relationship information that describes the relationships between photonic network elements, as well as configuration information about the elements of the photonic network. A path manager receives a request to generate one or more paths based on an input port and one or more output ports. Using the information stored in the photonic network model, the path manager generates one or more candidate paths.
Abstract:
A method for generating optical paths in a photonic network is provided. A model of a photonic network is used to store relationship information that describes the relationships between photonic network elements, as well as configuration information about the elements of the photonic network. A path manager receives a request to generate one or more paths based on an input port and one or more output ports. Using the information stored in the photonic network model, the path manager generates one or more candidate paths.
Abstract:
Method for fabricating ultrathin gaps producing ultrashort standoffs (26) in array structures includes sandwiching a patterned device layer (12) between a silicon standoff layer (26) and a silicon support layer (38), providing that the back surfaces (46, 48) of the respective silicon support layer and the standoff layer are polished to a desired thickness corresponding to the desired standoff height on one side and to at least a minimum height for mechanical strength on the opposing side, as well as to a desired smoothness. Standoffs and mechanical supports are then fabricated by etching to produce voids with the dielectric oxides (20, 40) on both sides of the device layer serving as suitable etch stops. Thereafter, the exposed portions of the oxide layers are removed to release the pattern, and a package layer is mated with the standoff voids to produce a finished device. The standoff layer can be fabricated to counteract curvature.
Abstract:
Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.
Abstract:
A structure of a hybrid MEMS structure is provided wherein a plate comprises a thin actuatable layer of conductive silicon, such as a MEMS actuatable element, and a thicker handle layer of conductive silicon to provide structural integrity which are separated by a thin oxide, together forming an SOI wafer. This plate is mounted to a substrate, typically ceramic, with the thin actuatable layer facing the substrate and separated by an air gap that is formed by creating, on the substrate, insulator standoffs which come in contact with the plate. A suitable dielectric material useful as a standoff on the substrate is a footrest that permits high aspect ratios.
Abstract:
Methods and apparatus are provided for the closed loop attenuation of optical beam power in a multiple-axis free-space-coupled single-mode fiber-optic transmission system. In a specific embodiment involving two tip-tilt mirrors to couple optical power from an input fiber to an output fiber, the four mirror axes are actuated in such a way as to produce either a static or time-varying set of induced mirror angles that yield a desired time history of optical loss. The attenuation technique uses the DC level of the measured output power to adjust the amplitude of the induced mirror angles.
Abstract:
A method is provided for calibrating a free-space-coupled fiber-optic transmission system. The method uses signal content in the measured coupled power at frequencies equal to the sum, difference, and first harmonics of the frequencies of control-related dither signals to infer and correct errors in the kinematical model used to apply the dithers. The technique can operate independently or simultaneously with dither-based functions such as alignment control and power attenuation to provide continuous tracking of model terms. The calibration method does not require that any calibration-specific signals be injected into the system, or that the operation of primary functions be halted for the purpose of calibration.