MEMS STRUCTURE WITH SURFACE POTENTIAL CONTROL
    61.
    发明申请
    MEMS STRUCTURE WITH SURFACE POTENTIAL CONTROL 审中-公开
    具有表面电位控制的MEMS结构

    公开(公告)号:WO03031316A2

    公开(公告)日:2003-04-17

    申请号:PCT/US0223418

    申请日:2002-07-22

    CPC classification number: G02B26/0841 B81B3/0086 B81B2201/042

    Abstract: In an electrostatically controlled apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to controllably neutralize excess charge and establish a controlled potential between the MEMS elements and the electrostatic actuation electrodes.

    Abstract translation: 在静电控制装置中,例如具有围绕电极形成的空腔的MEMS阵列,其直接安装在电介质基底上,其中嵌入的静电致动电极与各个MEMS元件对准设置,提供了可控地中和多余电荷的机构 并且在MEMS元件和静电致动电极之间建立受控电位。

    METHOD FOR CALIBRATING A FREE-SPACE-COUPLED FIBER-OPTIC TRANSMISSION SYSTEM
    62.
    发明申请
    METHOD FOR CALIBRATING A FREE-SPACE-COUPLED FIBER-OPTIC TRANSMISSION SYSTEM 审中-公开
    用于校准自由空间耦合光纤传输系统的方法

    公开(公告)号:WO03016959A3

    公开(公告)日:2003-04-10

    申请号:PCT/US0225562

    申请日:2002-08-09

    CPC classification number: G02B6/3586 G02B6/3512 G02B6/3556 H04B10/112

    Abstract: A method is provided for calibrating a free-space-coupled fiber-optic transmission system 23, 30. The method uses signal content in the measured coupled power at frequencies equal to the sum, difference, and first harmonics of the frequencies of control-related dither signals to infer and correct errors in the kinematical model used to apply the dithers 109. The technique can operate independently or simultaneously with dither-based functions such as alignment control and power attenuation to provide continuous tracking of model terms 100. The calibration method does not require that any calibration-specific signals be injected into the system, or that the operation of primary functions be halted for the purpose of calibration 300.

    Abstract translation: 提供了用于校准自由空间耦合光纤传输系统23,30的方法。该方法使用测量的耦合功率中的信号内容,其频率等于控制相关频率的和,差和第一谐波 抖动信号来推断和校正用于施加抖动器109的运动模型中的误差。该技术可以独立或同时与基于抖动的函数(诸如对准控制和功率衰减)一起操作,以提供模型项100的连续跟踪。校准方法确实 不要求将任何校准特定的信号注入到系统中,或者为了校准300而停止主要功能的操作。

    METHOD AND APPARATUS FOR OPTICAL BEAM ALIGNMENT DETECTION AND CONTROL

    公开(公告)号:WO2003016958A3

    公开(公告)日:2003-02-27

    申请号:PCT/US2002/025561

    申请日:2002-08-09

    Abstract: Methods and apparatus are provided for detection and control of multiple-axis active alignment for a free-space-coupled single-mode fiber-optic transmission system that automatically optimizes the coupling through the system. In a specific embodiment, a measurement of coupled power is made and error signals are used to control actuation via four axes of beam steering element to null four generally orthogonal alignment errors of the beam between the input (12) and output fibers (14). The four alignment errors are detected using a synchronous-detection approach. A feedback control system (100) nulls the four errors.

    SILICON ON INSULATOR STANDOFF AND METHOD FOR MANUFACTURE THEREOF
    66.
    发明申请
    SILICON ON INSULATOR STANDOFF AND METHOD FOR MANUFACTURE THEREOF 审中-公开
    绝缘子硅绝缘子及其制造方法

    公开(公告)号:WO2003090261A1

    公开(公告)日:2003-10-30

    申请号:PCT/US2003/012311

    申请日:2003-04-21

    Abstract: Method for fabricating ultrathin gaps producing ultrashort standoffs (26) in array structures includes sandwiching a patterned device layer (12) between a silicon standoff layer (26) and a silicon support layer (38), providing that the back surfaces (46, 48) of the respective silicon support layer and the standoff layer are polished to a desired thickness corresponding to the desired standoff height on one side and to at least a minimum height for mechanical strength on the opposing side, as well as to a desired smoothness. Standoffs and mechanical supports are then fabricated by etching to produce voids with the dielectric oxides (20, 40) on both sides of the device layer serving as suitable etch stops. Thereafter, the exposed portions of the oxide layers are removed to release the pattern, and a package layer is mated with the standoff voids to produce a finished device. The standoff layer can be fabricated to counteract curvature.

    Abstract translation: 用于制造在阵列结构中产生超短距离(26)的超薄间隙的方法包括在硅间隔层(26)和硅支撑层(38)之间夹着图案化的器件层(12),只要后表面(46,48) 将相应的硅支撑层和支座层抛光到对应于一侧上所需的间隔高度的期望厚度,并且至少在相对侧上的机械强度的最小高度以及期望的平滑度。 然后通过蚀刻制造支座和机械支撑件以产生空隙,其中装置层两侧的电介质氧化物(20,40)用作合适的蚀刻停止点。 此后,去除氧化物层的暴露部分以释放图案,并且将封装层与间隙空隙配合以产生成品装置。 可以制造隔离层以抵消曲率。

    METHOD AND APPARATUS FOR ACTUATION OF A TWO-AXIS MEMS DEVICE USING THREE ACTUATION ELEMENTS
    67.
    发明申请
    METHOD AND APPARATUS FOR ACTUATION OF A TWO-AXIS MEMS DEVICE USING THREE ACTUATION ELEMENTS 审中-公开
    使用三个启动元件来实现双轴MEMS器件的方法和装置

    公开(公告)号:WO2003076977A2

    公开(公告)日:2003-09-18

    申请号:PCT/US2003/006512

    申请日:2003-03-03

    IPC: G02B

    CPC classification number: G02B26/0833

    Abstract: Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.

    Abstract translation: 提供了用于使用三个非接触致动元件或电极驱动双轴MEMS镜的装置和方法。 差分双向镜控制使用以适当值偏置的单极驱动电压。 转换功能将两轴尖端倾斜命令映射到三个驱动驱动信号,以选择电极方向和尺寸。

    MEMS HYBRID STRUCTURE HAVING FLIPPED SILICON WITH EXTERNAL STANDOFFS
    68.
    发明申请
    MEMS HYBRID STRUCTURE HAVING FLIPPED SILICON WITH EXTERNAL STANDOFFS 审中-公开
    具有外部标准的溜槽硅的MEMS混合结构

    公开(公告)号:WO2003032402A1

    公开(公告)日:2003-04-17

    申请号:PCT/US2002/032400

    申请日:2002-10-08

    CPC classification number: B81B3/0086

    Abstract: A structure of a hybrid MEMS structure is provided wherein a plate comprises a thin actuatable layer of conductive silicon, such as a MEMS actuatable element, and a thicker handle layer of conductive silicon to provide structural integrity which are separated by a thin oxide, together forming an SOI wafer. This plate is mounted to a substrate, typically ceramic, with the thin actuatable layer facing the substrate and separated by an air gap that is formed by creating, on the substrate, insulator standoffs which come in contact with the plate. A suitable dielectric material useful as a standoff on the substrate is a footrest that permits high aspect ratios.

    Abstract translation: 提供了混合MEMS结构的结构,其中板包括导电硅的薄可致动层,例如MEMS可致动元件,以及较厚的导电硅手柄层,以提供由薄氧化物隔开的结构完整性,一起形成 SOI晶片。 该板被安装到通常为陶瓷的基板上,薄的可致动层面向基板,并由通过在基板上产生与板接触的绝缘体间隙而形成的气隙分开。 用作衬底上的支座的合适的介电材料是允许高纵横比的搁脚板。

    METHOD AND APPARATUS FOR OPTICAL BEAM POWER ATTENUATION
    69.
    发明申请
    METHOD AND APPARATUS FOR OPTICAL BEAM POWER ATTENUATION 审中-公开
    光束功率衰减的方法和装置

    公开(公告)号:WO2003016980A1

    公开(公告)日:2003-02-27

    申请号:PCT/US2002/025534

    申请日:2002-08-09

    Abstract: Methods and apparatus are provided for the closed loop attenuation of optical beam power in a multiple-axis free-space-coupled single-mode fiber-optic transmission system. In a specific embodiment involving two tip-tilt mirrors to couple optical power from an input fiber to an output fiber, the four mirror axes are actuated in such a way as to produce either a static or time-varying set of induced mirror angles that yield a desired time history of optical loss. The attenuation technique uses the DC level of the measured output power to adjust the amplitude of the induced mirror angles.

    Abstract translation: 为多轴自由空间耦合单模光纤传输系统中的光束功率的闭环衰减提供了方法和装置。 在涉及将光功率从输入光纤耦合到输出光纤的两个倾斜反射镜的具体实施例中,四个反射镜轴被致动以产生静态或时变的感应反射镜的集合,其产生 光损耗的期望历史。 衰减技术使用测量输出功率的直流电平来调节感应反射镜角度的幅度。

    METHOD FOR CALIBRATING A FREE-SPACE-COUPLED FIBER-OPTIC TRANSMISSION SYSTEM
    70.
    发明申请
    METHOD FOR CALIBRATING A FREE-SPACE-COUPLED FIBER-OPTIC TRANSMISSION SYSTEM 审中-公开
    用于校准自由空间耦合的光纤传输系统的方法

    公开(公告)号:WO2003016959A2

    公开(公告)日:2003-02-27

    申请号:PCT/US2002/025562

    申请日:2002-08-09

    IPC: G02B

    CPC classification number: G02B6/3586 G02B6/3512 G02B6/3556 H04B10/112

    Abstract: A method is provided for calibrating a free-space-coupled fiber-optic transmission system. The method uses signal content in the measured coupled power at frequencies equal to the sum, difference, and first harmonics of the frequencies of control-related dither signals to infer and correct errors in the kinematical model used to apply the dithers. The technique can operate independently or simultaneously with dither-based functions such as alignment control and power attenuation to provide continuous tracking of model terms. The calibration method does not require that any calibration-specific signals be injected into the system, or that the operation of primary functions be halted for the purpose of calibration.

    Abstract translation: 提供了一种用于校准自由空间耦合的光纤传输系统23,30的方法。该方法使用测量的耦合功率中的信号内容,其频率等于控制相关频率的和,差和一次谐波 抖动信号来推断和纠正用于施加抖动109的运动模型中的误差。该技术可以独立地或同时地操作基于抖动的功能,例如对准控制和功率衰减,以提供对模型项100的连续跟踪。校准方法 不需要将任何校准特定信号注入到系统中,或者为了校准目的300暂停主要功能的操作。

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